CN105624591B - The manufacture method of aluminium target - Google Patents
The manufacture method of aluminium target Download PDFInfo
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- CN105624591B CN105624591B CN201410606957.0A CN201410606957A CN105624591B CN 105624591 B CN105624591 B CN 105624591B CN 201410606957 A CN201410606957 A CN 201410606957A CN 105624591 B CN105624591 B CN 105624591B
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Abstract
A kind of manufacture method of aluminium target, including：Aluminium ingot is provided；First heat treatment is carried out to the aluminium ingot；After being heat-treated described first, the aluminium ingot is forged to form the first aluminum target blank；Second heat treatment is carried out to first aluminum target blank；After being heat-treated described second, first aluminum target blank is rolled to form the second aluminum target blank；Second aluminum target blank described at least two is contacted；To second aluminum target blank that contacts while carrying out the 3rd heat treatment, to form aluminium target.The manufacture method is improve in formed aluminium target, the homogeneity of grain size between different aluminum target, and improves production efficiency, reduces production cost.
Description
Technical field
The present invention relates to the manufacture field of liquid crystal panel, more particularly to a kind of manufacture method of aluminium target.
Background technology
TFT liquid crystal display (TFT-LCD) panel factory is usually in 6 generation lines distribution used above
Aluminum wiring.Aluminum wiring is generally formed using physical gas phase deposition technology, i.e., generally form film layer by way of aluminium target as sputter,
Then aluminum wiring is formed using etching technics etched membrane layer.
Aluminium target is generally by making of pure aluminum.The manufacturing process of existing aluminium target is generally included to provide aluminium ingot, and aluminium ingot is entered
Row first is heat-treated, and the aluminium ingot after being then heat-treated to first is forged, to form the first aluminum target blank, then to the first aluminium
Target blank carries out the second heat treatment, after being heat-treated second, the first aluminum target blank is rolled, and forms the second aluminium target
Blank, finally carries out third time heat treatment to the second aluminum target blank, so that the crystal grain recrystallization in the second aluminum target blank, from
And form aluminium target.
However, the manufacture method of existing aluminium target is generally unable to reach the use demand of advanced lines TFT-LCD panels.
The content of the invention
The problem that the present invention is solved is to provide a kind of manufacture method of aluminium target, is met with the aluminium target for manufacture is formed
Reach the use demand of advanced lines TFT-LCD panels.
To solve the above problems, the present invention provides a kind of manufacture method of aluminium target, including：
Aluminium ingot is provided；
First heat treatment is carried out to the aluminium ingot；
After being heat-treated described first, the aluminium ingot is forged to form the first aluminum target blank；
Second heat treatment is carried out to first aluminum target blank；
After being heat-treated described second, first aluminum target blank is rolled to form the second aluminum target blank；
Second aluminum target blank described at least two is contacted；
To second aluminum target blank that contacts while carrying out the 3rd heat treatment, to form aluminium target.
Optionally, the shape of second aluminum target blank is in cuboid, two maximum tables of area in the cuboid
Face is first type surface, and other surfaces are side；To include the step of second aluminum target blank contacts described at least two：Will
In two neighboring second aluminum target blank, first one of them described first type surface and of second aluminum target blank
One of them described first type surface of two second aluminum target blanks is at least partly superimposed together.
Optionally, all second aluminum target blanks are pressed into ladder staggered to overlap, so that the master being superimposed with each other
Outside surface is at least partially exposed at, and in the first type surface one thermocouple of connection of each second aluminum target blank.
Optionally, all second aluminum target blank will be overlapped by completely overlapped formula, so that the master being superimposed with each other
Surface is completely overlapped together, and connects a thermocouple in the side of each second aluminum target blank.
Optionally, second aluminum target blank for contacting has two master meters being completely exposed outside
Face, the first type surface being completely exposed outside using aluminium sheet and at least one of which is overlapped.
Optionally, also include：Second aluminum target blank to contacting is bundled, to described after binding
Second aluminum target blank carries out the 3rd heat treatment.
Optionally, three, four or five second aluminum target blanks are contacted.
