KR20090084936A - Measuring circuit and test device - Google Patents

Measuring circuit and test device Download PDF

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KR20090084936A
KR20090084936A KR1020097012304A KR20097012304A KR20090084936A KR 20090084936 A KR20090084936 A KR 20090084936A KR 1020097012304 A KR1020097012304 A KR 1020097012304A KR 20097012304 A KR20097012304 A KR 20097012304A KR 20090084936 A KR20090084936 A KR 20090084936A
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voltage
limit
main amplifier
under test
device under
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KR1020097012304A
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Korean (ko)
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KR101026128B1 (en
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켄지 오바라
타쿠야 하수미
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가부시키가이샤 어드밴티스트
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/36—Overload-protection arrangements or circuits for electric measuring instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Amplifiers (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

A measuring circuit for applying a DC voltage to a device under test and measuring a DC current flowing through the device under test, the main amplifier generating the DC voltage according to an input voltage and applying the DC voltage to the device under test; A series resistor provided in series between an output terminal of the amplifier section and an input terminal of the device under test, and a clamp circuit for limiting a current value of the direct current output by the main amplifier section, wherein the clamp circuit includes: A first limiting voltage output unit receiving the output DC voltage and outputting a first limiting voltage having a voltage difference corresponding to the limiting value of the DC current with respect to the DC voltage; A measuring circuit having a first clamp part for limiting the direct current output by the main amplifier part based on a drop voltage in Provided.

Description

MEASURING CIRCUIT AND TEST DEVICE}

The present invention relates to measurement circuits and test apparatus. In particular, the present invention measures a direct current flowing in the device under test by applying a direct current voltage to the device under test. This application relates to the following Japanese application. Regarding a designated country where reference is made by reference to a document, reference is made to the contents of the following application and incorporated into this application, and is incorporated into this application.

1. Japanese patent application 2006-310358 filing date November 16, 2006

As a test item of a device under test such as a semiconductor circuit, a direct current test of a device under test is known. The direct current test means a test for determining the quality of a device under test by measuring the power supply current or power supply voltage supplied to the device under test. For example, when a predetermined direct current voltage is applied to a device under test, a voltage applied current measurement for measuring a direct current supplied to a device under test, or a device under test when a predetermined direct current is supplied to a device under test A current applied voltage measurement for measuring the DC voltage supplied to the circuit can be considered.

In the case where the direct current test is performed, it is conceivable to limit the direct current supplied to the device under test in order to prevent the overcurrent or the like from being supplied to the device under test. For example, when the DC current which flows into a device under test becomes more than a limit value, the clamp circuit which limits the DC voltage applied to a device under test can be considered (for example, refer patent document 1).

The direct current flowing through the device under test can be detected, for example, from a drop voltage at both ends of the resistor provided between the amplifier supplying the power supply and the input terminal of the device under test. Therefore, the DC current is limited by detecting the magnitude relationship between the first voltage with respect to the ground potential at one end of the amplifier side of the resistor and the second voltage obtained by adding the voltage according to the limit value with the voltage with respect to the ground potential at the other end of the resistor. It can be detected whether it is a larger value.

For example, it is possible to detect whether the DC current is greater than the limit value by inputting the first voltage divided by the predetermined voltage divider and the second voltage divided by the voltage divider having the same voltage division ratio into the differential amplifier. have. In addition, by limiting the DC current in accordance with the output of the differential amplifier, excessive DC current can be prevented from flowing to the device under test.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2002-277505

However, when a high voltage is applied to the device under test, as described above, when the clamp circuit is operated based on the ground potential, the voltage applied to the voltage divider resistor becomes a high voltage. Therefore, when an error occurs between the voltage dividing ratio of the voltage dividing resistor corresponding to the first voltage and the voltage dividing ratio of the voltage dividing resistor corresponding to the second voltage, it is conceivable that the CMR error becomes large and the accuracy of the clamp deteriorates.

Therefore, in one aspect of the present invention, an object of the present invention is to provide a measurement circuit and a test apparatus for solving the above problems. This object is achieved by combining the features described in the independent claims in the claims. In addition, the dependent claims define further advantageous embodiments of the invention.

