CN104076122A - Temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity - Google Patents
Temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity Download PDFInfo
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- CN104076122A CN104076122A CN201410224721.0A CN201410224721A CN104076122A CN 104076122 A CN104076122 A CN 104076122A CN 201410224721 A CN201410224721 A CN 201410224721A CN 104076122 A CN104076122 A CN 104076122A
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Abstract
The invention discloses a temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity, and relates to the technical field of the gas-sensitive humidity-sensitive sensor, which aims at providing a temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity which is used for testing the performance of a sensitive element through toxic and corrosive gases. The temperature continuously-adjustable point-contact gas-sensitive humidity-sensitive test cavity comprises a test cavity main body and a temperature control module, wherein the test cavity main body comprises a cavity body and a cavity cover which is matched with the cavity body, the side wall of the cavity body is connected with a leading-out wire as well as a gas inlet pipe and a gas outlet pipe, wherein the gas inlet pipe and the gas outlet pipe are used for conveying the test gases, the leading-out wire is connected with a movable contact plate which is arranged in the cavity body, and when in test, a salient point of the movable contact plate is contacted with an electrode of a to-be-tested sensitive element which is arranged in the cavity body. By adopting the point contact way, the movable contact plate group is arranged in the cavity, a plurality of to-be-tested sensitive elements can be simultaneously tested, the temperature in the test cavity is continuously adjustable through the temperature control module, and the test of the to-be-tested sensitive element can be carried out in different temperature environments; moreover, the direction of the movable contact plate can be adjusted at random, so that the movable contact plate is suitable for testing the elements of different electrode sizes.
Description
Technical field
The present invention relates to air-sensitive, moisture sensor technical field of measurement and test, be specifically related to the continuous adjustable type point contact of a kind of temperature air-sensitive, wet sensitive test chamber.
Background technology
A people breathes approximately 15 cubic metres of air every day, and every cubic metres of air nearly weighs 1.3 kilograms, is equivalent to the air that a people need to suck 20 kilogram weights every day, and this quantity is more than ten times of people's amount of drinking water every day.In recent years, modernization development along with production and life style, more work and entertainment, sports all can be carried out indoor, and people had 80% even more time to spend indoor average every day, so IAQ (indoor air quality) and people's life and health has close relationship.
According to national standard, the major parameter of assessment IAQ (indoor air quality) has the content of the air pollutants such as sulphuric dioxide (SO2), nitrogen dioxide (NO2), carbon monoxide (CO), carbon dioxide (CO2), ammonia (NH3), stupid (C6H6); Meanwhile, the relative humidity of room air (Relative Humidity) is also as the important parameter of assessing.In IAQ (indoor air quality) detects, gas sensor and humidity sensor be as analysis means fast and effectively, have can measure in real time, volume is little, response is fast, price is low and consume energy and the feature such as lack; Use simultaneously and take the remote sensing monitoring system that gas and humidity sensor be core devices, can carry out in real time the air quality of indoor environment, remote monitoring.Given this, gas and the humidity sensor of urgently research and development high sensitivity, high selection, high stable, fast-response.
