CN101542304B - Measuring circuit and test device - Google Patents
Measuring circuit and test device Download PDFInfo
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- CN101542304B CN101542304B CN2007800426619A CN200780042661A CN101542304B CN 101542304 B CN101542304 B CN 101542304B CN 2007800426619 A CN2007800426619 A CN 2007800426619A CN 200780042661 A CN200780042661 A CN 200780042661A CN 101542304 B CN101542304 B CN 101542304B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/36—Overload-protection arrangements or circuits for electric measuring instruments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
- G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- Environmental & Geological Engineering (AREA)
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Abstract
The invention provides a measuring circuit applies a DC current to a device under test (DUT) and measures the DC current flowing in the DUT. The measuring circuit includes: a main amplification unit which generates the DC current in accordance with an input voltage and applies it to the DUT; a series resistor arranged in series between the output terminal of the main amplification unit and the input terminal of the DUT; and a cramp circuit which limits a current value of the DC current outputted by the main amplification unit. The cramp circuit includes: a first limit voltage output unit which receives the DC voltage outputted from the main amplification unit and outputs a first limit voltage having a voltage difference in accordance with the limit value of the DC current to the DC voltage; and a first cramp unit which limits the DC current outputted from the main amplification unit according to the first limit voltage and the a voltage drop at both ends of the series resistor.
Description
Technical field
The present invention relates to metering circuit and testing apparatus, relate in particular to device being tested is added DC voltage, measure the DC current that above-mentioned device being tested passes through.The application is relevant with following Japanese publication.For the designated state of admitting to enroll content, by enrolling the application, as the application's a part with reference to the content of following application record by bibliographic reference.
1. patented claim 2006-310358, November 16 2006 applying date.
Background technology
As the test event of the device being tested of semiconductor circuit etc., the known DC test that pair device being tested is arranged.So-called DC test is to supply to source current or supply voltage in the device being tested by measurement, judges the test of the quality of device being tested.For example can consider: when device being tested having been applied the DC voltage of regulation, measurement is measured at the voltage input and current of the DC current that device being tested is supplied with, or when device being tested having been supplied with the DC current of regulation, measure the electric current impressed voltage of the DC voltage of supplying with device being tested and measure.
Simultaneously, it is also conceivable that when carrying out this DC test, should prevent from device being tested is imported excess current etc. the DC current that restriction is supplied with device being tested.For example, when DC current value of reaching capacity of passing through at device being tested is above, consider to adopt clamping circuit, the DC voltage (for example referring to Patent Document 1) that device being tested is applied with restriction.
DC current in the device being tested for example can record from the pressure drop at the resistance two ends between the input end of the amplifier that is arranged on supply power power and device being tested.Therefore, whether connect earthy the 1st voltage and in connect magnitude relationship between the 2nd voltage of earthy voltage after adding the voltage that obtains according to ultimate value of other end of resistance of one end of the amplifier side by detecting resistance, it is bigger than ultimate value to find DC current.
For example, by with the divider resistance of regulation to the 1st voltage carry out after the dividing potential drop and with the divider resistance of same intrinsic standoff ratio the 2nd voltage after partial voltage is input to differential amplifier, whether can detect DC current bigger than ultimate value.And,, and can prevent the excessive DC current of device being tested input by export-restriction DC current according to differential amplifier.
Patent documentation 1, the spy opens the 2002-277505 communique.
, if device being tested has been applied high voltage, as mentioned above, with the earthing potential be benchmark by clamping circuit work, the voltage that then is added to divider resistance becomes high voltage.Therefore, if produce error between the intrinsic standoff ratio of the divider resistance of the intrinsic standoff ratio of the divider resistance of the 1st voltage correspondence and the 2nd voltage correspondence, then the CMR error becomes bigger, can think the precision deterioration that can cause clamper.
Summary of the invention
Therefore, one object of the present invention is to provide metering circuit and the testing apparatus that solves above-mentioned problem.This purpose is reached by the characteristics combination of independent claims record.Dependent claims has been stipulated more favourable object lesson of the present invention.