In order to solve the said subject, according to an example of the measuring circuit which concerns on the innovation contained in this specification, the measuring circuit which applies a DC voltage to the device under test, and measures the DC current which flows into the device under test. A series resistor provided in series between a main amplifier for generating the DC voltage according to an input voltage and applying it to the device under test, an output terminal of the main amplifier, and an input terminal of the device under test; And a clamp circuit for limiting a current value of the DC current output by the main amplifier, wherein the clamp circuit receives the DC voltage output by the main amplifier and outputs a voltage according to the limit value of the DC current with respect to the DC voltage. A first limiting voltage output unit configured to output a first limiting voltage having a difference, and the first limiting voltage and the series resistor It provides a measurement circuit which has a first clamp to limit the DC current to the main amplifier section output on the basis of the voltage drop at the end.

In addition, according to an example of the measurement circuit according to the second aspect related to the innovation included in the present specification, a measurement circuit for applying a DC voltage to a device under test and measuring a DC current flowing through the device under test, comprising: The DC current generated by the DC voltage and applied to the device under test, a series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, and the DC current output by the main amplifier. A clamp circuit for limiting the current value of the circuit; and a buffer for branching and receiving the input voltage and inputting the clamp circuit, wherein the clamp circuit receives the DC voltage output from the main amplifier. A first limiting voltage having a voltage difference corresponding to the limiting value of the direct current is applied to the input voltage input by the buffer. And a first circuit for limiting the direct current output by the main amplifier based on a dropping voltage at both ends of the first limiting voltage and the series resistance. .

In addition, according to an example of the test apparatus according to the third aspect related to innovation included in the present specification, a test apparatus for testing a device under test, the direct current being supplied to the device under test and flowing through the device under test A measuring circuit for measuring a current and a determining unit for determining whether or not the device under test is based on the DC current measured by the measuring circuit, wherein the measuring circuit generates the DC voltage according to an input voltage, A clamp circuit for limiting the current value of the main amplifier applied to the device under test, a series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, and the current value of the DC current output by the main amplifier. The clamp circuit receives the DC voltage output from the main amplifier, and the DC circuit A first amplifying voltage output unit configured to output a first limit voltage having a voltage difference corresponding to the limit value of the direct current with respect to a voltage; and the main amplification based on a drop voltage across the first limit voltage and the series resistance It provides a test apparatus including a first clamp portion for limiting the direct current outputs additionally.

In addition, according to an example of the test apparatus according to the fourth aspect related to innovation included in the present specification, a test apparatus for testing a device under test, the direct current being supplied to the device under test and flowing through the device under test A measuring circuit for measuring a current and a determining unit for determining whether or not the device under test is based on the DC current measured by the measuring circuit, wherein the measuring circuit generates the DC voltage according to an input voltage, A clamp circuit for limiting the current value of the main amplifier applied to the device under test, a series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, and the current value of the DC current output by the main amplifier. And a buffer for receiving the input voltage by branching it and inputting it to the clamp circuit. The circuit receives the direct current voltage output by the main amplifier, and outputs a first limit voltage having a voltage difference corresponding to the limit value of the direct current to the input voltage input by the buffer. And a first clamp part configured to limit the DC current output by the main amplifier part based on the first limit voltage and the drop voltage at both ends of the series resistance.

In addition, the summary of the present invention does not enumerate all the features required for the present invention, and the subcombination of these feature groups may also be an invention.

1 is a diagram illustrating an example of a configuration of a measurement circuit 100 according to an embodiment of the present invention.

2 is a diagram illustrating another example of the configuration of the measurement circuit 100.

3 is a diagram illustrating another example of the configuration of the measurement circuit 100.

4 is a diagram illustrating an example of a configuration of a test apparatus 200 according to an embodiment of the present invention.

<Code description>

10 Voltage Control 12 Resistance

14 Series Resistance 16 Current Detector

18 Current measuring part 20 Main amplifier part

22 Differential Amplifier 24 Main Amplifier

26 bypass condenser 30 clamp device

40 First clamp circuit 42 First limit voltage output

46,66 First Resistance 48,68 Second Resistance

50,70 Third Resistor 52,72 Fourth Resistor

54 First Comparator 56 First Diode

58 First clamp section 60 Second clamp circuit

62 Second limit voltage output section 74 Second comparison section

76 2nd diode 78 2nd clamp part

80 buffer 100 measuring circuit

110 Judgment unit 120 Pattern input unit

200 test device 300 device under test

EMBODIMENT OF THE INVENTION Hereinafter, although one aspect of this invention is described through embodiment of an invention, the following embodiment does not limit invention related to a claim, and all the combination of the features shown in embodiment are essential to the solution of this invention. It cannot be said.