In the R&D process of gas and humidity sensor, fast, accurately, simple, convenient, safely and effectively the prototype of development to be carried out to sensitive property test most important.Generally, the performance test of air-sensitive, wet sensitive prototype is not carried out under real atmospheric environment, but complete in performance test chamber, therefore, the design test chamber that also processability is good is pushing member development carry out smoothly to a great extent.From current report, there is the problem of function singleness in most of air-sensitives or wet sensitive test chamber, as: can not to a plurality of elements, test simultaneously, various temperature test environment can not be provided, can only test for the element of fixed electorde size, before test, need prototype to carry out complicated lead packages etc.The utility model patent that is 201120561722.6 as application number discloses a kind of gas-sensitive property dynamic test system test cabinet, comprise upper cover, main cavity, lower cover, support, test cabinet main body, described support is provided with lower cover, between described upper cover and lower cover, be provided with test cabinet main body, upper end face and the bottom surface of described test cabinet main body are respectively equipped with seal groove, and the two side of described test cabinet main body is respectively equipped with air intake opening and gas outlet, and described air intake opening and gas outlet communicate with main cavity respectively.But this test chamber can not provide multiple probe temperature environment, and do not possess connecting device of electricity, sensitive element to be measured need to first go between and test.Application number is that 201210566058.3 patent of invention discloses a kind of semiconductor micro-nano monocrystalline gas sensor test macro, by the SnO preparing
2single crystal nano-belt field effect transistor is fixed in chip pad, and each electrode of single crystal nano-belt field effect transistor is connected with the electrode in chip pad; On IC circuit board, weld test chip conversion seat and row's pin, make each pin hole and correspondence and the conducting one by one of row's pin of test chip conversion seat; IC circuit board is fixed on fixed support; Outer signal output port is connected with row's pin, and outer signal output port and fixed support are fixed on blind plate, and the component sealing that completes above connection is fixed in test cavity; Test cavity is regulated and controled to unit tail gas recovery system and is connected with semiconductor electricity test macro by outer signal output port with the monitoring of gas handling system gas flow and component respectively.The test for SnO2 single crystal nano-belt field effect transistor of this system, this gas sensor needed electrode to be connected in chip pad before test, then chip pad is arranged on the IC circuit board with chip conversion seat, finally IC circuit board is fixed in test chamber and complete being connected of IC circuit board and test chamber internal lead after aptitude test, operation is comparatively complicated.Given this, the application improves on the basis in traditional test chamber, has proposed the continuous adjustable type point contact air-sensitive/wet sensitive of a kind of temperature test chamber.
Summary of the invention
For above-mentioned the deficiencies in the prior art, object of the present invention is for providing the continuous adjustable type point contact of a kind of temperature air-sensitive wet sensitive test chamber, this test chamber can be in compared with large-temperature range simultaneously to a plurality of finished products or do not encapsulate air-sensitive wet sensitive prototype and carry out performance test, be applicable to multiple electrode size, and can be used for the test of multiple poisonous, corrosive gas.The present invention can solve that existing air-sensitive wet sensitive test chamber exists can not be simultaneously to a plurality of sensitive elements to be measured test, can not provide various temperature environment, only for needing the complicated problems such as lead packages before fixed electorde size element application, element test.
The present invention to achieve these goals, by the following technical solutions:
The continuous adjustable type point contact of a kind of temperature air-sensitive, wet sensitive test chamber, it is characterized in that: comprise test chamber main body and temperature control module, test chamber main body comprises cavity, covers with the chamber of cavity adaptation, cavity wall is connected with extension line, for delivery of draft tube and the escape pipe of test gas, extension line is connected with the movable contact spring in being arranged at cavity, the salient point of movable contact spring and the electrode contact of putting into the sensitive element to be measured of cavity during test.
Further, described temperature control module comprises key control unit, temperature detecting unit, heating unit, holding circuit, keyboard input circuit and liquid crystal display drive circuit, the input/output bidirectional port of key control unit respectively with temperature control unit, keyboard input circuit, liquid crystal display drive circuit, heating unit and holding circuit are electrically connected to, real time temperature in temperature detecting unit test chamber, keyboard input circuit arranges design temperature, design temperature and real time temperature are transferred to key control unit, key control unit outputs control signals to heating unit and by heating unit, cavity is heated, by liquid crystal display drive circuit display setting temperature and real time temperature, key control unit is in design temperature write protection circuit, the design temperature while again switching on after power-off in key control unit fetch protection circuit.
Further, temperature detecting unit and heating unit form negative feedback closed loop control.
Further, heating unit comprises heating element and temperature-control circuit, key control unit is electrically connected to temperature-control circuit, temperature-control circuit is electrically connected to heating element, heating element is installed in cavity, and the control signal of key control unit output is delivered to heating element and heating element is worked by temperature-control circuit.
Further, temperature detecting unit comprises temperature sensor, signal processing circuit, temperature sensor is installed in cavity, temperature sensor is electrically connected to signal processing circuit, signal processing circuit is electrically connected to key control unit, temperature in temperature sensor test chamber, and temperature information is delivered to key control unit by signal processing circuit.