In order to solve above-mentioned problem, according to one of the metering circuit example of the 1st relevant aspect that comprises with instructions of the present invention with new invention, a kind of metering circuit is provided, this metering circuit is that device being tested is applied DC voltage, the DC current that measurement is passed through at above-mentioned device being tested, it comprises: according to input voltage above-mentioned DC voltage takes place, and impose on the main enlarging section of above-mentioned device being tested, series connection is arranged on the resistance in series between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested, limit the clamping circuit of the current value of the above-mentioned DC current of exporting above-mentioned main enlarging section.Said clamping circuit comprises: receive the above-mentioned DC voltage of above-mentioned main enlarging section output, export the 1st limiting voltage efferent that above-mentioned relatively DC voltage has the 1st limiting voltage of the voltage difference corresponding with the ultimate value of above-mentioned DC current; Based on above-mentioned the 1st limiting voltage with in the pressure drop at above-mentioned resistance in series two ends, limit the 1st clamper unit of the above-mentioned DC current of above-mentioned main enlarging section output.
In addition, an example of the metering circuit of the 2nd aspect that the invention that comprises according to this instructions relates to, provide a kind of device being tested is applied DC voltage, measure the metering circuit of the DC current of passing through in the above-mentioned device being tested, comprise: main enlarging section, it generates above-mentioned DC voltage according to input voltage, imposes on above-mentioned device being tested; Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested; Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output; Impact damper, shunt is also accepted above-mentioned input voltage, inputs to said clamping circuit.Said clamping circuit has: the 1st limiting voltage efferent, accept the above-mentioned DC voltage of above-mentioned main enlarging section output, export the above-mentioned input voltage of above-mentioned relatively impact damper input, the 1st limiting voltage with voltage difference corresponding with the ultimate value of above-mentioned DC current; The 1st clamper unit according to the pressure drop in above-mentioned the 1st limiting voltage and the above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
In addition, example according to the testing apparatus of the 3rd relevant aspect of the invention that comprises with this instructions provides a kind of testing apparatus of testing device being tested, comprises, above-mentioned device being tested is supplied with DC voltage, measure the metering circuit of the DC current of passing through at above-mentioned device being tested; According to the above-mentioned DC current that above-mentioned metering circuit is measured, judge the judging part of the quality of above-mentioned device being tested; Above-mentioned metering circuit has: according to input voltage above-mentioned DC voltage takes place, impose on the main enlarging section of above-mentioned device being tested; Series connection is arranged on the resistance in series between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested; Limit the clamping circuit of the current value of the above-mentioned DC current of exporting above-mentioned main enlarging section.Said clamping circuit comprises the above-mentioned DC voltage that receives above-mentioned main enlarging section output, exports above-mentioned relatively DC voltage, has the 1st limiting voltage efferent of the 1st limiting voltage of the voltage difference corresponding with the ultimate value of above-mentioned DC current; According to the pressure drop in above-mentioned the 1st limiting voltage and the above-mentioned resistance in series two ends, limit the 1st clamper unit of the above-mentioned DC current of above-mentioned main enlarging section output.
Simultaneously, example according to the testing apparatus of the 4th relevant aspect of the invention that comprises with this instructions provides a kind of testing apparatus of testing device being tested, comprising: metering circuit, supply with above-mentioned device being tested DC voltage, measure the DC current of passing through in the above-mentioned device being tested; Judging part according to the above-mentioned DC current that above-mentioned metering circuit is measured, is judged the quality of above-mentioned device being tested; Above-mentioned metering circuit has: main enlarging section, generate above-mentioned DC voltage according to input voltage, and impose on above-mentioned device being tested; Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested; Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output; Impact damper is accepted above-mentioned input voltage along separate routes, the input said clamping circuit.Said clamping circuit comprises: the 1st limiting voltage efferent, receive the above-mentioned DC voltage of above-mentioned main enlarging section output, and export the above-mentioned input voltage that above-mentioned relatively impact damper is imported, have the 1st limiting voltage of voltage difference of the ultimate value correspondence of above-mentioned DC current; The 1st clamper unit according to above-mentioned the 1st limiting voltage and the pressure drop in above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
The summary of foregoing invention does not list the whole of essential features of the present invention, and the combination of these feature also can constitute invention.
Description of drawings
Fig. 1 is the illustration intention of the metering circuit 100 that relates to of an embodiment of the invention.
Fig. 2 is other structure illustration intentions of metering circuit 100.
Fig. 3 is other structure illustration intentions of metering circuit 100.
Fig. 4 is the illustration intention of the structure of the testing apparatus 200 that relates to of another embodiment of the present invention.