Optionally, it is described 3rd heat treatment heat treatment temperature be 245 DEG C~255 DEG C, heat treatment time be 14.5min~
15.5min。
Optionally, it is described second heat treatment heat treatment temperature be 395 DEG C~405 DEG C, heat treatment time be 29.5min~
30.5min。
Optionally, it is described first heat treatment heat treatment temperature be 295 DEG C~305 DEG C, heat treatment time be 29.5min~
30.5min。。
Compared with prior art, technical scheme has advantages below：
In technical scheme, aluminium ingot is provided first, and the first heat treatment is carried out to the aluminium ingot, described first
After heat treatment, the aluminium ingot is forged to form the first aluminum target blank, then first aluminum target blank is carried out
Second heat treatment, after being heat-treated described second, is rolled to form the second aluminium target base to first aluminum target blank
Material, afterwards contacts the second aluminum target blank described at least two, to the second aluminium target base for contacting
Material carries out the 3rd heat treatment simultaneously, to form aluminium target.Due to first by the second aluminum target blank contact described at least two one
Rise, then to second aluminum target blank that contacts while carry out the 3rd heat treatment, therefore, in the 3rd heat treatment,
Heat transfer can occur between the second aluminum target blank for contacting, and aluminum target blank is in itself metal material, metal
Heat conductivility is good, therefore in the 3rd heat treatment process, the second aluminum target blank each several part temperature for contacting can
Reach uniformly, so that in the aluminium target obtained after heat treatment, it is not only by grain size control below 100 μm and different
Grain size between aluminium target is homogeneous.Further, since the 3rd heat treatment once is carried out at least two second aluminum target blanks,
Production efficiency also is improve simultaneously, production cost is reduced.
Further, the shape of second aluminum target blank is in cuboid, two maximum tables of area in the cuboid
Face is first type surface；To include the step of second aluminum target blank contacts described at least two：By two neighboring described
In two aluminum target blanks, first one of them described first type surface and second second aluminium of second aluminum target blank
One of them of the target blank first type surface is at least partly superimposed together.Now, the second aluminium target for contacting
Material blank has two first type surfaces being completely exposed outside, and institute outside is completely exposed using aluminium sheet and at least one of which
State first type surface overlapping.Because the first type surface being completely exposed outside using aluminium sheet and at least one of which is overlapped, therefore, it is possible to
Make the heating condition of each the second aluminum target blank more consistent, so as to further increase crystal grain in the aluminium target for ultimately forming
The homogeneity of size.
Brief description of the drawings
Fig. 1 to Fig. 4 is each step counter structure schematic diagram of manufacture method of the aluminium target that the embodiment of the present invention is provided.
Specific embodiment
The manufacture method of existing aluminium target is generally needed by three heat treatment.However, existing heat treatment mode is directed to 6
During for more than line aluminium target, corresponding processing requirement is usually unable to reach.Because TFT-LCD panels more than 6 generation lines
Size is larger in itself for the aluminium target for using, and is often difficult homogeneity of the control aluminium target in heat treatment in-furnace temperature.For example and 8.5
For line aluminium target area be 2650mm × 210mm, in existing matching heat-treatment furnace, furnace temperature be transferred to aluminium target each
The temperature in orientation is often variant.Additionally, for TFT-LCD panels more than 6 generation lines, when forming aluminum wiring on the glass substrate
When, it is necessary to be sputtered together using multiple aluminium targets simultaneously.The TFT-LCD panels of such as 6 generation lines need to use 10 aluminium targets simultaneously
Material, and the TFT-LCD panels of 8.5 generation lines are even more and require Large size Aluminium target that 12 is one group while use, with glass substrate
Whole face on form corresponding aluminum wiring.Due to needing simultaneously using one group of multiple Large size Aluminium target, it is therefore desirable to strict control
The homogeneity of crystal grain after finished heat treatment.Specifically, the use requirement to meet TFT-LCD panels more than 6 generation lines, it is desirable to same
Following two standards are respectively reached in one group：
1st, the control of aluminium target crystalline grains size is below 100 μm；
2nd, keep the grain size between different aluminum target homogeneous.
It can be seen that, in the aluminium target used by 6 generation line above TFT-LCD panels, typically multiple (such as 10 or 12) are
It is a set of to use cooperatively, to make uniform more difficult per a piece of aluminium target heat treatment temperature profile.In existing manufacture method, one by one
Ground is heat-treated to aluminum target blank, therefore grain size homogeneity between different aluminum target is difficult control, easily occurs not
With the situation that the grain size between aluminium target is not homogeneous enough, it is impossible to meet the use requirement of 6 generation line above TFT-LCD panels.
