CN101701328A - Plastic deforming method of sputtering target material - Google Patents
Plastic deforming method of sputtering target material Download PDFInfo
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- CN101701328A CN101701328A CN200910211712A CN200910211712A CN101701328A CN 101701328 A CN101701328 A CN 101701328A CN 200910211712 A CN200910211712 A CN 200910211712A CN 200910211712 A CN200910211712 A CN 200910211712A CN 101701328 A CN101701328 A CN 101701328A
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Abstract
The invention provides a plastic deforming method of a sputtering target material, comprising the following steps of: providing a metal material which is aluminous or aluminium alloy; preheating the metal material; and performing a large-deformation calendering technology on the metal material in multiple steps, wherein the calendering quantity in each step is 10% to 20% of the required total calendering quantity. Compared with the prior art, the plastic deforming method of the sputtering target material reduces the processes of a plastic deforming technology and particularly ensures the fabricated sputtering target material to have small grain size and uniform distribution and accord with the requirements of the plastic deforming technology through the large-deformation calendering technology.
Description
Technical field
The present invention relates to sputtering target material and make the field, relate in particular to the plastic deformation method of sputtering target material.
Background technology
Physical vapor deposition (Physical Vapor Deposition; PVD) be one of the technology of most critical in semi-conductor chip and the TFT-LCD production process, PVD is that semi-conductor chip production and TFT-LCD prepare one of most important starting material in the course of processing with the splash-proofing sputtering metal target, and wherein the consumption maximum is ultra-pure aluminum and ultra-pure aluminum alloy sputtering target.
Wherein, the metal materials and parts that are used as sputtering target material need pass through certain viscous deformation complete processing, could realize the weave construction control of metal materials and parts, thereby produce the metal sputtering target that meets the plastic deformation process requirement.Notification number is the method for sputter target material of having introduced a kind of controllability plastic working equipment of application of air hammer in 100420757 the Chinese patent.
Traditional plastic deformation process, viscous deformation complete processing with metallic aluminium is an example, and described technology specifically comprises multiple working procedures such as forging is stretched, static pressure, calendering, thermal treatment, and each procedure wherein is more complicated all, need specific processing condition (for example equipment etc.), be difficult to control; Therefore in addition, because the crystal grain in the metallic aluminium is face-centred cubic structure, crystal grain wherein multidirectional skew may occur under the stressed situation of calendering, causes the big and crystal grain skewness of grain fineness number.Therefore, the viscous deformation complete processing stepping in the conventional art causes production cost higher, and the yield rate of the more feasible sputtering target material that is processed to form (particularly for large-sized sputtering target material) is lower.
Summary of the invention
The object of the present invention is to provide a kind of plastic deformation method of sputtering target material, solve the prior art processes complexity, grain fineness number is bigger and problem pockety.
For addressing the above problem, the invention provides a kind of plastic deformation method of sputtering target material, it comprises: the metal materials and parts are provided, and described metal materials and parts are aluminium or aluminium alloy; Described metal materials and parts are carried out thermal pretreatment; Described metal materials and parts are carried out the gross distortion calendering technology of multi-pass, and the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount.
Alternatively, the gross distortion calendering technology of described each passage specifically comprises: the metal materials and parts are placed on the board of rolling press; Mobile machine console is delivered to the metal materials and parts between a plurality of rollers that described rolling press disposes, and the roll spacing of described roller is set at the calendering aim parameter; By the rolling of roller, described metal materials and parts are rolled, send the metal materials and parts or the sputtering target material that meet described calendering aim parameter.
Alternatively, described gross distortion calendering technology is to carry out with the clockwise direction or the counter clockwise direction of metal materials and parts.
Alternatively, described gross distortion calendering technology adopts square crossing calendering mode.
Alternatively, described square crossing calendering mode refers to that specifically the rolling direction of the gross distortion calendering technology of adjacent two passages differs 90 degree.
Alternatively, described square crossing calendering mode refers to that specifically the gross distortion calendering technology of the gross distortion calendering technology of last passage and other multi-pass before differs 90 degree on rolling direction, and the rolling direction of the gross distortion calendering technology of described other multi-pass before is identical.
