CN105624591A - Manufacturing method for aluminum targets - Google Patents
Manufacturing method for aluminum targets Download PDFInfo
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- CN105624591A CN105624591A CN201410606957.0A CN201410606957A CN105624591A CN 105624591 A CN105624591 A CN 105624591A CN 201410606957 A CN201410606957 A CN 201410606957A CN 105624591 A CN105624591 A CN 105624591A
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Abstract
The invention discloses a manufacturing method for aluminum targets. The manufacturing method comprises the steps that aluminum ingots are provided; the aluminum ingots are subjected to first heat treatment; the aluminum ingots are forged to form first aluminum target blanks after the first heat treatment; the first aluminum target blanks are subjected to second heat treatment; the first aluminum target blanks are rolled to form second aluminum target blanks after the second heat treatment; at least two second aluminum target blanks are made to make contact with each other; and the second aluminum target blanks which make contact are simultaneously subjected to third heat treatment to form the aluminum targets. According to the manufacturing method, the uniformity of grain sizes of different aluminum targets formed through the method is improved, the production efficiency is improved and the production cost is reduced.
Description
Technical field
The present invention relates to the manufacture field of liquid crystal panel, particularly relate to the manufacture method of a kind of aluminum target.
Background technology
TFT liquid crystal display (TFT-LCD) panel factory is generally aluminum wiring at the distribution that 6 generation lines are used above. Aluminum wiring generally utilizes physical gas phase deposition technology to be formed, and namely the mode usually by aluminum target as sputter forms rete, then adopts etching technics etched membrane layer to form aluminum wiring.
Aluminum target is generally by making of pure aluminum. The manufacturing process of existing aluminum target generally includes offer aluminium ingot, and aluminium ingot is carried out the first heat treatment, then the aluminium ingot after the first heat treatment is forged, to form the first aluminum target blank, then the first aluminum target blank is carried out the second heat treatment, after the second heat treatment, first aluminum target blank is rolled, forms the second aluminum target blank, finally the second aluminum target blank is carried out third time heat treatment, so that the crystal grain recrystallization in the second aluminum target blank, thus form aluminum target.
But, the manufacture method of existing aluminum target is generally unable to reach the user demand of advanced lines TFT-LCD panel.
Summary of the invention
The problem that this invention address that is to provide the manufacture method of a kind of aluminum target, so that manufacturing the aluminum target formed to meet the user demand reaching advanced lines TFT-LCD panel.
For solving the problems referred to above, the present invention provides the manufacture method of a kind of aluminum target, including:
Aluminum ingot is provided;
Described aluminium ingot is carried out the first heat treatment;
After described first heat treatment, forge to form the first aluminum target blank to described aluminium ingot;
Described first aluminum target blank is carried out the second heat treatment;
After described second heat treatment, roll to form the second aluminum target blank to described first aluminum target blank;
Second aluminum target blank described at least two is contacted;
Described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, to form aluminum target.
Optionally, the shape of described second aluminum target blank is cuboid, and two surfaces that in described cuboid, area is maximum are first type surface, and other surface is side; The step that second aluminum target blank described at least two contacts is included: by adjacent two described second aluminum target blanks, one of them described first type surface of one of them described first type surface of first described second aluminum target blank and second described second aluminum target blank is superimposed together at least partly.
Optionally, will all press ladder staggered and overlap by described second aluminum target blank, so that outside the described first type surface being superimposed with each other has at least and be partially exposed at, and at described first type surface one thermocouple of connection of each described second aluminum target blank.
Optionally, all will overlap by completely overlapped formula by described second aluminum target blank, so that the described first type surface being superimposed with each other is completely overlapped together, and connect a thermocouple in the described side of each described second aluminum target blank.
Optionally, described second aluminum target blank contacted has two described first type surfaces being completely exposed outside, adopts aluminium sheet and at least one of which that described first type surface overlapping outside is completely exposed.
Optionally, also include: described second aluminum target blank contacted is bundled, after binding, described second aluminum target blank is carried out described 3rd heat treatment.
Optionally, described to three, four or five the second aluminum target blank is contacted.
Optionally, described 3rd heat treated heat treatment temperature is 245 DEG C��255 DEG C, and heat treatment time is 14.5min��15.5min.
Optionally, described second heat treated heat treatment temperature is 395 DEG C��405 DEG C, and heat treatment time is 29.5min��30.5min.