Therefore, the present invention provides a kind of manufacture method of new aluminium target, the manufacture method provides aluminium ingot first, and right
The aluminium ingot carries out the first heat treatment, after being heat-treated described first, the aluminium ingot is forged to form the first aluminium target
Blank, then carries out the second heat treatment to first aluminum target blank, after being heat-treated described second, to the first aluminium target
Material blank is rolled to form the second aluminum target blank, afterwards by the second aluminum target blank contact described at least two one
Rise, to second aluminum target blank that contacts while carrying out the 3rd heat treatment, to form aluminium target.
Due to first the second aluminum target blank described at least two being contacted, then to contact described second
Aluminum target blank carries out the 3rd heat treatment simultaneously, therefore, when the 3rd is heat-treated, heat can occur between each second aluminum target blank
Transmission, and aluminum target blank is in itself metal material, the heat conductivility of metal is good, therefore in the insulating process of the 3rd heat treatment
In, each second aluminum target blank each several part temperature for contacting can be made to reach uniformly, so that the aluminium target after heat treatment
Material grain size is controlled below 100 μm, and grain size between different aluminum target is homogeneous.Further, since once at least
Two the second aluminum target blanks carry out the 3rd heat treatment, also improve production efficiency simultaneously, reduce production cost.
It is understandable to enable the above objects, features and advantages of the present invention to become apparent, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
The embodiment of the present invention provides a kind of manufacture method of aluminium target, incorporated by reference to referring to figs. 1 to Fig. 4.
Refer to Fig. 1, there is provided aluminium ingot 100.
In the present embodiment, aluminium ingot 100 by metallic aluminum material make, also, the metallic aluminum material be purity 99.99%
Fine aluminium above, for example specially purity is 99.99%, 99.995% or 99.999% fine aluminium.
In the present embodiment, aluminium ingot 100 is shaped as cuboid.In other embodiments, the shape of aluminium ingot can also be circle
Cylinder, square, cone or section are the cylinder of Else Rule figure or irregular figure.
Please continue to refer to Fig. 1, the first heat treatment is carried out to aluminium ingot 100.
In the present embodiment, the first thermal processes act is mainly aluminium ingot 100 is preheated.Preheating can reduce aluminium ingot 100
Resistance of deformation when subsequently forging, thus forging force required when the aluminium ingot 100 for subsequently being forged deforms is reduced, apply forging and stamping
Plus dynamics greatly reduce.And if too low without preheating step, or preheating temperature to aluminium ingot 100, formed after forging
First aluminum target blank surface is also easy to produce crackle.
In detailed process, aluminium ingot 100 can be put into heat-treatment furnace, be preheated to 300 DEG C, be incubated 30min, now aluminium ingot
It is local-crystalized inside 100, be conducive to after follow-up forging, initial crystal grain is uniformly distributed.It should be noted that in this hair
In bright other embodiments, the heat treatment temperature of the first heat treatment can be controlled at 295 DEG C~305 DEG C, and at corresponding heat
The reason time can be 29.5min~30.5min.So as to ensure that aluminium ingot 100 after heat treatment can be adapted to carry out follow-up forge work
Skill.
Fig. 2 is refer to, after being heat-treated first, aluminium ingot 100 is forged to form the first aluminum target blank 101.
In the present embodiment, the process of forging can be：Aluminium ingot 100 is placed on forging press, then using forging hammer (pneumatic hammer)
Multidirectional impact is carried out to aluminium ingot 100, is impacted against each surface of aluminium ingot 100 using forging hammer.
The institutional framework and mechanical property that can preferably improve the first aluminum target blank 101 are forged, meanwhile, forging can be with
Improve plasticity of the aluminium ingot 100 when subsequently forging.Aluminium ingot 100 after the deformation of above-mentioned forging method by making original thick Dendritic TiC
Grain and columnar grain are smashed and are changed into small grains, original segregation, loose, stomata, slag inclusion etc. in aluminium ingot 100 is compacted and is welded
Close, form the first even closer aluminum target blank 101 of tissue, improve the plasticity and mechanical property of aluminium ingot 100.And if forging
The degree beaten not enough, for example, forges rear deformation rate not enough or forges number of times not enough, then for the improvement of the interior tissue of aluminium ingot 100
The degree of effect and crystal grain refinement not enough, influences the performance of the first aluminum target blank 101, or even the aluminium target that influence is ultimately formed
The performance of material.But if it is too big to forge rear deformation rate, because aluminium ingot 100 is hard and crisp, also it is easily caused the first aluminum target blank
There is crackle in 101 work in-processes.And if forging number of times excessively, cause to forge the waste of cost.
