CN101517127B - 涂覆的切削工具 - Google Patents
涂覆的切削工具 Download PDFInfo
- Publication number
- CN101517127B CN101517127B CN200780034200.7A CN200780034200A CN101517127B CN 101517127 B CN101517127 B CN 101517127B CN 200780034200 A CN200780034200 A CN 200780034200A CN 101517127 B CN101517127 B CN 101517127B
- Authority
- CN
- China
- Prior art keywords
- coating
- cvd
- layer
- pvd
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005520 cutting process Methods 0.000 title claims abstract description 45
- 238000000576 coating method Methods 0.000 claims abstract description 91
- 239000011248 coating agent Substances 0.000 claims abstract description 90
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000005422 blasting Methods 0.000 claims abstract description 8
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 8
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 8
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 8
- 238000000151 deposition Methods 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 230000006835 compression Effects 0.000 claims description 21
- 238000007906 compression Methods 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004576 sand Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000002002 slurry Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 43
- 238000005229 chemical vapour deposition Methods 0.000 description 34
- 238000005240 physical vapour deposition Methods 0.000 description 30
- 238000005516 engineering process Methods 0.000 description 12
- 238000003801 milling Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005553 drilling Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000007514 turning Methods 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- 229910010060 TiBN Inorganic materials 0.000 description 2
- 235000013877 carbamide Nutrition 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 238000007669 thermal treatment Methods 0.000 description 2
- ZSBXGIUJOOQZMP-JLNYLFASSA-N Matrine Chemical compound C1CC[C@H]2CN3C(=O)CCC[C@@H]3[C@@H]3[C@H]2N1CCC3 ZSBXGIUJOOQZMP-JLNYLFASSA-N 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/19—Rotary cutting tool