Further, the temperature in cavity (1) is 15 ℃～300 ℃.
Further, test gas is water vapor (H
2o), ammonia (NH
3), nitrogen monoxide (NO), nitrogen dioxide (NO
2), hydrogen (H
2), carbon dioxide (CO
2), carbon monoxide (CO), sulfuretted hydrogen (H
2s), sulphuric dioxide (SO
2), methane (CH
4), dimethyl methyl phosphonate (DMMP) or oxygen (O
2).
Further, chamber covers the surface contacting with cavity and is provided with gasket seal, and cavity seals by gasket seal while being connected with chamber lid.
Further, cavity is identical with the material of chamber lid, and is teflon or polyimide, and gasket seal is silica gel pad, polytetrafluoro cylinder-packing rubber sheet gasket, aramid fiber pad or carbon fiber pad.
Further, cavity is identical with the material of chamber lid, and is stainless steel or copper, and gasket seal is silica gel pad, polytetrafluoro cylinder-packing rubber sheet gasket, aramid fiber pad, carbon fiber pad, copper backing, stainless steel gasket or Graphite pad.
Further, inside cavity arranges 8～12 movable contact springs along cavity length direction.
Further, the length of movable contact spring is 4mm～12mm, distance between the center of the fixed orifice of movable contact spring and the center of salient point is 2mm～10mm, the diameter of salient point is 0.5mm～3mm, distance between adjacent two movable contact springs is 3mm～15mm, and the center of circle of the fixed orifice that each movable contact spring can movable contact spring is 0 °～180 ° of center of circle rotations.
Compared with prior art, the present invention has following beneficial effect:
One, test chamber adopts some contact, and inside is provided with movable contact spring group, can measure a plurality of sensitive elements to be measured simultaneously, and does not need prototype to encapsulate.Movable contact spring not only can clamping element electrode, guarantees the stability of electricity contact, and can arbitrarily regulate the direction of movable contact spring, makes the test of its applicable Different electrodes size element.
Two, this test chamber has temperature control module, makes to test cavity temperature adjustable continuously, and test can be carried out under various temperature environment.
Three, test chamber main body adopts corrosion-resistant, resistant to elevated temperatures material to make, and sealing is good, can be applicable to the test of multiple poisonous, corrosive gas, meets the demand of testing under high temperature simultaneously.
Four, test chamber internal capacity is little, is conducive to the rapid diffusion of gas molecule in cavity in distribution process, has improved testing precision.
Five, adopt temperature to control control algolithm and control test cavity temperature, can make temperature reach after setting value, in more accurate scope, keep constant.
Six, this test chamber has liquid crystal display cells, and display setting temperature value and real time temperature value, make tester intuitively effectively understand test chamber internal temperature situation simultaneously.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the continuous adjustable type point contact air-sensitive/wet sensitive of temperature test chamber;
Fig. 2 is the schematic top plan view of the continuous adjustable type point contact air-sensitive/wet sensitive of temperature test chamber;
Fig. 3 is movable contact spring structural representation;
Fig. 4 is the connection diagram of movable contact spring and sensitive element to be measured;
Fig. 5 is the design frame chart of temperature control modules;
Wherein, Reference numeral is: 1-cavity, 2-chamber lid, 3-draft tube, 4-escape pipe, 5-gasket seal, 6-screw hole, 7-keyboard, 8-LCDs, 9-supply hub, 10-sensitive element to be measured, 11-movable contact spring, 12-extension line, 111-fixed orifice, 112-salient point.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described:
Embodiment mono-
The continuous adjustable type point contact of a temperature air-sensitive wet sensitive test chamber, for the performance test of gas sensor or humidity-sensitive element.
