CN101550587A - Furnace cover structure of single crystal furnace - Google Patents
Furnace cover structure of single crystal furnace Download PDFInfo
- Publication number
- CN101550587A CN101550587A CNA2009100308929A CN200910030892A CN101550587A CN 101550587 A CN101550587 A CN 101550587A CN A2009100308929 A CNA2009100308929 A CN A2009100308929A CN 200910030892 A CN200910030892 A CN 200910030892A CN 101550587 A CN101550587 A CN 101550587A
- Authority
- CN
- China
- Prior art keywords
- neck
- interior
- furnace
- lid
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 25
- 238000003466 welding Methods 0.000 claims description 23
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 241000370738 Chlorion Species 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a furnace cover structure of a single crystal furnace, comprising a cover body and a furnace neck connected with the cover body; the lower end of the cover body is provided with a lower connecting device and the upper end of the furnace neck is provided with an upper connecting device; the cover body comprises an outer cover body and an inner cover body which are arranged at interval; the furnace neck comprises an inner furnace neck and an outer furnace neck which is arranged with the inner furnace at interval; the upper end of the outer furnace neck and the upper end of the inner furnace neck are respectively welded and fixed with the upper connecting device; the lower end of the inner furnace neck is welded and fixed with the inner cover body; the outer cover body is welded and fixed with the outer furnace neck; the end part of the outer cover body welded with the outer furnace neck extends into a gap of the inner furnace neck and the outer furnace neck and is contacted with the outer wall surface of the inner furnace neck; and the inner cover body and the lower end of the outer cover body are respectively welded and fixed with the lower connecting device. The furnace cover structure of the single crystal furnace has the advantage of long service life.
Description
Technical field
The present invention relates to the melting single crystal growing furnace, be specifically related to the assembly method of a kind of furnace bottom plate of single crystal furnace and electrode sleeve.
Background technology
The major part of semiconductor silicon single crystal is all with cutting krousky (Czochralski) manufactured.In this method, polysilicon is put in the quartz crucible, heat fused then, will melt silicon and slightly do cooling, give certain condensate depression, the silicon single crystal of a particular crystal orientation (being called seed crystal) contact with refining body silicon, and temperature by adjusting melt and the seed crystal pulling speed that makes progress is grown up when close-target props up directly seed body, improve pulling speed, make the nearly permanent growth in thickness of single crystal.In the last stage of process of growth, the interior silicon melt not completely dissolve as yet of crucible this moment, by the heat supplied that increases the crystalline pulling speed and adjust crystal diameter is reduced to form a tail cone body gradually to the whirlpool, when enough hour of slipping of cone, crystal will break away from the refining body, thereby finishes the crystalline process of growth.
For the single crystal growing furnace of melting polysilicon, they are made up of furnace bottom, time furnace chamber, last furnace chamber, bell, perble range and concubine six major parts.This wherein because bell needs to cool off in the course of the work, adopts water-cooled mode usually, and in process of cooling, the chlorion in the water can produce corrosion by butt welded seam, therefore, can cause shorten the work-ing life of bell.
Summary of the invention
At above-mentioned technical problem, the purpose of this invention is to provide a kind of furnace cover structure of single crystal furnace of long service life.
The technical scheme that realizes the inventive method is as follows:
Furnace cover structure of single crystal furnace, comprise lid and the neck that is connected with lid, the lid lower end is provided with lower connecting device, the neck upper end is provided with coupling device, described lid comprises outer cover and interior lid, outer cover and interior lid are provided with at interval, in neck comprises neck and with this in the outer neck that is provided with at interval of neck, outer neck upper end and interior neck upper end are fixing with last coupling device welding respectively, interior neck lower end and the welding of interior lid are fixing, described outer cover is fixing with outer neck welding, in the end of this outer cover and the welding of outer neck extends to, contact in the gap of outer neck and with the outside wall surface of interior neck, described interior lid and outer cover lower end are fixing with the lower connecting device welding respectively.
Described outer neck is provided with gas pipe line, and this gas pipe line is communicated with interior neck.
Described outer cover is provided with viewing window, and this viewing window is communicated with interior lid.
Described outer cover is provided with survey through the instrument window, and this survey is communicated with interior lid through the instrument window.
Described upward coupling device is a ring flange, and the lower surface of this ring flange is provided with interior connection section that is connected with interior neck and the outer connection section that is connected with outer neck, and interior connection section and outer connection section are spaced apart by the ring groove that is provided with on the ring flange.
Described upper surface of going up coupling device is provided with a boss that protrudes from this upper surface.
Described lower connecting device is a joint flange.