Alternatively, the calendering amount of described metal materials and parts in described gross distortion calendering technology accounts for 60% of described calendering total amount, and the calendering amount in the gross distortion calendering technology of each passage accounts for 15% of described calendering total amount.
Alternatively, the calendering amount of the gross distortion calendering technology of each passage is greater than 5 millimeters.
Alternatively, after carrying out the gross distortion calendering technology, also comprise the small deformation calendering technology that carries out multi-pass, make described metal materials and parts reach required calendering amount.
Alternatively, the calendering amount of each passage small deformation calendering technology is 2 millimeters to 5 millimeters.
Alternatively, after carrying out calendering technology, also comprise target step of heat treatment through forming behind the multi-pass calendering technology.
Alternatively, in the described sputtering target material purity of aluminium greater than 99.9%.
Alternatively, the grain fineness number of described sputtering target material is less than 300 microns.
Compared with prior art, the plastic deformation method of sputtering target material provided by the present invention has reduced the operation in the plastic deformation process, more less and be evenly distributed by the grain fineness number of the sputtering target material that adopts the gross distortion calendering technology to make to make, produce the sputtering target material that meets the plastic deformation process requirement.
Description of drawings
Fig. 1 is the plastic deformation method schematic flow sheet in the first embodiment of sputtering target material of the present invention;
Fig. 2 is the plastic deformation method of the sputtering target material of the present invention structural representation of metal materials and parts in the first embodiment;
Fig. 3 is the gross distortion calendering technology schematic flow sheet in the first embodiment of each passage among the step S12 among Fig. 1;
Fig. 4 is the enforcement synoptic diagram of the gross distortion calendering technology of each passage among Fig. 3;
Fig. 5 a, 5b are the roller configuration schematic diagram in other embodiments that is applied in rolling press in the plastic deformation method of sputtering target material of the present invention;
Fig. 6 is the plastic deformation method enforcement synoptic diagram in the first embodiment of sputtering target material of the present invention;
Fig. 7 is the plastic deformation method of the sputtering target material of the present invention enforcement synoptic diagram of the rolling direction of the gross distortion calendering technology of multi-pass in the first embodiment;
Fig. 8 has shown the schematic flow sheet of plastic deformation method in second embodiment of sputtering target material of the present invention;
Fig. 9 is the enforcement synoptic diagram of plastic deformation method rolling direction of the gross distortion calendering technology of multi-pass in second embodiment of sputtering target material of the present invention.
Embodiment
The present inventor's discovery, in the plastic deformation method of existing sputtering target material, complex procedures, and in calender line, make the aluminum or aluminum alloy sputtering target material unordered multi-direction skew occur, cause the big and crystal grain skewness of grain fineness number.In view of this, so propose under the situation of omitting some operations, to adopt gross distortion calendering technology multi-pass, that the calendering amount is bigger, finish the viscous deformation of target.Therefore, according to an aspect of the present invention, provide a kind of plastic deformation method of sputtering target material.
The present inventor proposes a kind of plastic deformation method of sputtering target material.Fig. 1 has shown the plastic deformation method schematic flow sheet in the first embodiment of sputtering target material of the present invention.As shown in Figure 1, described plastic deformation method comprises step:
S10 provides the metal materials and parts, and described metal materials and parts are aluminium or aluminium alloy;
S11 carries out thermal pretreatment to the metal materials and parts;
S12 carries out the gross distortion calendering technology of multi-pass to the metal materials and parts, and the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount;
S13 heat-treats the target behind the excessive deformation calendering technology.
Below in conjunction with accompanying drawing the making method shown in above-mentioned Fig. 1 is elaborated.
At first performing step S10 provides metal materials and parts 20, as shown in Figure 2.In the present embodiment, aluminium or aluminium alloy that described metal materials and parts 20 can be high purity or ultra-high purity, its purity for example is 3N5 (99.95%), 4N5 (99.995%) or 5N (99.999%) greater than 99.9%.In actual applications, metal materials and parts 20 can be the parts after cutting off from ingot metal.The shape of metal materials and parts 20 according to the actual requirement of applied environment, sputtering equipment, can be in circle, rectangle, annular, taper shape or other analogous shapes (comprising regular shape and irregularly shaped) any; In addition, metal materials and parts 20 its thickness can not wait to 100 millimeters for 1 millimeter (mm).As shown in Figure 2, demonstration is circular metal materials and parts 20.