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/23—Cutters, for shaping including tool having plural alternatively usable cutting edges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本发明涉及制造切削工具的方法，该切削工具至少部分涂覆有内部的CVD涂层和外部的PVD涂层，该方法包括如下的制备步骤：沉积所述CVD涂层，使所述CVD涂层至少部分地经受强烈的湿法喷砂操作，随后沉积所述PVD涂层。本发明还涉及涂覆的切削工具，其包括硬质合金基体，该基体组成为：5-14重量％Co，0-8重量％Ti、Ta或Nb或者其组合的立方相碳化物，及余量的WC，所述基体至少部分地涂覆有4-14μm厚的涂层，该涂层包括内部的CVD涂层和外部的PVD涂层，其中所述CVD涂层具有压缩应力。
Description
技术领域
本发明涉及涂覆的切削工具，其适用于通过车削、铣削、钻削(drilling)或通过类似的形成切屑的加工方法来加工金属。所述涂覆的工具具有改进的韧性，特别是当用于间歇式切削操作中时。所述涂层由至少一层通过CVD技术涂覆的内层和至少一层通过PVD技术涂覆的顶层组成。在所述涂层中的所有层都具有压缩应力。
背景技术
金属的现代高生产率的形成切屑加工需要可靠的工具，其具有高的耐磨性、良好的韧性和优异的抗塑性变形性。这可以通过采用涂覆有耐磨涂层的硬质合金(cemented carbide)工具来实现。所述硬质合金工具通常为紧固在工具夹持器上的可转位刀片形状，但也可以为整体硬质合金钻刀或铣刀的形式。多年来，涂覆有多种类型的硬质层如TiC、Ti(CxNy)、TiN、(TixAly)N、Ti(CxOyNz)和Al2O3的硬质合金切削工具在商业上可以得到。多层结构中的几个硬质层通常建立了这类涂层。谨慎地选择单独层的顺序和厚度，以适合不同的切削应用区域和工件材料。
最通常地，涂层通过化学气相沉积(CVD)或物理气相沉积(PVD)技术来沉积。在有些少数情况下，也使用等离子体辅助的化学气相沉积(PACVD)。CVD涂覆的刀片具有高耐磨性和优异的涂层附着力，而PVD涂覆的刀片在耐磨性和附着力方面表现稍差，但是另一方面具有好得多的韧性。因此，CVD涂覆的刀片优选用于高速车削操作，而PVD涂覆的刀片则用于需要韧性的切削操作如铣削、剖削和钻削。
所述CVD技术最通常在相当高的温度范围下，850-1050℃下实施。由于高的沉积温度和由于在沉积的涂层材料与硬质合金工具基体间热膨胀系数的差异，所以CVD制造出的涂层具有冷却裂纹和拉伸应力相当高，通常在500-700MPa之间。所述拉伸应力状态降低了CVD涂覆的刀片的韧性。
PVD工艺在明显较低的温度，450-650℃下实施，并且在强离子轰击条件下进行，其导致了没有裂纹并且具有高的压缩应力，通常为1400-2000MPa的涂层。高的压缩应力和无冷却裂纹是使得PVD涂覆的刀片韧性明显高于CVD涂层刀片的主要因素。目前，不可能通过PVD制造如下Ti(CxNy)层，该Ti(CxNy)层具有高C含量并具有像通过CVD如公知的MTCVD工艺制备的一样的高耐磨性和优异的附着力。
CVD涂覆的刀片的韧性可以通过例如使用硬粗砂对刀片喷砂来提高，如在瑞典专利申请SE 0501410-5和SE 0500435-3中公开，以及如还在EP-A-1311712中公开。然而，所获得的韧性仍然远不及那些PVD涂覆的刀片。
先前已经尝试过将CVD和PVD涂层的不同特性结合在CVD+PVD涂层中，这种结合在美国专利US 5250367和US 5364209中公开。
发明内容
本发明的目的是提供制备涂覆的切削工具的方法，所述工具具有改进的韧性同时保持耐磨性。
本发明进一步的目的是提供涂覆的切削工具，其具有改进的韧性同时保持耐磨性。
令人惊奇地，现在已经发现，制备同时具有PVD涂覆的工具和CVD涂覆的工具的所有良好特性的切削工具是可能的。即，与PVD工具相当的韧性(压缩应力)及与CVD涂层工具相当的涂层附着力和耐磨性。
附图说明
图1显示了测角器装置，用于通过X射线测量法来评价残留应力，其中，
E＝欧拉1/4-托架
S＝试样
I＝入射的X光束
D＝衍射的X光束
θ＝衍射角
ω＝θ
Ψ＝沿着欧拉1/4-托架的倾斜角
Ф＝绕试样轴线的旋转角
依据本发明，提供了制造切削工具的方法，该切削工具至少部分地涂覆有内部的CVD涂层和外部的PVD涂层，该方法包括以下制备步骤：沉积所述CVD涂层，使所述CVD涂层至少部分地经受强烈的湿法喷砂操作，随后沉积所述PVD涂层。本发明可以应用于适合于通过车削、铣削、钻削或者通过类似的形成切屑的机械加工方法而对金属进行加工的切削工具，例如切削工具刀片和旋转切削工具。