This test chamber comprises test chamber main body, temperature control module.Test chamber main body comprises cavity and chamber lid, cavity and the common test chamber main body that forms sealing of chamber lid, cavity and chamber lid are made by the polytetrafluoroethylmaterial material in macromolecule polymer material, the length of inside cavity cavity is that 40mm～120mm, width are that 10mm～30mm, the degree of depth are 3mm～10mm, in the present embodiment, the degree of depth of cavity internal cavities is 3mm, width is at 10mm, and length is 40mm, during test, in cavity, along cavity length direction, 4～6 gas sensors or humidity-sensitive element is set.Cavity and chamber cover correspondence and offer threaded hole, and cavity and chamber lid pass through screw tightening.Chamber covers the surface of contact contacting with cavity and is provided with gasket seal, can make cavity and chamber cover and guarantee the sealing of cavity when the screw tightening, thereby guaranteed accuracy and the security of test by gasket seal; When the material of cavity and chamber lid is macromolecule polymer material, gasket seal is corrosion-resistant flexible gasket, and in the present embodiment, the material of gasket seal is polytetrafluoro cylinder-packing rubber sheet gasket.Cavity wall is provided with extension line, draft tube and escape pipe, and described draft tube and escape pipe are silicone tube, and described draft tube and escape pipe are all for delivery of test gas.Test gas is water vapor (H
2o), ammonia (NH
3), nitrogen monoxide (NO), nitrogen dioxide (NO
2), hydrogen (H
2), carbon dioxide (CO
2), carbon monoxide (CO), sulfuretted hydrogen (H
2s), sulphuric dioxide (SO
2), methane (CH
4), dimethyl methyl phosphonate (DMMP) or oxygen (O
2).In inside cavity cavity, be provided with movable contact spring, described movable contact spring is small-sized moving contact, and as shown in Figure 3, movable contact spring total length is 4mm to its structural representation, the length of the rotatable portion of movable contact spring is 2mm, and this rotatable portion refers to the distance between the center of fixed orifice and the center of salient point on movable contact spring; Salient point diameter is 0.5mm; Distance between adjacent two movable contact springs is 3mm, and movable contact spring can fixed orifice be that the center of circle rotates in the scope of 0 °～180 °, thereby meets the element test demand of multiple electrode size, and this movable contact spring one end is installed on cavity bottom by the fixed orifice of movable contact spring.This sensitive element to be measured has two electrodes, distance between two electrodes is 2mm, electrode tie point width is greater than 0.5mm, during test, sensitive element to be measured be positioned over cavity bottom (certainly, sensitive element to be measured also can be positioned over the sidewall of cavity, but need be on cavity wall the fixture of relative set sensitive element to be measured, with the movable contact spring group being fixed on sidewall), the salient point of movable contact spring and the electrode contact of sensitive element to be measured.Sensitive element to be measured described in the present embodiment is gas sensor, during test, in cavity, along cavity length direction, place 5 gas sensors, 10 copper metal movable contact springs, an electrode in the corresponding gas sensor of each copper metal movable contact spring, 10 electrodes of 5 gas sensors and the corresponding contact one by one of 10 copper metal movable contact springs.
Cavity side is embedded with temperature control module, and described temperature control module comprises key control unit, temperature detecting unit, heating unit, holding circuit, keyboard input circuit, liquid crystal display drive circuit and feed circuit.Key control unit is comprised of Single Chip Microcomputer (SCM) system, its concrete temperature control algorithm adopts existing pid algorithm, and (it is that proportion integration differentiation is controlled that PID controls, it is in process control, in the ratio of deviation (P), integration (I) and differential (D), controlling, is to apply common, the longest a kind of basic controlling algorithm; PID regulator is a kind of linear regulator, and PID controller is comprised of ratio unit P, integral unit I and differentiation element D, and the expression-form of conventional continuous P ID controller is:
Wherein, Kp, Ki, Kd are three adjustable parameters of PID controller), and the internal memory of single-chip microcomputer is expanded, to be suitable for storage and the computing with pid algorithm.Temperature detecting unit comprises temperature sensor, signal processing circuit and A/D converter, and this temperature sensor is thermocouple temperature sensor, and temperature signal is transformed into voltage signal, and its measurement range is 15 ℃-300 ℃; Signal processing circuit to voltage signal amplify, compensation and linearization process; A/D converter is transformed into the discernible digital signal of single-chip microcomputer by voltage signal.Heating unit comprise adopt that volume is little, corrosion-resistant, maximum heating temperature can reach 250 ℃ and above heating element and with the corresponding temperature-control circuit of heating element, this heating element is CH-J103012 type refractory ceramics heating plate.Holding circuit is carried out power down protection to set temperature value, and the data of wherein preserving can controlled unit read and again write, and holding circuit has the function that latchs set information, prevents information dropout after power down.Keyboard input circuit is by can manually setting heating-up temperature write control unit to the operation of keyboard, difference according to demand can be selected independent keyboard or matrix keyboard, keyboard input circuit design in the present embodiment, employing matrix keyboard, there are four buttons, be respectively that power switch, temperature increase, temperature reduces and setting completes.Liquid crystal display drive circuit, has 2 cun of liquid crystal displays, can receive and show design temperature and real time temperature that Single Chip Microcomputer (SCM) system transmits, and key control unit can write design temperature and real time temperature to liquid crystal display cells.Wherein the keyboard of the LCDs of liquid crystal display drive circuit and keyboard input circuit is all arranged at cavity front side, and power interface is arranged at cavity right side, and extension line is arranged at cavity rear side.