1 is a diagram illustrating an example of a configuration of a measurement circuit 100 according to an embodiment of the present invention. The measuring circuit 100 is a voltage application current measuring circuit which applies a predetermined direct current voltage to the device under test 300 and measures a direct current flowing through the device under test 300. 12, main amplifier 20, series resistor 14, current detector 16, current measurer 18, clamp device 30, and bypass capacitor 26.

The voltage value control unit 10 controls the voltage applied to the device under test 300. For example, the voltage value control unit 10 is a digital analog converter and outputs an input voltage according to a given digital value.

The main amplifier 20 receives an input voltage through the resistor 12. In addition, the main amplifier 20 generates a DC voltage corresponding to the input voltage and applies it to the device under test 300. The main amplifier 20 has a differential amplifier 22 and a main amplifier 24. The differential amplifier 22 receives a DC voltage at an input terminal of the device under test 300 and outputs a voltage corresponding to the difference between the DC voltage and the input voltage. The main amplifier 24 amplifies and outputs the voltage output from the differential amplifier 22 at a predetermined amplification rate. By such a configuration, the DC voltage applied to the device under test 300 can be maintained at a predetermined voltage value corresponding to the input voltage from the voltage value control unit 10.

The current detector 16 detects a current value of the direct current supplied from the main amplifier 20 to the device under test 300 and outputs a detection voltage corresponding to the current value. For example, the current detector 16 may be a resistor provided in series between the output terminal of the main amplifier 20 and the input terminal of the device under test 300. The current measuring unit 18 measures the current value of the direct current supplied to the device under test 300 based on the detected voltage supplied from the current detecting unit 16. For example, the current measuring unit 18 may be a differential amplifier that receives respective voltages at both ends of the resistance of the current detecting unit 16.

The bypass capacitor 26 is provided between the input terminal of the device under test 300 and the ground potential. The bypass capacitor 26 compensates for the sudden change in the supply voltage or current at the input of the device under test 300.

The series resistor 14 is provided in series between the output terminal of the main amplifier 20 and the input terminal of the device under test 300. For example, the series resistor 14 may be provided in series between the output terminal of the main amplifier 20 and the input terminal of the current detector 16.

The clamp device 30 limits the current value of the direct current output from the main amplifier 20. For example, the clamp apparatus 30 limits the electric current value of the said direct current in the current range which is allowed to flow to the device under test 300 at least. As a result, excessive current flows through the device under test 300, thereby reducing the problem of the device under test 300.

In this example, the clamp device 30 has a first clamp circuit 40 and a second clamp circuit 60. The first clamp circuit 40 defines an upper limit of the direct current flowing through the device under test 300. In addition, the second clamp circuit 60 defines a lower limit of the direct current flowing through the device under test 300.

The first clamp circuit 40 includes a first limit voltage output 42, a first resistor 46, a second resistor 48, a third resistor 50, a fourth resistor 52, and a first clamp. It has a portion 58. The first limit voltage output section 42 is, for example, a digital analog converter, and may output a voltage corresponding to a given digital value.

The first limit voltage output section 42 defines an upper limit of the direct current flowing through the device under test 300. In this example, the first limit voltage output section 42 outputs the first limit voltage in accordance with the upper limit of the direct current. In addition, the first limiting voltage output unit 42 outputs the first limiting voltage based on the DC voltage output from the main amplifier 20. That is, the 1st limit voltage output part 42 receives the DC voltage output from the main amplifier 20, and outputs the 1st limit voltage which has a voltage difference according to the upper limit of DC current with respect to the said DC voltage. For example, if the DC voltage output from the main amplifier 20 is V1 and the voltage according to the upper limit of the DC current is Vc, the first limit voltage output from the first limit voltage output unit 42 is V1 +. Vc.

The first clamp portion 58 is. The DC current output by the main amplifier 20 is limited based on the first limit voltage and the drop voltage at both ends of the series resistor 14. In this example, the first clamp portion 58 has a first comparison portion 54 and a first diode 56.