Please continue to refer to Fig. 2, the second heat treatment is carried out to the first aluminum target blank 101.
In the present embodiment, annealing, destressing are played a part of in the second heat treatment, to coordinate target not cause in rolling
Cracking phenomena.Specifically, the heat treatment temperature of the second heat treatment can be 395 DEG C~405 DEG C, heat treatment time can be
29.5min~30.5min.
Fig. 3 is refer to, after being heat-treated second, the first aluminum target blank 101 is rolled to form the second aluminium target
Blank 102.
In the present embodiment, rolling is carried out to the first aluminum target blank 101 to be included for the first aluminum target blank 101 carrying out hot rolling
Or carry out the first aluminum target blank 101 cold rolling.Specifically, can be by the first aluminium target by the rolling of the first aluminum target blank 101
Material blank 101 be placed on two rollers of calender and between extruded.By the first aluminum target blank 101 of two rollers and extruding
Upper and lower surface, reduce the first aluminum target blank 101 thickness, so as to increase the area of upper and lower surface.By the first aluminium target base
Material 101 is placed on and multi- pass rolling is carried out on calender.On the one hand the height of the first aluminum target blank 101 can be reduced, so as to increase
Plus the second aluminum target blank 102 is formed to the area of the upper and lower surface of the first aluminum target blank 101.On the other hand, to first
Aluminum target blank 101 carries out rolling the crystallite dimension that can further refine inside the first target blank so that the second of formation
The crystallite dimension of aluminum target blank 102 is in the range of less than or equal to 100 μm., wherein it is desired to the first aluminum target blank 101 is entered
Repeatedly extruding could form the second aluminum target blank 102 to row.
Please continue to refer to Fig. 3, the shape of the second aluminum target blank 102 obtained after rolling is in cuboid, face in cuboid
Two maximum surfaces of product are first type surface 1021, and other surfaces are side 1022.
In the present embodiment, when the aluminium target for being formed is subsequently when applying to the making of 8.5 generation line TFT-LCD panels, by
In the glass substrate area used by 8.5 generation line TFT-LCD panels be 2650mm × 2500mm, therefore the aluminium target chi for ultimately forming
Very little can be 2650mm × 210mm × 19mm or be 2650mm × 210mm × 21mm, and the second aluminium by being formed after rolling
The size of target blank 102 always slightly greater than 2650mm × 210mm × 19mm or for 2650mm × 210mm × 21mm (typically
In length and width size bigger, to ensure having enough allowance).
Fig. 4 is refer to, five the second aluminum target blanks 102 are contacted.
In the present embodiment, because the second aluminum target blank 102 is in cuboid, and with the maximum first type surface of two areas
1021 (refer to Fig. 3), therefore, can be for when five the second aluminum target blanks 102 are contacted, the step of use：
By in two neighboring second aluminum target blank 102, first one of first type surface 1021 and of the second aluminum target blank 102
One of first type surface 1021 of two the second aluminum target blanks 102 is at least partly superimposed together.
Specifically, being overlapped (in other words by ladder as shown in figure 4, five the second aluminum target blanks 102 are pressed into ladder staggered
Formula sieve is put together) so that the first type surface 1021 being superimposed with each other at least is partially exposed at outward.
In the present embodiment, a thermocouple 103 is connected in the first type surface 1021 of each the second aluminum target blank 102, specifically
Thermocouple 103 can be plugged on first type surface 1021.Thermocouple 103 is inserted in first type surface 1021 easily operated, and afterwards
Thermocouple 103 is not allowed easy to fall off.The insertion of thermocouple 103 purpose of second aluminum target blank 102 is to monitor each second aluminium target
The temperature of blank 102, needs to ensure at ± 5 DEG C or so to monitor temperature heat treatment temperature.When there is larger temperature change, can
By manually adjusting heat-treatment furnace, to adjust the furnace temperature of heat-treatment furnace in time, it is ensured that the 3rd follow-up heat treatment is in suitable temperature
Steadily carried out in the range of degree.
