CN104418496A - Substrate inverting and conveying device - Google Patents
Substrate inverting and conveying device Download PDFInfo
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- CN104418496A CN104418496A CN201410186681.5A CN201410186681A CN104418496A CN 104418496 A CN104418496 A CN 104418496A CN 201410186681 A CN201410186681 A CN 201410186681A CN 104418496 A CN104418496 A CN 104418496A
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- substrate
- transport mechanism
- reversing device
- absorption
- action
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Abstract
The invention provides a substrate inverting and conveying device capable of efficiently inverting and delivering a substrate to a next operation platform in a short time. The substrate inverting and conveying device comprises: an adsorbing conveyance mechanism (2), which adsorbs and delivers a substrate (W) to be inverted to an inverting mechanism (3); and the inverting mechanism (3), which inverts and delivers the received substrate (W) from the adsorbing conveyance mechanism to a platform (4) in the next step, wherein the adsorbing conveyance mechanism (2) and the inverting mechanism (3) can be formed by moving in adjacent and departed directions and in such a manner that the adsorbing conveyance mechanism (2) delivers the substrate (W) to the inverting mechanism (3) when the adsorbing conveyance mechanism (2) and the inverting mechanism (3) move to an adjacent substrate delivering position, and the adsorbing action of the substrate (W) by use of the adsorbing conveyance mechanism (2) and the delivering action of the substrate (W) from the inverting mechanism (3) to the platform (4) in the next step are performed when the adsorbing conveyance mechanism (2) is departed from the inverting mechanism (3).
Description
Technical field
The present invention relates to a kind of to the brittle substrate of such as glass, silicon stock or other substrates processing line or along this line by the base plate processing device of substrate cutting etc., the substrate used when reverse and transfer substrate reverses carrying device.The invention particularly relates to following substrate reversion carrying device, it comprises: absorption transport mechanism, and it adsorbs and transports at the substrate that previous step is processed; And reversing device, it makes the substrate paid from absorption transport mechanism reverse and be positioned on the platform of next step.
Background technology
Since previously, it is well known that following method, such as disclose to some extent in patent documentation 1 grade, namely the method makes break bar (also referred to as tracing wheel) relative to the mother substrate rotation be positioned on platform for utilizing chalker, or to the mother substrate scanning laser beam be positioned on platform after this mother substrate forms line, mother substrate is reversed and is positioned on the platform of shut-off device, by cutting off bar to press on position directly over this line by substrate cutting.
In addition, when by such as liquid crystal panel stock is fitted with the mother substrate cut-out of 2 sheet glass substrates, first, by making break bar rotate relative to the mother substrate on the platform of chalker, and line is formed in a face (A face) of substrate.Secondly, be positioned on the platform of shut-off device after making mother substrate reversion, utilize position directly over this line of pressing such as cutting off bar and substrate A face is cut off.Then, form line in another face (B face) of substrate, after making substrate reversion, utilize pressings such as cutting off bar and substrate B face is cut off in the same manner as described.Such as disclose to some extent in patent documentation 2 (Figure 11, Figure 14) or patent documentation 3 (Figure 45) etc. with the method for the such as order cut-out of above stock.
[background technology document]
[patent documentation]
[patent documentation 1] International Publication W02005/053925 publication
[patent documentation 2] Japanese Patent Laid-Open 2010-076957 publication
[patent documentation 3] International Publication W02002/057192 publication
Summary of the invention
[inventing problem to be solved]
The reversing device that described arbitrary situation all needs substrate is reversed and the absorption transport mechanism in order to substrate to be delivered to this reversing device.And, such as, chalker is utilized to rule, and utilize the adsorption plate of absorption transport mechanism to adsorb the substrate be positioned on platform, being transported by substrate and being delivered to makes adsorption plane upward and the counter-rotary-ing plate of standby reversing device, this counter-rotary-ing plate is reversed, using the substrate-placing through just carrying on the back reversion on the platform of the shut-off device as next step.