Optionally, described first heat treated heat treatment temperature is 295 DEG C��305 DEG C, and heat treatment time is 29.5min��30.5min. .
Compared with prior art, technical scheme has the advantage that
In technical scheme, first aluminium ingot is provided, and described aluminium ingot is carried out the first heat treatment, after described first heat treatment, forge to form the first aluminum target blank to described aluminium ingot, then described first aluminum target blank is carried out the second heat treatment, after described second heat treatment, roll to form the second aluminum target blank to described first aluminum target blank, afterwards the second aluminum target blank described at least two is contacted, described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, to form aluminum target. owing to first the second aluminum target blank described at least two being contacted, again described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, therefore, when three heat treatments, heat transmission can be there is between the second aluminum target blank contacted, and aluminum target blank itself is metal material, the heat conductivility of metal is good, therefore in the 3rd heat treatment process, the the second aluminum target blank each several part temperature contacted can reach uniformly, so that in the aluminum target obtained after heat treatment, not only grain size is controlled below 100 ��m, and grain size between different aluminum target is homogeneous. additionally, due to once at least two the second aluminum target blank is carried out the 3rd heat treatment, also improve production efficiency simultaneously, reduce production cost.
Further, the shape of described second aluminum target blank is cuboid, and two surfaces that in described cuboid, area is maximum are first type surface; The step that second aluminum target blank described at least two contacts is included: by adjacent two described second aluminum target blanks, one of them described first type surface of one of them described first type surface of first described second aluminum target blank and second described second aluminum target blank is superimposed together at least partly. Now, described second aluminum target blank contacted has two described first type surfaces being completely exposed outside, adopts aluminium sheet and at least one of which that described first type surface overlapping outside is completely exposed. Owing to adopting aluminium sheet and at least one of which that described first type surface overlapping outside is completely exposed, therefore, it is possible to make the heating condition of each the second aluminum target blank more consistent, thus further increasing the homogeneity of grain size in the aluminum target ultimately formed.
Accompanying drawing explanation
Fig. 1 to Fig. 4 is each step counter structure schematic diagram of manufacture method of the aluminum target that the embodiment of the present invention provides.
Detailed description of the invention
The manufacture method of existing aluminum target typically requires through three heat treatments. But, when existing heat treatment mode is for more than 6 generation lines aluminum target, usually it is unable to reach and processes requirement accordingly. This is because the aluminum target itself that TFT-LCD panels more than 6 generation lines uses is larger in size, often it is difficult to the homogeneity controlling aluminum target at heat treatment in-furnace temperature. Such as and the aluminum target area of 8.5 generation lines is 2650mm �� 210mm, in the existing heat-treatment furnace matched, the temperature that furnace temperature is transferred to each orientation of aluminum target is often variant. Additionally, for TFT-LCD panels more than 6 generation lines, when forming aluminum wiring on the glass substrate, it is necessary to use multiple aluminum target to sputter together simultaneously. The such as TFT-LCD panel of 6 generation lines needs 10 aluminum targets of use simultaneously, and the Large size Aluminium target that the TFT-LCD panel of 8.5 generation lines requires 12 to be a group especially uses simultaneously, to form corresponding aluminum wiring on whole of glass substrate. Use one group of multiple Large size Aluminium target due to needs simultaneously, it is therefore desirable to the homogeneity of crystal grain after strictly controlling finished heat treatment. Concrete, for meeting the instructions for use of the TFT-LCD panel of more than 6 generation lines, it is desirable to same group respectively reaches following two standard:
1, aluminum target crystalline grains size controls below 100 ��m;
2, keep the grain size between different aluminum target homogeneous.
Visible, in the aluminum target used by the 6 above TFT-LCD panels of generation line, it is common that multiple (such as 10 or 12) for a set of with the use of, often a piece of aluminum target heat treatment temperature profile will be made uniformly more difficult. In existing manufacture method, one by one aluminum target blank is carried out heat treatment, therefore the grain size homogeneity between different aluminum target is difficult to control, and the situation that the grain size between different aluminum target is homogeneous not easily occurs, it is impossible to meet the instructions for use of the 6 above TFT-LCD panels of generation line.