Description of reference numerals:
10. magnitude of voltage control part, 12. resistance, 14. resistance in seriess, 16. the current indication device, 18. current measurement portions, 20. main enlarging sections, 22. differential amplifier, 24. main amplifiers, 26. bridging condensers, 30. clamp device, 40. the 1st clamping circuits, 42. the 1st limiting voltage efferents, 46,66. the 1st resistance, 48,68. the 2nd resistance, 50,70. the 3rd resistance, 52,72. the 4th resistance, 54. the 1st comparing sections, 56. the 1st diodes, 58. the 1st clamper unit, 60. the 2nd clamping circuit, 62. the 2nd limiting voltage efferents, 74. the 2nd comparing sections, 76. the 2nd diode, 78. the 2nd clamper unit, 80. impact dampers, 100. metering circuits, 110. judging part, 120. the pattern input part, 200. testing apparatuss, 300. devices being tested
Embodiment
Below by embodiment explanation one aspect of the present invention, but following embodiment is not to limit the related invention of claim scope, be not in addition the represented characteristics combination of embodiment be the necessary solution of invention all.
Fig. 1 is the illustration intention that the metering circuit 100 that one of the present invention embodiment relates to is constructed.Metering circuit 100, it is the DC voltage that device being tested 300 is applied regulation, measure voltage impressed current metering circuit, have magnitude of voltage control part 10, resistance 12, main enlarging section 20, resistance in series 14, current indication device 16, current measurement portion 18, clamp device 30 and bridging condenser 26 by the DC current of device being tested 300.
The voltage that 10 controls of magnitude of voltage control part apply device being tested 300.For example the magnitude of voltage control part 10, are digital analog converters, export the input voltage corresponding with the digital value that is given.
Resistance in series 14, series connection is arranged between main enlarging section 20 output terminals and device being tested 300 input ends.Can connect such as resistance in series 14 and to be arranged between main enlarging section 20 output terminals and current indication device 16 input ends.
In this example, clamp device 30 has the 1st clamping circuit 40 and the 2nd clamping circuit 60.The 1st clamping circuit 40, specified flow is to the upper limit of the DC current of device being tested 300; And the 2nd clamping circuit 60, specified flow is to the lower limit of the DC current of device being tested 300.
The 1st clamping circuit 40 has the 1st limiting voltage efferent the 42, the 1st resistance the 46, the 2nd resistance the 48, the 3rd resistance the 50, the 4th resistance 52 and the 1st clamper unit 58.The 1st limiting voltage efferent 42 can be a D/A converter for example, exports the voltage corresponding with the digital value that is given.
The 1st limiting voltage efferent 42, specified flow is to the upper limit of the DC current of device being tested 300.In this example, the 1st limiting voltage efferent 42, the 1st limiting voltage of the upper limit correspondence of output DC stream.In addition, the 1st limiting voltage efferent 42, the DC voltage of exporting with main enlarging section 20 is a benchmark, exports the 1st limiting voltage.In a word, the 1st limiting voltage efferent 42 receives the DC voltage that export main enlarging section 20, to this DC voltage, and the 1st limiting voltage that output has the voltage difference corresponding with the upper limit of DC current.Such as, be V1 if establish the DC voltage of main enlarging section 20 outputs, the upper voltage limit of establishing corresponding DC current is Vc, then the 1st limiting voltage of the 1st limiting voltage efferent 42 outputs is V1+Vc.
The 1st clamper unit 58 according to the 1st limiting voltage with in the pressure drop at resistance in series 14 two ends, limits the DC current of main enlarging section 20 outputs.Comprise the 1st clamper unit the 58, the 1st comparing section 54 and the 1st diode 56 in this example.
The 1st comparing section 54 is amplified output based on the comparative result of the voltage of pressure drop and corresponding the 1st limiting voltage, exports the 1st comparing section poor of the 1st comparative result voltage.The 1st comparing section 54 in this example is to have the 1st and the 2nd input end, the differential amplifier of the 1st comparative result voltage of the difference of the voltage of corresponding the 1st input end of output and the input of the 2nd input end.The voltage of so-called corresponding the 1st limiting voltage is to reach with the 3rd resistance with the 2nd resistance 48 to be pressed in the voltage V2 of an end of device being tested 300 sides of resistance in series 14 and the voltage behind the 1st limiting voltage in 50 minutes.
