CN101510528B - 金属氧化物半导体p-n结二极管结构及其制作方法 - Google Patents
金属氧化物半导体p-n结二极管结构及其制作方法 Download PDFInfo
- Publication number
- CN101510528B CN101510528B CN2009101325654A CN200910132565A CN101510528B CN 101510528 B CN101510528 B CN 101510528B CN 2009101325654 A CN2009101325654 A CN 2009101325654A CN 200910132565 A CN200910132565 A CN 200910132565A CN 101510528 B CN101510528 B CN 101510528B
- Authority
- CN
- China
- Prior art keywords
- layer
- photoresist
- metal
- irrigation canals
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 27
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 47
- 239000002184 metal Substances 0.000 claims abstract description 47
- 238000000034 method Methods 0.000 claims abstract description 42
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 42
- 230000008569 process Effects 0.000 claims abstract description 23
- 238000005468 ion implantation Methods 0.000 claims abstract description 15
- 238000005530 etching Methods 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 98
- 230000002262 irrigation Effects 0.000 claims description 50
- 238000003973 irrigation Methods 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 49
- 238000002347 injection Methods 0.000 claims description 39
- 239000007924 injection Substances 0.000 claims description 39
- 238000005516 engineering process Methods 0.000 claims description 38
- 238000010276 construction Methods 0.000 claims description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000013047 polymeric layer Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000005121 nitriding Methods 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 230000036632 reaction speed Effects 0.000 abstract description 7
- 238000001259 photo etching Methods 0.000 abstract description 6
- 150000002500 ions Chemical class 0.000 description 13
- 238000011084 recovery Methods 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- -1 boron ion Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005755 formation reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Images
Landscapes
- Electrodes Of Semiconductors (AREA)
- Element Separation (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101325654A CN101510528B (zh) | 2009-04-02 | 2009-04-02 | 金属氧化物半导体p-n结二极管结构及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101325654A CN101510528B (zh) | 2009-04-02 | 2009-04-02 | 金属氧化物半导体p-n结二极管结构及其制作方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110221706.7A Division CN102254934B (zh) | 2009-04-02 | 2009-04-02 | 金属氧化物半导体p-n结二极管结构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101510528A CN101510528A (zh) | 2009-08-19 |
CN101510528B true CN101510528B (zh) | 2011-09-28 |
Family
ID=41002865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101325654A Active CN101510528B (zh) | 2009-04-02 | 2009-04-02 | 金属氧化物半导体p-n结二极管结构及其制作方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101510528B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6404033B1 (en) * | 1999-04-01 | 2002-06-11 | Apd Semiconductor, Inc. | Schottky diode having increased active surface area with improved reverse bias characteristics and method of fabrication |
CN1366710A (zh) * | 2000-04-06 | 2002-08-28 | Apd半导体公司 | 制备功率整流器装置以改变操作参数的方法及其制得的装置 |
CN1485909A (zh) * | 2002-08-21 | 2004-03-31 | �Ҵ���˾ | 改进微电子电路的性能的方法 |
CN1577753A (zh) * | 2003-07-26 | 2005-02-09 | 海力士半导体有限公司 | 制造半导体器件的栅电极的方法 |
CN1669145A (zh) * | 2002-05-16 | 2005-09-14 | 斯平内克半导体股份有限公司 | 肖特基壁垒cmos器件及其方法 |
-
2009
- 2009-04-02 CN CN2009101325654A patent/CN101510528B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6404033B1 (en) * | 1999-04-01 | 2002-06-11 | Apd Semiconductor, Inc. | Schottky diode having increased active surface area with improved reverse bias characteristics and method of fabrication |
CN1366710A (zh) * | 2000-04-06 | 2002-08-28 | Apd半导体公司 | 制备功率整流器装置以改变操作参数的方法及其制得的装置 |
CN1669145A (zh) * | 2002-05-16 | 2005-09-14 | 斯平内克半导体股份有限公司 | 肖特基壁垒cmos器件及其方法 |
CN1485909A (zh) * | 2002-08-21 | 2004-03-31 | �Ҵ���˾ | 改进微电子电路的性能的方法 |
CN1577753A (zh) * | 2003-07-26 | 2005-02-09 | 海力士半导体有限公司 | 制造半导体器件的栅电极的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101510528A (zh) | 2009-08-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101151732B (zh) | 包括功率二极管的集成电路 | |
CN102629623B (zh) | 包含宽沟渠终端结构的半导体元件 | |
US7514751B2 (en) | SiGe DIAC ESD protection structure | |
CN102254944A (zh) | 一种沟槽mosfet功率整流器件及制造方法 | |
TWI381455B (zh) | 金氧半p-n接面二極體結構及其製作方法 | |
CN109509795B (zh) | 一种具有复合沟槽结构的碳化硅肖特基器件及其制造方法 | |
CN105789331A (zh) | 半导体整流器件及其制作方法 | |
CN103208529A (zh) | 半导体二极管以及用于形成半导体二极管的方法 | |
CN114628494A (zh) | 一种新型超级浮动结碳化硅功率器件及其制备方法 | |
CN109904152A (zh) | 集成肖特基二极管的沟槽mosfet的制备方法 | |
CN104241363B (zh) | 沟渠式mos整流元件及其制造方法 | |
CN101533804B (zh) | 金属氧化物半导体p-n结萧基二极管结构及其制作方法 | |
CN101510528B (zh) | 金属氧化物半导体p-n结二极管结构及其制作方法 | |
CN104733526A (zh) | 沟渠式金氧半p-n接面二极管结构及其制作方法 | |
CN106611798A (zh) | 一种n型碳化硅半导体肖特基二极管结构 | |
CN103094100B (zh) | 一种形成肖特基二极管的方法 | |
CN101789400A (zh) | 一种半导体整流器件的制造方法及所得器件 | |
CN206059399U (zh) | 一种沟槽肖特基二极管 | |
CN109119473A (zh) | 一种晶体管及其制作方法 | |
CN105762198A (zh) | 沟槽式快恢复二极管及其制备方法 | |
CN102254934A (zh) | 金属氧化物半导体p-n结二极管结构 | |
CN210607276U (zh) | 一种基于肖特基结构的沟槽式功率器件 | |
CN104241283B (zh) | 双沟渠式整流器及其制造方法 | |
CN102254819B (zh) | 低栅容金属氧化物半导体p-n 结二极管结构及其制作方法 | |
TWI532193B (zh) | 溝渠式金氧半p-n接面二極體結構及其製作方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CI01 | Publication of corrected invention patent application |
Correction item: Manual, drawings, abstract, drawings Correct: Correct False: Error Number: 39 Volume: 27 |
|
CI02 | Correction of invention patent application |
Correction item: Manual, drawings, abstract, drawings Correct: Correct False: Error Number: 39 Page: Description Volume: 27 |
|
ERR | Gazette correction |
Free format text: CORRECT: FIGURE OF DESCRIPTION FIGURE OF ABSTRACT; FROM: ERROR TO: CORRECT |