For this, the present invention provides the manufacture method of a kind of new aluminum target, first described manufacture method provides aluminum ingot, and described aluminium ingot is carried out the first heat treatment, after described first heat treatment, forge to form the first aluminum target blank to described aluminium ingot, then described first aluminum target blank is carried out the second heat treatment, after described second heat treatment, roll to form the second aluminum target blank to described first aluminum target blank, afterwards the second aluminum target blank described at least two is contacted, described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, to form aluminum target.
Owing to first the second aluminum target blank described at least two being contacted, again described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, therefore, when three heat treatments, heat transmission can be there is between each second aluminum target blank, and aluminum target blank itself is metal material, the heat conductivility of metal is good, therefore in the 3rd heat treated insulating process, the each second aluminum target blank each several part temperature contacted can be made to reach uniformly, so that the aluminum target crystalline grains size after heat treatment controls below 100 ��m, and grain size between different aluminum target is homogeneous. additionally, due to once at least two the second aluminum target blank is carried out the 3rd heat treatment, also improve production efficiency simultaneously, reduce production cost.
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with accompanying drawing, specific embodiments of the invention are described in detail.
The embodiment of the present invention provides the manufacture method of a kind of aluminum target, incorporated by reference to referring to figs. 1 to Fig. 4.
Refer to Fig. 1, it is provided that aluminium ingot 100.
In the present embodiment, aluminium ingot 100 is made by metallic aluminum material, and, described metallic aluminum material is purity fine aluminium more than 99.99%, for instance be specially the fine aluminium that purity is 99.99%, 99.995% or 99.999%.
In the present embodiment, aluminium ingot 100 be shaped as cuboid. In other embodiments, the shape of aluminium ingot can also be cylinder, square, cone or cylinder that cross section is Else Rule figure or irregular figure.
Please continue to refer to Fig. 1, aluminium ingot 100 is carried out the first heat treatment.
In the present embodiment, aluminium ingot 100 is mainly preheated by the first thermal processes act. Preheating can reduce the aluminium ingot 100 resistance of deformation when follow-up forging, thus reduces forging force required when the follow-up aluminium ingot 100 forged deforms, and makes the dynamics that forging and stamping apply be greatly reduced. And if to aluminium ingot 100 without preheating step, or preheating temperature too low, after forging formed the first aluminum target blank surface be easily generated crackle.
In detailed process, it is possible to put in heat-treatment furnace by aluminium ingot 100, being preheated to 300 DEG C, be incubated 30min, now aluminium ingot 100 is internal local-crystalized, is conducive to after follow-up forging, and initial crystal grain is uniformly distributed. It should be noted that in other embodiments of the invention, the first heat treated heat treatment temperature can control at 295 DEG C��305 DEG C, and corresponding heat treatment time can be 29.5min��30.5min. Thus aluminium ingot 100 can be adapted to carry out follow-up forge technique after ensureing heat treatment.
Refer to Fig. 2, after the first heat treatment, forge aluminium ingot 100 to form the first aluminum target blank 101.
In the present embodiment, the process of forging can be: is placed on forging press by aluminium ingot 100, then utilizes forging hammer (pneumatic hammer) that aluminium ingot 100 is carried out multidirectional impact, impacts including each surface utilizing forging hammer to face toward aluminium ingot 100.
Forge the organizational structure and mechanical property that can better improve the first aluminum target blank 101, meanwhile, forge the plasticity that can also improve aluminium ingot 100 when follow-up forging. Aluminium ingot 100 makes original thick dendritic particles and columnar grain smash and become small grains after above-mentioned forging method deforms, original segregation in aluminium ingot 100, loose, pore, slag inclusion etc. are made to be compacted and seam, formed and organize more close first aluminum target blank 101, improve plasticity and the mechanical property of aluminium ingot 100. And if the degree that forges is inadequate, not or to forge number of times inadequate such as to forge rear deformation rate, then inadequate for the degree improving effect and grain refinement of aluminium ingot 100 interior tissue, affect the performance of the first aluminum target blank 101, even affect the performance of the aluminum target ultimately formed. If but it is too big to forge rear deformation rate, owing to aluminium ingot 100 is hard and crisp, is also easily caused the first aluminum target blank 101 work in-process and crackle occurs. And if it is too much to forge number of times, causing the waste forging cost.
Please continue to refer to Fig. 2, the first aluminum target blank 101 is carried out the second heat treatment.