The 2nd resistance 48, an end of device being tested 300 sides of connection resistance in series 14 and the 2nd input end of the 1st comparing section 54.The 3rd resistance 50 is connected with the shunting point of the 1st limiting voltage efferent 42 output terminals and the 2nd resistance 48 and the 2nd input end.Preferred the 3rd resistance 50 resistance values are fully greater than the resistance value of the 2nd resistance 48.For example the resistance value of the 2nd resistance 48 is 5k Ω degree, and the 3rd resistance 50 resistance values are 200k Ω degree for well.In this case, if the pressure drop of resistance in series 14 is Vf, the voltage that then is added to the 2nd input end of the 1st comparing section 54 becomes (200k Ω * (V1-Vf)+5k Ω * (V1+Vc))/(200k Ω+5k Ω)=V1+ (5k Ω * Vc-200k Ω * Vf)/205k Ω.
Simultaneously, an end of main enlarging section 20 sides of the 1st resistance 46 connection resistance in seriess 14 and the 1st input end of the 1st comparing section 54.The 4th resistance 52 is arranged between the end of main enlarging section 20 sides of the end of the 1st comparing section 54 sides of the 1st resistance 46 and resistance in series 14.Here, best the 1st resistance 46 resistance values equate that with the 2nd resistance 48 resistance values the resistance value of the 4th resistance 52 equates substantially with the resistance value of the 3rd resistance 50.That is, be applied to the voltage of the 1st input end of the 1st comparing section 54, the voltage V1 of an end of main enlarging section 20 sides of input resistance in series 14.Therefore, ((5k Ω * Vc-200k Ω * Vf)/205k Ω amplifies back output to the difference of 5k Ω * Vc-200k Ω * Vf)/205k Ω to the voltage V1+ of the 1st comparing section 54 voltage V1 that the 1st input end is added and the input of the 2nd input end.That is, the 1st comparing section 54, output with by Vc after the 2nd resistance 48 and the 50 resistance value weightings of the 3rd resistance and the corresponding voltage of magnitude relationship of Vf.
The 1st diode 56 according to the 1st comparative result voltage, by limiting the input voltage of main enlarging section 20 inputs, limits the DC current of main enlarging section 20 outputs.In this example, the 1st diode 56 is connected at negative electrode with the 1st comparing section 54 output terminals, and 20 input ends are connected with anode in main enlarging section.Simultaneously, the 1st comparing section 54 is in that (when 5k Ω * Vc-200k Ω * Vf) is negative, promptly import the DC current of device being tested 300 when bigger than higher limit, output is made as the 1st diode 56 the 1st comparative result voltage of on-state.In view of the above, pressure drop in resistance 12 increases, and the input voltage of main enlarging section 20 is limited.For this reason, the DC current in the device being tested 300 is constrained to littler than higher limit.In addition, the 1st comparing section 54 is in that (5k Ω * Vc-200k Ω * Vf) is timing, and promptly the DC current in the device being tested 300 is than higher limit hour, and output is made as the 1st diode 56 the 1st comparative result voltage of off-state.According to such structure, the DC current in the device being tested 300 can be made as below the set upper limit.
As mentioned above, the 2nd clamping circuit 60 is regulated main enlarging section 20 input voltages so that the DC current of device being tested 300 more than the fixed lower limit.The 2nd clamping circuit 60 has the 2nd limiting voltage efferent the 62, the 1st resistance the 66, the 2nd resistance the 68, the 3rd resistance the 70, the 4th resistance 72 and the 2nd clamper unit 78.The 2nd limiting voltage efferent 62 for example can be a digital analog converter, can export the voltage corresponding with the digital value that gives.
The lower limit of the DC current of the 2nd limiting voltage efferent 62 regulation devices being tested 300.In this example, the 2nd limiting voltage efferent 62 outputs 2nd limiting voltage corresponding with the lower limit of DC current.In addition, the 2nd limiting voltage efferent 62 as a reference, is imported the DC voltage of main enlarging section 20 outputs, exports the 2nd limiting voltage.Just, the 2nd limiting voltage efferent 62 receives the DC voltage of main enlarging section 20 outputs, this DC voltage relatively, and output has the 2nd limiting voltage of voltage difference of the lower limit correspondence of DC current.The DC voltage of for example establishing 20 outputs of main enlarging section is V1, and the voltage of upper limit correspondence of establishing DC current is as Vc, and then the 2nd limiting voltage of the 2nd limiting voltage efferent 62 outputs is V1-Vc.
