CN101510523A - Substrate overturn platform and method for substrate overturn - Google Patents
Substrate overturn platform and method for substrate overturn Download PDFInfo
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- CN101510523A CN101510523A CNA2009101280386A CN200910128038A CN101510523A CN 101510523 A CN101510523 A CN 101510523A CN A2009101280386 A CNA2009101280386 A CN A2009101280386A CN 200910128038 A CN200910128038 A CN 200910128038A CN 101510523 A CN101510523 A CN 101510523A
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Abstract
The invention discloses a method of base plate roll-over platform and roll-over base plate, which is used for absorbing and turning over the base plate. The base plate roll-over platform comprises a fixed mount, a roll-over stand and an airflow guiding device. The roll-over stand is articulated on the fixed mount and the interior of the roll-over stand is hollow. The roll-over stand has an adsorption surface suitable for absorbing the base plate and the adsorption surface is provided with a plurality of first lead holes and a plurality of second lead holes. The airflow guiding device comprises a first pipeline unit and a second pipeline unit. One end of the first pipeline unit stretches into the interior of the roll-over stand and extends into the first lead holes, while one end of the second pipeline unit stretches into the interior of the roll-over stand and extends into the second lead holes, furthermore, the first pipeline unit and the second pipeline unit are mutually independent and are not communicated with each other. The base plate roll-over platform can prevent the base plate from dropping off during the roll-over process.
Description
Technical field
The invention relates to a kind of overturn platform, and particularly relevant for a kind of method of adsorbing the substrate overturn platform of substrate and substrate overturn and being used for its substrate overturn of being used to.
Background technology
Along with the progress of lcd technology adds advantages such as liquid crystal indicator has in light weight and volume is little, liquid crystal indicator has been widely used in multiple electronic product, as digital camera, personal digital assistant (personal digital assistant, PDA), mobile phone, notebook computer (notebook computer) and thin plane TV etc.Liquid crystal indicator comprises display panels and backlight module, and wherein display panels is made of two substrates and the liquid crystal layer between this two substrate.In the process with this two substrates assembling, need elder generation with one of them substrate turn-over, carries out the substrate assembling by overturn platform afterwards again.
Figure 1A and Figure 1B are the schematic top plan view and the schematic side view of known a kind of substrate overturn platform.Please refer to Figure 1A and Figure 1B, known substrate overturn platform 100 comprises rollover stand 110 and fixed mount 120, and rollover stand 110 is to be articulated on (pivot joint) fixed mount 120.The surface 112 of rollover stand 110 is provided with a plurality of stay pipes 114, and the top of each stay pipe 114 all is provided with an absorption layer 116, and each absorption layer 116 all has fairlead 117.In addition, rollover stand 110 inside are hollow, and rollover stand 110 inside are provided with many pipelines (figure does not show), one end of these pipelines extends to the fairlead 117 of absorption layer 116 via stay pipe 114 inside, the other end then is connected to Trunk Line, and is connected to rollover stand 110 vacuum source outward by this Trunk Line.So, when vacuum source was opened, absorption layer 116 promptly can be used to adsorb substrate.
Fig. 2 A to Fig. 2 C is the flow chart of in the known technology two substrates being assembled.Please earlier with reference to Fig. 2 A, the flow process of the substrate assembling of known technology is to come bearing substrate 50 with mechanical arm 10 earlier, wherein mechanical arm 10 has a plurality of absorption layers 12, and it is that the front of substrate 50 then is formed with chromatic filter layer 54 in order to the back side 52 of absorption substrate 50.Then, by mechanical arm 10 substrate 50 is positioned on the absorption layer 116.Then, open vacuum source, adsorbing the back side 52 of substrate 50 by absorption layer 116, and mechanical arm 10 is removed.
Afterwards, please refer to Fig. 2 B, with 180 ° of rollover stand 110 upsets, so that substrate 50 turn-overs.The back side 52 of then, adsorbing substrate 50 by the absorption layer 22 of another mechanical arm 20.Afterwards, close vacuum source, and substrate 50 is removed by mechanical arm 20.
Then, please refer to Fig. 2 C, substrate 50 is moved to the offside of another substrate 60, wherein the front of substrate 60 is formed with drive circuit layer 62, and is coated with frame glue 70, and the chromatic filter layer 54 of substrate 50 is relative with the drive circuit layer 62 of substrate 60.Then, with substrate 50 and substrate 60 assemblings, and by frame glue 70 in conjunction with substrate 50 and substrate 60.
In known technology; because being arranged at the pipeline of rollover stand 110 inside is to be connected to same vacuum source by Trunk Line; so when the contact-making surface of unusual or substrate 50 and absorption layer 116 has particulate when vacuum source, cause the absorption affinity deficiency of absorption layer 116 easily.So, when substrate overturn 50, be easy to generate the situation of vacuum breaker, thereby cause substrate 50 to drop.This not only loses substrate 50, also need stop whole technology and carry out follow-up cleanup action, so can cost of idle time.
Summary of the invention
The invention provides a kind of substrate overturn platform, to reduce the probability that substrate drops in the process of upset.
The present invention provides a kind of method of substrate overturn in addition, drops in the process of upset to prevent substrate.
For reaching above-mentioned advantage, the present invention proposes a kind of substrate overturn platform, and it is in order to absorption substrate and substrate overturn.This substrate overturn platform comprises fixed mount, rollover stand and airflow guidance device.Rollover stand is articulated on the fixed mount, and rollover stand inside is hollow.Rollover stand has the adsorption plane that is suitable for adsorbing substrate, and adsorption plane is provided with a plurality of first fairleads and a plurality of second fairlead.Airflow guidance device comprises first pipeline unit and second pipeline unit.It is inner and extend to first fairlead that one end of first pipeline unit stretches into rollover stand, and that an end of second pipeline unit stretches into rollover stand is inner and extend to second fairlead, and first pipeline unit and second pipeline unit are independently of one another, not connected.