为了获得涂覆有一个或多个耐磨层的切削工具的改进的韧性，依据本发明，已发现其必须遵照严格的制备工序。优选在适当低的温度750-850℃下，更优选通过公知的MTCVD技术，使用CH3CN作为C/N源，在由5-14重量％Co，0-8重量％Ti、Ta或Nb或者其组合的立方相碳化物(cubic carbide)，及余量的WC构成的硬质合金基体上，沉积2-7μm厚的内部CVD涂层，该CVD涂层优选包括一层或者多层硬质Ti(CxNy)层，其中x+y＝1且x和y大于等于0，优选0.5≤x≤0.6且0.4≤y≤0.5。然后优选在980-1030℃下在H2/N2气氛中对涂层热处理1-4小时。已经发现这是有利的步骤，因为其促进了元素向CVD层中的扩散，从而提高了涂层附着力。此外，在CVD涂覆中也可以沉积其它CVD层，这类层可以由金属氮化物、碳化物或氧化物或者其混合物组成，其中金属元素选自Ti、Nb、Hf、V、Ta、Mo、Zr、Cr、W和Al，例如由TiN、Ti(CxOy)、TiC、Ti(CxOyNz)或TiBN组成。
然后，为了得到使得CVD涂层的应力状态由拉伸应力状态转变为压缩应力状态，使所制得的涂层经受强烈的湿法喷砂操作，优选至少在前刀面上进行湿法喷砂操作。对于具有一层或多层硬质Ti(CxNy)层的实施方案来说，这些Ti(CxNy)层要求得到600-1600MPa的压缩应力，优选至少在前刀面上的压缩应力处于该范围内。所述湿法喷砂操作的目的还在于闭合位于涂层表面处的冷却裂纹。对于所采用的喷砂技术，喷砂介质可以优选为Al2O3粗砂在水中的浆料。冲击力通过喷浆的压力、喷砂喷嘴和涂层表面之间的距离、喷砂介质的颗粒尺寸、喷砂介质的浓度以及喷砂射流的冲击角度来控制。所使用的Al2O3粗砂尺寸优选为FE220(FEPA标准)，并且使用的鼓风压力为2.4-3.4巴。对于所使用的CVD材料和涂层厚度，本领域技术人员应该选择合适的喷砂条件以达到所期望的压缩应力水平。
而后在超声浴中小心地对所述工具进行清洗，然后再进一步涂覆2-7μm厚的外部的PVD涂层，该PVD涂层优选包括一个或多个如下物质的层：其中x、y＞0且x+y＝1的(TixAly)N，其中x、y、z＞0且x+y+z＝1的(TixAlySiz)N，其中x、y、z＞0且x+y+z＝1的(TixAlyCrz)，TiN，Ti(CxNy)和Al2O3，最优选包括其中x、y＞0且x+y＝1的(TixAly)N，得到的压缩应力为1000-2000MPa。所使用的PVD工艺的处理温度应该优选低于500℃。所述PVD工艺可以为已知技术的任一种：弧技术、磁控溅射和离子镀。
在本发明的一个实施方案中，对PVD工艺的工艺条件如偏压进行选择，使得最终涂层的应力比|σPVD涂层/σCVD Ti(CxNy)层|为0.9-1.8，例如，对于比例x/y接近于1的(TixAly)N的弧PVD工艺，选择偏压位于-(40-60)V的范围内。对于铝含量较高的(TixAly)N层来说，一般优选的偏压位于-(80-110)V范围内。
本发明还涉及具有通常的多边形或圆形形状的涂覆的切削工具刀片，或者旋转切削工具，其包括硬质合金基体，基体组成为5-14重量％Co，0-8重量％Ti、Ta或Nb或者其组合的立方相碳化物，及余量的WC，所述涂覆的切削工具刀片具有至少一个前刀面和至少一个间隙面(clearance face)，所述基体至少部分地涂覆有4-14μm厚的涂层，该涂层包括内部的2-7μm厚的CVD涂层和外部的2-7μm厚的PVD涂层，其中所述CVD涂层具有压缩应力，优选至少在前刀面上具有压缩应力，该压缩应力通过强烈的湿法喷砂操作来实现。所述CVD涂层优选包括一层或多层1-8μm，优选为2-5μm厚的Ti(CxNy)层，更优选为具有柱状结构的Ti(CxNy)层，其中x、y＞0且x+y＝1，该Ti(CxNy)层具有600-1600MPa的压缩应力，优选至少在前刀面上具有该压缩应力，而所述PVD涂层优选包括作为单层或者是多层结构的一层或多层1-5μm、优选2-4μm厚的如下物质的层：其中x、y＞0且x+y＝1的(TixAly)N，其中x、y、z＞0且x+y+z＝1的(TixAlySiz)N，其中x、y、z＞0且x+y+z＝1的(TixAlyCrz)，TiN，Ti(CxNy)和Al2O3，最优选其中x、y＞0且x+y＝1的(TixAly)N，所述PVD层压缩应力为1000-2000MPa。所述CVD涂层还可以附加地具有金属氮化物、碳化物或氧化物或者其组合的层，其中金属元素选自Ti、Nb、Hf、V、Ta、Mo、Zr、Cr、W和Al，例如TiN、Ti(CxOy)、TiC、Ti(CxOyNz)或TiBN。这些附加层的总厚度为0.5-4μm并且单个层的厚度＜1μm。
在所述CVD涂层和所述PVD涂层中的所有层具有压缩应力，其用sin2Ψ法通过XRD测量。
