CN101501239A - Takeup type vacuum filming apparatus - Google Patents
Takeup type vacuum filming apparatus Download PDFInfo
- Publication number
- CN101501239A CN101501239A CNA200780030031XA CN200780030031A CN101501239A CN 101501239 A CN101501239 A CN 101501239A CN A200780030031X A CNA200780030031X A CN A200780030031XA CN 200780030031 A CN200780030031 A CN 200780030031A CN 101501239 A CN101501239 A CN 101501239A
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- China
- Prior art keywords
- roller
- mentioned
- film
- printing ink
- mask pattern
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F31/00—Inking arrangements or devices
- B41F31/002—Heating or cooling of ink or ink rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F31/00—Inking arrangements or devices
- B41F31/15—Devices for moving vibrator-rollers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/0826—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
- B05C1/0834—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets the coating roller co-operating with other rollers, e.g. dosing, transfer rollers
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Intended is to simplify the constitution of and improve the assemblage of an oil condensing roller, while suppressing the reductions of a condensation adhesion efficiency of oil and a transfer efficiency of the oil to a printing roller. Provided is a takeup type vacuum filming apparatus comprising a mask forming unit (20), which includes an oil condensing roller (31) for holding such oil on its outer circumference as to form a mask pattern (25), a printing roller (33) for transferring the oil as the mask pattern (25) to the filming face of a film (12), and a transfer roller (32) arranged between the oil condensing roller (31) and the printing roller (33) for transferring the oil from the coil condensing roller (31) to the printing roller (33). Further comprises are a cooling mechanism for cooling the oil condensing roller (31), and a rocking mechanism for rocking the transfer roller periodically in the axial direction with respect to the oil condensing roller (31) and the printing roller (33).
Description
Technical field
The present invention relates to a kind of for example take-up type vacuum filming device of film capacitor manufacturing that is applicable to preferably.
Background technology
Since past, in the manufacturing of film capacitor, used on one side and rolled out insulativity films such as plastics film from rolling out roller, on one side behind a surperficial deposited metal film of this film, with the type vacuum vapor deposition device of the form of this winding film to the wind up roll.
But; in this film capacitor; the metal evaporation film that exists film surface to form is a plurality of condenser plates by burst, and the condenser plate that adjoins mutually is at the electrical condenser of the interconnected so-called self-protection function type of the connection section of the narrow width that is made of same vapor-deposited film.Like this in the film capacitor of type, produce when puncturing in the part, by making above-mentioned connection section fusing (fusing function), thereby with the breakdown area of monolithic unit's inferior limit ground suppression capacitor.
Under the situation of the self-protection function type film capacitor such with above-mentioned type vacuum vapor deposition device manufacturing; be provided with the mask that is used to form mask pattern between roller and the evaporation source and form device rolling out, this mask pattern delimited the evaporation zone of metallic membrane to the film forming face of film.Form the unit as mask, known for example as shown in Figure 6, film F is clipped between print roller (version body) P and support roll (pressure body) B transports, and will be supplied to the mask pattern M of print roller P to form use printing ink, to form (the following patent documentation 1 of reference) to the film forming face transfer printing of film F from print roller P continuously by the printing ink roller C that condenses from inking source S.
At this, the printing ink roller C that condenses has to make from the ink vapor of inking source S ejection and condenses at its side face, and keeps the function of the printing ink paid.So the printing ink roller C that condenses is heated by the heat of condensation of ink vapor, the surface high temperature then the condensation efficiency of printing ink is low more, thereby the printing ink amount of paying reduces, so the roller C that printing ink need be condensed is cooled to below the specified temperature.In addition, according to the pattern form of mask pattern M, the condense contact position of roller C and print roller P of printing ink can be fixed, and descends with respect to the printing ink transfer printing precision of print roller P, pattern precision that might deterioration mask pattern M.
For solving such problem, form in the unit at existing mask shown in Figure 6, the cycling mechanism that cooling media is set on printing ink condenses roller C to be forcing cooling, and is provided with and makes the printing ink tilting mechanism W of roller C in its direction of principal axis (arrow A direction) periodic wobble that condense.In view of the above, can prevent to descend to the printing ink printing ink of the roller C printing ink transfer printing precision of paying decrease in efficiency and relative print roller P that condenses that condenses.
