CN101632998A - Target plasticity deformation method - Google Patents
Target plasticity deformation method Download PDFInfo
- Publication number
- CN101632998A CN101632998A CN200910163727A CN200910163727A CN101632998A CN 101632998 A CN101632998 A CN 101632998A CN 200910163727 A CN200910163727 A CN 200910163727A CN 200910163727 A CN200910163727 A CN 200910163727A CN 101632998 A CN101632998 A CN 101632998A
- Authority
- CN
- China
- Prior art keywords
- target
- plastic deformation
- parts
- deformation method
- metal materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Metal Rolling (AREA)
Abstract
The invention relates to a target plasticity deformation method. The method comprises the following steps: providing metal material, wherein the metal material is aluminum or aluminum alloy; performing multiple rolling processing on the metal material to manufacture a target. The target plasticity deformation method simplifies the procedures in the plasticity deformation process, so the manufactured target conforms to the process requirement of plasticity deformation, and the production yield rate is enhanced.
Description
Technical field
The present invention relates to target and make the field, relate in particular to plastic deformation method of target materials.
Background technology
The processing method of existing most targets mainly is control plastic deformation mode, rate of deformation, and the variations in temperature in the control procedure.For example, application number is that 00816972.1 Chinese patent application has been introduced a kind of method for preparing sputtering target material.The processing speed of processing percentage and at least 100% with at least 5%/second is carried out plastic working to metal material, and the variations in temperature in the control material processing, the grain size size of control material that like this can be good.
Plastic deformation process has multiple, and common have an open die forging, die forging, sheet-metal press working, extruding, drawing, rolling etc.The processing of traditional target is that multiple plastic deformation process is carried out combination, is example with the plastic deformation processing technology of metallic aluminium, please refer to Fig. 1, and described technology specifically comprises cut-out, open die forging, punching press, multiple working procedure such as rolling.Each procedure wherein is more complicated all, needs specific process conditions (for example equipment etc.), is difficult to control, and requires also higher to the cooperation between each procedure.Multiple plastic deformation process combination, very high to equipment and personnel's requirement, the requirement that need prepare various plastic deformation process simultaneously, the input that needs is very high.Especially for large-scale target (for example diameter is the above target of 300mm and 300mm), because large-scale target size is big, control the homogeneous of internal performance and stable, its manufacture craft is more complicated and be difficult to stablize.
In addition, the employed equipment of technology such as existing open die forging, die forging are forging hammers, and forging hammer is uncontrollable each deflection and deformation time when operation, and just deformation technique can't accurately be controlled, and the quality of product can't be guaranteed.
Therefore, traditional plastic deformation processing technology is complicated and be difficult to control, causes production cost higher, and working (machining) efficiency is not high.
Summary of the invention
The object of the present invention is to provide a kind of plastic deformation method of target materials, solve prior art processes complexity and cost problem of higher.
For addressing the above problem, the invention provides a kind of plastic deformation method of target materials, it comprises: the metal materials and parts are provided, and described metal materials and parts are aluminium or aluminium alloy; Described metal materials and parts are carried out the rolling mill practice of multi-pass, be made into target.
Alternatively, described rolling mill practice is cold rolling.
Optionally, carry out described rolling mill practice by milling train, described milling train comprises symmetrically arranged two rolls up and down.
Alternatively, the rolling mill practice of described each passage specifically comprises: regulate the roll spacing of two roll shop buildings, described roll spacing is rolling aim parameter; The metal materials and parts are delivered between two rolls; By the rotation of two rolls, described metal materials and parts are rolled, send the metal materials and parts or the target that meet described rolling aim parameter.
Alternatively, described roll spacing is set according to drafts or rate of deformation.
Alternatively, the direction of rotation of described two rolls.
Alternatively, the thickness of described target is 30mm～100mm.The diameter of described target is 300mm or more than the 300mm.
Alternatively, described method also comprises heat-treating through the target that forms behind the multi-pass rolling mill practice.Described heat treated temperature is 200 ℃～600 ℃, and temperature retention time is 0 hour～5 hours.