在一个示例性实施方案中，所述CVD涂层由内部的0.1-1μm的Ti(CxNy)层和外部的柱状的MTCVD-Ti(CxNy)层组成，内部Ti(CxNy)层中y＞0.8，优选为MTCVD-TiN层。
在另一个示例性实施方案中，所述CVD涂层由内部的0.1至＜1μm的TiN层和外部的柱状的2-5μm厚的TiCxNy层组成，外部TiCxNy层中x、y＞0且x+y＝1，并且所述PVD涂层包括2-4μm厚的(TixAly)N层，其中x、y＞0且x+y＝1。
在本发明的一个实施方案中，最终涂层的应力比|σPVD涂层/σCVD Ti(CxNy)层|为0.9-1.8。
层的残余应力，σ，通过XRD测量法用公知的sin2Ψ法评价，如由I.C.Noyan、J.B.Cohen，Residual Stress Measurement by Diffractionand Interpretation，Springer-Verlag，New York，1987(pp117-130)中所描述。该测量法将利用如图1所示的测角器装置，使用CuKα辐射进行。所述测量应当在平坦的表面上进行，表面和刃口线相距在2.5mm以内。作为五次测量的平均值，得到所述应力值。应当采用侧倾技术(Ψ几何法)，其利有在0-0.5(Ψ＝45°)的sin2Ψ范围内等距离的6-11个Ψ角。在90°的Ф扇形内等距离分布Ф角也是优选的。为了确认双轴应力状态，在倾斜Ψ角的同时，应当旋转样品Ф＝0°和90°。在欧拉1/4-托架的情况下，这通过对于不同的Ψ角也在Ф＝180°和270°测量样品来完成。所述sin2Ψ法用于评价残余应力，优选使用一些市场上可以买到的软件，例如得自Bruker AXS的DIFFRACPlus Stress 32v.1.04。用Pseudo-Voigt-Fit函数完成反射的定位。在双轴应力状态的情况下，计算拉伸应力作为所得到的双轴应力的平均值。下面的常数用于应力计算：
表1
| 层材料 | 泊松比υ | 杨式模量GPa | 反射峰 |
| Ti(C，N) | 0.20 | 480 | 422 |
| TiN | 0.22 | 450 | 422 |
| TiAlN、(TixAlySiz)N和(TixAlyCrz)N | 0.22 | 450 | 200 |
| α-Al2O3 | 0.26 | 380 | 416 |
具体实施方式
实施例1
刀片A
硬质合金切削刀片，型号为R390-11T308M-PM，其组成为12.6重量％Co、1.25重量％TaC、0.32重量％NbC和余量的WC，该刀片用常规的CVD技术在930℃下涂覆0.5μm厚的TiN层，然后用MTCVD技术，用TiCl4、H2、N2和CH3CN作为工艺气体，在840℃的温度下涂覆4μm的Ti(C0.57N0.43)层。通过XRD测定的晶格常数和利用维加德定律，测定所述层组成。在涂覆工艺后，把反应器温度升至1010℃，并将刀片在N2/H2气氛中热处理2小时。
XRD应力测量显示Ti(C0.57N0.43)层的拉伸应力为600-700MPa。
刀片B(现有技术)
利用Al2O3/水的浆料，在2.7巴压力下，对刀片A的前刀面进行湿法喷砂。XRD应力测量显示的压缩应力为1200-1600MPa。在SEM(扫描电子显微镜)中研究了经过喷砂后的涂覆表面，在变形的涂层表面上几乎没有观察到冷却裂纹。
刀片C(本发明)
将刀片B离子刻蚀30分钟，并采用偏压为-40V且工艺温度为490℃的弧基PVD技术涂覆3μm的(TixAly)N，其中比例x/y接近1。在PVD工艺后，对Ti(C0.57N0.43)层和(Ti0.5Al0.5)N层中的应力进行测量，发现其均为压缩应力，并且分别为1000-1400MPa和1300-1800MPa。
刀片D(现有技术)
使用和刀片C相同的PVD工艺，使刀片A涂覆有3μm的(TixAly)N。在PVD工艺后，对Ti(C0.57N0.43)层和(Ti0.5Al0.5)N层的应力进行测量，发现分别为700-900MPa的拉伸应力和1300-1600MPa的压缩应力。
刀片E(本发明外)
使用和刀片C相同的PVD工艺，使刀片A涂覆有3μm的(TixAly)N层。在PVD工艺后，对Ti(C0.57N0.43)层和(Ti0.5Al0.5)N层的应力进行测量，发现分别为700-900MPa的拉伸应力和1300-1600MPa的压缩应力。利用Al2O3/水浆料，在6.2巴压力下，对所述刀片的前刀面进行强烈的湿法喷砂操作，以获得期望的压缩应力。对Ti(C0.57N0.43)层和(Ti0.5Al0.5)N层的应力进行测量，发现为600-700Mpa的压缩应力。然而，在所述喷砂操作过程中，刀片外部PVD涂层上发生了严重的片状剥落和损伤，以及在刃口处发生损伤，这是由于想要获得所需的压缩应力而必需的高鼓风压力所导致的。刀片E因而排除在任何后续试验之外。