Patent documentation 1 (Japan) spy opens the 2000-144375 communique
But, forming in the unitary type vacuum vapor deposition device at the existing mask of having of structure shown in Figure 6, the printing ink roller C that condenses has and forces cooling body and tilting mechanism, thus the structure complicated that exists printing ink to condense roller C, the problem that assembling operation is loaded down with trivial details.In addition,, need special syndeton, cause the problem that installation cost rises so exist because need under vacuum, supply with water coolant to the movable part circulation.
Summary of the invention
The present invention carries out in view of the above problems, its purpose is to provide a kind of take-up type vacuum filming device, it can suppress the decline of the printing ink transfer efficiency of the reduction of printing ink condensation efficiency and relative print roller, and realizes that condense simplifying the structure of roller and assembling operation performance of printing ink improves.
For overcoming the above problems, take-up type vacuum filming device of the present invention possesses the mask that forms mask pattern and forms device, the aforementioned mask pattern delimited the one-tenth diaphragm area of film forming material on film, it is characterized in that, this mask forms device to have: the supply source that forms the printing ink of mask pattern, to remain on first roller of periphery from the printing ink that supply source is supplied with, printing ink is carried out second roller of transfer printing as mask pattern on the film forming face of film, and be configured between first roller and second roller and with printing ink from three roller of first roller to second roller transfer, and comprise the cooling body that cools off first roller, and make the 3rd roller with respect to first, the tilting mechanism of second roller periodic wobble on direction of principal axis.
Among the present invention, first roller is corresponding to the printing ink that ink vapor is condensed the paying roller that condenses, and second roller is corresponding to the print roller on the film forming face that ink logo is printed on film.Among the present invention, between these first rollers and second roller configuration with printing ink from first roller to the transfer roll of second roller transfer as the 3rd roller.So, by above-mentioned cooling body is arranged on first roller, and above-mentioned tilting mechanism is arranged on the 3rd roller, the decline of printing ink transfer efficiency that the printing ink that can suppress first roller condenses the decline of paying efficient and relative second roller.
So, according to the present invention, because be printing ink is condensed structure that roller swings on its direction of principal axis, so be easy to be provided with at the condense cooling body of roller of printing ink, make printing ink the simplifying the structure of roller of condensing, thereby can realize assembling the raising of performance and the reduction of manufacturing cost with cooling function.
On the other hand, printing ink its upper layer of roller that condenses is made of the material than hard of ceramic-like usually, and the surface has trickle concaveconvex structure.On the other hand, print roller is formed the press plate on surface by plastic materials such as rubber, resins.So, form in the unit at above-mentioned existing mask, swing on direction of principal axis by the printing ink roller that condenses, thereby the upper layer of the print roller of contact is easy to wearing and tearing therewith.As a result of, descend for the transfer printing precision of the mask pattern of film, the replacing frequency gets higher of print roller can not steady in a long-term be kept the transfer printing precision of mask pattern.
So, among the present invention, between first roller (printing ink condense roller) and second roller (print roller) in the structure of configuration the 3rd roller (transfer roll), upper layer by making the 3rd roller forms with the material more soft than first roller soft resin materials such as (for example) urethaness, reduces to result from the upper layer wearing and tearing of second roller that relatively moves between the 3rd roller and second roller.In view of the above, can improve the life-span of second roller, carry out high precision transfer printing formation steadily in the long term the mask pattern of film.More preferably, the upper layer of the 3rd roller is formed with the material more soft than the upper layer of second roller.In view of the above, can protect second roller for a long time.
As mentioned above, according to take-up type vacuum filming device of the present invention, at the printing ink transfer roll of configuration that condense between roller and the print roller as the 3rd roller, and have cooling printing ink condense roller cooling body and make the tilting mechanism of transfer roll periodic wobble on direction of principal axis, so can suppress the printing ink decline of printing ink transfer printing precision of the reduction of paying efficient and relative print roller of condensing, and realize that condense simplifying the structure of roller and assembling operation performance of printing ink improves.In addition, can prevent to descend because of the transfer printing precision that print roller causes to the mask pattern of film.