Compared with prior art, the plastic deformation method of target materials that technique scheme provided, be to make target by the rolling mill practice that carries out multi-pass, with respect to prior art, reduced the operation in the plastic deformation process, and make the target of making meet the plastic deformation process requirement, improve it and produce yield.
Therefore,, can simplify the plastic deformation processing technology, and rolling mill practice is easy to control entirely, can reduce production costs, improves working (machining) efficiency by full rolling mill practice.
Description of drawings
Fig. 1 is the process schematic diagram of existing a kind of plastic deformation method of target materials;
Fig. 2 is the schematic flow sheet of the plastic deformation method of target materials of the embodiment of the invention;
Fig. 3 is the process schematic diagram of the plastic deformation method of target materials of the embodiment of the invention;
Fig. 4 is the schematic flow sheet of the rolling mill practice of each passage among Fig. 3;
Fig. 5 is the embodiment schematic diagram of the rolling mill practice of each passage among Fig. 3.
The specific embodiment
In existing plastic deformation method of target materials, comprise the multiple working procedure of multiple plastic deformation process combination, cause complex procedures and control inconvenience, the problem that cost is higher and working (machining) efficiency is low.In view of this, the present inventor has proposed a kind of full rolling mill practice, promptly under the situation of omitting some plastic deformation process, by the rolling mill practice of multi-pass, finishes the plastic deformation of target.
The embodiment of the invention provides a kind of plastic deformation method of target materials, as shown in Figure 2, comprises step:
S11 provides the metal materials and parts, and described metal materials and parts are aluminum or aluminum alloy;
S12 carries out the rolling mill practice of multi-pass to described metal materials and parts, is made into target;
S13 is to heat-treating through the target that forms behind the multi-pass rolling mill practice.
Can obtain meeting the target of performance requirement by above-mentioned plastic deformation method.Wherein, rolling purpose is to make the performance of target reach requirement, and heat treated purpose is to make performance meet the requirements of target to stablize, and performance no longer changes.
Below in conjunction with accompanying drawing the method shown in above-mentioned Fig. 2 is elaborated.
At first execution in step S11 provides metal materials and parts 20.As shown in Figure 3, in the present embodiment, described metal materials and parts 20 can be aluminium or aluminium alloy.In other embodiments, the metal materials and parts also can be copper or copper alloy, titanium or titanium alloy etc.
In actual applications, metal materials and parts 20 can be the parts after cutting off from ingot.The shape of metal materials and parts 20, actual requirement according to applied environment, sputtering equipment, can be in circle, rectangle, annular, taper shape or other analogous shapes (comprising regular shape and irregularly shaped) any, its thickness can not wait for 100mm to 300mm.As shown in Figure 3, demonstration is circular metal materials and parts 20.
Then execution in step S12 carries out the rolling mill practice of multi-pass to metal materials and parts 20, is made into target.
Rolling is under certain conditions, and the roll of rotation gives rolled piece with pressure, makes rolled piece produce a kind of processing mode of plastic deformation.The operation of rolling is a plurality of same diameters, all rotates with the roll of rotating speed, rolled piece only depend on roll active force (no external force) evenly motion finish rolling.The rolling title again of extending, roll, and is that the metal materials and parts bear compression by the slit of rotating roll shop building, and the process of extending takes place aspect length.
Rollingly can be divided into hot rolling and cold rolling.Usually, that carries out more than recrystallization temperature rollingly is called hot rolling, be lower than recrystallization temperature rolling be called cold rolling.In the present embodiment, adopt cold-rolling process that metal materials and parts 20 are rolled, therefore do not need metal materials and parts 20 are heated, promptly under the normal temperature state, metal materials and parts 20 are rolled.
In the present embodiment, described rolling mill practice utilizes milling train to come metal materials and parts 20 are rolled.Described milling train generally comprises roll, roll spacing adjusting device, transmission device and control system etc.