在X射线衍射仪Bruker D8 Discover-GADDS上用Ψ几何法评价残余应力，该衍射仪装备有激光视频定位，欧拉1/4托架，作为X射线源(CuKα辐射)的旋转阳极和面检测器(area detector)(Hi-Star)。使用尺寸为0.5mm的准直仪来聚焦射线束。对于每一个Ф角，进行0°-70°之间的8个Ψ倾角。利用得自Bruker AXS的软件DIFFRACPlus Stress 32v.1.04，与依据表1记载的常数，并且用Pseudo-Voigt-Fit函数定位反射，采用sin2Ψ方法来评价残余应力。确认双轴应力状态，并用平均值作为残余应力值。所有测量都在平坦的表面上进行，表面和前刀面的刃口线相距在2.5mm以内。
实施例2
在对韧性要求都很高的两组铣削操作中，对来自实施例1的刀片B、C和D进行试验。使用如下的条件：
切削试验1
在合金钢SS2541上进行铣削操作。工件为矩形块。铣刀从其长边侧进入工件多次，条件被归类为“难于进入”。
干燥条件
切削速度 V＝200m/分钟
每齿走刀量 Fz＝0.17mm/Z
轴向切削深度Ap＝3mm
径向切削深度Ae＝16mm
齿数 ＝1
在工件上运行三个刀片(每个刀片的一个刃口)。表示为在刃口发生碎裂之前能完成的进入次数的寿命在下面表2中给出。
表2 在破裂之前能完成的进入次数
| 切削试验 | 刀片CCVD+喷砂+PVD(本发明) | 刀片BCVD+喷砂(现有技术) | 刀片DCVD+PVD(现有技术) |
| 1 | 29 | 18 | 8 |
切削试验2
在合金钢SS2244上进行铣削操作。工件形状为薄且长的条状，其厚度远远小于铣刀的直径。铣刀沿纵向通过该条状工件，条件被归类为“难于退出”。
湿润状态
切削速度 V＝150m/分钟
每齿走刀量 Fz＝0.15mm/Z
轴向切削深度Ap＝3mm
径向切削深度Ae＝7mm
齿数 ＝2
在工件上运行3×2刀片(一个刃口/刀片)。表示为用在刃口破裂之前所能完成的条数的寿命在下面表3中给出。
表3 在破裂之前能完成的条数
| 切削试验 | 刀片CCVD+喷砂+PVD(本发明) | 刀片BCVD+喷砂(现有技术) | 刀片DCVD+PVD(现有技术) |
| 2 | 26 | 20 | 10 |
切削试验的结果清楚地表明，利用依照本发明制备得到的刀片，刀片C达到了总的来说最好的韧性。
Claims (9)
1.制造切削工具的方法，该切削工具至少部分地涂覆有内部的CVD涂层和外部PVD涂层，所述内部的CVD涂层包含一层或多层Ti(CxNy)层，其特征在于，包括如下的制备步骤：沉积所述CVD涂层，使所述CVD涂层至少部分地经受强烈的湿法喷砂操作，使得所述一层或多层Ti(CxNy)层获得600-1600MPa的压缩应力，随后沉积所述PVD涂层，所述PVD涂层具有1000至2000MPa的压缩应力，并且最终涂层的应力比︱σPVD涂层/σCVD Ti(CxNy)层︱为0.9至1.8。
2.如权利要求1所述的方法，其特征在于，在沉积所述CVD涂层之后但在所述强烈的湿法喷砂操作之前，在980-1030℃下，于H2/N2气氛中进行促进扩散的热处理步骤1-4小时。
3.如权利要求2所述的方法，其特征在于，使用由在水中的Al2O3的F220粗砂组成的浆料，在2.3-3.2巴的空气压力下，进行所述喷砂操作。
4.涂覆的切削工具刀片，其包括硬质合金基体，基体组成为：5-14重量%Co，0-8重量%Ti、Ta或Nb或者其组合的立方相碳化物，及余量的WC，所述基体至少部分地涂覆有4-14μm厚的涂层，该涂层包括内部的CVD涂层和外部的PVD涂层，所述内部的CVD涂层包含一层或多层Ti(CxNy)层，其特征在于所述一层或多层Ti(CxNy)层具有600-1600MPa的压缩应力，所述PVD涂层具有1000至2000MPa的压缩应力，并且最终涂层的应力比︱σPVD涂层/σCVD Ti(CxNy)层︱为0.9至1.8。
5.如权利要求4所述的涂覆的切削工具刀片，其特征在于，所述CVD涂层包括一层或多层1-8μm厚的Ti(CxNy)层，其中x、y>0且x+y=1，所述Ti(CxNy)层的压缩应力为600-1600MPa。
6.如权利要求5所述的涂覆的切削工具刀片，其特征在于，所述一层或多层Ti(CxNy)层为2-5μm厚，其中x、y>0且x+y=1。
7.如权利要求4至6中任一项所述的涂覆的切削工具刀片，其特征在于，所述PVD涂层包括如下物质的一种或多种：其中x、y>0且x+y=1的(TixAly)N，其中x、y、z>0且x+y+z=1的(TixAlySiz)N，其中x、y、z>0且x+y+z=1的(TixAlyCrz)，TiN，Ti(CxNy)和Al2O3。
8.如权利要求4至6中任一项所述的涂覆的切削工具刀片，其特征在于，所述CVD涂层具有金属氮化物、碳化物或氧化物或者其组合的附加层，其中所述金属元素选自Ti、Nb、Hf、V、Ta、Mo、Zr、Cr、W和Al。