Then performing step S11 carries out thermal pretreatment to metal materials and parts 20.
In actual applications, described thermal pretreatment specifically comprises: metal materials and parts 20 are placed thermal treatment unit, have controlled atmosphere or protective atmosphere in described thermal treatment unit, for example rare gas element; Temperature is increased to 500 ℃ to 600 ℃, and under described temperature, kept 3 hours to 5 hours; Metal materials and parts 20 are carried out cooling process, make it restore to normal temperature.Wherein, described cooling process can adopt traditional air cooling mode or water-cooling pattern, does not repeat them here.
By the thermal pretreatment of step S11, can change the weave construction of metal materials and parts 20 inside, make metal materials and parts 20 eliminate stress and softened, improve its plasticity, for follow-up calendering technology is laid a good foundation.
Follow performing step S12, the metal materials and parts are carried out the gross distortion calendering technology of multi-pass.The present inventor has creatively proposed to produce bigger calendering amount gross distortion calendering technology, makes the calendering amount of gross distortion calendering technology of each passage can account for 10% to 20% of required calendering total amount.
Described gross distortion calendering technology utilizes rolling press to come metal materials and parts 20 are rolled.Described rolling press generally is made up of roller, frame, roll spacing setting device, roller setting device, transmission mechanism, oiling system and Controlling System etc.
In actual applications, in conjunction with Fig. 3 and Fig. 4, the gross distortion calendering technology of described each passage specifically comprises: step S120 places metal materials and parts 20 on the board 31 of rolling press 30.In the present embodiment, board 31 is horizontally disposed platen structure, and can utilize transmission mechanism (not illustrating in the drawings) to control board 31 to move back and forth.
Step S122, mobile machine console 31 is delivered to metal materials and parts 20 between a plurality of rollers that rolling press 30 disposed, and can roll after described roller is controlled.In the present embodiment, rolling press 30 disposes symmetrically arranged two roller 32a, 32b up and down, the line in the center of circle of two roller 32a, 32b is the vertical direction perpendicular with horizontal direction, and the roll spacing of the two (promptly the distance in two roller 32a, the 32b center of circle deducts the value that the diameter of two roller 32a, 32b obtains respectively) is as the calendering aim parameter.Described calendering aim parameter can not set by roll spacing setting device (indicating).
We easily know, because the crystal grain in the metallic aluminium is face-centred cubic structure, crystal grain wherein multidirectional skew may occur under stressed situation, when therefore adopting the small deformation calendering technology of the less multi-pass of calendering amount in the prior art, the skew of different directions all may appear in the metal materials and parts of aluminum or aluminum alloy in the calender line of the small deformation calendering technology of multi-pass.And the passage at the small deformation calendering technology is got over for a long time, and it is disorderly irregular that the metal materials and parts of aluminum or aluminum alloy seem in skew more, causes the crystal grain skewness; Have again, when adopting the small deformation calendering technology of the less multi-pass of calendering amount, pressure during calendering is less, particularly the power that is subjected to of the middle portion relative two relative Outboard Sections of the metal materials and parts of described aluminum or aluminum alloy is much smaller, described pressure is difficult to maybe can not be delivered to the middle portion of described metal materials and parts, so easily causes the grain fineness number in the described metal materials and parts bigger.And in the present embodiment, described calendering aim parameter accounts for 10% to 20% of required calendering total amount, make that the calendering amount of metal materials and parts 20 in gross distortion calendering technology each time is enough big, realize bigger distortion, can guarantee that the crystal grain distribution is even as much as possible and grain fineness number is less relatively, be less than 300 microns, even can reach about 150 microns.
In addition, though be that example describes with two roller 32a, 32b about symmetrically arranged in the present embodiment, but not as limit, in other embodiments, the roller that rolling press disposed can also be three, four, five or even more a plurality of, and described a plurality of rollers can be symmetrical arranged or arrange in regular turn setting (shown in Fig. 5 a, 5b) on the reference line up and down.
