CN101569898B - Manufacture method of target material - Google Patents
Manufacture method of target material Download PDFInfo
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- CN101569898B CN101569898B CN2009101406223A CN200910140622A CN101569898B CN 101569898 B CN101569898 B CN 101569898B CN 2009101406223 A CN2009101406223 A CN 2009101406223A CN 200910140622 A CN200910140622 A CN 200910140622A CN 101569898 B CN101569898 B CN 101569898B
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Abstract
The invention relates to a manufacture method of target material, which comprises the following steps: providing a metal charge part which is aluminum; extruding and forming the metal charge part for making target material; wherein the extrusion temperature of the extrusion forming is 150 DEG C to 300 DEG C; and the extrusion ratio is 4 to 4.5. The manufacture method of the target material commendably solves the control of forming size precision of the target material by controlling the extrusion temperature and the extrusion ratio of the extrusion forming technique.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to the preparation method of target.
Background technology
In semi-conductor industry, target material structure is to constitute by the target that meets sputtering performance with backboard that described target combined, had certain intensity.Backboard can be assembled in the sputter base station at described target material structure and play a supporting role, and has the effect of conduction heat.
The technology of general preparation sputtering target material product be will meet the sputtering target material performance metal for example raffinal (being generally 99.999%) by technologies such as preheating, extrusion modling, heat treatment, roughing and fine finishining, be processed into the qualified sputtering target material product of size at last.On the basis of strictness control target purity, by selecting different extrusion forming process, heat-treat condition, the forming dimension precision of adjustment target and grain size etc. finally satisfy the requirement of sputter procedure.
Especially, extrusion modling is an indispensable technology in target design and the process, and this technology is mainly controlled for the institutional framework that realizes metal material, thereby produces the sputtering target material that meets the forming dimension precision.With the metallic aluminium is example, and the raffinal resistance of deformation is low, is difficult to the forming dimension precision of control target, and this has very big negative effect for target as sputter, even can not meet the requirement of target as sputter.
Summary of the invention
The problem that embodiment of the present invention solves provides a kind of preparation method of target, with the forming dimension precision of control target.
For addressing the above problem, the invention provides a kind of preparation method of target, comprising:
The metal materials and parts are provided, and described metal materials and parts are aluminium;
Described metal materials and parts are carried out extrusion modling, be made into target, wherein, the extrusion temperature of described extrusion modling is 150 ℃～300 ℃, and extrusion ratio is 4～4.5.
Optionally, the preparation method of described target also comprises: before described metal materials and parts are carried out extrusion modling, described metal materials and parts are carried out The pre-heat treatment.
Optionally, the heating-up temperature of described The pre-heat treatment is 400 ℃～500 ℃.
Optionally, be 60min～180min the heat time heating time of described The pre-heat treatment.
Optionally, described extruding is the forward hot extrusion.
The preparation method of optional described target also comprises: described target is heat-treated.
Optionally, described heat treated heating-up temperature is 150 ℃～300 ℃.
Optionally, described heat treated heat time heating time is 30min～60min.
Compared with prior art, the preparation method of above-mentioned target is promptly controlled extrusion temperature and extrusion ratio by the parameter of control extrusion forming process, has solved the control of the forming dimension precision of target well.
In addition, the preparation method of above-mentioned target is promptly controlled the extrusion ratio and the heat treated heating-up temperature of extrusion modling by the parameter and the heat treated parameter of control extrusion forming process, has controlled the grain size of target well.
Description of drawings
Fig. 1 is the flow chart of preparation method of the target of embodiment of the present invention;
Fig. 2 is the flow chart of preparation method of the target of the embodiment of the invention.
The specific embodiment
The forming dimension precision control of target mainly is divided into two aspects: being the control of product size precision on the one hand, is the control of flexibility precision on the other hand.The inventor recognizes that by arduous research work the parameter by the control extrusion forming process as extrusion temperature, extrusion ratio, can realize the control to the forming dimension precision of target.
The preparation method of the target of embodiment of the present invention comprises the steps: as shown in Figure 1
Step S10 provides the metal materials and parts, and described metal materials and parts are aluminium.
Step S12 carries out extrusion modling to described metal materials and parts, is made into target, and wherein, the extrusion temperature of described extrusion modling is 150 ℃～300 ℃, and extrusion ratio is 4～4.5.
It is to place the extrusion die of pressurizing unit (for example forging press, pneumatic hammer or calender) to carry out extrusion modling the metal materials and parts that described metal materials and parts are carried out extrusion modling, and the shape and size of extrusion die have determined the cross section of product.Described extruding can be adopted the forward hot extrusion, and promptly the direction of extrusion of pressurizing unit is consistent with the flow direction of metal materials and parts, and extruding is to carry out at a certain temperature simultaneously.By reasonable control extrusion temperature and the suitable extrusion ratio of setting, can accurately control the forming dimension precision of target.The ratio of total area of section of the goods after total area of section that described extrusion ratio is meant the goods before the extruding and the extruding.
By extrusion forming process, can accurately control the plastic deformation of target, produce the target that meets the forming dimension required precision, and realize reducing the purpose of target crystallite dimension size, crystal grain thinning and reduction target material surface roughness.