Adopted such scheme, outer cover and interior lid are provided with at interval, in neck comprises neck and with this in the outer neck that is provided with at interval of neck, outer neck upper end and interior neck upper end are fixing with last coupling device welding respectively, interior neck lower end and the welding of interior lid are fixing, described outer cover is fixing with outer neck welding, this outer cover and the end of outer neck welding extend in the gap of inside and outside neck and with the outside wall surface of interior neck and contacts, described in lid and outer cover lower end fix with the lower connecting device welding respectively.After two-sided welding on lid in of the present invention and the neck, remove the weld seam slit of inwall water interlayer side, prevent that the chlorion in the water coolant from producing crevice corrosion in the commissure, can prolong the work-ing life of bell like this.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the sectional structure chart of Fig. 1;
In the accompanying drawing, 10 is outer cover, and 11 is interior lid, 12 is viewing window, and 13 for surveying through the instrument window, and 20 is interior neck, 21 is outer neck, and 22 is gas pipe line, and 30 is lower connecting device, 301 is interior connection section, and 302 is outer connection section, and 303 is ring groove, 40 is last coupling device, and 41 is interior connection section, and 42 is outer connection section, 43 is ring groove, and 44 is boss.
Embodiment
With reference to Fig. 1 and Fig. 2, furnace cover structure of single crystal furnace of the present invention comprises lid and the neck that is connected with lid, and the lid lower end is provided with lower connecting device 30, and the neck upper end is provided with coupling device 40.Lid adopts stainless material to make, and lid comprises outer cover 10 and interior lid 11, and outer cover 10 is provided with at interval with interior lid 11, and the spacing at this interval is 20mm.In neck comprises neck 20 and with this in the outer neck 21 that is provided with at interval of neck, the spacing distance between outer neck and the interior neck is 20mm.Outer neck 21 is provided with gas pipe line 22, and this gas pipe line 22 is communicated with interior neck, and gas pipe line 22 is used for argon gas and is passed into interior neck.Outer neck 21 upper ends and interior neck 20 upper ends are fixing with last coupling device 40 welding respectively, interior neck 20 lower ends and 11 welding of interior lid are fixing, outer cover 10 is fixing with outer neck welding, last coupling device 40 is a ring flange, the lower surface of this ring flange is provided with interior connection section 41 that is connected with interior neck and the outer connection section 42 that is connected with outer neck, interior connection section and outer connection section are spaced apart by the ring groove 43 that is provided with on the ring flange, the space, interval between ring groove 43 and outer neck and the interior neck over against.The upper surface of last coupling device is provided with a boss 44 that protrudes from this upper surface, and this boss is used for cooperating with connection section on the concubine ring flange and forming a fixed connection.
Interior neck 20 lower ends and interior lid 11 are fixedlyed connected by welding process, described outer cover 10 and outer neck 21 are fixedlyed connected by welding process, the end that this outer cover 10 is connected with outer neck 20 extends in the gap of inside and outside neck and with the outside wall surface of interior neck 20 and contacts, described in lid 11 and outer cover 10 lower ends fixedly connected by welding process with lower connecting device 30 respectively.Lower connecting device 30 is a joint flange, and the interior connection section 301 that the upper surface of this lower connecting device is formed for the outer connection section 302 that welds with outer cover 10 and is used for welding with interior lid 11 separates by ring groove 303 between outer connection section and the interior connection section.Outer lid body 10 is provided with viewing window 12, and this viewing window is communicated with interior lid, viewing window comprise forms and with the transparent glass of this forms sealing and fixing, see through glass and can observe the intravital situation of stove.Outer cover 10 is provided with survey through instrument window 13, and this survey is communicated with interior lid through the instrument window.
Claims (7)
1. furnace cover structure of single crystal furnace, comprise lid and the neck that is connected with lid, the lid lower end is provided with lower connecting device, the neck upper end is provided with coupling device, it is characterized in that: described lid comprises outer cover and interior lid, outer cover and interior lid are provided with at interval, in neck comprises neck and with this in the outer neck that is provided with at interval of neck, outer neck upper end and interior neck upper end are fixing with last coupling device welding respectively, interior neck lower end and the welding of interior lid are fixing, described outer cover is fixing with outer neck welding, in the end of this outer cover and the welding of outer neck extends to, contact in the gap of outer neck and with the outside wall surface of interior neck, described interior lid and outer cover lower end are fixing with the lower connecting device welding respectively.
2. furnace cover structure of single crystal furnace according to claim 1 is characterized in that: described outer neck is provided with gas pipe line, and this gas pipe line is communicated with interior neck.
3. furnace cover structure of single crystal furnace according to claim 1 is characterized in that: described outer cover is provided with viewing window, and this viewing window is communicated with interior lid.
4. furnace cover structure of single crystal furnace according to claim 1 is characterized in that: described outer cover is provided with survey through the instrument window, and this survey is communicated with interior lid through the instrument window.
5. furnace cover structure of single crystal furnace according to claim 1, it is characterized in that: described upward coupling device is a ring flange, the lower surface of this ring flange is provided with interior connection section that is connected with interior neck and the outer connection section that is connected with outer neck, and interior connection section and outer connection section are spaced apart by the ring groove that is provided with on the ring flange.
6. furnace cover structure of single crystal furnace according to claim 5 is characterized in that: described upper surface of going up coupling device is provided with a boss that protrudes from this upper surface.