For reaching above-mentioned advantage, the present invention proposes a kind of substrate overturn platform in addition, and it comprises fixed mount, rollover stand, a plurality of first absorption layer, a plurality of second absorption layer, first negative pressure source and second negative pressure source.Rollover stand is articulated on the fixed mount, and first absorption layer and second absorption layer are matrix and alternately are arranged on the rollover stand.First negative pressure source is connected in first absorption layer, and second negative pressure source is connected in second absorption layer.
For reaching above-mentioned advantage, the present invention proposes a kind of method of substrate overturn, and it comprises the following step: at first, provide above-mentioned substrate overturn platform and substrate.Then, substrate is loaded on the rollover stand.Afterwards, drive first negative pressure source, so that first absorption layer absorption substrate.Then, 180 ° of overturn rollover stand and substrates.
In substrate overturn platform of the present invention, because rollover stand is to be connected to different negative pressure sources, so when negative pressure that one of them negative pressure source provided lost efficacy, also can adsorb substrate, so can reduce the probability that substrate drops in switching process by the negative pressure that another negative pressure source provided.In addition, the method for turning of substrate of the present invention drops in the process of upset so can prevent substrate because of using above-mentioned substrate overturn platform.
Description of drawings
Figure 1A and Figure 1B are the schematic top plan view and the schematic side view of known a kind of substrate overturn platform;
Fig. 2 A to Fig. 2 C is the flow chart of in the known technology two substrates being assembled;
Fig. 3 is the vertical view of a kind of substrate overturn platform of one embodiment of the invention;
Fig. 4 is the generalized section along I-I ' line among Fig. 3;
Fig. 5 is the schematic diagram of airflow guidance device;
Fig. 6 A to Fig. 6 C is the flow chart of method of a kind of substrate overturn of one embodiment of the invention;
Fig. 7 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention;
Fig. 8 is the generalized section along II-II ' line and the III-III ' line of Fig. 7;
Fig. 9 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention;
Figure 10 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention;
Figure 11 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention;
Figure 12 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention;
Figure 13 is the schematic diagram of the arrangement mode of a kind of part first fairlead of substrate overturn platform of another embodiment of the present invention and second fairlead;
Figure 14 is the schematic diagram of the arrangement mode of a kind of first fairlead of substrate overturn platform of another embodiment of the present invention and second fairlead.
Drawing reference numeral
10,20,30,40: mechanical arm
12,22,32,42: absorption layer
50,60,80: substrate
52: the back side
54: chromatic filter layer
62: drive circuit layer
70: frame glue
100,200: overturn platform
110,220: rollover stand
112: the surface
114: stay pipe
116: absorption layer
117: fairlead
120,210: fixed mount
211: adsorption plane
222: the first fairleads
223: the second fairleads
224: the sealing frame
225: hollow posts
226: the articulated section
230a: first stay pipe
230b: second stay pipe
240a: first absorption layer
240b: second absorption layer
242: the three fairleads
250a: first negative pressure source
250b: second negative pressure source
260: airflow guidance device
261,262: the first pipeline unit
261a: first vacuum pipeline
261b: first vacuum manifold
262a: first pipeline
262b: second pipeline
262c: the 3rd pipeline
263,264: the second pipeline unit
263a: second vacuum pipeline
263b: second vacuum manifold
264a: the 4th pipeline
264b: the 5th pipeline
264c: the 6th pipeline
265a: first base segment
265b: first extension
267a: second base segment
267b: second extension
269a: parallel-segment
269b: linkage section
270a: first control valve
270b: second control valve
A1: first direction
A2: second direction
A3: predetermined direction
C: geometric center
D1: first distance
D2: second distance
Ds: minimum range
M1, M2:3 * 3 arrays
θ 1: angle
θ 2: bending angle
Embodiment
For above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, preferred embodiment cited below particularly, and cooperate appended accompanying drawing, be described in detail below.
Fig. 3 is the vertical view of a kind of substrate overturn platform of one embodiment of the invention, and Fig. 4 is the generalized section along I-I ' line among Fig. 3, and Fig. 5 is the schematic diagram of airflow guidance device.Please refer to Fig. 3 to Fig. 5, the substrate overturn platform 200 of present embodiment is in order to absorption substrate and substrate overturn.This substrate overturn platform 200 comprises fixed mount 210 and rollover stand 220.Rollover stand 220 is articulated on the fixed mount 210, and rollover stand 220 inside are hollow.Rollover stand 220 has the adsorption plane 211 that is suitable for adsorbing substrate, and adsorption plane 211 is provided with a plurality of first fairleads 222 and a plurality of second fairleads 223.This rollover stand 220 for example comprises sealing frame 224 and a plurality of hollow posts 225.Sealing frame 224 is a hollow with the inside of hollow posts 225, and hollow posts 225 is connected in sealing frame 224.The inner space of each hollow posts 225 all communicates with the inner space of sealing frame 224, and above-mentioned adsorption plane 211 for example is that the surface institute towards the same side by these hollow posts 225 is constituted.In addition, sealing frame 224 has rotating shaft, and this rotating shaft comprises relative two articulated sections (pivot) 226.These two articulated sections 226 are positioned at the relative dual side-edge of sealing frame 224, and are articulated on the fixed mount 210.In addition, each hollow posts 225 is provided with first fairlead 222 and second fairlead 223.First fairlead 222 of each hollow posts 225 and second fairlead 223 for example are to arrange along the bearing of trend of hollow posts 225, and first fairlead 222 and second fairlead 223 are to be arranged alternately.