In actual applications, described metal materials and parts are carried out extrusion modling before, can carry out The pre-heat treatment to described metal materials and parts.In addition, described metal materials and parts are carried out extrusion modling, be made into target after, can heat-treat described target.
Below in conjunction with embodiment and Fig. 2 the preparation method of the target of embodiment of the present invention is elaborated, the target preparation method of present embodiment comprises the steps:
Step S20 provides the metal materials and parts, and described metal materials and parts are aluminium.
Step S21 carries out The pre-heat treatment to described metal materials and parts, and wherein, the heating-up temperature of described The pre-heat treatment is 400 ℃～500 ℃, and be 60min～180min heat time heating time.
Step S22 carries out extrusion modling to the metal materials and parts after the described The pre-heat treatment, is made into target, and wherein, the extrusion temperature of described extrusion modling is 150 ℃～300 ℃, and extrusion ratio is 4～4.5.
Step S23 heat-treats described target, and wherein, described heat treated heating-up temperature is 150 ℃～300 ℃, and be 30min～60min heat time heating time.
At first execution in step S20 provides the metal materials and parts, and described metal materials and parts are aluminium.In actual applications, the metal materials and parts can be the parts after cutting off from ingot.The shape of metal materials and parts, actual requirement according to applied environment, sputtering equipment, can be in circle, rectangle, annular, taper shape or other analogous shapes (comprising regular shape and irregularly shaped) any, and its thickness can not wait for 1mm to 100mm.
Then execution in step S21 carries out The pre-heat treatment to described metal materials and parts, and wherein, the heating-up temperature of The pre-heat treatment is 400 ℃～500 ℃, and be 60min～180min heat time heating time.Described The pre-heat treatment can comprise: the chamber that the metal materials and parts is placed annealing device (for example constant temperature oven), in the chamber of described annealing device, have controlled atmosphere or protective atmosphere, inert gas for example, the metal materials and parts can be placed on the zone of energy thermally equivalent, for example the geometric center zone of chamber; Temperature is increased to 400 ℃～500 ℃, and under described temperature, keeps 60min～180min; The metal materials and parts are carried out cooling processing, make it return back to normal temperature, wherein, described cooling processing can adopt air cooling mode or water-cooling pattern.
In actual applications, can before carrying out The pre-heat treatment, preestablish the concrete numerical value of above-mentioned each parameter, wherein, described preheat temperature and time can be set according to certain corresponding relation, 400 ℃ of * 180min for example, 450 ℃ of * 120min, or 500 ℃ of * 60min etc.
By the The pre-heat treatment of step S21, can change the institutional framework of metal materials and parts inside, make the metal materials and parts eliminate stress and softened, improve its plasticity, for follow-up extrusion forming process is laid a good foundation.
Then execution in step S22 carries out extrusion modling to the metal materials and parts after the described preheating, is made into target, and wherein, the extrusion temperature of described extrusion modling is 150 ℃～300 ℃, and extrusion ratio is 4～4.5.The ratio of total area of section of the goods after total area of section that described extrusion ratio is meant the goods before the extruding and the extruding.Place the extrusion die of pressurizing unit (for example forging press, pneumatic hammer or calender) to carry out extrusion modling the metal materials and parts after the preheating, the shape and size of extrusion die have determined the cross section of product.Described extruding can be adopted the forward hot extrusion, and promptly the direction of extrusion of pressurizing unit is consistent with the flow direction of metal materials and parts, and extruding is to carry out at a certain temperature simultaneously.By reasonable control extrusion temperature and the suitable extrusion ratio of setting, can accurately control the forming dimension precision of target.
By the extrusion forming process of step S22, can accurately control the plastic deformation of target, produce the target that meets the forming dimension required precision, and realize reducing the purpose of target crystallite dimension size, crystal grain thinning and reduction target material surface roughness.The product size precision of the described target that is made into can be controlled at 0.1mm, and the flexibility precision can be controlled at≤1mm.
Then execution in step S23 heat-treats described target, and wherein, described heat treated heating-up temperature is 150 ℃～300 ℃, and be 30min～60min heat time heating time.Described heat treatment can comprise: the chamber that will the target after extrusion modling places annealing device (for example heating furnace), in the chamber of described annealing device, have controlled atmosphere or protective atmosphere, inert gas for example, target can be placed on the zone of energy thermally equivalent, for example the geometric center zone of chamber; Temperature is increased to 150 ℃～300 ℃, and under described temperature, keeps 30min～60min; Target is carried out cooling processing, make it return back to normal temperature.Wherein, described cooling processing can adopt air cooling mode or water-cooling pattern.