The temperature sensor of temperature detecting unit is electrically connected to signal processing circuit, temperature in temperature sensor test chamber, temperature signal is transformed into voltage signal and is delivered to signal processing circuit, signal processing circuit to voltage signal amplify, compensation and linearization, signal processing circuit is electrically connected to A/D converter, and the voltage signal after amplification, compensation or linearization process is delivered to A/D converter, and A/D converter is transformed into the discernible digital signal of single-chip microcomputer by voltage signal, A/D converter is electrically connected to key control unit, and the digital signal after A/D converter conversion is delivered to key control unit, and key control unit is made response accordingly, the input/output bidirectional port of key control unit respectively with the temperature-control circuit of heating unit, holding circuit, keyboard input circuit and liquid crystal display drive circuit are electrically connected to, temperature-control circuit is electrically connected to heating element, temperature detecting unit and heating unit form negative feedback closed loop and control, real time temperature in temperature detecting unit test chamber, keyboard input circuit arranges design temperature, design temperature and real time temperature are transferred to key control unit, key control unit outputs control signals to heating unit and by heating unit, cavity is heated, by liquid crystal display drive circuit display setting temperature and real time temperature, key control unit is by design temperature write protection circuit, design temperature while again switching on after power-off in key control unit fetch protection circuit, the response that key control unit is made is delivered to temperature-control circuit, temperature-control circuit is adjusted the duty of heating element, thereby can make the temperature in cavity adjustable in 15 ℃～300 ℃, due to after cavity is positioned in environment, the initial temperature in cavity is identical with environment temperature, be room temperature, its initial temperature is 15 ℃～30 ℃.
This air-sensitive wet sensitive test chamber is both applicable to dynamic air-sensitive test, again applicable to static air-sensitive test.
During test, open chamber lid, sensitive element to be measured is positioned over to cavity bottom, wherein sensitive element to be measured arranges 5 along cavity length direction, the salient point of 10 movable contact springs be pressed on sensitive element to be measured and with electrode corresponding contact one by one on sensitive element to be measured, close chamber lid and make test chamber sealing, by draft tube, in cavity, pass into test gas, survey sensitive element and produce corresponding comparatively stable resistance, the electric signal such as electric capacity or curent change, the electric signal that sensitive element to be measured produces is delivered to external instrument by extension line, the properties that can visual test goes out sensitive element to be measured by external instrument.