The first comparator 54 amplifies and outputs a first comparator difference that outputs a first comparison result voltage based on a comparison result between the drop voltage and the voltage according to the first limit voltage. In this example, the first comparator 54 has first and second input terminals and differentially outputs a first comparison result voltage according to a difference between voltages input to the first input terminal and the second input terminal. It is an amplifier. In addition, the voltage according to a 1st limit voltage means the voltage V2 and the 1st limit voltage at the one end of the series resistance 14 side of the device under test 300, the 2nd resistance 48 and the 3rd resistance 50 The voltage divided by.

The second resistor 48 connects one end of the series resistor 14 on the side of the device under test 300 and the second input terminal of the first comparator 54. The third resistor 50 connects the output terminal of the first limit voltage output section 42 and the connection point of the second resistor 48 and the second input terminal. It is preferable that the resistance value of the third resistor 50 is sufficiently large with respect to the resistance value of the second resistor 48. For example, the resistance of the second resistor 48 may be about 5 kΩ, and the resistance of the third resistor 50 may be about 200 kΩ. In this case, assuming that the voltage drop across the series resistor 14 is Vf, the voltage applied to the second input terminal of the first comparator 54 is (200kΩ × (V1-Vf) + 5kΩ × (V1 + Vc). )) / (200kΩ + 5kΩ = V1 + (5kΩ × Vc-200kΩ × Vf) / 205kΩ.

In addition, the first resistor 46 connects one end of the main amplifier 20 side of the series resistor 14 and the first input terminal of the first comparator 54. The fourth resistor 52 is provided between one end on the side of the first comparator 54 of the first resistor 46 and one end on the side of the main amplifier 20 of the series resistor 14. Here, the resistance value of the first resistor 46 is equal to the resistance value of the second resistor 48, and the resistance value of the fourth resistor 52 is substantially the same as the resistance value of the third resistor 50. Do. That is, the voltage applied to the first input terminal of the first comparator 54 is input with the voltage V1 of one end of the main amplifier 20 side of the series resistor 14. Therefore, the first comparator 54 has a difference between the voltage V1 applied to the first input terminal and the voltage V1 + (5kΩ × Vc-200kΩ × Vf) / 205kΩ (5kΩ × Vc-200kΩ × Amplify and output Vf) / 205kΩ. That is, the first comparator 54 outputs a voltage according to the magnitude relationship between Vc and Vf that is weighted according to the resistance values of the second resistor 48 and the third resistor 50.

The first diode 56 limits the DC current output by the main amplifier 20 by limiting the input voltage input to the main amplifier 20 based on the first comparison result voltage. In this example, the first diode 56 has a cathode connected to the output terminal of the first comparator 54 and an anode connected to the input terminal of the main amplifier 20. In addition, the first comparator 54 has a first diode 56 when (5 kΩ × Vc-200 kΩ × Vf) is negative, that is, when the DC current flowing through the device under test 300 is greater than the upper limit. Outputs a first comparison result voltage with ON) turned on. This increases the drop voltage at the resistor 12 and limits the input voltage to the main amplifier 20. Therefore, the direct current flowing through the device under test 300 is limited to be smaller than the upper limit. In addition, the first comparator 54 includes the first diode 56 when (5 kΩ × Vc-200 kΩ × Vf) is positive, that is, when the DC current flowing through the device under test 300 is smaller than the upper limit. Outputs a first comparison result voltage which turns OFF. By configuring in this way, the DC current flowing through the device under test 300 can be made below a predetermined upper limit.

As described above, the second clamp circuit 60 controls the input voltage of the main amplifier 20 so that the DC current flowing through the device under test 300 is equal to or greater than a predetermined lower limit value. The second clamp circuit 60 includes a second limit voltage output unit 62, a first resistor 66, a second resistor 68, a third resistor 70, a fourth resistor 72, and a second resistor. It has a clamp portion 78. The second limit voltage output unit 62 may output a voltage corresponding to a given digital value, for example, as a digital analog converter.