In addition, upper layer by making transfer roll forms with the more soft material of upper layer of the roller that condenses than printing ink, can reduce the relatively moving of transfer roll of relative print roller to the wearing and tearing of print roller upper layer, improve the life-span of print roller, carry out the high precision transfer printing formation of mask pattern steadily in the long term film.
Description of drawings
Fig. 1 is the conduct brief configuration figure of the type vacuum vapor deposition device of take-up type vacuum filming device according to an embodiment of the invention.
Fig. 2 shows that mask according to the type vacuum vapor deposition device of Fig. 1 forms the figure of mask pattern one example that the unit forms, and A is before showing the evaporation of metallic membrane, and B is after showing its evaporation.
Fig. 3 is that the mask of the type vacuum vapor deposition device of Fig. 1 forms unitary concise and to the point side elevational view.
Fig. 4 is that the mask of Fig. 3 forms unitary schematic plan view.
Fig. 5 is the figure of the structure example of the mask of explanatory view 3 tilting mechanism that forms unitary transfer roll.
Fig. 6 shows that the mask of existing take-up type vacuum filming device forms the concise and to the point stereographic map of unitary structure.
Nomenclature
10 type vacuum vapor deposition device
11 vacuum chambers
12 material films
13 roll out roller
14 jars of roller (キ ヤ Application ロ-ラ) (cooling rollers)
15 wind up rolls
16 evaporation sources
20 masks form the unit
21 support rolls
25 ink logos
26 metallic membranes
The 31 printing ink roller that condenses
32 transfer rolls
33 print roller
Embodiment
Below, with reference to accompanying drawing embodiments of the invention are described.In the present embodiment,, describe at the example that the present invention is applicable to type vacuum vapor deposition device as take-up type vacuum filming device.
Fig. 1 is the brief configuration figure of the type vacuum vapor deposition device 10 of embodiments of the invention.Type vacuum vapor deposition device 10 of the present invention has: vacuum chamber 11, film 12 roll out roller 13, cooling with a jar roller 14, the wind up roll 15 of film 12 and the evaporation source 16 of evaporation material.
By above roller 13, jar roller 14, wind up roll 15 and other guide rollers of rolling out, be formed in " running gear " of the present invention that film 12 is moved.
As evaporation material, except that Al (aluminium), Co (cobalt), Cu (copper), Ni (nickel), Ti metallic element simple substance such as (titaniums), can use Al-Zn (zinc), Cu-Zn, Fe (iron)-two or more metals or multielement alloys such as Co.Evaporation source 16 is not limited to one, is provided with a plurality of also passable.
The type vacuum vapor deposition device 10 of present embodiment also has mask and forms unit 20.Mask forms the upstream side that unit 20 is arranged on evaporation source 16, promptly rolls out between roller 13 and the evaporation source 16 (jar roller 14).Mask forms unit 20 and constitutes " mask formation device " of the present invention.
Fig. 2 shows the film forming face of film 12.The structure that mask forms unit 20 is that the mask pattern (ink logo) 25 with shape shown in the shade line among Fig. 2 A for example is coated on roughly whole of the film forming face of film 12.Because film forming metal film not on the mask pattern 25, so after the film forming, at the peristome 25a of mask pattern 25, the metal pattern of essentially rectangular that is coated with evaporation material is by connection section 26a, be able to film forming with the metallic membrane 26 of predetermined distance type of attachment.In addition, the one-tenth form membrane of metallic membrane 26 is not limited to above-mentioned.
In addition; when each metallic membrane 26 constitutes condenser plate respectively, produce when puncturing in the part, connection section 26a is fused by the joule heating of the electric current that is produced; with the breakdown area of monolithic unit inferior limit ground suppression capacitor, play a role as the film capacitor of self-shield type.
Fig. 3 is the concise and to the point pie graph that mask forms unit 20.Mask forms unit 20 and has ink jet source 31A, printing ink condense roller (first roller) 31, transfer roll (the 3rd roller) 32, print roller (second roller) 33 and support roll 21.