Above-mentioned substrate overturn platform 200 can more comprise a plurality of stay pipes, as a plurality of first stay pipe 230a and a plurality of second stay pipe 230b.The end of the first stay pipe 230a is connected to one first fairlead 222, the end of the second stay pipe 230b then is connected to one second fairlead 223, the first stay pipe 230a and the second stay pipe 230b arrange along the bearing of trend of hollow posts 225, and the first stay pipe 230a and the second stay pipe 230b are arranged alternately.In addition, substrate overturn platform 200 can more comprise a plurality of absorption layers, as a plurality of first absorption layer 240a and a plurality of second absorption layer 240b.The first absorption layer 240a and the second absorption layer 240b have one the 3rd fairlead 242 respectively.The first absorption layer 240a is the other end that is sheathed on the first stay pipe 230a, and the 3rd fairlead 242 of the first absorption layer 240a is to communicate with corresponding first fairlead 222 by the first stay pipe 230a.The second absorption layer 240b is the other end that is sheathed on the second stay pipe 230b, and the 3rd fairlead 242 of the second absorption layer 240b is to communicate with corresponding second fairlead 223 by the second stay pipe 230b.
Hold above-mentionedly, the first absorption layer 240a and the second absorption layer 240b are matrix and alternately are arranged on the rollover stand 220.In more detail, in each row of above-mentioned array, the first absorption layer 240a and the second absorption layer 240b are arranged alternately, and in each row of above-mentioned array, the first absorption layer 240a and the second absorption layer 240b are arranged alternately.In other words, first fairlead 222 and second fairlead 223 on the adsorption plane 211 are to be arrayed, and in each row of array, first fairlead 222 and second fairlead 223 are to be arranged alternately, in each row of array, first fairlead 222 and second fairlead 223 are to be arranged alternately.In addition, each the first absorption layer 240a and the second absorption layer 240b have an absorption layer diameter, and the scope of absorption layer diameter for example is between 20 millimeters and 32 millimeters.In addition, have a minimum range Ds between the adjacent first absorption layer 240a and the second absorption layer 240b, and the scope of this minimum range Ds for example is between 12 centimetres and 29 centimetres.Have one first distance D 1 between the adjacent first absorption layer 240a, and this first distance D 1 is greater than minimum range Ds.Have a second distance D2 between the adjacent second absorption layer 240b, and this second distance D2 is greater than minimum range Ds.Particularly, the scope of first distance D 1 for example is between 35 centimetres and 45 centimetres, and the scope of second distance D2 is for example between 35 centimetres and 45 centimetres.
The substrate overturn platform 200 of present embodiment can more comprise one first negative pressure source 250a and one second negative pressure source 250b, and this first negative pressure source 250a and the second negative pressure source 250b for example are vacuum source.The first negative pressure source 250a is connected in the first absorption layer 240a, and the second negative pressure source 250b is connected in the second absorption layer 240b.Substrate overturn platform 200 can more comprise airflow guidance device 260, and the first absorption layer 240a and the second absorption layer 240b are connected to the first negative pressure source 250a and the second negative pressure source 250b by airflow guidance device 260.Particularly, airflow guidance device 260 comprises first pipeline unit 262 and second pipeline unit 264, wherein the first absorption layer 240a is connected to the first negative pressure source 250a by first pipeline unit 262, and the second absorption layer 240b is connected to the second negative pressure source 250b by second pipeline unit 264.One end of first pipeline unit 262 for example is to be connected to the first negative pressure source 250a by the first control valve 270a, it is inner and extend to first fairlead 222 that the other end stretches into rollover stand 220, and extend to the 3rd fairlead 242 of the first absorption layer 240a via first fairlead 222 and the first stay pipe 230a.One end of second pipeline unit 264 for example is to be connected to the second negative pressure source 250b by the second control valve 270b, it is inner and extend to second fairlead 223 that the other end stretches into rollover stand 220, and extend to the 3rd fairlead 242 of the second absorption layer 240b via second fairlead 223 and the second stay pipe 230b.In addition, first pipeline unit 262 and second pipeline unit 264 are independently of one another, not connected.The first above-mentioned control valve 270a and the second control valve 270b for example are electromagnetically operated valve.
The first above-mentioned pipeline unit 262 comprises the first pipeline 262a, many second pipeline 262b and many 3rd pipeline 262c.The end of the first pipeline 262a for example is to be connected to the first negative pressure source 250a by the first control valve 270a, and the other end stretches in the sealing frame 224.The end of each second pipeline 262b connects the first pipeline 262a, and the other end stretches in the hollow posts 225, and extends along the bearing of trend of hollow posts 225.The 3rd pipeline 262c is positioned at the first stay pipe 230a, and the end of each the 3rd pipeline 262c connects the second corresponding pipeline 262b, and, extend to the 3rd fairlead 242 of the first absorption layer 240a along the bearing of trend of the first stay pipe 230a via first fairlead 222.In addition, the second above-mentioned pipeline unit 264 comprises the 4th pipeline 264a, many 5th pipeline 264b and many 6th pipeline 264c.The end of the 4th pipeline 264a for example is to be connected to the second negative pressure source 250b by the second control valve 270b, and the other end stretches in the sealing frame 224.The end of each the 5th pipeline 264b connects the 4th pipeline 264a, and the other end stretches in the hollow posts 225, and extends along the bearing of trend of hollow posts 225.The 6th pipeline 264c is positioned at the second stay pipe 230b, and the end of each the 6th pipeline 264c connects the 5th corresponding pipeline 264b, and, extend to the 3rd fairlead 242 of the second absorption layer 240b along the bearing of trend of the second stay pipe 230b via second fairlead 223.In addition, the inside of two above-mentioned articulated sections 226 for example is hollow, and first pipeline unit 262 and second pipeline unit 264 for example be through two articulated sections 226 thus at least the inside of one of them stretch into rollover stand 220 inside.In other words, first pipeline unit 262 and second pipeline unit 264 can stretch in the rollover stand 220 via the inside of same articulated section 226, or stretch in the rollover stand 220 via the inside of different articulated sections 226.