In addition, otherwise adopt with the following method etc., namely the substrate utilizing the counter-rotary-ing plate of reversing device to adsorb to be positioned on the platform of chalker after making it reversion, the adsorption plate absorption of utilization absorption transport mechanism is positioned at the substrate on the counter-rotary-ing plate of reversing device upward, and conveyance is to the platform of shut-off device.
But, in method in the past, absorption transport mechanism oscilaltion and after sorbing substrate, move to reversing device and pay substrate, thereafter the action of original substrate adsorption position is again back to, in contrast, reversing device only makes the substrate received reverse, so the difference that activity duration generation is larger needed for both.Therefore, reversing device, must be standby to substrate moves by absorption transport mechanism after making substrate reverse and to be delivered to the platform of shut-off device, and the leeway that this phase asks is larger.
In addition, the situation of the latter is also identical, and absorption transport mechanism is after the platform of shut-off device is back to reversing device, and self reversal authorities substrate also moves to the action spended time of the platform of shut-off device.
Therefore, exist and cannot carry out the waiting time less process of operation smoothly, to reverse and the working hour of the process entirety transferred is also elongated and problem points that operating efficiency is poor.
Therefore, the present invention is in view of described problem in the past, its object is to provide a kind of imbalance eliminating absorption transport mechanism and the required activity duration of reversing device, and the carrying device and the substrate being delivered to next job platform reverses that efficiently substrate reversed with the shorter activity duration.
[technique means of dealing with problems]
In order to reach described object, in the present invention, adopt following technical method.That is, the feature of substrate reversion carrying device of the present invention is to comprise: absorption transport mechanism, and the substrate that its absorption should be reversed also is delivered to following reversing device; And reversing device, it makes the substrate received from this absorption transport mechanism reverse and be delivered on the platform of next step; And described absorption transport mechanism and described reversing device can be formed movably to direction that is close to each other, that deviate from, and formed as follows, namely when described absorption transport mechanism and described reversing device move to substrate delivery position close to each other, carry out paying substrate from described absorption transport mechanism to described reversing device, and described absorption transport mechanism and described reversing device mutually away from position, the substrate adsorption action carrying out described absorption transport mechanism with from described reversing device to the payment action of the substrate of the platform of next step.
Herein, be formed as good in the substrate adsorption action of described absorption transport mechanism and the substrate of the described reversing device mode that action synchronously carries out of reversing.
In addition, the mode of preferably synchronously carrying out towards the action of adsorbing transport mechanism movement towards action and the described reversing device of described reversing device movement with the absorption transport mechanism adsorbing described substrate is formed.
[effect of invention]
The present invention's stock described above is formed, and therefore with the roughly the same length setting absorption opening time of transport mechanism and the opening time of reversing device, thus, can eliminate the imbalance of both required opening times and shorten the activity duration.
Accompanying drawing explanation
Fig. 1 is the stereographic map of the schematic configuration representing substrate of the present invention reversion carrying device.
Fig. 2 (a)-(e) is the explanatory view of the sequence of events representing the substrate reversion carrying device shown in Fig. 1.
Fig. 3 (a)-(d) is the follow-up explanatory view of the sequence of events representing Fig. 2.
Embodiment
Below, according to the graphic detailed content that substrate of the present invention reversion carrying device is described representing embodiment.
As shown in Figure 1, the substrate reversion carrying device A shown in the present embodiment comprises: conveyance body 1, and it loads and transports the substrate W that should reverse; Absorption transport mechanism 2, its absorption also lifting transports and next substrate W, and is delivered to following reversing device 3; And reversing device 3, it makes the substrate W received from this absorption transport mechanism 2 reverse and is delivered to the platform 4 of next step.