The printing ink roller 31 that condenses makes from the ink vapor of ink jet source 31A ejection and condenses at its side face, and keeps the printing ink paid.The condense upper layer of roller 31 of printing ink is made of the material of ceramic-like comparison hard, and the surface has trickle concaveconvex structure.
Condense each two ends of roller 31, transfer roll 32 and print roller 33 of ink jet source 31A, printing ink are supported by shared framework 34.Framework 34 is fixed with the inner-wall surface one of vacuum chamber 11.The synchronously related rotation of moving that printing ink condenses roller 31, transfer roll 32 and print roller 33 and film 12 is arranged so that the driver element of part or all rotating drive of these rollers.
Fig. 4 is the schematic plan view that mask forms unit 20.Mask form unit 20 possess cooling printing ink condense roller 31 cooling body and make transfer roll 32 go up the tilting mechanism of periodic wobble at direction of principal axis (arrow H direction) with respect to condense roller 31 and print roller 33 of printing ink.
The cooling body of printing ink coagulation mechanism 31 by be formed on printing ink condense roller 31 inside cooling media (cooling oil, water coolant etc.) circulation tube 35, and carry the recycle pump (omitting diagram) of cooling medias to constitute to this circulation tube 35.In view of the above, condense all surface temperatures of roller 31 of printing ink are maintained at below the specified temperature, prevent from that printing ink from condensing to pay the decline of efficient.Particularly, when the vapour temperature of printing ink was 125 ℃-135 ℃, the cooling media temperature was set at 40 ℃-50 ℃.
On the other hand, above-mentioned tilting mechanism is to descend and be provided with for suppressing from transfer roll 32 to print roller 33 printing ink transfer printing precision.That is, when mask pattern has continuous pattern on the travel direction (Zhou Fangxiang of print roller 33) of film 12, because need supply printing ink continuously and stably to this pattern position of print roller 33, so by making transfer roll 32 periodic wobble on direction of principal axis, transfer roll 32 broadens with respect to the contact area of print roller 33 on direction of principal axis, thereby can stably carry out the printing ink transfer printing of necessary amount to print roller 33.
Fig. 5 A, B show the structure example of the tilting mechanism of transfer roll 32.
In the structure example shown in Fig. 5 A, when the part of the axial region 32A of transfer roll 32 forms threaded portion 32B, first gear 38 that is screwed with threaded portion 32B is set, reaches second gear 39 that is meshed with the peripheral part of this first gear 38, by make second gear 39 rotating drive periodically on positive and negative two directions by motor 40, transfer roll 32 is swung on the H direction.
In addition, in the structure example shown in Fig. 5 B, in the distolateral configuration cam 41 of the axial region 32A of transfer roll 32, another distolateral return spring 42 that is provided with at the axial region 32A of transfer roll 32, by the rotating drive of the cam 41 that causes by motor 43, make transfer roll 32 periodically swing on the H direction.
Below, the action of the type vacuum vapor deposition device 10 of the present embodiment that as above constitutes is described.
In vacuum chamber 11 inside that are depressurized to the specified vacuum degree,, be wound up into continuously on the wind up roll 15 from rolling out film 12 process masks formation operation and the evaporation operations that roller 13 pulls straight.
Form in the operation at mask, form unit 20 prints form shown in Fig. 2 A on the film forming face of film 12 mask pattern 25 by mask.The film 12 that is formed with mask pattern 25 is reeled by jar roller 14.In addition, as required, also can apply charged particle beam such as irradiating electron beam etc. to film 12 to improve the processing of jar roller 14 being close to power.Then, be deposited on the film forming face of film 12, form the metallic membrane 26 shown in Fig. 2 B by making from the evaporation material of evaporation source 16 evaporations.Evaporation has the film 12 of metallic membrane 26 to be winding on the wind up roll 15 by guide roller.