Step S124 by the rolling of described roller, rolls metal materials and parts 20, sends the metal materials and parts or the sputtering target material that meet described calendering aim parameter.In the present embodiment, be exactly by the rolling of two roller 32a, 32b up and down, progressively will roll by the metal materials and parts of sending here on the board 31 20, make metal materials and parts 20 under the pressing effect of roller 32a, 32b, roll attenuate.
Repeat the gross distortion calendering technology of multi-pass, finally just metal materials and parts 20 can be rolled into required sputtering target material 21 (as shown in Figure 6).
Need to prove, wherein behind the gross distortion calendering technology of each passage, need reset roll spacing between roller 32a, the 32b by described roll spacing setting device.In actual applications, described roll spacing can realize by direct target setting calendering amount, but not as limit, also can realize by the calendering amount of setting every time, the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount, the calendering amount of for example described metal materials and parts in described gross distortion calendering technology accounts for 60% of described calendering total amount, and the calendering amount in the gross distortion calendering technology of each passage accounts for 15% of described calendering total amount.
In addition, the gross distortion calendering technology of described multi-pass adopts square crossing calendering mode, for example can be that the rolling direction of the gross distortion calendering technology of adjacent two passages differs 90 degree; The gross distortion calendering technology that also can be the gross distortion calendering technology of last passage and other multi-pass before differs 90 degree on rolling direction, the rolling direction of the gross distortion calendering technology of described other multi-pass before is identical.The square crossing calendering modes that differ 90 degree with the rolling direction of the gross distortion calendering technology of adjacent two passages are example, in the gross distortion calendering technology of each passage, all be that metal materials and parts 20 are sent into roller 32a, 32b with certain angle promptly, and the preceding relatively gross distortion calendering technology together of the gross distortion calendering technology of back a time clockwise (also being suitable for counterclockwise) is sent metal materials and parts 20 into roller 32a, 32b after revolving and turning 90 degrees again, makes the gross distortion calendering technology of front and back two passages form square crossing all the time.
Then performing step S13 heat-treats the sputtering target material 40 that forms behind the process gross distortion calendering technology of multi-pass.In the present embodiment, step S13 and step S12 are similar, specifically comprise: will place thermal treatment unit through the sputtering target material behind the gross distortion calendering technology 40, and have controlled atmosphere or protective atmosphere in described thermal treatment unit, for example rare gas element; Temperature is increased to 500 ℃ to 600 ℃ (preferably, being 550 ℃ to 570 ℃), and under described temperature, kept 5 hours to 8 hours; Sputtering target material 20 is carried out cooling process, make it return back to normal temperature.Wherein, described cooling process can adopt air cooling mode or water-cooling pattern.
The plastic deformation method of above-mentioned sputtering target material, mainly be gross distortion calendering technology by multi-pass, the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount, produce the sputtering target material that meets the plastic deformation process requirement, with respect to prior art, on the basis of the operation in reducing plastic deformation process, the grain fineness number of the feasible sputtering target material of making is less and be evenly distributed the quality of the sputtering target material that raising is produced.
Below in conjunction with preferred embodiment the plastic deformation method in the first embodiment of the invention is further described.
Embodiment:
Following processing step and the result who carries out viscous deformation for the aluminium of 4N5 or 5N:
Suppose that the initial thickness to the aluminum metal materials and parts is 90 millimeters, according to code requirement, the target value of viscous deformation is 56 millimeters.
(1) the aluminum metal materials and parts is carried out thermal pretreatment; Change the weave construction of metal materials and parts 20 inside, make metal materials and parts 20 eliminate stress and softened, improve its plasticity.
(2) the aluminum metal materials and parts are carried out the gross distortion calendering technology of multi-pass, be made into sputtering target material;
The gross distortion calendering technology of each passage wherein comprises: earlier the aluminum metal materials and parts are placed on the board of rolling press; Mobile machine console is delivered to the aluminum metal materials and parts between the roller that described rolling press disposes; By the rolling of roller, described aluminum metal materials and parts are rolled.
Here, described gross distortion calendering technology carries out in a clockwise direction, carries out four-pass altogether, and the rolling direction of the gross distortion calendering technology of adjacent two passages differs 90 degree, forms cross (as shown in Figure 7).