The second limit voltage output section 62 defines a lower limit of the direct current flowing through the device under test 300. In this example, the second limit voltage output unit 62 outputs a second limit voltage in accordance with the lower limit of the direct current. In addition, the second limit voltage output unit 62 outputs the second limit voltage based on the DC voltage output from the main amplifier 20. That is, the second limit voltage output unit 62 receives the direct current voltage output from the main amplifier 20 and outputs a second limit voltage having a voltage difference corresponding to the lower limit of the direct current to the direct current voltage. For example, if the DC voltage output from the main amplifier 20 is V1 and the voltage according to the upper limit of the DC current is Vc, the second limit voltage output from the second limit voltage output unit 62 is V1. -Vc.

The second clamp portion 78 limits the DC current output by the main amplifier 20 based on the second limit voltage and the drop voltage at both ends of the series resistor 14. In this example, the second clamp portion 78 includes a second comparison portion 74 and a second diode 76.

The second comparator 74 may be a differential circuit having substantially the same characteristics as the first comparator 54. The first input terminal of the second comparator 74 is connected to the connection point of the first resistor 66 and the fourth resistor 72. In addition, the second input terminal of the second comparator 74 is connected to the connection point of the second resistor 68 and the third resistor 70. The second diode 76 has an anode connected to the output terminal of the second comparator 74 and a cathode connected to the input terminal of the main amplifier 20. The second diode 76 is a direct current flowing through the device under test 300 by limiting the lower limit of the input voltage to the main amplifier 20 based on the second comparison result voltage output from the second comparator 74. Limit the lower bound.

The first resistor 66, the second resistor 68, the third resistor 70, and the fourth resistor 72 may include the first resistor 46 and the second resistor in the first clamp circuit 40. 48) Since it is the same resistance as the 3rd resistor 50 and the 4th resistor 52, the same connection may be made.

With this configuration, the second comparison section 74 outputs a second comparison result voltage in which the second diode 76 is turned on when the drop voltage in the series resistor 14 is smaller than the second limit voltage. When the drop voltage is greater than the second limit voltage, the second comparison result voltage which turns off the second diode 76 is output. By configuring in this way, the direct current flowing through the device under test 300 can be more than a predetermined lower limit.

In addition, the clamp device 30 in this example operates on the basis of the DC voltage V1 output from the main amplifier 20. Therefore, the voltages applied to the first resistors 46 and 66, the second resistors 48 and 68, the third resistors 50 and 70 and the fourth resistors 52 and 72 can be reduced. For this reason, the CMR error which arises due to the resistance value nonuniformity of these resistors can be reduced. In particular, the effect becomes more remarkable when the DC voltage V1 output from the main amplifier 20 is a high voltage.

In addition, when the clamp device 30 operates on the basis of the ground potential, it is necessary to supply the clamp device 30 with a high-voltage power supply voltage corresponding to the DC voltage output from the main amplifier 20. However, since the clamp device 30 in this example operates on the basis of the DC voltage output by the main amplifier 20, it is not necessary to supply a high voltage power supply voltage. For example, a power supply voltage capable of operating in the range of + Vc to -Vc may be supplied.

2 is a diagram illustrating another example of the configuration of the measurement circuit 100. The measurement circuit 100 in this example is different in that it does not have the fourth resistors 52 and 72 with respect to the configuration of the measurement circuit 100 described in FIG. 1. The third resistor 50 in this example is provided between the connection point of the first resistor 46 and the first comparator 54 and the output terminal of the first limit voltage output section 42. Similarly, the third resistor 70 is provided between the connection point of the first resistor 66 and the second comparator 74 and the output terminal of the second limit voltage output section 62. About the other structure, it is the same as the component with the same code | symbol in FIG.

In FIG. 1, the DC voltage V1 output from the main amplifier 20 is simultaneously applied to both ends of the first resistors 46 and 66 and the fourth resistors 52 and 72 connected in series. Therefore, as shown in FIG. 2, even if the 4th resistors 52 and 72 are abbreviate | omitted in the measurement circuit 100, it is the same operation | movement as the measurement circuit 100 demonstrated in FIG. In this example, since the connection destinations of the third resistors 50 and 70 are changed, the polarities of the output voltages of the first limit voltage output section 42 and the second limit voltage output section 62 are also changed. For example, the output voltage of the first limiting voltage output section 42 may be V1-Vc, or the output voltage of the second limiting voltage output section 62 may be V1 + Vc.