The 2nd clamper portion 78 limits the DC current of main enlarging section 20 outputs according to the 2nd limiting voltage with in the pressure drop at resistance in series 14 two ends.The 2nd clamper unit 78 has the 2nd comparing section 74 and the 2nd diode 76 in this example.
The 2nd comparing section 74 preferably has the differential circuit with the same substantially characteristic of the 1st comparing section 54.The 1st input end of the 2nd comparing section 74 connects the tie point of the 1st resistance 66 and the 4th resistance 72.Simultaneously, the 2nd input end of the 2nd comparing section 74 connects the tie point of the 2nd resistance 68 and the 3rd resistance 70.Simultaneously, the 2nd diode 76 is connected by the 2nd comparing section 74 output terminal anodes, is connected by main enlarging section 20 input end negative electrodes.The 2nd diode 76 is according to the 2nd comparative result voltage of the 2nd comparing section 74 outputs, and by the lower limit of restriction to the input voltage of main enlarging section 20, restriction flows to the lower limit of the DC current of device being tested 300.
The 1st resistance the 66, the 2nd resistance the 68, the 3rd resistance 70 and the 4th resistance 72 can be with the 1st clamping circuit 40 in the 1st resistance the 46, the 2nd resistance the 48, the 3rd resistance 50 resistance identical with the 4th resistance 52, and have identical annexation.
According to such structure, when pressure drop ratio 2nd limiting voltage of the 2nd comparing section 74 in resistance in series 14 hour, output is set to the 2nd diode 76 the 2nd comparative result voltage of on-state, when this pressure drop ratio the 2nd limiting voltage was big, output was set to the 2nd diode 76 the 2nd comparative result voltage of off-state.According to such structure, the DC current in the device being tested 300 can be made as more than the lower limit of regulation.
Simultaneously, this routine clamp device 30 is benchmark job with the DC voltage V1 of main enlarging section 20 outputs.Therefore, can reduce the voltage that the 1st resistance (46,66), the 2nd resistance (48,68), the 3rd resistance (50,70) and the 4th resistance (52,72) apply.For this reason, be minimized because the CMR error that the resistance value scattered error of these resistance produces.Particularly when the DC voltage V1 of main enlarging section 20 outputs was high voltage, its effect was more remarkable.
Simultaneously, if when clamp device 30 is reference work with the earthing potential,, need to supply with the supply voltage of the corresponding high pressure of the DC voltage exported with main enlarging section 20 for clamp device 30.But, at this routine clamp device 30, because the DC voltage of exporting with main enlarging section 20 is benchmark job, so also passable even do not supply with the supply voltage of high pressure.For example supply with+Vc～-scope of Vc in workable supply voltage just passable.
Fig. 2 is the synoptic diagram of other structures of metering circuit 100.This routine metering circuit 100 is compared with metering circuit 100 structures shown in Fig. 1, is not having difference on the 4th resistance (52, the 72) this point.Simultaneously, the 3rd resistance 50 in this example is arranged between the output terminal of the 1st resistance 46 and the 1st comparing section 54 contacts and the 1st limiting voltage efferent 42.Equally, the 3rd resistance 70 is arranged between the tie point and the 2nd limiting voltage efferent 62 output terminals of the 1st resistance 66 and the 2nd comparing section 74.Other have identical symbol with Fig. 1 components identical.
In Fig. 1,, all apply the DC voltage V1 of main enlarging section 20 outputs at the two ends of the 1st resistance (46,66) that is connected in series and the 4th resistance (52,72).Therefore, as shown in Figure 2,, also can carry out in the same operation of the metering circuit described in Fig. 1 100 even in metering circuit 100, omit the 4th resistance (52,72).In this example simultaneously, because changed the joint of the 3rd resistance 50 and 70, so the polarity of the 1st limiting voltage efferent 42 and the 2nd limiting voltage efferent 62 output voltages also changes.For example, can establish the 1st limiting voltage efferent 42 output voltages is V1-Vc, and establishing the 2nd limiting voltage efferent 62 output voltages is V1+Vc.
Fig. 3 is the synoptic diagram of metering circuit 100 other structure examples.In this routine metering circuit 100 is at the metering circuit shown in Figure 1 100 textural circuit that increase impact damper 80.The element of other and the same symbol of Fig. 1 can have same function and structure.