It should be noted that in other embodiments, it is also possible to which all the second aluminum target blanks are folded by completely overlapped formula
Close so that the first type surface being superimposed with each other it is completely overlapped together (because each second aluminum target blank size is identical, thus they
First type surface can be with completely overlapped), and connect a thermocouple in the side of each the second aluminum target blank.Thermocouple needs firm
Be interspersed in per on a piece of target, to prevent from being split away off in the 3rd follow-up heat treatment process, cause by detect its
The temperature of its position (furnace wall of such as heat-treatment furnace) is mistakenly considered the temperature of the second aluminum target blank, the heat treatment of influence the 3rd
Carry out.
Although it should be strongly noted that do not shown in figure, in the present embodiment, also including to contacting
Two aluminum target blanks 102 are bundled, and the 3rd heat treatment is carried out to the second aluminum target blank 102 after binding.3rd heat treatment
When, it is necessary to target is in close contact, make each temperature of second aluminum target blank 102 uniform by heat transfer with best.Therefore, will
Second aluminum target blank 102 is bundled, and is prevented from the second aluminum target blank 102 for contacting and is being moved or the 3rd
Relatively moved in heat treatment process, so as to ensure five the second aluminum target blanks 102 when the 3rd is heat-treated, all the time closely
Contact, therefore in heat-treatment furnace, metal heat transfer effect in itself can be effectively utilized, make five the second aluminum target blanks
102 final heat treatment temperatures reach uniformly.
Please continue to refer to Fig. 4, in the present embodiment, the second different aluminum target blanks 102 is overlapped by first type surface 1021
Together.However, each second aluminum target blank 102 has two first type surfaces 1021.Therefore, the second aluminium target for contacting
Material blank 102 has two first type surfaces 1021 being completely exposed outside, and this two first type surfaces 1021 being completely exposed outside are specific
In for Fig. 4, extreme higher position and (not right in Fig. 4 positioned at two surfaces of extreme lower position is located in five the second aluminum target blanks 102
This two surfaces are labeled).
In the present embodiment, the first type surface 1021 being completely exposed outside with the two respectively using two aluminium sheets 104 is folded completely
Close.Though not showing that aluminium sheet 104 is not overlapped also with exposure first type surface 1021 outside in Fig. 4, because understanding, rear extended meeting is by aluminium sheet
104 directly overlay do not overlapped with other first type surfaces 1021 in Fig. 4 positioned at outermost two first type surfaces 1021.Increase aluminium sheet
104 cover the two first type surfaces 1021 ensure that each second aluminum target blank 102 is in identical heated environment, so that
Ensure that each second aluminum target blank 102 receives identical heat transfer effect, the i.e. heating condition of each the second aluminum target blank 102
It is more consistent, so as to further increase the homogeneity of grain size in the aluminium target for ultimately forming.
It should be noted that in other embodiments, it is also possible to only with one block of aluminium sheet 104 with one of exposure outside
First type surface 1021 overlap, or do not use aluminium sheet 104 to be superimposed on exposure first type surface 1021 outside.
In the present embodiment, above-mentioned five the second aluminium target bases being superimposed together can be bundled using iron belt (not shown)
Material 102.In binding, can be by five uniform bindings of the head and the tail of the second aluminum target blank 102 together.Iron belt mechanical strength in itself
Suitable for tying up for large-sized object, and it is difficult to be influenceed toughness by temperature rising.In other embodiments, it would however also be possible to employ other
Mode enters binding to the second aluminum target blank 102 for contacting.
It should be noted that in other embodiments, it is also possible to by the second of two, three, four or more than six
Aluminum target blank contacts, but needs the second aluminum target blank for considering once be accommodated in heat-treatment furnace certainly
Number.The aluminium target used in view of the TFT-LCD panels of advanced lines is usually multiple, and such as 6 generation line first uses ten are big
The aluminium target of area, the aluminium target of 8.5 12 large area of generation line first use.Therefore, it can it is many using by three, four or
Five the second aluminum target blanks of person contact, and carry out the 3rd follow-up heat treatment simultaneously, so ensure that what is formed
Between different aluminum target, grain size homogeneity is higher.Likewise, the second aluminum target blank of other numbers is contacted at the same time
When together, when the second aluminum target blank is still cuboid, and the second aluminum target blank is superimposed on one still through first type surface
When rising, still can be covered on the first type surface not overlapped with other first type surfaces using aluminium sheet.
Please continue to refer to Fig. 4, to five the second aluminum target blanks 102 contacting while carrying out the 3rd heat treatment,
To form aluminium target (not shown).