Hold above-mentionedly, the first pipeline 262a for example is the first trunk vacuum hose, and each second pipeline 262b for example is a branch vacuum hose for the first time, and each the 3rd pipeline 262c for example is one first an end vacuum hose.These second pipelines 262b for example is parallel to each other, and these the 3rd pipelines 262c for example is parallel to each other.In addition, the 4th pipeline 264a for example is the second trunk vacuum hose, and each the 5th pipeline 264b for example is a branch vacuum hose for the second time, and each the 6th pipeline 264c for example is one second an end vacuum hose.These the 5th pipelines 264b for example is parallel to each other, and these the 6th pipelines 264c for example is parallel to each other.
In the substrate overturn platform 200 of present embodiment; the first absorption layer 240a that is used to adsorb substrate is connected to different negative pressure sources with the second absorption layer 240b; so when having particulate to cause one of them negative pressure source inefficacy between unusual or the contact-making surface because of absorption layer and substrate when one of them negative pressure source; also can adsorb substrate, so can reduce the probability that substrate drops when rollover stand 220 upsets by the negative pressure that another negative pressure source provided.
Since the substrate overturn platform 200 of present embodiment can be only by the first absorption layer 240a or only hold substrate by the second absorption layer 240b, so if the theoretical absorption affinity of the first absorption layer 240a or the second absorption layer 240b is W, and the required absorption affinity of substrate is F, then the theoretical absorption affinity W of the first absorption layer 240a or the second absorption layer 240b need be more than or equal to two times of the required absorption affinity F of substrate, i.e. W ≧ 2 * F.So, when one of them negative pressure source lost efficacy, also can adsorb substrate by the negative pressure that another negative pressure source provided.
Hold above-mentioned, arbitrary theoretical absorption affinity W=|P| * S * 0.1 of the arbitrary or second absorption layer 240b of the above-mentioned first absorption layer 240a, the negative pressure that provided for the first negative pressure source 250a or the second negative pressure source 250b of P wherein, S is any area of any or all second absorption layer 240b of all first absorption layer 240a.In the present embodiment, the scope of theoretical absorption affinity W for example is between 24 newton and 39 newton, and the scope of negative pressure P for example is between between-50 kPas (kPa) and-80 kPas, and the scope of area S for example is between 3 square centimeters and 8 square centimeters.
In addition, if the weight of substrate is that M, required safety coefficient are 8, the total quantity of all the first absorption layer 240a and the second absorption layer 240b is N, the absorption affinity F=(M/N) * 8 that then above-mentioned substrate is required.In the present embodiment, the scope of the absorption affinity F that above-mentioned substrate is required for example is between 9 newton and 11 newton, the scope of the weight M of substrate for example is between 100 and 105, and the scope of the total quantity N of the first absorption layer 240a and the second absorption layer 240b for example is between 72 and 88.
In the time of hereinafter will substrate overturn platform 200 negative pressure source inefficacy therein of present embodiment being described, still can hold substrate with a real example.
If first absorption layer 240a of substrate overturn platform 200 and the total quantity N of the second absorption layer 240b are 80, substrate is a glass substrate, and its density is 2.69 gram/cubic centimetres, it is of a size of 0.07 centimetre of 220 cm x, 250 cm x, then the weight M of substrate is about 10356.5 grams, be about 101.6 newton, so the required absorption affinity F of substrate equals 10.16 newton.In other words, the required absorption affinity that provides of each first absorption layer 240a or each second absorption layer 240b needs more than or equal to 10.16 newton.
Table one is the numerical value of theoretical absorption affinity under different parameters of absorption layer (i.e. the first absorption layer 240a and the second absorption layer 240b), and unit is newton (N).
Table one
As shown in Table 1, if the negative pressure P that the first negative pressure source 250a and the second negative pressure source 250b are provided is respectively-50 kPas, and arbitrary absorption layer diameter of arbitrary or all second absorption layer 240b of all first absorption layer 240a is 25 millimeters, area S is 4.01 square centimeters, and arbitrary theoretical absorption affinity W of the arbitrary or second absorption layer 240b of the then above-mentioned first absorption layer 240a equals 24.6 newton.
Because arbitrary theoretical absorption affinity W of the arbitrary or second absorption layer 240b of the first above-mentioned absorption layer 240a is 24.6 newton, the required absorption affinity F of substrate only is 10.16 newton, even so wherein a negative pressure source lost efficacy, the substrate overturn platform 200 of present embodiment still can hold substrate.
What deserves to be mentioned is that theoretical absorption affinity W is 24.6 Newtonian times, coefficient of safety is about 2.4 (being 24.6/10.16) doubly, so can use two vacuum sources.The rest may be inferred, and coefficient of safety can be used three vacuum sources or two vacuum source during greater than 3 times, for example uses the absorption layer diameter
Be 32 millimeters, and negative pressure is-40～-85 kPas, then the theoretical absorption affinity W of absorption layer can be greater than 3 times coefficient of safety.Coefficient of safety can be used four vacuum sources, three vacuum sources or two vacuum source during greater than 4 times, for example uses the absorption layer diameter
Be 32 millimeters, and negative pressure is-50～-85 kPas, then the theoretical absorption affinity W of absorption layer can be greater than 4 times coefficient of safety.Therefore, the number of vacuum source should be less than coefficient of safety, and the coefficient of safety minimum is 2, and the present invention does not do other restriction to the number of vacuum source.
Therefore, in another embodiment, the adsorption plane 211 of above-mentioned substrate overturn platform 200 can more be provided with a plurality of the 4th fairleads (figure does not show), and airflow guidance device 260 can more comprise one the 3rd pipeline unit (figure does not show), the one end stretches into rollover stand 220 inside and extends to the 4th fairlead, and first pipeline unit 262, second pipeline unit 264 and the 3rd pipeline unit are independently of one another, not connected.In addition, adsorption plane 211 also can be provided with a plurality of the 5th fairleads (figure does not show), and airflow guidance device 260 more comprises one the 4th pipeline unit (figure does not show), the one end stretches into rollover stand 220 inside and extends to the 5th fairlead, and first pipeline unit 262, second pipeline unit 264, the 3rd pipeline unit and the 4th pipeline unit are independently of one another, not connected.