Embodiment bis-
On the basis of embodiment mono-, key control unit is comprised of Single Chip Microcomputer (SCM) system, its concrete temperature control algorithm is used existing Dahlin algorithm instead, and (design of the whole controller of Dahlin algorithm is the method based on discretize, is at a suitable digitial controller of the inside, Z territory design.The maximum feature of this algorithm is the expectation closed loop response of system to be designed to desirable first order inertial loop add pure lag system, then by the closed loop response transport function of expectation and the mathematical model of control system, tries to achieve conversely the regulator of closed loop response.The control system structure of Dahlin algorithm is as follows:
controlled device is time lag of first order process:
wherein τ=NT, is pure delay time.T is the sampling period, and Tp is the time constant of object, and Kp is enlargement factor.The closed loop transfer function, of expectation is:
wherein Tb, for the closed loop time constant of expectation, is a setting parameter.Use the z converter technique with zero-order holder to carry out respectively discretize to G (s) and Gp (s):
The pulsed transfer function of digitial controller is:
。In addition, cavity and chamber lid are made by the polyimide material in macromolecule polymer material, and the inside cavity degree of depth is 5mm, and width is at 20mm, and length is 80mm.In cavity, be provided with humidity-sensitive element, in cavity, along cavity length direction, 4 humidity-sensitive elements, 8 copper metal movable contact springs be set.When the material of cavity and chamber lid is macromolecule polymer material, gasket seal is corrosion-resistant flexible gasket, and in the present embodiment, the material of gasket seal is silica gel pad.Movable contact spring total length is 8mm, and the length of the rotatable portion of movable contact spring is 6mm, and salient point diameter is 1.5mm; Distance between movable contact spring is 9mm.Distance between sensitive element electrode tie point to be measured is 5mm, and electrode tie point width is greater than 0.5mm.Heating element is polyimide heater film.
Embodiment tri-
On the basis of embodiment mono-or embodiment bis-, cavity and chamber lid are made by the stainless steel material in metal material, and the inside cavity degree of depth is 10mm, and width is at 30mm, and length is 120mm.In cavity, be provided with humidity-sensitive element, in cavity, along cavity length direction, 6 humidity-sensitive elements, 12 copper metal movable contact springs be set.When the material of cavity and chamber lid is metal material, gasket seal can be corrosion-resistant flexible gasket, also can be rigid gasket, and in the present embodiment, gasket seal is stainless steel gasket.Movable contact spring total length is 12mm, and the length of the rotatable portion of movable contact spring is 10mm, and salient point diameter is 3mm; Distance between movable contact spring is 15mm.Distance between sensitive element electrode tie point to be measured is 10mm, and electrode tie point width is greater than 0.5mm.Heating element is CH-J103012 type refractory ceramics heating plate.
Claims (12)
1. the continuous adjustable type point contact of a temperature air-sensitive, wet sensitive test chamber, it is characterized in that: comprise test chamber main body and temperature control module, test chamber main body comprises cavity (1), covers (2) with the chamber of cavity (1) adaptation, cavity (1) sidewall is connected with extension line (12), for delivery of draft tube (3) and the escape pipe (4) of test gas, extension line (12) is connected with the movable contact spring (11) in being arranged at cavity (1), the salient point (112) of movable contact spring during test (11) and the electrode contact of putting into the sensitive element to be measured (10) of cavity (1).
2. the continuous adjustable type point contact of a kind of temperature as claimed in claim 1 air-sensitive wet sensitive test chamber, it is characterized in that: described temperature control module comprises key control unit, temperature detecting unit, heating unit, holding circuit, keyboard input circuit and liquid crystal display drive circuit, the input/output bidirectional port of key control unit respectively with temperature control unit, keyboard input circuit, liquid crystal display drive circuit, heating unit and holding circuit are electrically connected to, real time temperature in temperature detecting unit test chamber (1), keyboard input circuit arranges design temperature, design temperature and real time temperature are transferred to key control unit, key control unit outputs control signals to heating unit and by heating unit, cavity (1) is heated, by liquid crystal display drive circuit display setting temperature and real time temperature, key control unit is in design temperature write protection circuit, the design temperature while again switching on after power-off in key control unit fetch protection circuit.
3. the continuous adjustable type point contact of a kind of temperature as claimed in claim 2 air-sensitive wet sensitive test chamber, is characterized in that: temperature detecting unit and heating unit form negative feedback closed loop and control.
4. the continuous adjustable type point contact of a kind of temperature as claimed in claim 2 air-sensitive wet sensitive test chamber, it is characterized in that: heating unit comprises heating element and temperature-control circuit, key control unit is electrically connected to temperature-control circuit, temperature-control circuit is electrically connected to heating element, heating element is installed in cavity (1), and the control signal of key control unit output is delivered to heating element and heating element is worked by temperature-control circuit.
