CN101486128B - 具有电子遮蔽系统的激光装置 - Google Patents

具有电子遮蔽系统的激光装置 Download PDF

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CN101486128B
CN101486128B CN2009100025690A CN200910002569A CN101486128B CN 101486128 B CN101486128 B CN 101486128B CN 2009100025690 A CN2009100025690 A CN 2009100025690A CN 200910002569 A CN200910002569 A CN 200910002569A CN 101486128 B CN101486128 B CN 101486128B
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workpiece
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masking system
phase modulating
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CN101486128A (zh
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U·古布勒
R·泽布肯
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Leister Technologies AG
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B29C65/1696—Laser beams making use of masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112—Single lapped joints
    • B29C66/1122—Single lap to lap joints, i.e. overlap joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B29C66/43—Joining a relatively small portion of the surface of said articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
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    • B29C65/16—Laser beams
    • B29C65/1629—Laser beams characterised by the way of heating the interface
    • B29C65/1654—Laser beams characterised by the way of heating the interface scanning at least one of the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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    • B29C65/16—Laser beams
    • B29C65/1687—Laser beams making use of light guides
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    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/291—Two-dimensional analogue deflection
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    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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Abstract

本发明涉及一种借助于电磁辐射来加工或者连接工件的激光装置，该装置具有发出激光射束的激光源，以及串联在激光源之后的用于工件的电子遮蔽系统。该遮蔽系统将通过的激光射束以可自由确定的图案绘制在工件上。作为遮蔽系统采用具有通常的像素大小＞4μm的相位调制阵列，以及具有激光射束的高射束质量的激光源，该相位调制阵列和该激光源共同实现了在工件上清晰地绘制具有线宽＜2mm的图案。

