CN101487812B - Test system for resistivity-temperature characteristics and air-sensitive characteristics of components - Google Patents
Test system for resistivity-temperature characteristics and air-sensitive characteristics of components Download PDFInfo
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- CN101487812B CN101487812B CN2009100677533A CN200910067753A CN101487812B CN 101487812 B CN101487812 B CN 101487812B CN 2009100677533 A CN2009100677533 A CN 2009100677533A CN 200910067753 A CN200910067753 A CN 200910067753A CN 101487812 B CN101487812 B CN 101487812B
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Abstract
The invention relates to a test system for resistance temperature characteristic and air sensitive characteristic of components and parts, which comprises two air inlets, a mixing chamber, a vacuum reaction chamber, a gas concentration tester, a test probe device, a temperature controlled plate, a temperature controller and a computer. The two air inlets are respectively connected with the mixing chamber by a valve. Two flow meters are respectively arranged at the two air inlets. The mixing chamber is connected with the vacuum reaction chamber by the valve. An air extracting pump is connected with the vacuum reaction chamber by the valve. The vacuum reaction chamber is fixed with the temperature controlled plate used for heating the components and parts to be tested. The gas concentration tester is arranged at a position near to the temperature controlled plate. The vacuum reaction chamber is internally fixed with the test probe device. The temperature controlled plate is controlled by the temperature controller connected with the computer. Two probes of the test probe device are used as contact electrodes of the components and parts to be tested and connected with a multimeter which is connected with the computer. The test system can accurately control and measure the contents of tracer gas in the reaction chamber in real time and the electrode contact is more reliable. And the resistance temperature characteristic and air sensitive characteristic are integrated in the same device, which can realize the full automation of data record.
Description
Technical field
The present invention relates to a kind of gas sensor characteristic test device.
Background technology
The resistivity-temperature characteristics proving installation of gas sensor generally includes two major parts: heating part and resistance test part.Main measuring test instrument in the market (like the FQJ/2 type nonequilibrium bridge heating arrangement of Hangzhou Instr Ltd. of smart section) all needs artificial counting.Because people's the subjectivity and the hysteresis quality of reaction, make and sample inaccurate and sampled point is on the low side.And this kind equipment can not accurately control programming rate, limited the usable range of equipment.
The gas-sensitive property proving installation comprises three major parts: induction part, electrical performance testing part, heating part.
(1) at present domestic have two kinds of air inlet methods: a kind of is volume calculation air inflow according to reaction chamber, injects detected gas with microsyringe, makes gas evenly be full of reaction chamber through diffusion or by fan.(referring to paper, Huijuan Xia, Yan Wang, Fanhong Kong; Shurong Wang, Baolin Zhu, Xianzhi Guo; Jun Zhang, YanmeiWang, Shihua Wu; Au-doped WO3-based sensor for NO2 detection at low operatingtemperature, Sensors and Actuators B 134 (2008) 133-139.) another kind is earlier reaction chamber to be vacuumized, and directly injects in advance the gas that mixes with mass flowmeter again to reaction chamber.(referring to patent, 200710063698.1).Because the restriction of gas source purity; The accuracy limitations of microsyringe (mass flowmeter); The impermeability restriction of whole device and the maximum vacuum restriction that the single-stage vacuum pump can reach; The concentration that the concentration of end reaction indoor gas and front end Theoretical Calculation obtain has deviation, so the method for implanting of type detected gas needs to improve.
(2) the test electric property need be drawn two electrodes of components and parts.The general at present mode that adopts welded wire or compressing tablet contact.The welded wire complicated steps, the resistance of components and parts is very responsive to the electrode contact quality simultaneously, and the quality of solder joint directly has influence on the test of electric property.Common pressure type more can not guarantee good electrical contact.
(3) present, the measurement to resistivity-temperature characteristics and the gas-sensitive property of components and parts needs to adopt the independent device to test device of two covers, and test is inconvenience both, and cost is high again.
Summary of the invention
The objective of the invention is to overcome the above-mentioned deficiency of prior art; Provide a kind of control more accurately also can measure the content (ppm level) of reaction chamber detected gas in real time; The electrode contact is more reliable; And two kinds of functions of resistivity-temperature characteristics test and gas-sensitive property test are integrated in same device, realize the gas sensor characteristic test device of the full-automation of data recording.