In the present embodiment, the second heat treatment plays the effect of annealing, destressing, to coordinate target will not cause cracking phenomena when rolling. Concrete, the second heat treated heat treatment temperature can be 395 DEG C��405 DEG C, and heat treatment time can be 29.5min��30.5min.
Refer to Fig. 3, after the second heat treatment, roll to form the second aluminum target blank 102 to the first aluminum target blank 101.
In the present embodiment, the first aluminum target blank 101 is carried out rolling and includes the first aluminum target blank 101 carrying out hot rolling or being undertaken cold rolling by the first aluminum target blank 101. Concrete, it is possible to by the first aluminum target blank 101 rolling be the first aluminum target blank 101 is placed on calender two rollers and between extrude. By the upper and lower surface of two rollers and extruding the first aluminum target blank 101, reduce the thickness of the first aluminum target blank 101, thus increasing the area of upper and lower surface. First aluminum target blank 101 is placed on calender and carries out multi-pass rolling. The height of the first aluminum target blank 101 can be reduced on the one hand, thus increasing the area of the upper and lower surface to the first aluminum target blank 101 and forming the second aluminum target blank 102. On the other hand, the first aluminum target blank 101 is carried out rolling and can refine the crystallite dimension within the first target blank further so that the crystallite dimension of the second aluminum target blank 102 of formation is in the scope less than or equal to 100 ��m. Wherein it is desired to the first aluminum target blank 101 is carried out repeatedly extruding could form the second aluminum target blank 102.
Please continue to refer to Fig. 3, the shape of the second aluminum target blank 102 obtained after rolling is cuboid, and two surfaces that in cuboid, area is maximum are first type surface 1021, and other surface is side 1022.
In the present embodiment, when the aluminum target formed is follow-up be the making applying to 8.5 generation line TFT-LCD panels time, glass substrate area used by 8.5 generation line TFT-LCD panels is 2650mm �� 2500mm, therefore the aluminum target size ultimately formed can be 2650mm �� 210mm �� 19mm or be 2650mm �� 210mm �� 21mm, and always slightly greater than 2650mm �� 210mm �� 19mm or be that 2650mm �� 210mm �� 21mm is (usually in length and width size bigger by the second aluminum target blank 102 size of formation after rolling, to ensure having enough allowance).
Refer to Fig. 4, five the second aluminum target blanks 102 are contacted.
In the present embodiment, owing to the second aluminum target blank 102 is in cuboid, and there are two maximum first type surfaces of area 1021 (refer to Fig. 3), therefore, when five the second aluminum target blanks 102 are contacted, the step adopted can be: by adjacent two the second aluminum target blanks 102, one of them first type surface 1021 of first the second aluminum target blank 102 and one of them first type surface 1021 of second the second aluminum target blank 102 are superimposed together at least partly.
Concrete, as shown in Figure 4, five the second aluminum target blanks 102 are overlapped (putting together in other words) by staged sieve by ladder staggered, so that outside the first type surface 1021 being superimposed with each other has at least and be partially exposed at.
In the present embodiment, the first type surface 1021 at each second aluminum target blank 102 connects a thermocouple 103, specifically can be plugged on first type surface 1021 by thermocouple 103. Thermocouple 103 is inserted in first type surface 1021 easily operated, and thermocouple 103 is not easy to come off afterwards. Thermocouple 103 insert the second aluminum target blank 102 purpose be monitor each the second aluminum target blank 102 temperature, with monitor temperature heat treatment temperature need ensure at about �� 5 DEG C. When bigger variations in temperature occurs, can pass through to manually adjust heat-treatment furnace, to adjust the furnace temperature of heat-treatment furnace in time, it is ensured that the 3rd follow-up heat treatment proceeds smoothly in suitable temperature range.
It should be noted that, in other embodiments, whole second aluminum target blanks can also be overlapped by completely overlapped formula, so that the first type surface being superimposed with each other is completely overlapped together (because each second aluminum target blank is equivalently-sized, therefore their first type surface can be completely overlapped), and a thermocouple is connected in the side of each second aluminum target blank. Thermocouple needs to be interspersed in securely on every a piece of target, to prevent from splitting away off in the 3rd follow-up heat treatment process, causing that the temperature by other position (furnace wall of such as heat-treatment furnace) detected is thought by mistake is the temperature of the second aluminum target blank, affects the 3rd and heat treated carries out.