5. the continuous adjustable type point contact of a kind of temperature as claimed in claim 2 air-sensitive, wet sensitive test chamber, it is characterized in that: temperature detecting unit comprises temperature sensor, signal processing circuit, temperature sensor is installed in cavity (1), temperature sensor is electrically connected to signal processing circuit, signal processing circuit is electrically connected to key control unit, temperature in temperature sensor test chamber (1), and temperature information is delivered to key control unit by signal processing circuit.
6. the continuous adjustable type point contact of a kind of temperature as claimed in claim 5 air-sensitive wet sensitive test chamber, is characterized in that: the temperature in cavity (1) is 15 ℃ ~ 300 ℃.
7. the continuous adjustable type point contact of a kind of temperature as claimed in claim 1 air-sensitive wet sensitive test chamber, is characterized in that: test gas is water vapor (H
2o), ammonia (NH
3), nitrogen monoxide (NO), nitrogen dioxide (NO
2), hydrogen (H
2), carbon dioxide (CO
2), carbon monoxide (CO), sulfuretted hydrogen (H
2s), sulphuric dioxide (SO
2), methane (CH
4), dimethyl methyl phosphonate (DMMP) or oxygen (O
2).
8. the continuous adjustable type point contact of a kind of temperature as claimed in claim 1 air-sensitive wet sensitive test chamber, it is characterized in that: the upper surface contacting with cavity (1) of chamber lid (2) is provided with gasket seal (5), when cavity (1) is connected with chamber lid (2), by gasket seal (5), seals.
9. the continuous adjustable type point contact of a kind of temperature as claimed in claim 8 air-sensitive wet sensitive test chamber, it is characterized in that: cavity (1) is identical with the material of chamber lid (2), and be teflon or polyimide, gasket seal (5) is silica gel pad, polytetrafluoro cylinder-packing rubber sheet gasket, aramid fiber pad or carbon fiber pad.
10. the continuous adjustable type point contact of a kind of temperature as claimed in claim 8 air-sensitive wet sensitive test chamber, it is characterized in that: cavity (1) is identical with the material of chamber lid (2), and be stainless steel or copper, gasket seal (5) is silica gel pad, polytetrafluoro cylinder-packing rubber sheet gasket, aramid fiber pad, carbon fiber pad, copper backing, stainless steel gasket or Graphite pad.
The continuous adjustable type point contact of 11. a kind of temperature as claimed in claim 1 air-sensitive wet sensitive test chamber, is characterized in that: cavity (1) is inner arranges 8 ~ 12 movable contact springs along cavity (1) length direction.
The continuous adjustable type point contact of 12. a kind of temperature as claimed in claim 11 air-sensitive wet sensitive test chamber, it is characterized in that: the length of movable contact spring (11) is 4mm ~ 12mm, distance between the center of the fixed orifice (111) of movable contact spring (11) and the center of salient point (112) is 2mm ~ 10mm, the diameter of salient point (112) is 0.5mm ~ 3mm, distance between adjacent two movable contact springs (11) is 3mm ~ 15mm, and the center of circle of the fixed orifice (111) that each movable contact spring (11) can movable contact spring (11) is 0 ° ~ 180 ° of center of circle rotations.
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| CN105866331A (en) * | 2016-03-28 | 2016-08-17 | 宁波大学 | Gas sensor test system for dynamic and static gas distribution dual purposes |
| CN108323816A (en) * | 2018-02-12 | 2018-07-27 | 广西中烟工业有限责任公司 | A kind of heating non-combustion-cigarette core rubber capsule suction unit |
| CN109115965A (en) * | 2018-10-31 | 2019-01-01 | 常州市武进区半导体照明应用技术研究院 | A kind of multifunctional gas-sensitive dynamic checkout unit |
| CN114414629A (en) * | 2021-12-08 | 2022-04-29 | 中国科学院福建物质结构研究所 | Gas sensing dynamic testing device and gas sensing testing method |
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