In the present embodiment, mask forms unit 20 to have in the printing ink structure of configuration transfer roll 32 between roller 31 and the print roller 33 of condensing, and possess cooling printing ink condense roller 31 cooling body and make the tilting mechanism of transfer roll 32 periodic wobble on direction of principal axis.By above-mentioned cooling body, can be suppressed at the decline of ink vapor condensation efficiency that printing ink condenses roller 31, the stable printing ink of guaranteeing requirement is being paid and is being measured.In addition,, the printing ink of requirement can be supplied with, the decline of mask pattern 25 can be prevented for the transfer printing precision of film 12 at print roller 33 transfer printings by above-mentioned tilting mechanism.
So, according to present embodiment, to form unitary structure different with existing mask shown in Figure 6, the printing ink roller 31 that condenses is swung on its direction of principal axis, so be easy to be provided with at the condense cooling body of roller 31 of printing ink, printing ink with the cooling function roll structure that condenses is oversimplified, thereby can be realized assembling the raising of performance.
And, in the present embodiment,, compare so form unitary structure with existing mask shown in Figure 6 because the upper layer of transfer roll 32 forms with the roller 31 more soft materials that condense than printing ink,
Can reduce the wearing and tearing of print roller 33 upper layers.In view of the above, can improve the life-span of print roller 33, the high precision transfer printing of carrying out 25 pairs of films 12 of mask pattern steadily in the long term forms.More preferably, the upper layer of transfer roll 33 is formed with the material more soft than the upper layer of print roller 33.In view of the above, can more long-term protection print roller 33.
More than be illustrated at embodiments of the invention, certainly, the present invention is not limited to this, according to technical conceive of the present invention, can carry out various distortion.
For example, in the above-described embodiments, though what illustrate is the vacuum vapour deposition of applications exploiting evaporation source 16 is come the film forming metal film as film deposition system example, but be not limited to this, also can use other one-tenth embrane methods of sputtering method, various CVD methods etc., film forming metal film or non-metallic film, become embrane method to match with these, can suitably adopt film deposition systems such as sputtering target.
In addition, also can constitute transfer roll 32, in these a plurality of rollers, make a swing at least by a plurality of rollers.In addition, also can be in these a plurality of rollers, making the roller that contacts with print roller 33 is than the soft material of print roller 33 upper layers.
Claims (2)
1. take-up type vacuum filming device, it comprises: vacuum chamber; The running gear that film is moved; On the above-mentioned film in moving film forming material is carried out film forming film deposition system; The mask that forms mask pattern in the upstream of above-mentioned film deposition system, on above-mentioned film forms device, and the aforementioned mask pattern delimited the one-tenth diaphragm area of above-mentioned film forming material, and this take-up type vacuum filming device is characterised in that,
Aforementioned mask forms device to be had:
The supply source of the printing ink of formation aforementioned mask pattern,
To remain on from the printing ink that above-mentioned supply source is supplied with periphery first roller,
With above-mentioned printing ink on the film forming face of above-mentioned film as mask pattern carry out transfer printing second roller, and
Be configured between above-mentioned first roller and above-mentioned second roller and from three roller of above-mentioned first roller to the above-mentioned printing ink of above-mentioned second roller transfer, and
Aforementioned mask forms device and comprises: cool off the cooling body of above-mentioned first roller and make the tilting mechanism of above-mentioned the 3rd roller with respect to above-mentioned first roller, second roller periodic wobble on direction of principal axis.