Although it should be strongly noted that figure does not show, but in the present embodiment, also including the second aluminum target blank 102 to contacting and bundle, after binding, the second aluminum target blank 102 is carried out the 3rd heat treatment. During three heat treatments, it is necessary to target is in close contact, makes each second aluminum target blank 102 homogeneous temperature with best logical heat transfer. Therefore, second aluminum target blank 102 is bundled, the second aluminum target blank 102 being prevented from contacting is being moved or relative movement is being occurred in the 3rd heat treatment process, thus ensureing that five the second aluminum target blanks 102 are when three heat treatments, all the time it is in close contact, therefore, in heat-treatment furnace, it is possible to effectively utilize the heat transfer effect of metal itself, the heat treatment temperature making five the second aluminum target blanks 102 final reaches uniformly.
Please continue to refer to Fig. 4, in the present embodiment, by first type surface 1021, the second different aluminum target blanks 102 is superimposed together. But, each second aluminum target blank 102 has two first type surfaces 1021. Therefore, the second aluminum target blank 102 contacted has two first type surfaces 1021 being completely exposed outside, these two first type surfaces 1021 being completely exposed outside are specially in Fig. 4, be arranged in extreme higher position and be positioned at two surfaces (these two surfaces are not labeled by Fig. 4) of extreme lower position in five the second aluminum target blanks 102.
In the present embodiment, two aluminium sheets 104 first type surface 1021 being completely exposed with the two outside respectively is adopted to overlap completely. Though Fig. 4 not showing, aluminium sheet 104 does not also overlap with the first type surface 1021 being exposed to, but because of understand, rear extended meeting aluminium sheet 104 is directly overlayed Fig. 4 does not overlap with other first type surface 1021 be positioned at outermost two first type surfaces 1021. Increase aluminium sheet 104 covers the two first type surface 1021 and ensure that each second aluminum target blank 102 is in identical heated environment, thus ensureing that each second aluminum target blank 102 receives identical heat transfer effect, namely the heating condition of each the second aluminum target blank 102 is more consistent, thus further increasing the homogeneity of grain size in the aluminum target ultimately formed.
It should be noted that in other embodiments, it is also possible to the first type surface 1021 being exposed to only with one block of aluminium sheet 104 and one of them overlaps, or does not adopt aluminium sheet 104 to be superimposed on the first type surface 1021 being exposed to.
In the present embodiment, it is possible to adopt iron belt (not shown) to bundle above-mentioned five the second aluminum target blanks 102 being superimposed together. When binding, it is possible to by five the second aluminum target blank 102 head and the tail uniformly bindings together. The mechanical strength of iron belt own is applicable to the tying up of large-sized object, and is susceptible to temperature and rises and affect toughness. In other embodiments, it would however also be possible to employ the second aluminum target blank 102 contacted is entered binding by alternate manner.
It should be noted that in other embodiments, it is also possible to second aluminum target blank of two, three, four or more than six is contacted, but certainly needs the second aluminum target blank number considering once can hold in heat-treatment furnace. Consider that the aluminum target that the TFT-LCD panel of advanced lines uses is generally multiple, for instance the 6 large-area aluminum targets of generation line first use ten, the 8.5 large-area aluminum targets of generation line first use 12. Therefore, it can adopt three, four or five the second aluminum target blanks are contacted more, and carry out the 3rd follow-up heat treatment simultaneously, so ensure that between the different aluminum target of formation, grain size homogeneity is higher. Same, when at the same time the second aluminum target blank of other number being contacted, when the second aluminum target blank is still cuboid, and when the second aluminum target blank is superimposed together still through first type surface, aluminium sheet still can be adopted to cover on the first type surface not overlapped with other first type surface.
Please continue to refer to Fig. 4, five the second aluminum target blanks 102 contacted are carried out the 3rd heat treatment simultaneously, to form aluminum target (not shown).
In the present embodiment, the 3rd heat treated heat treatment temperature can be 245 DEG C��255 DEG C, and heat treatment time can be 14.5min��15.5min. 3rd heat treated purpose is to improve the diffusivity of the second aluminum target blank 102 Atom, to forge and to roll, before reducing, the internal structural flaw caused, and eliminate the residual stress of the second aluminum target blank 102, so that the second aluminum target blank 102 is internal, and recrystallization phenomenon occurs. And, in the present embodiment, five the second aluminum target blanks 102 contacted are carried out the 3rd heat treatment, additionally it is possible to make full use of the metal heat transfer process between different second aluminum target blank 102, thus better controling over the grain size homogeneity of the aluminum target finally given simultaneously. Further, owing to once five the second aluminum target blanks 102 being carried out the 3rd heat treatment, also improve production efficiency simultaneously, reduce production cost.