Description

具有电子遮蔽系统的激光装置
技术领域
本发明涉及一种借助于电磁辐射来加工或者连接工件的激光装置，该激光装置具有发出激光射束的激光源，以及串联在激光源之后的用于工件的电子遮蔽系统(Maskierungssystem)，其中该遮蔽系统将通过的激光射束以可自由确定的图案绘制在工件上。
背景技术
在用电磁辐射、尤其是用激光射束加工或者连接工件时，聚焦在该工件上的射束轮廓的大小和形状起着重要的作用。在激光加工时还另外取决于在所产生的焦斑中正确设置的功率密度分布。在进行激光焊接时，例如在对塑料制成的工件进行透射焊接时，通常必须产生具有多种形状的热分布图案或者焊缝。
激光源一般具有圆形的射束轮廓，该射束轮廓必须通过合适的措施转换成期望的大小和需要的形状。这可以一方面通过固定的与特殊任务相协调的镜头或掩模实现，该镜头或掩模的准备通常是费时的，而且大多数镜头或掩模不可更改或者不能容易地更改。另一方面，众所周知，为了更大的灵活性以及由此带来的更高的实用性，利用位置分辨的电子射束调制器来转换激光射束，该射束调制器能够改变激光的振幅和/或极性和/或相位。具有这种电子射束调制器的激光系统例如在公开说明书DE 100 07 391 A1和DE 10 2004 017 129 A1中公开。
DE 100 07 391 A1涉及用电磁辐射进行材料加工的装置和方法。在该装置中，通过使用位置分辨的电子射束调制器，可以在工件上的焦斑内产生可预设的功率密度分布。对该辐射的位置分辨的调制既可以实现对工件的连续加工，又可以实现对工件的同步加工，同样可以实现准同步的加工方式。
DE 10 2004 017 129 A1描述了具有发出激光射束的激光源和电子显示装置的激光绘图装置。该显示装置串联在激光源的射出面之后。该显示装置用于极化激光射束的各个片段，以定义已更改和未更改的片段。极化滤波器串联在该显示装置之后，为的是选择阻止激光射束的更改片段还是未更改片段通过，从而产生具有预定轮廓图案的绘图射束。
在现有技术中优选采用液晶装置作为射束调制器或者显示单元。液晶被封闭在各个可控的液晶单元中，这些液晶单元在理想情况下以有规律的样式在平面上并排排列。这些单元由此形成了个体单调制器的阵列。对出现在液晶单元上的激光射束区域的调制在此在这些单元内利用电光效应通过有目的的影响实现。
由液晶单元形成的调制阵列能用于调制所出现的激光的相位和/或振幅。与振幅调制相比，相位调制更好地使用了激光射束的能量，因为原来未调制的激光射束的辐射部分没有被遮挡。通过对激光相位的空间调制，相位调制阵列可用作衍射光学元件(DOE)。
目前可使用的相位调制阵列具有5至10微米的比较大的像素。通常的激光源产生具有典型的几百纳米波长的激光辐射。由此，根据衍射定理针对激光的衍射得到大约5至10度的较小的最大偏转角。该衍射角对由经过相位调制的激光射束在工件上产生的射束图案的清晰度有很大影响。已经表明，利用由高功率二极管激光器或者由Nd-YAG固体激光器输出耦合的高能量激光，在激光装置的加工头和工件之间处于通常的加工间距的情况下，只有宽度为几个毫米的线条能够清晰地绘制在工件上。然而经常期望或者需要在工件上产生具有更高能量密度以及清晰边沿的更细的图案。
发明内容
因此本发明要解决的技术问题是，从所述的现有技术出发提供这样一种可能性，即能够在工件上清晰地绘制尤其是具有较窄宽度的线条。
该技术问题根据本发明通过具有本发明特征的激光装置解决。
本发明的基本思路是，不需要在相位调制阵列之后设置附加的光学辅助工具就可以将激光射束更为清晰地聚焦在工件上。已经示出，工件上射束图案的清晰度不仅仅通过取决于相位调制阵列的像素大小和所采用的激光波长的激光射束衍射来确定，而且也通过产生该激光射束的激光源的辐射角(Abstrahlwinkel)确定。激光射束的发散度，也就是说激光射束在从激光源射出之后随着距离增加而产生的扩展，是激光器的品质以及该激光器的射束质量的度量。在射束直径较小时的微小发散度代表良好的射束质量，并且导致清晰的绘图。
激光射束的可聚焦性按照ISO标准11146通过衍射值M2来描述。该衍射值给出了与具有相同射束部分直径的理想高斯射束的发散度相称的发散角。
因此，根据本发明的激光装置具有这样的相位调制阵列和激光源，该相位调制阵列具有大于4微米、优选4至10微米的通常像素大小，该激光源具有激光射束的高射束质量。所述具有高射束质量的激光源与具有限制了最小像素大小的相位调制阵列的组合，使得具有小于2毫米线宽的线条可以借助于具有短波长的激光清晰地绘制在工件上。当然也可以用该新的激光装置清晰地绘制具有更大线宽的图案。对此相位调制阵列可以用公知的方式透射或者反射地工作。
为此优选使用一种激光源，从该激光源中可以输出耦合具有射束质量K＞0.5的激光射束，由此该激光源对应于衍射值M2＜2。
由纤维激光器产生的激光射束具有突出的有益特性。这种纤维激光器以出色的方式结合了二极管泵浦固体激光器与波导的优点。在纤维的核心区域中的光引导实现了贯穿整个纤维长度的高功率密度以及高输出功率，同时实现了极好的射束质量。高功率纤维激光器能够发射几个微米的波长，这可以得到明显更小的最大偏转角。
根据本发明的激光装置尤其出色地适用于对塑料制成的工件进行透射焊接。该激光装置使得对小批量生产或者样品生产可以使用相位调制阵列作为可变的衍射光学元件。因此该激光装置在频繁的改装过程中特别有益以及实用，因为它明显减少了由此带来的装调时间。
有益的是，遮蔽系统能够使激光射束位置固定地作为固定图案或者位置变化地作为移动图案绘制在工件上。因此根据本发明的激光装置类似地适用于工件的同步加工和准同步加工，或者类似地适用于工件的同步连接和准同步连接。因此除了同步焊接的标准使用之外，还可以使用可变的可控相位调制阵列作为扫描器。为此产生锯齿状的空间调制，该调制引起所出现的全部激光射束的偏转。以这种模式，该激光装置还可以用于轮廓焊接。
相位调制的意义在于，这样来调制激光的相位，即产生期望的干涉图案。基于具有足够的横向相干性的极化辐射场，所出现的激光射束的各个子区域的相位可控地改变，从而在相位调制阵列之后的子区域以期望的方式发生干涉。通过液晶单元，出现的激光射束分成各个子射束。每一个子射束在此都在单独可控的单元中以确定的方式得到相位调制。在从相位调制阵列射出之后，各个子射束整体形成新的激光射束。由此以特别简单、灵活，并且尤其不依赖于其它子射束的方式，实现了对由各自的液晶单元确定的子射束的调制。
空间分辨率以及由此在工件上绘制的图案的清晰度，决定性地取决于原来的辐射场的射束质量以及各个液晶单元的几何尺寸和数量。在实践中可以通过由合适的电子控制设备发出并且施加在液晶单元上的电压来改变液晶的折射率。由此又可以对进入的激光的相位发生影响。在此，所述的折射率以及由此的光学相位延迟随着电压增加而连续改变。因此，通过将个别电压有目的性地施加给从相位调制阵列中选出的确定的液晶单元，得到许多个别的相位。通过对各个子射束的相位进行有目的性的调制，这些子射束在工件上发生干涉而形成所期望的图案。
原则上也能够由具有垂直可移动反射镜的微电子机械系统(MEMS)来代替基于液晶的相位调制阵列。
附图说明
下面借助实施例进一步阐释本发明。该实施例是激光装置，该激光装置具有用于对工件进行激光透射焊接的可变相位调制阵列。以示意图示出：
图1根据本发明针对同步焊接的工作方式的激光装置；以及
图2根据图1中的激光装置在准同步焊接或者轮廓焊接的工作方式下工作的射束偏转。
具体实施方式
图1示出根据本发明的激光装置1，包括纤维激光器2，连接到图中没有示出的加工头的纤维光导体3，在该加工头中设置有用于射束成型的光学透镜4以及用于对激光射束6的辐射进行相位改变的相位调制阵列5。从光导体3中导出的激光射束6由透镜4成束地投射到在图2中可见示出的相位调制阵列5的液晶单元7上。
相位调制阵列5的液晶单元7可分别借助于电子控制器8彼此独立地受到控制，并且将出现的激光射束6的相位在确定位置上以预定的期望方式调制成相同和/或不同。相位调制阵列5在该示例中工作在透射方式下，从而激光射束6穿过液晶单元7，其中产生确定的射束图案，该射束图案同时被偏转到要连接的工件9，10上。
图2示出没有形成特殊图案的激光射束6的偏转。在此并排排列的液晶单元7由控制器8以这种方式控制，即激光射束6经受锯齿状的空间相位调制，该空间相位调制导致射束6的连续射束偏转。激光射束6的光波在相位调制阵列5的入射面11之前和在相位调制阵列5的射出面12之后，由于相位发生了变化而在不同的方向上传播。