For this reason, the present invention adopts following technical scheme:
A kind of components and parts resistivity-temperature characteristics and gas-sensitive property test macro; Comprise two air intake openings; Mixing chamber, vacuum reaction chamber, gas concentration tester, test probe apparatus, temperature control plate, temperature controller and computing machine, two air intake openings link to each other with mixing chamber through valve respectively, are provided with flowmeter respectively at two air intake opening places; Mixing chamber links to each other with vacuum reaction chamber through valve; Aspiration pump links to each other with vacuum reaction chamber through valve, is useful on the temperature control plate that heats components and parts to be measured, is provided with the gas concentration tester in the position near the temperature control plate, at the indoor test probe apparatus that also is fixed with of vacuum reaction at the vacuum reaction chamber internal fixation; The control of the temperature controller that the temperature control plate receives to link to each other with computing machine; Two probes of test probe apparatus are used as the contact electrode of components and parts to be measured, and link to each other with multimeter, and multimeter links to each other with computing machine.
As preferred implementation; Components and parts resistivity-temperature characteristics of the present invention and gas-sensitive property test macro, described test probe apparatus comprise pallet, be arranged on clamping device on the pallet, receive two fixing feeler arms of clamping device, be fixed on two spring probes on the feeler arm through probe base respectively; Described feeler arm is that an arm is apart from adjustable mechanical hook-up; Described test macro also comprises the negative and positive polarizer, is used to cooperate the volt-ampere characteristic of testing components and parts to be measured; Described test macro also comprises the constant current constant-current source, is used to cooperate the gas-sensitive property of test components and parts to be measured under constant working current.
The present invention has following outstanding technique effect:
1, use through the collocation of intelligence instrument and computing machine, can realize gas-sensitive property, it is integrated that series of characteristics such as resistivity-temperature characteristics are tested, intellectuality, the full-automation of record data, and the easy of data processing.
2, through accurate measurement, can quantize the gas-sensitive property of the device of surveying more accurately to the vacuum reaction chamber gas concentration.
3, through the ingenious use of spring probe, solved component testing and drawn the difficult and insecure practical problems of electrode.
Description of drawings
The structured flowchart of Fig. 1 components and parts resistivity-temperature characteristics of the present invention and gas-sensitive property test macro;
The front elevation of the test probe apparatus that Fig. 2 the present invention adopts;
The side view of the test probe apparatus that Fig. 3 the present invention adopts;
The structured flowchart of the another kind of embodiment of Fig. 4 test macro of the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is done further detailed description.
Referring to Fig. 1, test macro of the present invention comprises two air intake openings, and air intake opening 1 is used to feed detected gas; Air intake opening 2 is used to feed carrier gas; Accurate mass flowmeter 3; Mass flowmeter 4; Mixing chamber 5; The vacuum reaction chamber with a lid that links to each other with mixing chamber 5; Be provided with gas detecting instrument, heating aluminium sheet (or being called the temperature control plate) in the vacuum reaction chamber, be used to measure thermopair, the test probe apparatus (also can be described as the contact electrode device) that heats the aluminium sheet temperature; Carry out thermoregulator PID intelligent temperature controller (having serial communication interface) according to the temperature of thermocouple measurement; Digital multimeter; Computing machine; The aspiration pump that links to each other through valve with vacuum reaction chamber; Measure the tensimeter or the vacuum meter of vacuum reaction chamber pressure.
During test, first valve-off 6,7,8,9 is opened valve 10,11. usefulness vacuum pumps mixing chamber 5 and vacuum reaction chamber is vacuumized.Valve-off 10,11 when reaching required vacuum values is opened valve 6,7,8,9.According to the test needs, utilize mass flowmeter that the gas feeding mixing chamber of special ratios is carried out premixed.To be mixedly open valve 11 after fully, gas is fed vacuum reaction chamber, utilize gas detecting instrument to measure the gas content of reaction chamber in real time.
Referring to Fig. 2 and Fig. 3, components and parts 27 are positioned over heating plate 26 surfaces of feeler arm 23 belows, regulate feeler arm 23 spacings and make it to be complementary, and iron clamp 22 is moved down, until the surface of probe 25 contact electrodes with the device electrode spacing.Through programming and setting, components and parts 27 are accurately heated the PID intelligent temperature controller.And import temperature-time value into computing machine.
Two probe bases 24 link to each other with the external world through terminals that are installed on the reaction chamber wall.And be connected on the ground wire and the resistance test end of digital multimeter respectively.Digital multimeter links to each other with computing machine.Can real time record resistance-time value, observation resistance-time curve.
Vacuum reaction chamber top is divided into the reaction chamber cap that flange connects.The vacuum reaction chamber specification is: diameter 200mm, high 150mm.