It should be noted that, after above-mentioned first heat treatment, the second heat treatment or the 3rd heat treatment, all can adopt corresponding cooling technique that aluminium ingot 100 or aluminum target blank (including the first aluminum target blank 101 and the second aluminum target blank 102) are cooled down. Concrete mode can adopt air cooling. Air cooling is without carrying out extra operation to aluminium ingot 100 or aluminum target blank, it is not required that consume other any article, therefore Simplified flowsheet and saving cost. And the final temperature of air cooling is room temperature, on the one hand, so that the chilling temperature difference after heat treatment maximizes, the crystal grain homogenization more of aluminium ingot 100 or aluminum target blank can be conducive to; On the other hand, room temperature better controls, it is possible to the initial temperature making each stage process is consistent, i.e. the temperature of the technique in each stage can have identical starting point, and then is more beneficial for the control of the manufacturing process of whole aluminum target.
After the 3rd heat treatment, the present embodiment obtains aluminum target. In subsequent process steps, it is also possible to aluminum target is carried out machining. Described machining includes the technique such as roughing and polish, the aluminum target sputtering requirement to make size meet. Wherein roughing refers to that contour turning, polish refer to product size turning, and including week astragal cutting, lower planes grinding machine is processed. Such as remove, by straight wire saw process, the size surplus that aluminum target is unnecessary, correct technique by flexibility and aluminum target flexibility is corrected, and through facing cut technique, surface of aluminum target material is carried out milling equality. After the machining operation, it is also possible to process such as finished product being carried out and dries.
Finally, it is also possible to aluminum target is carried out microcosmic crystal grain analysis. Concrete, it is possible to (area is 1mm as sample to take part-structure2��2mm2), it is polished, to remove the oxide layer on its surface, and the sample after polishing is corroded, then observe the size of the internal grain of aluminum target with microscope, and whether grain structure structure is uniform. Can adopt whether the crystal orientation that EBSD analyser (ElectronBackScatteredDiffraction, EBSD) detects aluminum target meets the requirements.
Manufacture method that the present embodiment provides makes in the aluminum target obtained, and is sampled detection to carrying out five aluminum targets that same order three heat treatment formed simultaneously. Testing result shows: in five samples of five aluminum targets, and crystallite dimension all can be less than or be equal to the level of 100 ��m; Further, between five samples of five aluminum targets, largest grain size can decrease below with the smallest grain size difference or be equal to the level of 15 ��m. Visible, in five aluminum targets that five the second aluminum target blanks 102 that the present embodiment contacts are formed, the homogeneity of each aluminum target internal grain size is higher, and the homogeneity of different aluminum target internal grain size is also higher. Therefore, method of making described in makes the aluminum target indices obtained and all reaches the instructions for use of big (such as more than 6 generation lines) TFT-LCD panel from generation to generation.
In the manufacture method of the aluminum target that the embodiment of the present invention provides, with the heat transfer performance of metal, the aluminum target making formation to greatest extent is heated evenly, grain size and the crystal grain homogeneity of aluminum target are efficiently controlled, and once in bulk plural second aluminum target blank can be carried out the 3rd heat treatment, production efficiency is greatly improved, reduces production cost.
Although present disclosure is as above, but the present invention is not limited to this. Any those skilled in the art, without departing from the spirit and scope of the present invention, all can make various changes or modifications, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (10)
1. the manufacture method of an aluminum target, it is characterised in that including:
Aluminum ingot is provided;
Described aluminium ingot is carried out the first heat treatment;
After described first heat treatment, forge to form the first aluminum target blank to described aluminium ingot;
Described first aluminum target blank is carried out the second heat treatment;
After described second heat treatment, roll to form the second aluminum target blank to described first aluminum target blank;
Second aluminum target blank described at least two is contacted;
Described second aluminum target blank contacted is carried out the 3rd heat treatment simultaneously, to form aluminum target.