At the substrate W utilizing conveyance body 1 to transport, such as, be formed with many line cut off by chalker (not shown) at upper surface.In addition, transport body 1 and also can be used as the movable platform of chalker to replace the travelling belt 1a shown in Fig. 1.In addition, the platform 4 receiving the next step of the substrate W reversed by reversing device 3 uses travelling belt 4a in the present embodiment, substrate W is transported the shut-off device (not shown) to cutting off substrate W along line by this travelling belt 4a, but about this, also can be used as the movable platform of shut-off device to replace travelling belt 4a.
In addition, for convenience of description, in Fig. 1, the direction of with adsorbing transport mechanism 2 and reversing device 3 relativity movement is set to X-direction, the direction orthogonal with X-direction is set to Y-direction.
Described absorption transport mechanism 2 possesses first and to divide a word with a hyphen at the end of a line body 7, and this first to be divided a word with a hyphen at the end of a line the upper surface of body 7 at the machine frame 5 of substrate reversion carrying device A, and can arrange movably along the track 6,6 of left and right, the track 6,6 of described left and right extends along the X direction.First body 7 of dividing a word with a hyphen at the end of a line possesses the guiding element 8 extended along the Y direction, and is provided with and along the holding components 9 of guiding element 8 movement, can be provided with the adsorption plate 11 of the level be elevated by cylinder 10 at holding components 9.
The lower surface of adsorption plate 11 is provided with multiple air suction hole, although the diagram of omission, is connected to the air such as vacuum pump via pipe arrangement and attracts source.In addition, the first body 7 of dividing a word with a hyphen at the end of a line is driven by the driving part 12 of built-in engine.
Reversing device 3 possesses second dividing a word with a hyphen at the end of a line body 13 of can arranging movably along track 6,6, and is driven by the driving part 14 of built-in engine.
Second body 13 of dividing a word with a hyphen at the end of a line is provided with the turning axle 15 extended along the Y direction, turning axle 15 is provided with counter-rotary-ing plate 17 via arm 16,16.By the rotation of this turning axle 15, counter-rotary-ing plate 17 is can be formed from the mode of turn of reversing towards the flat-hand position (with reference to Fig. 1 and Fig. 2 (a)) of absorption transport mechanism 2 side to the posture (with reference to Fig. 2 (b)) and reverse direction thereof that are inverted to platform 4 side.
Counter-rotary-ing plate 17 is under the flat-hand position towards absorption transport mechanism 2 side, and surface is provided with multiple air suction hole 17a thereon, although diagram is omitted, is connected to the air such as vacuum pump attracts source via pipe arrangement.In addition, turning axle 15 is driven by the driving part 18 of built-in engine.
By described formation, absorption transport mechanism 2 and reversing device 3 can to close to each other or away from direction move.And, absorption transport mechanism 2 and reversing device 3 move to position close to each other, namely substrate delivery position time carry out the payment of substrate W, and mutual away from position, synchronously carry out the absorption action of the substrate W utilizing absorption transport mechanism 2 and the reversion action of substrate W utilizing reversing device 3.
Below, based on Fig. 2 and Fig. 3, this action is described.
Fig. 2 (a) represent absorption transport mechanism 2 and reversing device 3 be in farthest away from the state of position.Now, substrate W to transport to the absorption below of transport mechanism 2 and standby by transporting body 1.In addition, substrate W is not yet loaded at the upper surface of the counter-rotary-ing plate 17 of reversing device 3.
In this position, as shown in Fig. 2 (b), synchronously carry out the absorption decline of adsorption plate 11 of transport mechanism 2 and the reversion action of the counter-rotary-ing plate 17 of reversing device 3, and inhale attaching substrates W by adsorption plate 11.
In addition, below, the position of the substrate W adsorbed on conveyance body 1 by absorption transport mechanism 2 is called " substrate adsorption position ", the position that the counter-rotary-ing plate 17 of reversing device 3 reverses is called " substrate reverse position ", and " substrate adsorption position " intermediate location with " substrate reverse position " is called " substrate delivery position ".