The peak power of heating plate is 400w, reliable heated perimeter 0-350 ℃.Specification is: long 95mm, wide 95mm, high 12mm.
0.5 grade of PID temperature controller precision, 400 sections curves are able to programme, band serial line interface and interface software.
Digital multimeter (DMM) resistance grade range 0-99 megaohm.Trueness error 0.025%, band serial line interface and interface software.
Gas detecting instrument can freely be changed test probe to be used for the parameter testing of gas with various.
The probe model is P100-J, and contact resistance is 50 milliohms.
Specify below and how to use test macro of the present invention.
1, respectively reaction gas and carrier gas are received air intake opening 1 and air intake opening 2.
2, with vacuum pump gas reaction chamber and mixing chamber are evacuated down to required vacuum tightness.Tensimeter is used to show the vacuum tightness of reaction chamber.
3, calculate the ratio of reacting gas and carrier gas according to required reacting gas concentration.Utilize mass flowmeter that two kinds of gases are fed mixing chamber and mix, feed reaction chamber again and reach required pressure until the tensimeter displayed value.
4, the definite concentration of utilizing gas concentration detector (the GAXT series high precision waterproof pure gas detector of Canadian York company) to read gas in the reaction chamber.This point is an original creation part of the present invention.Near the reaction chamber gas sensitive device, directly detect the concentration of gas.Avoided the restriction and the interference of all experiment conditions of periphery, reduced requirement, be extracted into very high vacuum to guarantee vacuum reaction chamber, practiced thrift experimental period like unnecessary installation multistage vacuum pump to the precision of all the other equipment in this system; The unnecessary expensive accurate mass flowmeter etc. of buying.And the concentration that the method is measured is directly, and the concentration of calculating through front end can only be approximate value.Simultaneously, cooperate tensimeter, whether this gas concentration detector judgment experiment device more intuitively leaks gas.
It more than is the novel gas injection system solution of a cover.
5,6 both-end binding posts are arranged on the wall of reaction chamber.The inner end of these 6 binding posts connects the heating plate both positive and negative polarity respectively, the thermopair both positive and negative polarity.Probe base (2).An outside end correspondence connects the relay output both positive and negative polarity of PID intelligent temperature controller.Thermopair input both positive and negative polarity.The ground wire of digital multimeter and resistance grade.
6, the inside of vacuum reaction chamber: carry out the installation of components and parts before the test, at first open multimeter, then device is placed on probe below appropriate location.Spacing according to the adjustment of the electrode separation on device feeler arm.Iron clamp is moved down, observe the multimeter registration simultaneously, become finite value to the multimeter registration, stop to move iron clamp.This mode of connection is the initiative in this field.This invention is ingenious to utilize domestic ripe PCB probe, need welded wire could guarantee that reliable contact method simplifies script, and theory facts have proved that it is that electricity is reliable that probe contacts.(just adopt similar probe contact like the four point probe tester that is widely used in scientific experiment.) the detailed formation of this part sees accompanying drawing 2, test probe apparatus comprises: iron stand 21; Iron clamp 22; Feeler arm 23; Probe base 24; Spring probe 25.Feeler arm 23 is the adjustable mechanical hook-ups of arm distance, and the spacing between left and right arms is adjustable flexibly, and range of adjustment 1-15mm can adapt to the most devices under the integrated circuit technology.Probe base 24 is installed in the lower end of spring probe arm 23, and spring probe 25 is inserted in the probe base 23.If for a long time probe is followed the string.Also can change spring probe 25 easily to guarantee highly reliable electricity contact.
7, during the test gas-sensitive property, earlier reaction chamber is vacuumized, then the PID temperature controller is transferred to preference temperature.After treating temperature stabilization, open multimeter, and with sampling rate interrupted transmission electrical quantities in computing machine of 1sa/s, to reaction chamber in feed proper amount of gas according to step 3 this moment, draws the gas-sensitive property curve map in real time.After question response is stable, use the vacuum pump gas bleeding, and feed carrier gas, the air-sensitive recovery characteristics of test component.Be stored in the computing machine all experimental datas are complete then, conveniently further handle.
8, during the test resistivity-temperature characteristics, set the heating curve and the intensification threshold value of PID temperature controller according to the test needs.And connect the PID temperature controller to computing machine, output temperature-time value (1sa/s).Open digital multimeter simultaneously and be connected to computing machine, output resistance-time value (1sa/s).After experiment finishes, two files are preserved into electronic form file, utilize form software can draw resistance-temperature value and response curve easily, this is the 3rd bright spot of the present invention.The precision of PID intelligent temperature controller (day island proper electricity fp-23) control is high, and the heating curve of different shape can be set.Digital multimeter is the high precision multimeter (the excellent sharp ut-70d of getting) of sampling rate 5sa/s.
