CN101480964A - 一种晶圆运输车 - Google Patents
一种晶圆运输车 Download PDFInfo
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- CN101480964A CN101480964A CNA2009100077322A CN200910007732A CN101480964A CN 101480964 A CN101480964 A CN 101480964A CN A2009100077322 A CNA2009100077322 A CN A2009100077322A CN 200910007732 A CN200910007732 A CN 200910007732A CN 101480964 A CN101480964 A CN 101480964A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 35
- 229910052710 silicon Inorganic materials 0.000 title claims description 35
- 239000010703 silicon Substances 0.000 title claims description 35
- 239000002184 metal Substances 0.000 claims description 13
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 238000013016 damping Methods 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 abstract 2
- 230000007774 longterm Effects 0.000 abstract 1
- 241000220317 Rosa Species 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000001684 chronic effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010338 mechanical breakdown Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004630 mental health Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
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Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200910007732 CN101480964B (zh) | 2008-02-22 | 2009-02-17 | 一种晶圆运输车 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNA2008100338173A CN101229816A (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆运输车 |
CN200810033817.3 | 2008-02-22 | ||
CN 200910007732 CN101480964B (zh) | 2008-02-22 | 2009-02-17 | 一种晶圆运输车 |
Publications (2)
Publication Number | Publication Date |
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CN101480964A true CN101480964A (zh) | 2009-07-15 |
CN101480964B CN101480964B (zh) | 2013-01-02 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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CNA2008100338173A Pending CN101229816A (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆运输车 |
CN 200910007732 Expired - Fee Related CN101480964B (zh) | 2008-02-22 | 2009-02-17 | 一种晶圆运输车 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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CNA2008100338173A Pending CN101229816A (zh) | 2008-02-22 | 2008-02-22 | 一种晶圆运输车 |
Country Status (1)
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CN (2) | CN101229816A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110713131A (zh) * | 2019-09-20 | 2020-01-21 | 西南交通大学 | 基于电磁制动的随动升降装置 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101927970B (zh) * | 2010-04-01 | 2012-05-09 | 浙江硅宏电子科技有限公司 | 一种晶棒升降车 |
CN102826108B (zh) * | 2012-09-19 | 2016-12-28 | 竞陆电子(昆山)有限公司 | 防掉板台车 |
CN103569172A (zh) * | 2013-10-23 | 2014-02-12 | 芜湖市顺昌汽车配件有限公司 | 用于零部件的托运支架 |
CN103963812A (zh) * | 2014-05-15 | 2014-08-06 | 桐乡市锡良罐业有限公司 | 一种易碎品运送小车 |
CN106276710A (zh) * | 2016-08-25 | 2017-01-04 | 无锡市太湖同步带轮厂 | 同步带轮加工运输车 |
CN107323990B (zh) * | 2017-08-28 | 2019-08-13 | 大连佳峰自动化股份有限公司 | 一种晶元盒运输车及其晶圆盒自动定位机构 |
US11590996B2 (en) * | 2018-07-31 | 2023-02-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transporting apparatus with shock absorbing elements |
AT17342U1 (de) * | 2020-08-13 | 2022-01-15 | Viwa Gmbh | Transportwagen für Halbleiterwafer |
CN112815595B (zh) * | 2021-01-19 | 2022-06-07 | 立凯生物技术(杭州)有限公司 | 一种检验科科室用慢病毒试剂盒冷藏箱 |
CN113264093B (zh) * | 2021-05-24 | 2023-10-13 | 和县隆盛精密机械有限公司 | 一种用于办公楼配送智能车 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201068158Y (zh) * | 2007-06-29 | 2008-06-04 | 李雨庭 | 一种晶圆运输车 |
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2008
- 2008-02-22 CN CNA2008100338173A patent/CN101229816A/zh active Pending
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2009
- 2009-02-17 CN CN 200910007732 patent/CN101480964B/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110713131A (zh) * | 2019-09-20 | 2020-01-21 | 西南交通大学 | 基于电磁制动的随动升降装置 |
Also Published As
Publication number | Publication date |
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CN101480964B (zh) | 2013-01-02 |
CN101229816A (zh) | 2008-07-30 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: LIUHEFENG (TIANJIN) ENGINEERING CO., LTD. Free format text: FORMER OWNER: SHANGHAI JL (SHANGHAI) INTERNATIONAL TRADING CO., LTD. Effective date: 20141008 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 200127 PUDONG NEW AREA, SHANGHAI TO: 300192 NANKAI, TIANJIN |
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TR01 | Transfer of patent right |
Effective date of registration: 20141008 Address after: 300192 Tianjin City, Nankai District Anshan West Road No. 338 building 1416 room Bainaohui Patentee after: Liuhe peak (Tianjin) Engineering Co., Ltd. Address before: 26, No. 1383, Dongfang Road, Shanghai, No. 200127, block C Patentee before: Shanghai JL (Shanghai) International Trading Co., Ltd. |
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C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 300192 Tianjin City, Nankai District Anshan West Road No. 338 building 1416 room Bainaohui Patentee after: Liuhe peak (Tianjin) Polytron Technologies Inc Address before: 300192 Tianjin City, Nankai District Anshan West Road No. 338 building 1416 room Bainaohui Patentee before: Liuhe peak (Tianjin) Engineering Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20190217 |
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CF01 | Termination of patent right due to non-payment of annual fee |