Because the 3rd pipeline unit is similar to above-mentioned first pipeline unit 262 or second pipeline unit 264 to the 4th pipeline unit, those skilled in the art can understand with reference to working as behind this specification, so about the embodiment that substrate overturn platform has the 4th fairlead (even having the 5th fairlead) and the 3rd pipeline unit (even having the 4th pipeline unit), will be not in addition with description of drawings.
Fig. 6 A to Fig. 6 C is the flow chart of method of a kind of substrate overturn of one embodiment of the invention.Please earlier with reference to Fig. 6 A, the method for the substrate overturn of present embodiment is the substrate overturn platform 200 and substrate 80 that provides above-mentioned earlier, then substrate 80 is loaded on the rollover stand 220.Present embodiment can come bearing substrate 80 by mechanical arm 30, and substrate 80 is positioned on the first absorption layer 240a and the second absorption layer 240b, and wherein mechanical arm 30 has a plurality of absorption layers 32, and it is in order to absorption substrate 80.Afterwards, drive the first negative pressure source 250a, and open the first control valve 270a,, and mechanical arm 30 is removed so that the first absorption layer 240a adsorbs substrate 80.
Then, shown in Fig. 6 B, 180 ° of overturn rollover stand 220 and substrates 80.
Please refer to Fig. 6 C, the method for the substrate overturn of present embodiment can comprise cut-out in addition or close the first negative pressure source 250a so that the first absorption layer 240a no longer adsorbs substrate 80, and the method for wherein cutting off the first negative pressure source 250a for example is to close the first control valve 270a.Then, substrate 80 is unloaded on rollover stand 220.Particularly, present embodiment can adsorb substrate by the absorption layer 42 of mechanical arm 40.Afterwards, cut off or close the first negative pressure source 250a, and substrate 80 is removed by mechanical arm 40.
The method of above-mentioned substrate overturn can comprise the driving second negative pressure source 250b in addition and open the second control valve 270b, so that second absorption layer 240b absorption substrate 80.In addition, the method of above-mentioned substrate overturn can comprise in addition cut off or close the first negative pressure source 250a and the second negative pressure source 250b one of them, so that the first absorption layer 240a and the second absorption layer 240b one of them no longer adsorb substrate 80, afterwards substrate 80 is unloaded on rollover stand 220.Above-mentioned cut-out or close the first negative pressure source 250a and one of them method of the second negative pressure source 250b for example be close wittingly the first control valve 270a and the second control valve 270b one of them, the first negative pressure source 250a and the second negative pressure source 250b one of them or the first control valve 270a and the second control valve 270b one of them by mistake or do not have expectedly lost efficacy due to.
Because the method for the substrate overturn of present embodiment can be adsorbed substrate by the first absorption layer 240a and the second absorption layer 240b that is connected to different negative pressure sources simultaneously, when wherein a negative pressure source lost efficacy, still can adsorb substrate 80, in the process of upset, drop to prevent substrate 80 by the negative pressure that another negative pressure source provided.
In the present invention, the arrangement mode of the pipeline of the arrangement mode of the first absorption layer 240a and the second absorption layer 240b (i.e. the arrangement mode of first fairlead 222 and second fairlead 223) and airflow guidance device 260 is not limited to shown in Figure 3, below other is illustrated for other embodiment.
Fig. 7 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention, and Fig. 8 is the generalized section along II-II ' line and the III-III ' line of Fig. 7.Please refer to Fig. 7 and Fig. 8, first fairlead 222 is arranged in multiple row in the present embodiment, and second fairlead 223 also is arranged in multiple row, and these row that these are listed as and second fairlead 223 is lined up that 222 arrangements of first fairlead form are to be arranged alternately.In other words, the first absorption layer 240a is arranged in multiple row, and the second absorption layer 240b is arranged in multiple row, and first absorption layer 240a arrangement these row that form and these row that the second absorption layer 240b lines up are to be arranged alternately.
In the present embodiment, airflow guidance device comprises first pipeline unit 261 and second pipeline unit 263.First pipeline unit 261 comprises one first vacuum pipeline 261a and many first vacuum manifold 261b.The first vacuum pipeline 261a stretches into rollover stand 220 inside, and extends to first fairlead, 222 belows, and the first vacuum manifold 261b is positioned at the first stay pipe 230a.The end of these first vacuum manifold 261b is connected to the first vacuum pipeline 261a, and the other end extends to the first absorption layer 240a via first fairlead 222 along the bearing of trend of the first stay pipe 230a.In addition, second pipeline unit 263 comprises one second vacuum pipeline 263a and many second vacuum manifold 263b.The second vacuum pipeline 263a stretches into rollover stand 220 inside, and extends to second fairlead, 223 belows.The second vacuum manifold 263b is positioned at the second stay pipe 230b.The end of the second vacuum manifold 263b is connected to the second vacuum pipeline 263a, and the other end extends to the second absorption layer 240b via second fairlead 223 along the bearing of trend of the second stay pipe 230b.
In more detail, the first above-mentioned vacuum pipeline 261a comprises one first base segment 265a and a plurality of first extension 265b that are connected this first base segment 265a, and the bearing of trend of these first extensions 265b is different with the bearing of trend of the first base segment 265a.The second vacuum pipeline 263a comprises one second base segment 267a and a plurality of second extension 267b that are connected this second base segment 267a.The bearing of trend of these second extensions 267b is different with the bearing of trend of the second base segment 267a, and these first extension 265b and these second to extend the 267b section be to be arranged alternately.In addition, the first base segment 265a is relative with the second base segment 267a, the first base segment 265a and the second base segment 267a extend along a first direction A1, and these first extension 265b and these second extensions 267b extend along a second direction A2, and first direction A1 is in fact perpendicular to second direction A2.