In concrete the application, in the gross distortion calendering technology of described four-pass, the calendering amount that can set the gross distortion calendering technology of each passage is (90-56)/4=8.5 millimeter, makes the sputtering target material of making meet the plastic deformation process requirement.
Through (2), can roll and be made into sputtering target material.
(3) to heat-treating, finally obtain the product of viscous deformation through the sputtering target material that forms behind the gross distortion calendering technology of multi-pass.
In the above-described first embodiment, in the plastic deformation method of sputtering target material, with and only used the gross distortion calendering technology, but not as limit, in other embodiments, also can adopt the gross distortion calendering technology to combine with traditional small deformation calendering technology.
Fig. 8 has shown the schematic flow sheet of plastic deformation method in second embodiment of sputtering target material of the present invention.As shown in Figure 2, described plastic deformation method comprises step:
S20 provides the metal materials and parts, and described metal materials and parts are aluminium or aluminium alloy;
S22 carries out thermal pretreatment to the metal materials and parts;
S24 carries out the gross distortion calendering technology of multi-pass to the metal materials and parts, and the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount;
S26 carries out the small deformation calendering technology of multi-pass to described metal materials and parts;
S28 is to heat-treating through the target that forms behind the calendering technology.
Compare with first embodiment, in second embodiment, except adopting the gross distortion calendering technology, also additionally adopted the small deformation calendering technology.Described small deformation calendering technology is than the gross distortion calendering technology, and its applied pressure is less, and the calendering amount of generation is also corresponding less, is generally 2 millimeters to 5 millimeters.Combination by gross distortion calendering technology and small deformation calendering technology can not only adapt to the requirement of various calendering total amounts, can also further reduce the grain fineness number of sputtering target material, improves the homogeneity that crystal grain distributes.
Below in conjunction with preferred embodiment the plastic deformation method in the second embodiment of the invention is further described.
Embodiment:
Following processing step and the result who carries out viscous deformation for the aluminium of 4N5 or 5N:
Suppose that the initial thickness to the aluminum metal materials and parts is 90 millimeters, according to code requirement, the target value of viscous deformation is 56 millimeters.
(1) the aluminum metal materials and parts is carried out thermal pretreatment; Change the weave construction of metal materials and parts 20 inside, make metal materials and parts 20 eliminate stress and softened, improve its plasticity.
(2) the aluminum metal materials and parts are carried out the gross distortion calendering technology of multi-pass;
The gross distortion calendering technology of each passage wherein comprises: earlier the aluminum metal materials and parts are placed on the board of rolling press; Mobile machine console is delivered to the aluminum metal materials and parts between the roller that described rolling press disposes; By the rolling of roller, described aluminum metal materials and parts are rolled.
Here, described gross distortion calendering technology carries out in a clockwise direction, carry out four-pass altogether, wherein the rolling direction of the gross distortion calendering technology of previous three passes is identical, and the gross distortion calendering technology of the gross distortion calendering technology of four-pass and previous three passes differs 90 degree (as shown in Figure 9) on rolling direction.
In concrete the application, in the gross distortion calendering technology of described four-pass, the calendering amount that can set the gross distortion calendering technology of each passage is 6 millimeters.Through behind the gross distortion calendering technology of four-pass, the thickness of described aluminum metal materials and parts becomes 90-6 * 4=66 millimeter like this.
(3) to carry out the small deformation calendering technology of multi-pass again through the aluminum metal materials and parts of excessive deformation calendering technology;
The small deformation calendering technology of each passage wherein comprises: earlier the aluminum metal materials and parts are placed on the board of rolling press; Mobile machine console is delivered to the aluminum metal materials and parts between the roller that described rolling press disposes; By the rolling of roller, described aluminum metal materials and parts are rolled.
Described small deformation calendering technology carries out in a clockwise direction, carries out four-pass altogether, and the rolling direction of the small deformation calendering technology of adjacent two passages differs 90 degree, forms cross.Certainly, in the small deformation calendering technology of described four-pass, also can be similar to Fig. 9 here,, wherein the rolling direction of the small deformation calendering technology of previous three passes is identical, and the small deformation calendering technology of the small deformation calendering technology of four-pass and previous three passes differs 90 degree on rolling direction.Because described small deformation calendering technology and described gross distortion calendering technology are similar, so do not give unnecessary details at this.