Impact damper 80, the input voltage that main enlarging section 20 is imported receives along separate routes, input clamp device 30.In this example, impact damper 80 receives input voltage along separate routes from the shunting point of the input end of resistance 12 and main enlarging section 20.
Simultaneously, the 1st limiting voltage efferent 42 among Fig. 1 and the 2nd limiting voltage efferent 62, DC voltage with 20 outputs of main enlarging section is benchmark job, but the 1st limiting voltage efferent 42 in this example and the 2nd limiting voltage efferent 62 are reference voltage work with the input voltage of impact damper 80 outputs.
Simultaneously, an end of the 4th resistance (52,72) among Fig. 1 applies the DC voltage of main enlarging section 20 outputs.But, this end of the 4th resistance (52,72) in this example applies the input voltage of impact damper 80 outputs.
Magnification in main enlarging section 20, when for example being 1 times, according to such structure, also can obtain with in the same effect of metering circuit shown in Figure 1 100.But the magnification in main enlarging section 20 is not defined as 1 times.
Fig. 4 is the illustration intention of the testing apparatus that relates to of one of the present invention embodiment 200 structures.Testing apparatus 200 is the equipment of the device being tested 300 of measuring semiconductor circuit etc., has metering circuit 100, pattern input part 120 and judging part 110.
Judging part 110 is according to the quality of the judgement of the measurement result in metering circuit 100 device being tested 300.For example judging part 110, and whether the current value of the DC current that can measure according to current measurement portion shown in Figure 1 18 judges the quality of device being tested 300 in the scope of defined.
Simultaneously, when the DC test of carrying out when device being tested 300 is static, metering circuit 100 can be measured in the state of pattern input part 120 not input test patterns.Simultaneously, if carry out DC test when device being tested 300 action, metering circuit 100 can be measured in the state of pattern input part 120 input test patterns.
More than with embodiment a side of the present invention has been described, but the scope of technology of the present invention is not limited by the scope of above-mentioned embodiment record.It will be obvious to those skilled in the art that and to do diversified distortion or improvement above-mentioned embodiment.The scope that accessory rights requires can know that the embodiment of its distortion and improvement is also contained in the scope of the present invention.
Claims (9)
1. a metering circuit is that device being tested is applied DC voltage, measures the metering circuit of the DC current of passing through in the above-mentioned device being tested, it is characterized in that comprising:
Main enlarging section, it generates above-mentioned DC voltage according to input voltage, imposes on above-mentioned device being tested;
Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested;
Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output;
Said clamping circuit has:
The 1st limiting voltage efferent receives the above-mentioned DC voltage that export above-mentioned main enlarging section, and output has the 1st limiting voltage of the voltage difference corresponding with the ultimate value of above-mentioned DC current corresponding to above-mentioned DC voltage;
The 1st clamper unit according to the pressure drop in above-mentioned the 1st limiting voltage and the above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
2. metering circuit according to claim 1 is characterized in that above-mentioned the 1st clamper unit has:
The 1st comparing section, output is based on the 1st comparative result voltage of the comparative result of above-mentioned pressure drop and the voltage corresponding with above-mentioned the 1st limiting voltage;
The 1st diode is by limiting above-mentioned DC current according to the above-mentioned input voltage of above-mentioned the 1st comparative result voltage limit.
3. metering circuit according to claim 2 is characterized in that:
Above-mentioned the 1st limiting voltage efferent is exported above-mentioned 1st limiting voltage corresponding with the higher limit of above-mentioned DC current;
Above-mentioned the 1st diode, at the output terminal connection negative electrode of above-mentioned the 1st comparing section, the input end in above-mentioned main enlarging section connects anode;
Above-mentioned the 1st comparing section, when the above-mentioned pressure drop ratio voltage corresponding with above-mentioned the 1st limiting voltage is big, output is set at above-mentioned the 1st diode above-mentioned the 1st comparative result voltage of on-state, when the above-mentioned pressure drop ratio voltage corresponding with above-mentioned the 1st limiting voltage hour, output is set at above-mentioned the 1st diode above-mentioned the 1st comparative result voltage of off-state.