Fig. 9 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention.Please refer to Fig. 9, the first absorption layer 240a of present embodiment is similar to Fig. 3 to the arrangement mode of the second absorption layer 240b, and difference is in airflow guidance device.Particularly, the first base segment 265a of the first vacuum pipeline 261a is relative with the second base segment 267a of the second vacuum pipeline 263a in the present embodiment, and is bent into L shaped respectively.The first base segment 265a and the second base segment 267a are provided with along a rectangular path R, and the first extension 265b and the second extension 267b extend along a predetermined direction A3, and this predetermined direction A3 is not orthogonal to arbitrary limit of rectangular path R.Particularly, folded acute angle theta 1 can be 45 degree between predetermined direction A3 and the rectangular path.
Figure 10 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention.Please refer to Figure 10, in the present embodiment, the first base segment 265a of the first vacuum pipeline 261a is the wherein three springs folding along rectangular path R, and the second base segment 267a of the second vacuum pipeline 263a partly or entirely is arranged in the rectangular path R and is bent into U-shaped, and the both sides that parallel of the second base segment 267a are the both sides that parallel that are parallel to the first base segment 265a.The first extension 265b of the first vacuum pipeline 261a and the second extension 267b of the second vacuum pipeline 263a are positioned at rectangular path R.The first extension 265b of the first vacuum pipeline 261a for example is perpendicular to the first base segment 265a, and the second extension 267b of the second vacuum pipeline 263a for example is perpendicular to the second base segment 267a.The first absorption layer 240a is arranged at first vacuum pipeline 261a top, and the second absorption layer 240b is arranged at second vacuum pipeline 263a top, and the first absorption layer 240a and the second absorption layer 240b line up an array.
Figure 11 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention.Please refer to Figure 11, in the present embodiment, the first base segment 265a of the first vacuum pipeline 261a is the wherein three springs folding along rectangular path R, and the second base segment 267a of the second vacuum pipeline 263a is arranged in the rectangular path R.The second base segment 267a comprise the parallel first base segment 265a wherein both sides two parallel-segment 269a and be connected in a linkage section 269b between these parallel-segment 269a, its middle connecting segment 269b is not parallel and be not orthogonal to these parallel-segment 269a, and the second extension 267b of the first extension 265b of the first vacuum pipeline 261a and the second vacuum pipeline 263a is positioned at rectangular path R.The first absorption layer 240a is arranged at first vacuum pipeline 261a top, and the second absorption layer 240b is arranged at second vacuum pipeline 263a top, and the first absorption layer 240a and the second absorption layer 240b line up an array.
Figure 12 is first absorption layer and the arrangement mode of second absorption layer and the schematic diagram of airflow guidance device of a kind of substrate overturn platform of another embodiment of the present invention.Please refer to Figure 12, in the present embodiment, the first vacuum pipeline 261a is bent to form the helical form with a plurality of bending places, and between the first vacuum pipeline 261a helical form region S is arranged.The second vacuum pipeline 263a is bent to the other end that is positioned at outside the helical form region S from an end that is positioned at the helical form region S, have the helical form of a plurality of bending places with formation, and the bending angle θ 2 of the bending place of the first vacuum pipeline 261a and the second vacuum pipeline 263a is 90 degree.The first absorption layer 240a is arranged at first vacuum pipeline 261a top, and the second absorption layer 240b is arranged at second vacuum pipeline 263a top, and the first absorption layer 240a and the second absorption layer 240b line up an array.
In the various embodiments described above, if the quantity of first fairlead 222 is identical with the quantity of second fairlead 223, then the length of the first vacuum manifold 261b and the length of the second vacuum manifold 263b can be identical, to avoid unnecessary vacuum loss.In addition, if the quantity of first fairlead 222 is greater than the quantity of second fairlead 223, then the length of the first vacuum manifold 261b can also can be avoided unnecessary vacuum loss less than the length of the second vacuum manifold 263b.
Figure 13 is the schematic diagram of the arrangement mode of a kind of part first fairlead of substrate overturn platform of another embodiment of the present invention and second fairlead.Please refer to Figure 13, first fairlead 222 of present embodiment and the arrangement mode of second fairlead 223 are in arbitrary 3 * 3 arrays of the array that first fairlead 222 and second fairlead 223 are lined up, when the center that is positioned at 3 * 3 arrays is first fairlead 222 (as array M1), comprise at least one first fairlead 222 around this 3 * 3 array M1.When second fairlead 223 is positioned at the center of 3 * 3 arrays (as array M2), comprise at least one second fairlead 223 around this 3 * 3 array M2.Be noted that among Figure 13 that array M1, M2 only are usefulness for example, the arrangement mode of first fairlead 222 and second fairlead 223 is not limited thereto.
Figure 14 is the schematic diagram of the arrangement mode of a kind of first fairlead of substrate overturn platform of another embodiment of the present invention and second fairlead.Please refer to Figure 14, in the present embodiment, the geometric center C of the array of being lined up with first fairlead 222 and second fairlead 223 is that initial point defines a rectangular coordinate system, makes each first fairlead 222 have a coordinate figure respectively with each second fairlead 223.The coordinate figure sum of these first fairleads 222 is zero, and the coordinate figure sum of these second fairleads 223 is zero.Be noted that the arrangement mode of first fairlead 222 and second fairlead 223 is not limited to shown in Figure 14.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; those skilled in the art of the present invention; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention attached claims scope before looking defines and is as the criterion.