2. the manufacture method of aluminum target as claimed in claim 1, it is characterised in that the shape of described second aluminum target blank is cuboid, and two surfaces that in described cuboid, area is maximum are first type surface, and other surface is side; The step that second aluminum target blank described at least two contacts is included: by adjacent two described second aluminum target blanks, one of them described first type surface of one of them described first type surface of first described second aluminum target blank and second described second aluminum target blank is superimposed together at least partly.
3. the manufacture method of aluminum target as claimed in claim 2, it is characterized in that, all described second aluminum target blanks are pressed ladder staggered overlap, so that outside the described first type surface being superimposed with each other has at least and be partially exposed at, and connect a thermocouple at the described first type surface of each described second aluminum target blank.
4. the manufacture method of aluminum target as claimed in claim 2, it is characterized in that, all will overlap by completely overlapped formula by described second aluminum target blank, so that the described first type surface being superimposed with each other is completely overlapped together, and connect a thermocouple in the described side of each described second aluminum target blank.
5. the manufacture method of aluminum target as claimed in claim 2, it is characterized in that, described second aluminum target blank contacted has two described first type surfaces being completely exposed outside, adopts aluminium sheet and at least one of which that described first type surface overlapping outside is completely exposed.
6. the manufacture method of the aluminum target as described in any one of claim 1 to 5, it is characterised in that also include: described second aluminum target blank contacted is bundled, after binding, described second aluminum target blank is carried out described 3rd heat treatment.
7. the manufacture method of the aluminum target as described in any one of claim 6, it is characterised in that described to three, four or five the second aluminum target blank is contacted.
8. the manufacture method of aluminum target as claimed in claim 1, it is characterised in that described 3rd heat treated heat treatment temperature is 245 DEG C��255 DEG C, and heat treatment time is 14.5min��15.5min.
9. the manufacture method of aluminum target as claimed in claim 1, it is characterised in that described second heat treated heat treatment temperature is 395 DEG C��405 DEG C, and heat treatment time is 29.5min��30.5min.
10. the manufacture method of aluminum target as claimed in claim 1, it is characterised in that described first heat treated heat treatment temperature is 295 DEG C��305 DEG C, and heat treatment time is 29.5min��30.5min.
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| CN111318570A (en) * | 2020-03-05 | 2020-06-23 | 爱发科电子材料（苏州）有限公司 | Process for manufacturing micronized target material crystal grains |
| CN112779483A (en) * | 2020-12-24 | 2021-05-11 | 徐州捷图机械有限公司 | Treatment method for internal porosity of aluminum alloy |
| CN113061852A (en) * | 2021-03-17 | 2021-07-02 | 宁波江丰电子材料股份有限公司 | High-purity aluminum or aluminum alloy target material and preparation method thereof |
| CN113084235A (en) * | 2021-04-22 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Processing method for repairing surface defects of high-purity aluminum target material |
| CN113106362A (en) * | 2021-03-18 | 2021-07-13 | 先导薄膜材料（广东）有限公司 | Manufacturing method of target material back plate with concave surface |
| CN114717525A (en) * | 2022-04-06 | 2022-07-08 | 宁波江丰电子材料股份有限公司 | Aluminum-containing target material and preparation method thereof |
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| CN111318570A (en) * | 2020-03-05 | 2020-06-23 | 爱发科电子材料（苏州）有限公司 | Process for manufacturing micronized target material crystal grains |
| CN112779483A (en) * | 2020-12-24 | 2021-05-11 | 徐州捷图机械有限公司 | Treatment method for internal porosity of aluminum alloy |
| CN113061852A (en) * | 2021-03-17 | 2021-07-02 | 宁波江丰电子材料股份有限公司 | High-purity aluminum or aluminum alloy target material and preparation method thereof |
| CN113106362A (en) * | 2021-03-18 | 2021-07-13 | 先导薄膜材料（广东）有限公司 | Manufacturing method of target material back plate with concave surface |
| CN113084235A (en) * | 2021-04-22 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Processing method for repairing surface defects of high-purity aluminum target material |
| CN114717525A (en) * | 2022-04-06 | 2022-07-08 | 宁波江丰电子材料股份有限公司 | Aluminum-containing target material and preparation method thereof |
| CN114717525B (en) * | 2022-04-06 | 2024-01-30 | 宁波江丰电子材料股份有限公司 | Aluminum-containing target and preparation method thereof |
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