Next, as shown in Fig. 2 (c), while rising with the adsorption plate 11 of the absorption transport mechanism 2 inhaling attaching substrates W, the counter-rotary-ing plate 17 of reversing device 3 returns to and makes suction hole 17a posture upward.Then, as shown in Fig. 2 (c) and Fig. 2 (d), absorption transport mechanism 2 and reversing device 3 mobile towards starting in a direction close to each other, and till moving to substrate delivery position Z.At this substrate delivery position, as shown in Fig. 2 (e), substrate W is delivered to the counter-rotary-ing plate 17 of reversing device 3 from the adsorption plate 11 of absorption transport mechanism 2.
Secondly, as shown in Fig. 3 (a), absorption transport mechanism 2 and reversing device 3 start mobile to the direction mutually deviated from, and as shown in Fig. 3 (b), absorption transport mechanism 2 moves to substrate adsorption position, and reversing device 3 moves to reverse position.Now, by conveyance body 1 by next substrate W ' conveyance to adsorbing the below of transport mechanism 2 and standby.
Then, as shown in Fig. 3 (c), the adsorption plate 11 of absorption transport mechanism 2 declines and sorbing substrate W ', and synchronously, the counter-rotary-ing plate 17 of reversing device 3 reverses and previous substrate W is delivered to platform 4.After this, as shown in the arrow of Fig. 3 (d), absorption transport mechanism 2 and reversing device 3 start mobile towards substrate delivery position close to each other, at substrate delivery position, substrate W ' is delivered to reversing device 3 from absorption transport mechanism 2.By repeating described action, the substrate transported by conveyance body 1 is inverted successively and is delivered to next platform 4.
In addition, the action of described absorption transport mechanism 2 and reversing device 3 is undertaken by carrying out conputer controlled to each driving part of each mechanism.
Formed as follows as mentioned above, namely when adsorbing transport mechanism 2 and moving to position close to each other with reversing device 3, carry out the payment of substrate W, and adsorb transport mechanism 2 and reversing device 3 mutual away from position, carry out the absorption action of substrate W and the reversion action of reversing device 3 that utilize absorption transport mechanism 2, therefore, can with the roughly the same length setting absorption opening time of transport mechanism 2 and the opening time of reversing device 3.Thus, the imbalance of both required opening times can be eliminated, thus the activity duration on the whole can be shortened.
Above, representational embodiment of the present invention is illustrated, but the present invention is non-essential is defined in described embodiment.Such as, in the described embodiment, the first body 7 and second body 13 of dividing a word with a hyphen at the end of a line of dividing a word with a hyphen at the end of a line is divided a word with a hyphen at the end of a line along the track 6 shared, but the mode also can divided a word with a hyphen at the end of a line for each to arrange the special track of each be formed.In addition, in the present invention, can reaching its object and suitably carry out revising, changing in the scope not departing from claim.
[utilizability in industry]
The present invention for forming line and the substrate reversion carrying device cut off along this line on substrate.
[explanation of symbol]
A substrate reversion carrying device
W substrate
1 conveyance body
2 absorption transport mechanisms
3 reversing devices
The platform of 4 next steps
5 machine frames
6 tracks
11 adsorption plates
17 counter-rotary-ing plates
Claims (3)
1. a substrate reversion carrying device, is characterized in that comprising: absorption transport mechanism, and the substrate that absorption should be reversed also is delivered to following reversing device; And reversing device, make the substrate received from this absorption transport mechanism reverse and be delivered on the platform of next step; And
Described absorption transport mechanism and described reversing device can be formed movably in direction that is close to each other, that deviate from, and formed as follows, namely when described absorption transport mechanism and described reversing device move to substrate delivery position close to each other, carry out paying substrate from described absorption transport mechanism to described reversing device, and described absorption transport mechanism and described reversing device mutually away from position, the absorption action carrying out the substrate utilizing described absorption transport mechanism with from described reversing device to the payment action of the substrate of the platform of next step.