Claims (21)
1. a substrate overturn platform is characterized in that, the described substrate overturn platform of stating is in order to adsorb a substrate and the described substrate that overturns, and described substrate overturn platform comprises:
One fixed mount;
One rollover stand is articulated on the described fixed mount, and described rollover stand inside is hollow, and described rollover stand has an adsorption plane that is suitable for adsorbing described substrate, and described adsorption plane is provided with a plurality of first fairleads and a plurality of second fairlead;
One airflow guidance device comprises:
One first pipeline unit, an end stretch into described rollover stand inside and extend to described these first fairleads; And
It is inner and extend to described these second fairleads that one second pipeline unit, an end stretch into described rollover stand, and described first pipeline unit and described second pipeline unit are independently of one another, not connected.
2. substrate overturn platform as claimed in claim 1, it is characterized in that, described rollover stand comprises a plurality of first stay pipes in addition, a plurality of second stay pipes with in order to adsorb a plurality of absorption layers of described substrate, each absorption layer has one the 3rd fairlead, one end of described these first stay pipes is connected to described these first fairleads, one end of described these second stay pipes is connected to described these second fairleads, described these absorption layers are sheathed on the other end of described these first stay pipes and described these second stay pipes respectively, and described these the 3rd fairleads communicate with described these second fairleads with corresponding described these first fairleads respectively with described these second stay pipes by described these first stay pipes.
3. substrate overturn platform as claimed in claim 2 is characterized in that, described rollover stand comprises:
One sealing frame, its inside is hollow; And
A plurality of hollow posts, its inside is hollow, and described these hollow posts are connected in described sealing frame, and the inner space of each hollow posts all communicates with the inner space of described sealing frame, and described adsorption plane is that the surface institute towards the same side by described these hollow posts is constituted.
4. substrate overturn platform as claimed in claim 3 is characterized in that, each hollow posts is provided with described these first fairleads of part and described these second fairleads of part.
5. substrate overturn platform as claimed in claim 4, it is characterized in that, described these first fairleads of each hollow posts and described these second fairleads are to arrange along the bearing of trend of described hollow posts, and described these first fairleads and described these second fairleads are to be arranged alternately.
6. substrate overturn platform as claimed in claim 4 is characterized in that, described first pipeline unit comprises:
One first pipeline, one end stretch in the described sealing frame;
Many second pipelines, an end of described these second pipelines connects described first pipeline, and the other end of described these second pipelines stretches into respectively in described these hollow posts, and extends along the bearing of trend of described these hollow posts; And
Many the 3rd pipelines are positioned at described these first stay pipes, and corresponding described second pipeline of an end of each the 3rd pipeline connection, and described these the 3rd pipelines are via described these first fairleads, along the bearing of trend extension of described these first stay pipes;
Described second pipeline unit comprises:
One the 4th pipeline, one end stretch in the described sealing frame;
Many the 5th pipelines, an end of described these the 5th pipelines connects described the 4th pipeline, and the other end of described these the 5th pipelines stretches into respectively in described these hollow posts, and extends along the bearing of trend of described these hollow posts; And
Many the 6th pipelines are positioned at described these second stay pipes, and corresponding described the 5th pipeline of an end of each the 6th pipeline connection, and described these the 6th pipelines are via described these second fairleads, along the bearing of trend extension of described these second stay pipes.
7. substrate overturn platform as claimed in claim 3 is characterized in that, described sealing frame has a rotating shaft, and described rotating shaft comprises two relative articulated sections, is positioned at the relative dual-side of described sealing frame, and is articulated on the described fixed mount.
8. substrate overturn platform as claimed in claim 7, it is characterized in that, described these inside, articulated section are hollow, and described first pipeline unit and described second pipeline unit are one of them inside to stretch into described rollover stand inside at least via described these articulated sections.
9. substrate overturn platform as claimed in claim 1 is characterized in that, described these first fairleads and described these second fairleads are to be arranged in an array.
10. substrate overturn platform as claimed in claim 9 is characterized in that, in each row of described array, described these first fairleads and described these second fairleads are to be arranged alternately.
11. substrate overturn platform as claimed in claim 10 is characterized in that, in each row of described array, described these first fairleads and described these second fairleads are to be arranged alternately.
12. substrate overturn platform as claimed in claim 10, it is characterized in that, described these first fairleads are arranged in multiple row, described these second fairleads are arranged in multiple row, and described these first fairleads to arrange described these row that described these row of forming and described these second fairleads line up be to be arranged alternately.
13. substrate overturn platform as claimed in claim 2 is characterized in that, described first pipeline unit comprises:
One first vacuum pipeline stretches into described rollover stand inside, and extends to described these first fairlead belows;
Many first vacuum manifold are positioned at described these first stay pipes, and an end of described these first vacuum manifold is connected to described first vacuum pipeline, and the other end is via described these first fairleads, along the bearing of trend extension of described these first stay pipes;
Described second pipeline unit comprises:
One second vacuum pipeline stretches into described rollover stand inside, and extends to described these second fairlead belows; And
Many second vacuum manifold are positioned at described these second stay pipes, and an end of described these second vacuum manifold is connected to described second vacuum pipeline, and the other end is via described these second fairleads, along the bearing of trend extension of described these second stay pipes.
14. substrate overturn platform as claimed in claim 13, it is characterized in that, described first vacuum pipeline comprises one first base segment and a plurality of first extensions that are connected described first base segment, the bearing of trend of described these first extensions is different with the bearing of trend of described first base segment, described second vacuum pipeline comprises one second base segment and a plurality of second extensions that are connected described second base segment, the bearing of trend of described these second extensions is different with the bearing of trend of described second base segment, and described these first extensions and described these second extensions are to be arranged alternately.
15. substrate overturn platform as claimed in claim 14, it is characterized in that, described first base segment is relative with described second base segment, described first base segment and described second base segment extend along a first direction, and extend along a second direction described these first extensions and described these second extensions, and described first direction is in fact perpendicular to described second direction.