9.涂覆的旋转切削工具，其包括硬质合金基体，该基体组成为5-14重量%Co，0-8重量%Ti、Ta或Nb或者其组合的立方相碳化物，及余量的WC，所述基体至少部分地涂覆有4-14μm厚的涂层，该涂层包括内部的CVD涂层和外部的PVD涂层，所述内部的CVD涂层包含一层或多层Ti(CxNy)层，其特征在于所述CVD涂层具有600-1600MPa的压缩应力，所述PVD涂层具有1000至2000MPa的压缩应力，并且最终涂层的应力比︱σPVD涂层/σCVD Ti(CxNy)层︱为0.9至1.8。
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| SE0601950-9 | 2006-09-15 | ||
| SE0601950A SE530756C2 (sv) | 2006-09-15 | 2006-09-15 | Sätt att tillverka ett belagt skärverktyg av hårdmetall, ett belagt skär och ett belagt roterande skärverktyg |
| SE06019509 | 2006-09-15 | ||
| PCT/EP2007/059376 WO2008031768A1 (en) | 2006-09-15 | 2007-09-07 | Coated cutting tool |
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| CN101517127B true CN101517127B (zh) | 2014-07-30 |
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| EP (1) | EP2074241B1 (zh) |
| JP (1) | JP2010512251A (zh) |
| KR (1) | KR20090052875A (zh) |
| CN (1) | CN101517127B (zh) |
| IL (1) | IL197514A0 (zh) |
| SE (1) | SE530756C2 (zh) |
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| SE532049C2 (sv) * | 2008-03-07 | 2009-10-13 | Seco Tools Ab | Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål |
| EP2287359B1 (en) * | 2009-07-03 | 2012-05-23 | Sandvik Intellectual Property AB | Coated cutting tool insert |
| US8323783B2 (en) * | 2009-11-10 | 2012-12-04 | Kennametal Inc. | Coated cutting insert and method for making the same |
| JP5856805B2 (ja) * | 2010-11-01 | 2016-02-10 | 株式会社アルバック | 真空部品の製造方法 |
| AT510963B1 (de) † | 2011-03-18 | 2012-08-15 | Boehlerit Gmbh & Co Kg | Beschichteter körper und verfahren zu dessen herstellung |
| ES2532898T3 (es) | 2011-06-30 | 2015-04-01 | Lamina Technologies Sa | Deposición por arco catódico |
| EP2604720A1 (en) * | 2011-12-14 | 2013-06-19 | Sandvik Intellectual Property Ab | Coated cutting tool and method of manufacturing the same |
| AT511950B1 (de) * | 2012-03-14 | 2013-04-15 | Boehlerit Gmbh & Co Kg | Beschichteter Körper und Verfahren zum Beschichten eines Körpers |
| DE102013104254A1 (de) | 2013-04-26 | 2014-10-30 | Walter Ag | Werkzeug mit CVD-Beschichtung |
| EP3228726A1 (en) * | 2016-04-08 | 2017-10-11 | Seco Tools Ab | Coated cutting tool |
| CN110484892B (zh) * | 2019-09-19 | 2021-04-27 | 中南大学 | 一种高切削寿命Al2O3基CVD涂层合金及其制备方法 |