2. substrate according to claim 1 reversion carrying device, is characterized in that: formed in the substrate adsorption action of described absorption transport mechanism and the substrate of the described reversing device mode that action synchronously carries out of reversing.
3. substrate according to claim 1 and 2 reversion carrying device, is characterized in that: formed in the mode that the described absorption transport mechanism adsorbing described substrate synchronously carries out towards action and the described reversing device of described reversing device movement towards the action of described absorption transport mechanism movement.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013186107A JP6280332B2 (en) | 2013-09-09 | 2013-09-09 | Substrate reverse transfer device |
| JP2013-186107 | 2013-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104418496A true CN104418496A (en) | 2015-03-18 |
| CN104418496B CN104418496B (en) | 2018-08-21 |
Family
ID=52701194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410186681.5A Active CN104418496B (en) | 2013-09-09 | 2014-05-05 | Substrate inverts carrying device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6280332B2 (en) |
| KR (1) | KR102217699B1 (en) |
| CN (1) | CN104418496B (en) |
| TW (1) | TWI633069B (en) |
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| CN106078404A (en) * | 2016-07-25 | 2016-11-09 | 长兴科艺玻璃工艺品有限公司 | A kind of face glass processing edging device |
| CN106946022A (en) * | 2017-04-22 | 2017-07-14 | 河北亚峰专用汽车制造有限公司 | A kind of tank body welding flat board automatic turnover machine |
| WO2017161677A1 (en) * | 2016-03-21 | 2017-09-28 | 京东方科技集团股份有限公司 | Substrate transmission device and transmission method therefor |
| CN110405962A (en) * | 2019-07-23 | 2019-11-05 | 上海理工大学 | Automatic turnover semiconductor cleavage device and processing method |
| CN114772249A (en) * | 2022-04-06 | 2022-07-22 | 深圳市可信华成通信科技有限公司 | Automatic positioning device for cam plate |
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| CN106078405A (en) * | 2016-07-25 | 2016-11-09 | 长兴科艺玻璃工艺品有限公司 | A kind of fixing and turning device for face glass processing |
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| CN108016876A (en) * | 2017-12-29 | 2018-05-11 | 重庆市中光电显示技术有限公司 | FPC heater cars and FPC processing lines |
| JP7029187B2 (en) | 2020-01-29 | 2022-03-03 | 三星ダイヤモンド工業株式会社 | Board reversing device and dividing system |
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- 2014-04-30 KR KR1020140052510A patent/KR102217699B1/en active IP Right Grant
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2017161677A1 (en) * | 2016-03-21 | 2017-09-28 | 京东方科技集团股份有限公司 | Substrate transmission device and transmission method therefor |
| CN106078404A (en) * | 2016-07-25 | 2016-11-09 | 长兴科艺玻璃工艺品有限公司 | A kind of face glass processing edging device |
| CN106946022A (en) * | 2017-04-22 | 2017-07-14 | 河北亚峰专用汽车制造有限公司 | A kind of tank body welding flat board automatic turnover machine |
| CN110405962A (en) * | 2019-07-23 | 2019-11-05 | 上海理工大学 | Automatic turnover semiconductor cleavage device and processing method |
| CN110405962B (en) * | 2019-07-23 | 2021-11-19 | 上海理工大学 | Automatic turnover type semiconductor cleavage device and processing method |
| CN114772249A (en) * | 2022-04-06 | 2022-07-22 | 深圳市可信华成通信科技有限公司 | Automatic positioning device for cam plate |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI633069B (en) | 2018-08-21 |
| JP2015051864A (en) | 2015-03-19 |
| KR20150029518A (en) | 2015-03-18 |
| CN104418496B (en) | 2018-08-21 |
| KR102217699B1 (en) | 2021-02-18 |
| JP6280332B2 (en) | 2018-02-14 |
| TW201509841A (en) | 2015-03-16 |
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