16. substrate overturn platform as claimed in claim 14, it is characterized in that, described first base segment is relative with described second base segment, and be bent into L shaped respectively, described first base segment and described second base segment are along a rectangular path setting, and described these first extensions and described these second extensions are to extend along a predetermined direction, and described predetermined direction is not orthogonal to arbitrary limit of described rectangular path.
17. substrate overturn platform as claimed in claim 14, it is characterized in that, described first base segment is the wherein three springs folding along a rectangular path, described second base segment is partly or entirely to be arranged in the described rectangular path and to be bent into U-shaped, and the both sides that parallel of described second base segment are the both sides that parallel that are parallel to described first base segment, and described these first extensions and described these second extensions are to be positioned at described rectangular path.
18. substrate overturn platform as claimed in claim 14, it is characterized in that, described first base segment is the wherein three springs folding along a rectangular path, described second base segment is to be arranged in the described rectangular path, described second base segment comprise parallel described first base segment wherein both sides two parallel-segment and be connected in a linkage section between described these parallel-segment, described linkage section is not parallel and be not orthogonal to described these parallel-segment, and described these first extensions and described these second extensions are to be positioned at described rectangular path.
19. substrate overturn platform as claimed in claim 13, it is characterized in that, described first vacuum pipeline is bent to form the helical form with a plurality of bending places, and a helical form zone is arranged between described first vacuum pipeline, described second vacuum pipeline is bent to from an end that is positioned at described helical form zone and is positioned at the extra-regional other end of described helical form, have the helical form of a plurality of bending places with formation, and the bending angle of described these bending places of described first vacuum pipeline and described second vacuum pipeline is 90 degree.
20. substrate overturn platform as claimed in claim 9, it is characterized in that, in arbitrary 3 * 3 arrays of described array, when one of them is positioned at the center of described 3 * 3 arrays when described these first fairleads, described 3 * 3 arrays around comprise described these first fairleads at least one of them, and when described these second fairleads when one of them is positioned at the center of described 3 * 3 arrays, comprise around described 3 * 3 arrays described these second fairleads at least one of them.
21. substrate overturn platform as claimed in claim 9, it is characterized in that, geometric center with described array is that initial point defines a rectangular coordinate system, make each first fairlead and each second fairlead have a coordinate figure respectively, and described these coordinate figure sums of described these first fairleads are zero, and described these coordinate figure sums of described these second fairleads are zero.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101280386A CN101510523B (en) | 2009-03-19 | 2009-03-19 | Substrate overturn platform and method for substrate overturn |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101280386A CN101510523B (en) | 2009-03-19 | 2009-03-19 | Substrate overturn platform and method for substrate overturn |
Publications (2)
| Publication Number | Publication Date |
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| CN101510523A true CN101510523A (en) | 2009-08-19 |
| CN101510523B CN101510523B (en) | 2010-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009101280386A Expired - Fee Related CN101510523B (en) | 2009-03-19 | 2009-03-19 | Substrate overturn platform and method for substrate overturn |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011066701A1 (en) * | 2009-12-01 | 2011-06-09 | 东莞宏威数码机械有限公司 | Clamping type substrate turning device |
| CN104418496A (en) * | 2013-09-09 | 2015-03-18 | 三星钻石工业股份有限公司 | Substrate inverting and conveying device |
| CN105702615A (en) * | 2014-11-28 | 2016-06-22 | 中电电气(上海)太阳能科技有限公司 | Clamping devices for 90-degree turning of solar photovoltaic module on-line visual inspection platform |
| CN107195577A (en) * | 2017-05-08 | 2017-09-22 | 深圳市华星光电技术有限公司 | Substrate turnover device and its method for departing from substrate |
| CN108328275A (en) * | 2018-04-04 | 2018-07-27 | 上海日港置信非晶体金属有限公司 | Amorphous alloy core automatic reversible table |
| CN108435714A (en) * | 2018-04-12 | 2018-08-24 | 环维电子(上海)有限公司 | A kind of Novel dry ice cleaning pedestal and its cleaning method |
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2009
- 2009-03-19 CN CN2009101280386A patent/CN101510523B/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011066701A1 (en) * | 2009-12-01 | 2011-06-09 | 东莞宏威数码机械有限公司 | Clamping type substrate turning device |
| CN104418496A (en) * | 2013-09-09 | 2015-03-18 | 三星钻石工业股份有限公司 | Substrate inverting and conveying device |
| CN104418496B (en) * | 2013-09-09 | 2018-08-21 | 三星钻石工业股份有限公司 | Substrate inverts carrying device |
| CN105702615A (en) * | 2014-11-28 | 2016-06-22 | 中电电气(上海)太阳能科技有限公司 | Clamping devices for 90-degree turning of solar photovoltaic module on-line visual inspection platform |
| CN105702615B (en) * | 2014-11-28 | 2018-10-12 | 中电电气(上海)太阳能科技有限公司 | A kind of clamping device for the 90 ° of overturnings of the online visual inspection platform of solar photovoltaic assembly |
| CN107195577A (en) * | 2017-05-08 | 2017-09-22 | 深圳市华星光电技术有限公司 | Substrate turnover device and its method for departing from substrate |
| CN108328275A (en) * | 2018-04-04 | 2018-07-27 | 上海日港置信非晶体金属有限公司 | Amorphous alloy core automatic reversible table |
| CN108435714A (en) * | 2018-04-12 | 2018-08-24 | 环维电子(上海)有限公司 | A kind of Novel dry ice cleaning pedestal and its cleaning method |
| CN108435714B (en) * | 2018-04-12 | 2023-08-29 | 环维电子(上海)有限公司 | Novel dry ice cleaning base and cleaning method thereof |
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| Publication number | Publication date |
|---|---|
| CN101510523B (en) | 2010-08-25 |
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