2. take-up type vacuum filming device according to claim 1 is characterized in that, the upper layer of above-mentioned the 3rd roller forms with the material more soft than the upper layer of above-mentioned first roller.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006275151 | 2006-10-06 | ||
| JP275151/2006 | 2006-10-06 | ||
| PCT/JP2007/068929 WO2008044489A1 (en) | 2006-10-06 | 2007-09-28 | Takeup type vacuum filming apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101501239A true CN101501239A (en) | 2009-08-05 |
| CN101501239B CN101501239B (en) | 2012-03-07 |
Family
ID=39282699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200780030031XA Active CN101501239B (en) | 2006-10-06 | 2007-09-28 | Takeup type vacuum filming apparatus |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20100009082A1 (en) |
| EP (1) | EP2071051B1 (en) |
| JP (1) | JP5095624B2 (en) |
| KR (1) | KR101082852B1 (en) |
| CN (1) | CN101501239B (en) |
| TW (1) | TWI390058B (en) |
| WO (1) | WO2008044489A1 (en) |
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| CN106094430A (en) * | 2016-08-23 | 2016-11-09 | 贵州劲瑞新型包装材料有限公司 | A kind of vacuum aluminum-coated device for forming pattern and operational approach thereof |
| CN113684464A (en) * | 2021-08-27 | 2021-11-23 | 辽宁分子流科技有限公司 | A coiling formula equipment for preparation of graphite alkene composite film |
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| US8333841B2 (en) * | 2006-08-08 | 2012-12-18 | Ulvac, Inc. | Roll-to-roll vacuum deposition apparatus |
| US11738537B2 (en) | 2013-10-30 | 2023-08-29 | San Diego Gas & Electric Company, c/o Sempra Energy | Nonconductive films for lighter than air balloons |
| US20150118460A1 (en) * | 2013-10-30 | 2015-04-30 | San Diego Gas & Electric company c/o Sempra Energy | Nonconductive films for lighter than air balloons |
| JP2015181979A (en) * | 2014-03-20 | 2015-10-22 | Ｊｘ日鉱日石エネルギー株式会社 | Coating device and coating film forming method of forming discontinuous coating film in longitudinal direction and width direction of band-like film base material |
| JP2015181981A (en) * | 2014-03-20 | 2015-10-22 | Ｊｘ日鉱日石エネルギー株式会社 | Coating device and coating film forming method of forming coating film with discontinuous pattern on band-like film base material |
| JP6157391B2 (en) * | 2014-03-20 | 2017-07-05 | Ｊｘｔｇエネルギー株式会社 | COATING APPARATUS AND COATING METHOD FOR FORMING DISCONTINUOUS COATING ON A SHEET-shaped FILM |
| WO2015064685A1 (en) * | 2013-11-01 | 2015-05-07 | Ｊｘ日鉱日石エネルギー株式会社 | Application device for forming coating having discontinuous pattern onto strip-shaped film substrate, and method for manufacturing strip-shaped film substrate having uneven pattern |
| CN115938804A (en) * | 2023-03-15 | 2023-04-07 | 四川省科学城久信科技有限公司 | Preparation method of thin film capacitor metallized film |
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-
2007
- 2007-09-28 KR KR1020097001149A patent/KR101082852B1/en active IP Right Grant
- 2007-09-28 EP EP07828671.3A patent/EP2071051B1/en active Active
- 2007-09-28 JP JP2008538641A patent/JP5095624B2/en active Active
- 2007-09-28 US US12/438,957 patent/US20100009082A1/en not_active Abandoned
- 2007-09-28 CN CN200780030031XA patent/CN101501239B/en active Active
- 2007-09-28 WO PCT/JP2007/068929 patent/WO2008044489A1/en active Application Filing
- 2007-10-01 TW TW096136704A patent/TWI390058B/en active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106094430A (en) * | 2016-08-23 | 2016-11-09 | 贵州劲瑞新型包装材料有限公司 | A kind of vacuum aluminum-coated device for forming pattern and operational approach thereof |
| CN113684464A (en) * | 2021-08-27 | 2021-11-23 | 辽宁分子流科技有限公司 | A coiling formula equipment for preparation of graphite alkene composite film |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200827461A (en) | 2008-07-01 |
| US20100009082A1 (en) | 2010-01-14 |
| JP5095624B2 (en) | 2012-12-12 |
| TWI390058B (en) | 2013-03-21 |
| CN101501239B (en) | 2012-03-07 |
| EP2071051A4 (en) | 2012-01-04 |
| EP2071051B1 (en) | 2016-08-31 |
| WO2008044489A1 (en) | 2008-04-17 |
| KR101082852B1 (en) | 2011-11-11 |
| KR20090027247A (en) | 2009-03-16 |
| EP2071051A1 (en) | 2009-06-17 |
| JPWO2008044489A1 (en) | 2010-02-12 |
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