In actual applications, in conjunction with Fig. 4 and Fig. 5, the rolling mill practice of described each passage specifically comprises:
Step S20 regulates the roll spacing h between two roll 41a, 41b.In the present embodiment, milling train disposes symmetrically arranged two roll 41a, 41b up and down, the roll spacing h of the two (being clearance distance, is that the distance in two roll 41a, the 41b center of circle deducts the value that the diameter of roll obtains) is rolling aim parameter, and roll spacing h can set by the roll spacing adjusting device.
The roll spacing adjusting device is set roll spacing h according to drafts or rate of deformation, and wherein, drafts (mm) is defined as the total deflection of product, and promptly the original depth of product deducts the final thickness of product; Rate of deformation (mm/ time) is defined as the deflection of each passage rolled products.The rate of deformation of each passage can be identical, promptly can calculate rate of deformation according to drafts and rolling road number of times; The rate of deformation of each passage also can be different, promptly can set the deflection of each passage according to drafts and rolling road number of times respectively.
In addition, though be that example describes with two roll 41a, 42b about symmetrically arranged in the present embodiment, but not as limit, in other embodiments, the roll that milling train disposed can also be three, four, five or even more a plurality of, and described a plurality of rolls can be symmetrical arranged or arrange in regular turn setting up and down.
Step S21 delivers to metal materials and parts 20 between two roll 41a, the 41b.Utilize transmission device (indicate) metal materials and parts 20 can be delivered between two roll 41a, the 41b that milling train disposes, transmission device can be controlled metal materials and parts 20 and move back and forth.
Step S22 by the rotation of two roll 41a, 41b, is rolled metal materials and parts 20, sends the metal materials and parts or the target that meet described rolling aim parameter.Roll 41a, 41b are controlled by control system, can carry out clockwise or rotate counterclockwise, and the rotation direction of roll 41a, 41b can be identical, also can be different.In the present embodiment, as shown in Figure 5, roll 41a above the control system control rotates counterclockwise, roll 42a below the control system control clockwise rotates, by the rotation of two roller 41a, 41b up and down, the metal materials and parts of progressively transmission device being sent here 20 roll, and make metal materials and parts 20 roll attenuate under the pressing effect of roller 41a, 41b.
The rolling mill practice that repeats multi-pass is (in the present embodiment, be calendering technology), finally just metal materials and parts 20 can be rolled into required target 21 (as shown in Figure 3), the thickness of described target 21 is that 30mm～100mm, diameter are 300mm or the above target of 300mm.
Then execution in step S13 heat-treats the target 21 that forms behind the process multi-pass rolling mill practice.Wherein, heat treated temperature and temperature retention time are decided on material, institutional framework and the plastic deformation effect (being deformation rate) of target.In the present embodiment, please refer to Fig. 3, heat treatment specifically comprises: the target 21 behind rolling mill practice is placed annealing device 22 (for example heating furnace), have controlled atmosphere or protective atmosphere in described annealing device 22, for example inert gas; Temperature is increased to 200 ℃～600 ℃, and under described temperature, kept 0 hour～5 hours; Target 21 is carried out cooling processing, make it return back to normal temperature.Wherein, described cooling processing can adopt that stove is cold, air cooling or water-cooling pattern.
Above-mentioned plastic deformation method of target materials mainly is the calendering technology by multi-pass, produces the target that meets the plastic deformation process requirement, with respect to prior art, reduced the operation in the plastic deformation process, and made the target of making meet the plastic deformation process requirement, improved it and produce yield.
Citing an actual example below is further introduced the present invention, below is the processing step and the result of aluminium target plasticity deformation:
The diameter of supposing initial aluminum metal materials and parts is 180mm, and thickness is 60mm, and according to code requirement, the desired value of plastic deformation is that the diameter of target is 320mm, and thickness is 19mm.
For the ease of control and raising rolling efficiency and precision, according to drafts 60mm-19mm=41mm, the rate of deformation of setting each passage rolling mill practice is identical, as 1mm/ time, need carry out the rolling mill practice of 41 passages altogether.