In the present embodiment, the heat treatment temperature of the 3rd heat treatment can be 245 DEG C~255 DEG C, and heat treatment time can be
14.5min~15.5min.The purpose of the 3rd heat treatment is to improve the diffusivity of atom in the second aluminum target blank 102, to subtract
It is small above to forge and roll the internal structural flaw for causing, and the second aluminum target blank 102 of elimination residual stress so that second
There is recrystallization phenomenon in the inside of aluminum target blank 102.And, in the present embodiment, while to five the second aluminium for contacting
Target blank 102 carries out the 3rd heat treatment, additionally it is possible to make full use of the metal heat transfer between different second aluminum target blanks 102
Effect, so as to better control over the grain size homogeneity of the aluminium target for finally giving.Also, due to once to five the second aluminium
Target blank 102 carries out the 3rd heat treatment, also improves production efficiency simultaneously, reduces production cost.
It should be noted that after the above-mentioned first heat treatment, the second heat treatment or the 3rd heat treatment, can use phase
The cooling technique answered is to aluminium ingot 100 or aluminum target blank (including the first aluminum target blank 101 and second aluminum target blank 102)
Cooled down.Specific mode can use air cooling.Air cooling to aluminium ingot 100 or aluminum target blank without carrying out extra behaviour
Make, it is not required that consume other any articles, therefore Simplified flowsheet and cost-effective.And the final temperature of air cooling is room temperature,
On the one hand, can cause that the chilling temperature difference after heat treatment is maximized, be conducive to the crystal grain of aluminium ingot 100 or aluminum target blank more
Plus homogenization；On the other hand, room temperature is preferably controlled, and can cause that the initial temperature of each stage process is consistent, i.e. each stage
The temperature of technique can have identical starting point, and then be more beneficial for the control of the manufacturing process of whole aluminium target.
After being heat-treated the 3rd, the present embodiment has obtained aluminium target.In subsequent process steps, aluminium target can also be carried out
Machining.The machining includes the technique such as roughing and finishing, and the aluminium target that sputtering is required is met to be made size.
Wherein roughing refers to contour turning, and finishing refers to product size turning, including border wire cutting, and lower planes grinding machine adds
Work.The unnecessary size surplus of aluminium target are for example removed by straight wire saw process, aluminium target is bent by flexibility rectification technique
Degree is corrected, and by facing cut technique, milling equality is carried out to surface of aluminum target material.After the machining operation, finished product can also be entered
The treatment such as capable cleaning and drying.
Finally, microcosmic crystal grain analysis can also be carried out to aluminium target.Specifically, part-structure can be taken as sample (face
Product is 1mm2~2mm2), it is polished, to remove the oxide layer on its surface, and the sample after polishing is corroded, then
It is whether uniform with the size of the internal grain of micro- sem observation aluminium target, and grain structure structure.Can be dissipated using the electronics back of the body
Diffraction analysis instrument (Electron Back Scattered Diffraction, EBSD) is penetrated to detect the crystal orientation of aluminium target
Whether meet the requirements.
Manufacture method that the present embodiment is provided is made in the aluminium target for obtaining, and pair is carried out simultaneously with the 3rd heat treatment
The five aluminium targets for being formed are sampled detection.Testing result shows：In five the five of aluminium target samples, crystallite dimension is equal
Can be less than or the level equal to 100 μm；Also, between five the five of aluminium target samples, largest grain size with
The smallest grain size difference can be decreased below or the level equal to 15 μm.It can be seen that, contact five of the present embodiment
In five aluminium targets that second aluminum target blank 102 is formed, the homogeneity of each aluminium target internal grain size is higher, and not
Homogeneity with aluminium target internal grain size is also higher.Therefore, it is described to make method to make the aluminium target indices that obtain equal
Reach the use requirement of big (such as more than 6 generation lines) TFT-LCD panels from generation to generation.
In the manufacture method of the aluminium target that the embodiment of the present invention is provided, with the heat transfer performance of metal, to greatest extent
The aluminium target to be formed is heated evenly, the grain size and crystal grain homogeneity of aluminium target has been efficiently controlled, and can be once
The 3rd heat treatment is carried out to more than two second aluminum target blanks in bulk, production efficiency greatly improved, reduce production
Cost.