7. furnace cover structure of single crystal furnace according to claim 1 is characterized in that: described lower connecting device is a joint flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100308929A CN101550587A (en) | 2009-04-20 | 2009-04-20 | Furnace cover structure of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100308929A CN101550587A (en) | 2009-04-20 | 2009-04-20 | Furnace cover structure of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101550587A true CN101550587A (en) | 2009-10-07 |
Family
ID=41155068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100308929A Pending CN101550587A (en) | 2009-04-20 | 2009-04-20 | Furnace cover structure of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101550587A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181942A (en) * | 2011-04-21 | 2011-09-14 | 无锡市惠德晶体控制设备有限公司 | Furnace cover observation window of silicon single crystal furnace |
| CN103774240A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Heating body connecting device for gem furnace |
| CN107655334A (en) * | 2017-10-13 | 2018-02-02 | 天津林立感应加热电炉制造有限公司 | A kind of processing method of hot plate lid leak tight structure |
| CN109023533A (en) * | 2018-08-30 | 2018-12-18 | 浙江晶鸿精密机械制造有限公司 | A kind of bell applied to single crystal growing furnace |
-
2009
- 2009-04-20 CN CNA2009100308929A patent/CN101550587A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181942A (en) * | 2011-04-21 | 2011-09-14 | 无锡市惠德晶体控制设备有限公司 | Furnace cover observation window of silicon single crystal furnace |
| CN103774240A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Heating body connecting device for gem furnace |
| CN107655334A (en) * | 2017-10-13 | 2018-02-02 | 天津林立感应加热电炉制造有限公司 | A kind of processing method of hot plate lid leak tight structure |
| CN109023533A (en) * | 2018-08-30 | 2018-12-18 | 浙江晶鸿精密机械制造有限公司 | A kind of bell applied to single crystal growing furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102242397B (en) | Process for producing Czochralski silicon single crystal | |
| CN102220633B (en) | Production technology of semiconductor grade silicon single crystal | |
| CN102220634B (en) | Method to raise production efficiency of czochralski silicon mono-crystal | |
| CN101550587A (en) | Furnace cover structure of single crystal furnace | |
| CN109338462B (en) | Diameter-variable seed crystal for Czochralski single crystal and seeding method | |
| CN113574213A (en) | Single crystal manufacturing apparatus | |
| JPH08333124A (en) | Production of double crucible made of quartz | |
| CN201362752Y (en) | Crucible for silicon single crystal growth | |
| CN103757691B (en) | Polycrystalline silicon material throws method again | |
| CN107287652A (en) | A kind of silica crucible for suppressing melting silicon liquid level vibration and preparation method thereof | |
| CN110453283A (en) | A kind of mold and method of the EFG technique growth sealing sapphire pipe of sealing cover type seeding | |
| CN102719883A (en) | Semiconductor monocrystal silicon production process | |
| CN201785551U (en) | Cooling structure of single crystal furnace cover | |
| CN201395642Y (en) | Cooling structure of mono-crystal furnace cover | |
| KR100499435B1 (en) | Crystal growth apparatus | |
| CN104911695A (en) | Silicon heating crucible with graphite paper interlayer | |
| CN201395639Y (en) | Filtration structure of mono-crystal furnace cover | |
| JP2006256898A (en) | Silicon single crystal pulling apparatus | |
| KR101190697B1 (en) | Base champer for ingot growing apparatus | |
| CN206319080U (en) | It is a kind of effectively to prevent the method for crystal growth by crystal pulling stove of pollution in stove | |
| US9708729B2 (en) | Apparatus for manufacturing single crystal | |
| JP4874888B2 (en) | Silica glass crucible for pulling silicon single crystal and method for producing the same | |
| JP5289294B2 (en) | Quartz crucible for pulling silicon single crystal | |
| JP2010006657A (en) | Silicon single crystal production apparatus and silicon single crystal production method | |
| JP2011225408A (en) | Method for manufacturing silicon single crystal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU TIANLONG OPTOELECTRONICS EQUIPMENT CO., Free format text: FORMER OWNER: PAN YANPING Effective date: 20101203 Free format text: FORMER OWNER: PAN GUOQIANG |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 213129 NO.157, QILIANG ROAD, WANSUI, MENGHE TOWN, XINBEI DISTRICT, CHANGZHOU CITY, JIANGSU PROVINCE TO: 213138 NO.16, GANGXI AVENUE, MENGHE TOWN, CHANGZHOU CITY, JIANGSU PROVINCE |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20101203 Address after: 213138, No. 16, West Avenue, Meng Meng Town, Jiangsu, Changzhou Applicant after: Changzhou Tianlong Optical Equipment Co., Ltd. Address before: 213129, Changzhou, Jiangsu province new North Meng Town, Wan Sui Qi Liang Road, No. 157 Applicant before: Pan Yanping Co-applicant before: Pan Guoqiang |
|
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20091007 |