9, the test function expansion
Electrode based on device is drawn out to the outer terminals of reaction chamber reliably, therefore can cooperate other characteristic of Other Instruments test component easily and flexibly.For example, cooperate the I-V characteristic that the anode and cathode polarizer can test component, cooperate the gas-sensitive property that the constant current constant-current source can the constant working current of test component, or the like, referring to Fig. 4.
Claims (4)
1. components and parts resistivity-temperature characteristics and gas-sensitive property test macro; Comprise two air intake openings; Mixing chamber, vacuum reaction chamber, gas concentration tester, test probe apparatus, temperature control plate, temperature controller and computing machine; Two air intake openings link to each other with mixing chamber through valve respectively, are provided with flowmeter respectively at two air intake opening places, and mixing chamber links to each other with vacuum reaction chamber through valve; Aspiration pump links to each other with vacuum reaction chamber through valve; The vacuum reaction chamber internal fixation be useful on heating components and parts to be measured the temperature control plate, be provided with the gas concentration tester in position near the temperature control plate, at the indoor test probe apparatus that also is fixed with of vacuum reaction, the control of the temperature controller that the temperature control plate receives to link to each other with computing machine; Described test probe apparatus comprises pallet, be arranged on clamping device on the pallet, receive two fixing feeler arms of clamping device, be fixed on two spring probes on the feeler arm through probe base respectively; Its two spring probes are used as the contact electrode of components and parts to be measured, and link to each other with multimeter, and multimeter links to each other with computing machine.
2. components and parts resistivity-temperature characteristics according to claim 1 and gas-sensitive property test macro is characterized in that, described feeler arm is that an arm is apart from adjustable mechanical hook-up.
3. components and parts resistivity-temperature characteristics according to claim 1 and gas-sensitive property test macro is characterized in that described test macro also comprises the negative and positive polarizer, are used to cooperate the volt-ampere characteristic of testing components and parts to be measured.
4. components and parts resistivity-temperature characteristics according to claim 1 and gas-sensitive property test macro is characterized in that described test macro also comprises the constant current constant-current source, are used to cooperate the gas-sensitive property of test components and parts to be measured under constant working current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100677533A CN101487812B (en) | 2009-01-20 | 2009-01-20 | Test system for resistivity-temperature characteristics and air-sensitive characteristics of components |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009100677533A CN101487812B (en) | 2009-01-20 | 2009-01-20 | Test system for resistivity-temperature characteristics and air-sensitive characteristics of components |
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| Publication Number | Publication Date |
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| CN101487812A CN101487812A (en) | 2009-07-22 |
| CN101487812B true CN101487812B (en) | 2012-01-25 |
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| CN101762625B (en) * | 2010-01-19 | 2012-08-22 | 南京工业大学 | Gas sensitivity measuring device for gas sensitive material |
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| CN103760200B (en) * | 2014-01-20 | 2016-09-14 | 吉林大学 | A kind of ion-type gas sensitive analytical equipment |
| CN104076122A (en) * | 2014-05-26 | 2014-10-01 | 电子科技大学 | Temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity |
| CN104950863B (en) * | 2015-07-03 | 2018-02-27 | 威海双丰韩柏温度智能控制有限公司 | Temperature controller life-span automatic detection device |
| CN105988490B (en) * | 2015-08-03 | 2018-02-16 | 北京艾立特科技有限公司 | A kind of outside temperature control type intelligence air-sensitive analytical equipment |
| CN105973967B (en) * | 2016-07-15 | 2018-06-15 | 中国科学院福建物质结构研究所 | A kind of controllable more device field-effect transistor sealing test devices of atmosphere |
| CN106645956A (en) * | 2016-10-11 | 2017-05-10 | 吉林大学 | New gas-sensitive material testing system |
| CN108490844B (en) * | 2018-05-11 | 2023-05-26 | 湖南众源科技有限公司 | High-precision constant pressure closed-loop control instrument |
| CN110568024A (en) * | 2019-09-02 | 2019-12-13 | 中国工程物理研究院材料研究所 | Gas-sensitive performance testing device based on four-probe method |
| CN113885310B (en) * | 2020-07-01 | 2023-03-28 | 东北大学 | Intelligent control system for vacuum dry pump test |
| CN114622177A (en) * | 2022-02-11 | 2022-06-14 | 清华大学 | Sample platform, film growth equipment and in-situ measurement system |
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