3 is a diagram illustrating another example of the configuration of the measurement circuit 100. The measurement circuit 100 in this example further includes a buffer 80 with respect to the configuration of the measurement circuit 100 described in FIG. 1. The other component may have the same function and structure as the component with the same code | symbol in FIG.

The buffer 80 receives the input voltage input to the main amplifier 20 and inputs it to the clamp device 30. In this example, the buffer 80 receives the input voltage from the connection point of the input terminal of the resistor 12 and the main amplifier 20.

In addition, although the 1st limit voltage output part 42 and the 2nd limit voltage output part 62 in FIG. 1 operated based on the DC voltage output from the main amplifier part 20, The first limit voltage output section 42 and the second limit voltage output section 62 operate on the basis of the input voltage output from the buffer 80.

In addition, although the direct current voltage output from the main amplifier 20 is applied to one end of the fourth resistors 52 and 72 in FIG. 1, the buffer ( The input voltage output by 80 is applied.

When the amplification factor in the main amplifier 20 is 1 times, for example, the same effect as that of the measurement circuit 100 described with reference to FIG. However, the amplification factor in the main amplifier 20 is not limited to one time.

4 is a diagram illustrating an example of a configuration of a test apparatus 200 according to an embodiment of the present invention. The test apparatus 200 is an apparatus for testing a device under test 300 such as a semiconductor circuit, and includes a measurement circuit 100, a pattern input unit 120, and a determination unit 110.

The measurement circuit 100 is the same circuit as the measurement circuit 100 described with reference to FIGS. 1 to 3. That is, the measurement circuit 100 measures the voltage applied current of the device under test 300 while supplying power supply power to the device under test 300.

The determination unit 110 determines whether or not the device under test 300 is based on the measurement result in the measurement circuit 100. For example, the determination unit 110 may determine whether the device under test 300 is good or bad based on whether the current value of the DC current measured by the current measurement unit 18 described in FIG. 1 is within a predetermined range. do.

In addition, when the direct current test is performed while the device under test 300 is stopped, the measurement circuit 100 may measure the state in which the pattern input unit 120 does not input the test pattern. In addition, when the direct current test in the operation | movement of the device under test 300 is performed, the measuring circuit 100 may measure in the state which the pattern input part 120 inputs the test pattern.

The pattern input part 120 may input into the device under test 300 the test pattern which changes the state of the predetermined logic circuit contained in the device under test 300 sequentially, for example. In this case, it is possible to detect whether or not the logic circuit is normal. In addition, the pattern input unit 120 may input a test pattern for sequentially operating a plurality of logic circuits included in the device under test 300 to the device under test. In this case, the defect location in the device under test 300 can be specified.

As mentioned above, although one aspect of this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It is apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is evident from the description of the claims that such modifications or improvements can be included in the technical scope of the present invention.

Claims (9)