Wherein the rolling mill practice of first passage comprises: the roll spacing of setting two rolls up and down that milling train disposed is 59mm; The aluminum metal materials and parts are delivered between described two rolls; By the rolling of two rolls, described aluminum metal materials and parts calendering is thinned to 59mm; Send the aluminum metal materials and parts.
The rolling mill practice of each passage comprises later on: 1mm is shortened in the roll spacing of two rolls up and down that milling train disposed, the aluminum metal materials and parts are delivered between described two rolls; By the rolling of two rolls, with described aluminum metal materials and parts calendering attenuate 1mm; Send aluminum metal materials and parts or target.
By the rolling mill practice of 41 passages, make the target of making meet the plastic deformation process requirement like this.
Then, to heat-treating, finally obtain the target product of plastic deformation through the target that forms behind the multi-pass rolling mill practice.
For large-scale target, rolling mill practice and Technology for Heating Processing combination by above-mentioned multi-pass can obtain meeting the target of technological requirement, and can guarantee the stability of product quality.
In sum, the plastic deformation method of target materials that technique scheme provided, be to make target by the calendering technology that carries out multi-pass, with respect to comprising multiple working procedures such as forging is stretched, static pressure, calendering, heat treatment in the prior art, under the situation that has reduced the operation in the plastic deformation process, produce and meet that plastic deformation process requires, provide cost savings, and improve it and produce yield.
Therefore,, can simplify the plastic deformation processing technology, and rolling mill practice is easy to control entirely, can reduce production costs, improves working (machining) efficiency by full rolling mill practice.
Though the present invention discloses as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (10)
1. a plastic deformation method of target materials is characterized in that, comprising:
The metal materials and parts are provided, and described metal materials and parts are aluminum or aluminum alloy;
Described metal materials and parts are carried out the rolling mill practice of multi-pass, be made into target.
2. plastic deformation method of target materials according to claim 1 is characterized in that, described rolling mill practice is cold rolling.
3. plastic deformation method of target materials according to claim 1 is characterized in that, carries out described rolling mill practice by milling train, and described milling train comprises symmetrically arranged two rolls up and down.
4. plastic deformation method of target materials according to claim 3 is characterized in that, the rolling mill practice of described each passage specifically comprises:
Regulate the roll spacing of two roll shop buildings, described roll spacing is rolling aim parameter;
The metal materials and parts are delivered between two rolls;
By the rotation of two rolls, described metal materials and parts are rolled, send the metal materials and parts or the target that meet described rolling aim parameter.
5. plastic deformation method of target materials according to claim 4 is characterized in that, described roll spacing is set according to drafts or rate of deformation.
6. plastic deformation method of target materials according to claim 4 is characterized in that, the direction of rotation of described two rolls.
7. plastic deformation method of target materials according to claim 1 is characterized in that, the thickness of described target is 30mm～100mm.
8. plastic deformation method of target materials according to claim 1 is characterized in that, the diameter of described target is 300mm or more than the 300mm.
9. plastic deformation method of target materials according to claim 1 is characterized in that, also comprises heat-treating through the target that forms behind the multi-pass rolling mill practice.