Although present disclosure is as above, the present invention is not limited to this.Any those skilled in the art, are not departing from this
In the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
The scope of restriction is defined.
Claims (8)
1. a kind of manufacture method of aluminium target, it is characterised in that including：
Aluminium ingot is provided；
First heat treatment is carried out to the aluminium ingot；
After being heat-treated described first, the aluminium ingot is forged to form the first aluminum target blank；
Second heat treatment is carried out to first aluminum target blank；
After being heat-treated described second, first aluminum target blank is rolled to form the second aluminum target blank；
Second aluminum target blank described at least two is contacted；
To second aluminum target blank that contacts while carrying out the 3rd heat treatment, to form aluminium target；
Wherein, the shape of second aluminum target blank is in cuboid, in the cuboid based on two maximum surfaces of area
Surface, other surfaces are side；To include the step of second aluminum target blank contacts described at least two：By adjacent two
In individual second aluminum target blank, one of them described first type surface of first second aluminum target blank and second institute
One of them the described first type surface part for stating the second aluminum target blank is superimposed together to form ladder staggered overlapping, makes mutually
Outside the first type surface of overlapping is at least partially exposed at, and in the first type surface connection of each second aluminum target blank
One thermocouple.
2. the manufacture method of aluminium target as claimed in claim 1, it is characterised in that press all second aluminum target blanks
Ladder staggered is overlapped, and in the first type surface one thermocouple of connection of each second aluminum target blank.
3. the manufacture method of aluminium target as claimed in claim 1, it is characterised in that the second aluminium target for contacting
Blank has two first type surfaces being completely exposed outside, using aluminium sheet and at least one of which be completely exposed outside described in
First type surface is overlapped.
4. the manufacture method of the aluminium target as described in any one of claims 1 to 3, it is characterised in that also include：To contacting one
Second aluminum target blank for rising is bundled, and second aluminum target blank is carried out at the 3rd heat after binding
Reason.
5. the manufacture method of aluminium target as claimed in claim 4, it is characterised in that by three, four or five described
Two aluminum target blanks contact.
6. the manufacture method of aluminium target as claimed in claim 1, it is characterised in that the heat treatment temperature of the 3rd heat treatment
It it is 245 DEG C~255 DEG C, heat treatment time is 14.5min~15.5min.
7. the manufacture method of aluminium target as claimed in claim 1, it is characterised in that the heat treatment temperature of second heat treatment
It it is 395 DEG C~405 DEG C, heat treatment time is 29.5min~30.5min.
8. the manufacture method of aluminium target as claimed in claim 1, it is characterised in that the heat treatment temperature of first heat treatment
It it is 295 DEG C~305 DEG C, heat treatment time is 29.5min~30.5min.
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| CN111318570B (en) * | 2020-03-05 | 2021-11-19 | 爱发科电子材料（苏州）有限公司 | Process for manufacturing micronized target material crystal grains |
| CN112779483A (en) * | 2020-12-24 | 2021-05-11 | 徐州捷图机械有限公司 | Treatment method for internal porosity of aluminum alloy |
| CN113061852B (en) * | 2021-03-17 | 2022-09-09 | 宁波江丰电子材料股份有限公司 | High-purity aluminum or aluminum alloy target material and preparation method thereof |
| CN113106362B (en) * | 2021-03-18 | 2022-07-01 | 先导薄膜材料（广东）有限公司 | Manufacturing method of target material back plate with concave surface |
| CN113084235A (en) * | 2021-04-22 | 2021-07-09 | 宁波江丰电子材料股份有限公司 | Processing method for repairing surface defects of high-purity aluminum target material |
| CN114717525B (en) * | 2022-04-06 | 2024-01-30 | 宁波江丰电子材料股份有限公司 | Aluminum-containing target and preparation method thereof |
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| CN101624695B (en) * | 2009-08-11 | 2011-02-09 | 宁波江丰电子材料有限公司 | Heat treatment method of target blank |
| CN102296272B (en) * | 2011-08-17 | 2013-09-04 | 宁波江丰电子材料有限公司 | Manufacturing method of tantalum target material |
| CN103572224B (en) * | 2012-08-01 | 2016-03-16 | 宁波江丰电子材料股份有限公司 | The manufacture method of nickel target and nickel target material assembly |
| CN103692166B (en) * | 2013-12-20 | 2016-01-13 | 东北大学 | The preparation method of the thick alloy-steel plate of a kind of spy |
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