In concrete the application, in the small deformation calendering technology of described four-pass, the calendering amount that can set the small deformation calendering technology of each passage is (66-56)/4=2.5 millimeter, makes the sputtering target material of making meet the plastic deformation process requirement.
Through (3), can roll and be made into sputtering target material.
(3) to heat-treating, finally obtain the product of viscous deformation through the sputtering target material that forms behind the small deformation calendering technology of multi-pass.
The plastic deformation method of sputtering target material provided by the present invention, mainly be to adopt the gross distortion calendering technology that carries out multi-pass to make sputtering target material, under the situation that has reduced the operation in the plastic deformation process, with respect to because of the less prior art that easily causes the inferior quality of sputtering target material of calendering amount in the calendering technology, can make that the sputtering target material of producing meets processing requirement, its grain fineness number is less and be evenly distributed the raising product quality.
Though oneself discloses the present invention as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (13)
1. the plastic deformation method of a sputtering target material is characterized in that, comprising:
The metal materials and parts are provided, and described metal materials and parts are aluminium or aluminium alloy;
Described metal materials and parts are carried out thermal pretreatment;
Described metal materials and parts are carried out the gross distortion calendering technology of multi-pass, and the calendering amount of the gross distortion calendering technology of each passage accounts for 10% to 20% of required calendering total amount.
2. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, the gross distortion calendering technology of described each passage specifically comprises:
The metal materials and parts are placed on the board of rolling press;
Mobile machine console is delivered to the metal materials and parts between a plurality of rollers that described rolling press disposes, and the roll spacing of described roller is set at the calendering aim parameter;
By the rolling of roller, described metal materials and parts are rolled, send the metal materials and parts or the sputtering target material that meet described calendering aim parameter.
3. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, described gross distortion calendering technology is with the clockwise direction of metal materials and parts or counterclockwise carries out.
4. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, described gross distortion calendering technology adopts square crossing calendering mode.
5. the plastic deformation method of sputtering target material according to claim 4 is characterized in that, described square crossing calendering mode refers to that specifically the rolling direction of the gross distortion calendering technology of adjacent two passages differs 90 degree.
6. the plastic deformation method of sputtering target material according to claim 4, it is characterized in that, described square crossing calendering mode refers to that specifically the gross distortion calendering technology of the gross distortion calendering technology of last passage and other multi-pass before differs 90 degree on rolling direction, and the rolling direction of the gross distortion calendering technology of described other multi-pass before is identical.
7. the plastic deformation method of sputtering target material according to claim 1, it is characterized in that, the calendering amount of described metal materials and parts in described gross distortion calendering technology accounts for 60% of described calendering total amount, and the calendering amount in the gross distortion calendering technology of each passage accounts for 15% of described calendering total amount.
8. according to the plastic deformation method of claim 1 or 7 described sputtering target materials, it is characterized in that the calendering amount of the gross distortion calendering technology of each passage is greater than 5 millimeters.
9. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, also comprises the small deformation calendering technology that carries out multi-pass after carrying out the gross distortion calendering technology, makes described metal materials and parts reach required calendering amount.
10. the plastic deformation method of sputtering target material according to claim 9 is characterized in that, the calendering amount of each passage small deformation calendering technology is 2 millimeters to 5 millimeters.
11. the plastic deformation method according to claim 1 or 9 described sputtering target materials is characterized in that, also comprises after carrying out calendering technology the sputtering target material step of heat treatment through forming behind the multi-pass calendering technology.
12. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, the purity of aluminium is greater than 99.9% in the described sputtering target material.
13. the plastic deformation method of sputtering target material according to claim 1 is characterized in that, the grain fineness number of described sputtering target material is less than 300 microns.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111421063A (en) * | 2020-04-10 | 2020-07-17 | 宁波江丰电子材料股份有限公司 | Pot-shaped target material processing and forming method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111421063A (en) * | 2020-04-10 | 2020-07-17 | 宁波江丰电子材料股份有限公司 | Pot-shaped target material processing and forming method |
| CN111421063B (en) * | 2020-04-10 | 2022-02-18 | 宁波江丰电子材料股份有限公司 | Pot-shaped target material processing and forming method |
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Open date: 20100505 |