The temperature that target is heat-treated is controlled the grain size that has directly influenced target, and described grain size is the parameter that is used to describe the crystallite dimension size.In the present embodiment, the concrete parameter of described Technology for Heating Processing is: heating-up temperature is 150 ℃～300 ℃, and is incubated 30min～60min under this temperature.Heating-up temperature is low excessively, and crystallization is insufficient again for crystal grain in the target; Heating-up temperature is too high, and crystal grain is grown up easily in the target, and size can surpass scope; Temperature retention time is too short, and crystal grain is heated inadequately in the target, and crystallization is insufficient again; Temperature retention time is long, and crystal grain is grown up easily in the target, and size can surpass scope.In actual applications, can before heat-treating, preestablish the concrete numerical value of above-mentioned each parameter, wherein, described heating-up temperature and time can be set according to certain corresponding relation, 150 ℃ of * 60min for example, 200 ℃ of * 50min, 250 ℃ of * 40min or 300 ℃ of * 30min etc.
The extrusion forming process of present embodiment by step S22 can be controlled at the grain size of target≤500 μ m, and can guarantee the uniformity of target on institutional framework the control to heating-up temperature of the Technology for Heating Processing of the control of extrusion ratio and step S23.
After described target heat-treated, pass through technologies such as roughing, fine finishining again, the target after the described heat treatment can be processed into the qualified sputtering target material product of size at last.Wherein, roughing is to carry out the product contour turning, and fine finishining is to carry out product size turning.
Be further described in conjunction with the preparation method of an example more below above-mentioned target.
(1) provide the high-purity aluminum pipe, its purity is generally 99.999%.
(2) setting preheat temperature is 500 ℃, and temperature retention time is 60min, and the chamber of the high-purity aluminum pipe being put into constant temperature oven carries out preheating, changes the institutional framework of aluminum pipe inside, makes aluminum pipe eliminate stress and is softened, and improves its plasticity.
(3) setting extrusion temperature is 200 ℃, and extrusion ratio is 4.5, and the aluminum pipe after the preheating is packed in the extrusion die of forging press, adopts the forward hot extrusion to carry out extrusion modling, is made into the aluminium target.
(4) setting heating-up temperature is 300 ℃, and temperature retention time is 30min, and the chamber of the aluminium target being put into heating furnace evenly heats, to guarantee the uniformity of aluminium target on institutional framework.
(5) the aluminium target is carried out the product contour turning.
(6) the aluminium target is carried out product size turning.
See through above steps, the final aluminium target that obtains to meet the sputter requirement, the product size precision of described aluminium target is 0.1mm, flexibility precision≤1mm, grain size≤500 μ m is specially adapted to as the solar energy target.
In sum, the preparation method of above-mentioned target is promptly controlled extrusion temperature and extrusion ratio by the parameter of control extrusion forming process, has solved the control of the forming dimension precision of target well.
In addition, the preparation method of above-mentioned target is promptly controlled the extrusion ratio and the heat treated heating-up temperature of extrusion modling by the parameter and the heat treated parameter of control extrusion forming process, has controlled the grain size of target well.
Though oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (8)
1. the preparation method of a target is used to make the sputtering target material that the product size precision is 0.1mm, flexibility precision≤1mm, it is characterized in that, comprising:
The metal materials and parts are provided, and described metal materials and parts are aluminium;
Described metal materials and parts are carried out extrusion modling, be made into target, wherein, the extrusion temperature of described extrusion modling is 150 ℃～300 ℃, and extrusion ratio is 4～4.5.
2. the preparation method of target as claimed in claim 1 also comprises: before described metal materials and parts are carried out extrusion modling, described metal materials and parts are carried out The pre-heat treatment.
3. the preparation method of target as claimed in claim 1 is characterized in that, the heating-up temperature of described The pre-heat treatment is 400 ℃～500 ℃.
4. the preparation method of target as claimed in claim 3 is characterized in that, be 60min～180min the heat time heating time of described The pre-heat treatment.
5. the preparation method of target as claimed in claim 1 is characterized in that, described extruding is the forward hot extrusion.
6. the preparation method of target as claimed in claim 1 is characterized in that, also comprises: described target is heat-treated.
7. the preparation method of target as claimed in claim 6 is characterized in that, described heat treated heating-up temperature is 150 ℃～300 ℃.
8. the preparation method of target as claimed in claim 7 is characterized in that, be 30min～60min described heat treated heat time heating time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101406223A CN101569898B (en) | 2009-06-08 | 2009-06-08 | Manufacture method of target material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101406223A CN101569898B (en) | 2009-06-08 | 2009-06-08 | Manufacture method of target material |
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| CN101569898A CN101569898A (en) | 2009-11-04 |
| CN101569898B true CN101569898B (en) | 2011-09-07 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102091733B (en) * | 2009-12-09 | 2013-02-13 | 宁波江丰电子材料有限公司 | Manufacturing method of high-purity copper targets |
| CN104419899A (en) * | 2013-08-22 | 2015-03-18 | 宁波江丰电子材料股份有限公司 | Forming method for target material |
| CN105220092A (en) * | 2015-11-03 | 2016-01-06 | 基迈克材料科技（苏州）有限公司 | For the rafifinal target extrusion process method of liquid crystal flat panel display plated film |
| CN112323028A (en) * | 2020-11-11 | 2021-02-05 | 广安市立正金属有限公司 | Non-smelting casting method for high-purity copper |
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Address after: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee after: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Address before: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee before: Ningbo Jiangfeng Electronic Materials Co., Ltd. |