Claims (4)

1.一种借助于电磁辐射来加工或者连接工件(9，10)的激光装置(1)，该激光装置具有发出激光射束(6)的激光源(2)，以及串联在激光源(2)之后的用于工件(9，10)的电子遮蔽系统，其中该电子遮蔽系统将通过的激光射束(6)以可自由确定的图案绘制在工件(9，10)上，其特征在于，具有：
作为可变的衍射光学遮蔽系统的相位调制阵列(5)，以及作为激光源(2)的纤维激光器，该相位调制阵列(5)具有大于4微米的像素大小，该纤维激光器的衍射值为M2＜2，
通过所述相位调制阵列(5)与所述纤维激光器相互组合，使得能够通过所述相位调制阵列(5)在工件(9，10)上清晰地直接绘制具有小于2毫米的线宽的图案。
2.根据权利要求1所述的激光装置，其特征在于，激光射束的射束质量K具有大于0.5的值。
3.根据权利要求1或2所述的激光装置，其特征在于，遮蔽系统将激光射束(6)位置固定地作为固定图案绘制在工件(9，10)上。
4.根据权利要求1或2所述的激光装置，其特征在于，遮蔽系统将激光射束(6)作为移动图案绘制在工件(9，10)上。 
CN2009100025690A 2008-01-17 2009-01-16 具有电子遮蔽系统的激光装置 Expired - Fee Related CN101486128B (zh)

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