4. metering circuit according to claim 3 is characterized in that:
Above-mentioned the 1st comparing section has the 1st and the 2nd input end, exports the differential circuit of the above-mentioned 1st comparative result voltage corresponding with the voltage difference that is imported into described the 1st input end and above-mentioned the 2nd input end;
Above-mentioned the 1st clamper unit also comprises:
The 1st resistance that connects above-mentioned the 1st input end of the end of above-mentioned main enlarging section side of above-mentioned resistance in series and above-mentioned the 1st comparing section;
Connect the end of above-mentioned device being tested side of above-mentioned resistance in series and above-mentioned the 2nd input end of above-mentioned the 1st comparing section, with resistance value the 2nd resistance about equally of above-mentioned the 1st resistance;
Connect the output terminal of above-mentioned the 1st limiting voltage efferent and the tie point of above-mentioned the 2nd resistance and above-mentioned the 2nd input end, than the 3rd big resistance of the resistance value of above-mentioned the 2nd resistance.
5. metering circuit according to claim 4 is characterized in that:
Above-mentioned the 1st clamper unit also has between the end of above-mentioned main enlarging section side of end of above-mentioned the 1st comparing section side that is arranged on above-mentioned the 1st resistance and above-mentioned resistance in series, with resistance value the 4th resistance about equally of above-mentioned the 3rd resistance.
6. metering circuit according to claim 4 is characterized in that also comprising:
Receive the above-mentioned DC voltage of above-mentioned main enlarging section output, export above-mentioned relatively DC voltage, have the 2nd limiting voltage efferent of the 2nd limiting voltage of voltage difference of the lower limit correspondence of above-mentioned DC current;
According to the pressure drop at above-mentioned the 2nd limiting voltage and above-mentioned resistance in series two ends, limit the 2nd clamper unit of the lower limit of the above-mentioned DC current of exporting above-mentioned main enlarging section;
Above-mentioned the 2nd clamper unit has:
Output is based on the 2nd comparing section of the 2nd comparative result voltage of the comparative result of above-mentioned pressure drop and the voltage corresponding with above-mentioned the 2nd limiting voltage;
Output terminal in above-mentioned the 2nd comparing section connects anode, and the input end in above-mentioned main enlarging section connects negative electrode, limits the 2nd diode of the lower limit of above-mentioned DC current by the lower limit according to the above-mentioned input voltage of above-mentioned the 2nd comparative result voltage limit;
Above-mentioned the 2nd comparing section when the voltage of above-mentioned the 2nd limiting voltage correspondence of above-mentioned pressure drop ratio hour, is exported above-mentioned the 2nd comparative result voltage that above-mentioned the 2nd diode is set to on-state; When the voltage of above-mentioned the 2nd limiting voltage correspondence of above-mentioned pressure drop ratio was big, output was set at above-mentioned the 2nd diode above-mentioned the 2nd comparative result voltage of off-state.
7. a metering circuit is that device being tested is applied DC voltage, measures the metering circuit of the DC current of passing through in the above-mentioned device being tested, it is characterized in that comprising:
Main enlarging section, it generates above-mentioned DC voltage according to input voltage, imposes on above-mentioned device being tested;
Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested;
Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output;
Impact damper, shunt is also accepted above-mentioned input voltage, inputs to said clamping circuit;
Said clamping circuit has:
The 1st limiting voltage efferent is accepted the above-mentioned DC voltage that export above-mentioned main enlarging section, and output is corresponding to the above-mentioned input voltage of above-mentioned impact damper input, the 1st limiting voltage with voltage difference corresponding with the ultimate value of above-mentioned DC current;
The 1st clamper unit according to the pressure drop in above-mentioned the 1st limiting voltage and the above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
8. a testing apparatus is the testing apparatus of test device being tested, it is characterized in that comprising:
Metering circuit is supplied with DC voltage to above-mentioned device being tested, measures the DC current of passing through in the above-mentioned device being tested;
Judging part according to the above-mentioned DC current that above-mentioned metering circuit is measured, is judged the quality of above-mentioned device being tested;
Above-mentioned metering circuit has:
Main enlarging section generates above-mentioned DC voltage according to input voltage, imposes on above-mentioned device being tested;
Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested;
Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output;
Said clamping circuit comprises:
The 1st limiting voltage efferent receives the above-mentioned DC voltage that export above-mentioned main enlarging section, and output has the 1st limiting voltage of the voltage difference corresponding with the ultimate value of above-mentioned DC current corresponding to above-mentioned DC voltage;
The 1st clamper unit according to the pressure drop in above-mentioned the 1st limiting voltage and the above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
9. a testing apparatus is the testing apparatus of test device being tested, it is characterized in that comprising:
Metering circuit is supplied with above-mentioned device being tested DC voltage, measures the DC current of passing through in the above-mentioned device being tested;
Judging part according to the above-mentioned DC current that above-mentioned metering circuit is measured, is judged the quality of above-mentioned device being tested;
Above-mentioned metering circuit has:
Main enlarging section generates above-mentioned DC voltage according to input voltage, imposes on above-mentioned device being tested;
Resistance in series, series connection are arranged between the input end of the output terminal of above-mentioned main enlarging section and above-mentioned device being tested;
Clamping circuit limits the current value of the above-mentioned DC current of above-mentioned main enlarging section output;
Impact damper is accepted above-mentioned input voltage along separate routes, the input said clamping circuit;
Said clamping circuit comprises:
The 1st limiting voltage efferent receives the above-mentioned DC voltage that export above-mentioned main enlarging section, and output is corresponding to the described input voltage of above-mentioned impact damper input, the 1st limiting voltage with voltage difference corresponding with the ultimate value of above-mentioned DC current;
The 1st clamper unit according to above-mentioned the 1st limiting voltage and the pressure drop in above-mentioned resistance in series two ends, limits the above-mentioned DC current of above-mentioned main enlarging section output.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP310358/2006 | 2006-11-16 | ||
| JP2006310358 | 2006-11-16 | ||
| PCT/JP2007/071839 WO2008059766A1 (en) | 2006-11-16 | 2007-11-09 | Measuring circuit and test device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101542304A CN101542304A (en) | 2009-09-23 |
| CN101542304B true CN101542304B (en) | 2011-11-16 |
Family
ID=39401573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800426619A Expired - Fee Related CN101542304B (en) | 2006-11-16 | 2007-11-09 | Measuring circuit and test device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5022377B2 (en) |
| KR (1) | KR101026128B1 (en) |
| CN (1) | CN101542304B (en) |
| TW (1) | TWI347446B (en) |
| WO (1) | WO2008059766A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5461379B2 (en) * | 2010-12-15 | 2014-04-02 | 株式会社アドバンテスト | Test equipment |
| CN102288899B (en) * | 2011-07-18 | 2013-06-12 | 电子科技大学 | Precise constant-current constant-voltage applying test circuit |
| CN103926499B (en) * | 2013-12-27 | 2017-01-18 | 武汉天马微电子有限公司 | Device and method for detecting multiple-time programming circuit automatically |
| JP7337723B2 (en) * | 2020-02-07 | 2023-09-04 | 日置電機株式会社 | Current supply circuit and resistance measuring device |
| US11940496B2 (en) | 2020-02-24 | 2024-03-26 | Analog Devices, Inc. | Output voltage glitch reduction in ate systems |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2136473Y (en) * | 1992-07-30 | 1993-06-16 | 蔡冰 | Clamp-on tester |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1082837A (en) * | 1996-09-06 | 1998-03-31 | Advantest Corp | Lsi test device |
| JP2002277505A (en) | 2001-03-21 | 2002-09-25 | Advantest Corp | Power unit for dc characteristic measurement and semiconductor tester |
-
2007
- 2007-11-09 CN CN2007800426619A patent/CN101542304B/en not_active Expired - Fee Related
- 2007-11-09 WO PCT/JP2007/071839 patent/WO2008059766A1/en active Application Filing
- 2007-11-09 JP JP2008544121A patent/JP5022377B2/en active Active
- 2007-11-09 KR KR1020097012304A patent/KR101026128B1/en not_active IP Right Cessation
- 2007-11-15 TW TW096143248A patent/TWI347446B/en not_active IP Right Cessation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2136473Y (en) * | 1992-07-30 | 1993-06-16 | 蔡冰 | Clamp-on tester |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2002-277505A 2002.09.25 |
| JP特开平10-82837A 1998.03.31 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI347446B (en) | 2011-08-21 |
| KR101026128B1 (en) | 2011-04-05 |
| TW200834100A (en) | 2008-08-16 |
| JPWO2008059766A1 (en) | 2010-03-04 |
| JP5022377B2 (en) | 2012-09-12 |
| WO2008059766A1 (en) | 2008-05-22 |
| CN101542304A (en) | 2009-09-23 |
| KR20090084936A (en) | 2009-08-05 |
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