10. plastic deformation method of target materials according to claim 9 is characterized in that, described heat treated temperature is 200 ℃～600 ℃, and temperature retention time is 0 hour～5 hours.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910163727A CN101632998A (en) | 2009-08-14 | 2009-08-14 | Target plasticity deformation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910163727A CN101632998A (en) | 2009-08-14 | 2009-08-14 | Target plasticity deformation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101632998A true CN101632998A (en) | 2010-01-27 |
Family
ID=41592424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910163727A Pending CN101632998A (en) | 2009-08-14 | 2009-08-14 | Target plasticity deformation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101632998A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104694862B (en) * | 2013-12-09 | 2017-05-10 | 有研亿金新材料股份有限公司 | Preparation method of silver sputtering target blank |
| CN108097722A (en) * | 2017-12-08 | 2018-06-01 | 宁波江丰电子材料股份有限公司 | A kind of Al-Sc alloy target materials forming method |
| CN108607943A (en) * | 2016-12-09 | 2018-10-02 | 宁波江丰电子材料股份有限公司 | The forming method of forging method and target |
| CN110788146A (en) * | 2018-08-01 | 2020-02-14 | 合肥江丰电子材料有限公司 | Target material rolling device and rolling method |
| CN111001662A (en) * | 2018-10-08 | 2020-04-14 | 合肥江丰电子材料有限公司 | Monitoring method and monitoring system for rolling deformation of test target |
-
2009
- 2009-08-14 CN CN200910163727A patent/CN101632998A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104694862B (en) * | 2013-12-09 | 2017-05-10 | 有研亿金新材料股份有限公司 | Preparation method of silver sputtering target blank |
| CN108607943A (en) * | 2016-12-09 | 2018-10-02 | 宁波江丰电子材料股份有限公司 | The forming method of forging method and target |
| CN108097722A (en) * | 2017-12-08 | 2018-06-01 | 宁波江丰电子材料股份有限公司 | A kind of Al-Sc alloy target materials forming method |
| CN110788146A (en) * | 2018-08-01 | 2020-02-14 | 合肥江丰电子材料有限公司 | Target material rolling device and rolling method |
| CN111001662A (en) * | 2018-10-08 | 2020-04-14 | 合肥江丰电子材料有限公司 | Monitoring method and monitoring system for rolling deformation of test target |
| CN111001662B (en) * | 2018-10-08 | 2021-05-11 | 合肥江丰电子材料有限公司 | Monitoring method and monitoring system for rolling deformation of test target |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101632998A (en) | Target plasticity deformation method | |
| CN104786021A (en) | Bearing ring forging technology | |
| CN104178714B (en) | A kind of rolling is in conjunction with the processing unit (plant) of roll extrusion process magnesium alloy plate and method | |
| US11618066B2 (en) | Hot and cold composite formed square and rectangular steel tube with thickened corners and production method | |
| CN109079072A (en) | Large-scale TC4 alloy rings structural homogenity forging method | |
| CN103045978B (en) | Preparation method of TCl8 titanium alloy plate | |
| CN103834924A (en) | Method for preparing ultra-high purity aluminium and ultra-high purity aluminium alloy sputtering target material | |
| CN109468561A (en) | A kind of preparation method of GH3625 alloy strip steel rolled stock | |
| CN103230969A (en) | Heat-assisted variable-section roll forming machine system and method thereof | |
| CN104226684A (en) | Cold rolling process of Ti2AlNb-based alloy foil with thickness of 0.1 mm | |
| CN105624591A (en) | Manufacturing method for aluminum targets | |
| CN101758150B (en) | Rolling formation method of large and medium high-temperature alloy hollow disc-shaped forge piece | |
| CN104233136A (en) | Production process for obtaining copper alloy strip with uniform and small grains | |
| CN207463813U (en) | A kind of miniature heated type four-roller sheet moulding device | |
| CN106064221B (en) | A kind of forging technology of GCr15 rollers set | |
| CN101758151B (en) | Rolling formation method of large and medium titanium alloy solid disc-shaped forge piece | |
| CN105483626B (en) | A kind of production method of fine grain planar molybdenum target material | |
| CN101569898A (en) | Manufacture method of target material | |
| CN101649439B (en) | Plastic deformation method of target materials | |
| CN107442670A (en) | A kind of method for rolling square billet aligning | |
| CN114178456A (en) | Forging processing method for oversized titanium alloy forging stock | |
| CN1208142C (en) | Three-roller rotary rolling processing method for copper pipe blank | |
| CN101804438B (en) | Roll forming method of large and medium-size aluminum alloy hollow disk-shaped forgings | |
| CN101791667B (en) | Roll forming method of large and medium high-temperature alloy solid disk forging | |
| CN101701328A (en) | Plastic deforming method of sputtering target material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20100127 |