A measurement circuit for applying a direct current voltage to a device under test and measuring a direct current flowing in the device under test, A main amplifier for generating the DC voltage according to an input voltage and applying the DC voltage to the device under test; A series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, A clamp circuit for limiting a current value of the direct current output by the main amplifier; And The clamp circuit, A first limit voltage output unit configured to receive the DC voltage output by the main amplifier, and output a first limit voltage having a voltage difference corresponding to the limit value of the DC current with respect to the DC voltage; A first clamp part configured to limit the DC current output by the main amplifier part based on the first limit voltage and a drop voltage at both ends of the series resistance; Measuring circuit. The method of claim 1, The first clamp portion, A first comparator for outputting a first comparison result voltage based on a comparison result between the drop voltage and the voltage according to the first limit voltage; A first diode which limits the direct current by limiting the input voltage based on the first comparison result voltage; Measuring circuit. The method of claim 2, The first limit voltage output unit outputs the first limit voltage according to an upper limit value of the direct current, The first diode has a cathode connected to an output terminal of the first comparator, an anode connected to an input terminal of the main amplifier, The first comparator outputs the first comparison result voltage for turning on the first diode when the drop voltage is greater than the voltage according to the first limit voltage, and the drop voltage is the first limit voltage. Outputting the first comparison result voltage which turns off the first diode when the voltage is smaller than Measuring circuit. The method of claim 3, The first comparison unit is a differential circuit having first and second input terminals and outputting the first comparison result voltage according to a difference between voltages input to the first input terminal and the second input terminal. The first clamp portion, A first resistor connecting one end of the main amplifier side of the series resistor to the first input terminal of the first comparator; One end of the series resistor on the device under test, the second input terminal of the first comparator, and a second resistor having substantially the same resistance as the first resistor; A third resistor having a larger resistance value than the second resistor by connecting an output terminal of the first limit voltage output unit to a connection point of the second resistor and the second input terminal; Measurement circuit having a further. The method of claim 4, wherein The first clamp portion is provided between one end of the first comparison unit side of the first resistor and one end of the main amplifier side of the series resistor, and the fourth resistor is substantially equal in resistance to the third resistor. Measuring circuit with additional resistance. The method of claim 4, wherein A second limit voltage output unit configured to receive the DC voltage output from the main amplifier, and output a second limit voltage having a voltage difference corresponding to the lower limit of the DC current with respect to the DC voltage; A second clamp portion for limiting a lower limit of the direct current output by the main amplifier based on the second limit voltage and a drop voltage at both ends of the series resistance; Additionally provided, The second clamp portion, A second comparator for outputting a second comparison result voltage based on a comparison result between the drop voltage and the voltage according to the second limit voltage; An anode connected to an output terminal of the second comparator, a cathode connected to an input terminal of the main amplifier, and a second limiting the lower limit of the DC current by limiting the lower limit of the input voltage based on the second comparison result voltage; diode, Take it, The second comparator outputs the second comparison result voltage which turns on the second diode when the drop voltage is smaller than the voltage according to the second limit voltage, and the drop voltage is the second limit voltage. And a measurement circuit for outputting the second comparison result voltage which turns off the second diode when the voltage is larger than the voltage according to. A measurement circuit for applying a direct current voltage to a device under test and measuring a direct current flowing in the device under test, A main amplifier for generating the DC voltage according to an input voltage and applying the DC voltage to the device under test; A series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, A clamp circuit for limiting a current value of the direct current output by the main amplifier; A buffer for receiving the input voltage and inputting it to the clamp circuit; And The clamp circuit, A first limit voltage output unit configured to receive the DC voltage output by the main amplifier, and output a first limit voltage having a voltage difference corresponding to the limit value of the DC current to the input voltage input by the buffer; A first clamp part configured to limit the DC current output by the main amplifier part based on the first limit voltage and a drop voltage at both ends of the series resistance; Measuring circuit. A test apparatus for testing a device under test, A measuring circuit for supplying a direct current voltage to the device under test and measuring a direct current flowing through the device under test; A determination unit that determines whether the device under test is successful based on the DC current measured by the measurement circuit; And The measuring circuit, A main amplifier for generating the DC voltage according to an input voltage and applying the DC voltage to the device under test; A series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, A clamp circuit for limiting a current value of the direct current output by the main amplifier; Take it, The clamp circuit, A first limit voltage output unit configured to receive the DC voltage output by the main amplifier, and output a first limit voltage having a voltage difference corresponding to the limit value of the DC current with respect to the DC voltage; A first clamp part configured to limit the DC current output by the main amplifier part based on the first limit voltage and a drop voltage at both ends of the series resistance; Test device comprising a. A test apparatus for testing a device under test, A measuring circuit for supplying a direct current voltage to the device under test and measuring a direct current flowing through the device under test; A determination unit that determines whether the device under test is successful based on the DC current measured by the measurement circuit; And The measuring circuit, A main amplifier for generating the DC voltage according to an input voltage and applying the DC voltage to the device under test; A series resistor provided in series between the output terminal of the main amplifier and the input terminal of the device under test, A clamp circuit for limiting a current value of the direct current output by the main amplifier; A buffer for receiving the input voltage and inputting it to the clamp circuit; Take it, The clamp circuit, A first limit voltage output unit configured to receive the DC voltage output by the main amplifier, and output a first limit voltage having a voltage difference corresponding to the limit value of the DC current to the input voltage input by the buffer; A first clamp part for limiting the DC current output by the main amplifier part based on the first limit voltage and a drop voltage at both ends of the series resistance; Test device comprising a.
KR1020097012304A 2006-11-16 2007-11-09 Measuring circuit and test device KR101026128B1 (en)

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