| EP3872222B1 (en) * | 2020-02-28 | 2022-12-28 | AB Sandvik Coromant | A coated cutting tool |
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| US5250367A (en) | 1990-09-17 | 1993-10-05 | Kennametal Inc. | Binder enriched CVD and PVD coated cutting tool |
| JPH0657409A (ja) | 1992-08-11 | 1994-03-01 | Mitsubishi Materials Corp | 強度および耐摩耗性に優れた硬質層複合被覆切削工具の製造方法 |
| JP3269305B2 (ja) | 1994-12-28 | 2002-03-25 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた層間密着性を有する表面被覆炭化タングステン基超硬合金製切削工具 |
| US5722803A (en) * | 1995-07-14 | 1998-03-03 | Kennametal Inc. | Cutting tool and method of making the cutting tool |
| US5976707A (en) * | 1996-09-26 | 1999-11-02 | Kennametal Inc. | Cutting insert and method of making the same |
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| EP1311712A2 (de) | 2001-03-27 | 2003-05-21 | Widia GmbH | Verfahren zur erhöhung der druckspannung oder zur erniedrigung der zugeigenspannung einer schicht |
| JP4562401B2 (ja) | 2003-02-17 | 2010-10-13 | 京セラ株式会社 | 表面被覆切削工具 |
| US7244519B2 (en) | 2004-08-20 | 2007-07-17 | Tdy Industries, Inc. | PVD coated ruthenium featured cutting tools |
| JP2006192545A (ja) | 2005-01-14 | 2006-07-27 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具およびその製造方法 |
| SE529023C2 (sv) | 2005-06-17 | 2007-04-10 | Sandvik Intellectual Property | Belagt skär av hårdmetall |
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| US5364209A (en) * | 1990-09-17 | 1994-11-15 | Kennametal Inc. | CVD and PVD coated cutting tools |
| CN1824440A (zh) * | 2005-02-25 | 2006-08-30 | 山特维克知识产权股份有限公司 | 涂覆切削刀片 |
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| US8409733B2 (en) | 2013-04-02 |
| IL197514A0 (en) | 2009-12-24 |
| CN101517127A (zh) | 2009-08-26 |
| US20100061812A1 (en) | 2010-03-11 |
| KR20090052875A (ko) | 2009-05-26 |
| EP2074241B1 (en) | 2018-11-14 |
| SE0601950L (sv) | 2008-03-16 |
| JP2010512251A (ja) | 2010-04-22 |
| WO2008031768A1 (en) | 2008-03-20 |
| EP2074241A1 (en) | 2009-07-01 |
| SE530756C2 (sv) | 2008-09-02 |
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