CN101474627B - Plasma cleaning machine and plasma cleaning method - Google Patents
Plasma cleaning machine and plasma cleaning method Download PDFInfo
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- CN101474627B CN101474627B CN2009100028650A CN200910002865A CN101474627B CN 101474627 B CN101474627 B CN 101474627B CN 2009100028650 A CN2009100028650 A CN 2009100028650A CN 200910002865 A CN200910002865 A CN 200910002865A CN 101474627 B CN101474627 B CN 101474627B
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Abstract
The invention provides a plasma cleaner and a plasma cleaning method. The plasma cleaner consists of a carrier, a plasma ejection gun, a temperature sensing unit and an adjusting unit. The plasma ejection gun uses plasma flame to clean an object which is carried by the carrier and is to be cleaned. The temperature sensing unit is adhered on the object to be cleaned; the temperature sensing unit changes colour when passing through the plasma ejection gun along a first direction and launches an adjusting signal. The adjusting unit is respectively connected with the carrier and the plasma ejection gun and adjusts the corresponding positions of the plasma ejection gun and the carrier in a second direction according to the adjusting signal, so as to position the plasma ejection gun and the carrier oppositely along a second direction. The plasma cleaner can quantize cleaning path, reduce time for adjusting and confirming the cleaning path and ensure plasma cleaning effect.
Description
Technical field
The present invention is about a kind of plasma cleans machine and plasma cleans method, particularly relevant for a kind of plasma cleans machine and plasma cleans method of confirming cleaning path.
Background technology
In the process of making display (as LCD or plasma display), normal plasma cleans (Plasma clean) mode of using is carried out the cleaning on various portion of terminal or composition surface, for example the cleaning of tin indium oxide (ITO) electrode and the composition surface, circuit board terminals and the electrode portion that drive chip etc.
The cleaning path of plasma cleans machine does not have the method for quantification at present, can only be by the path of visual observations cleaning, and there is very mistake in this; And cleaning equipment inner structure complexity, visual observations is difficult for, and causes cleaning path to confirm difficulty more, thus causing cleaning adjusts overlong time, cleaning effect is not good.
See also Fig. 1, Fig. 1 is a cleaner work schematic diagram ideally.With cleaning solution crystal panel 12 is example, and liquid crystal panel 12 comprises upper substrate 121, liquid crystal layer 122 and infrabasal plate 123, in the ideal case, the plasma torch 112 that plasma gun 11 sends need drop on infrabasal plate 123 to be cleaned regional 124 in.Please in conjunction with referring to Fig. 2 A and Fig. 2 B, Fig. 2 A and Fig. 2 B are respectively the cleaner work schematic diagram under the failure condition.Shown in Fig. 2 A, the inboard of the too close liquid crystal panels 12 of plasma torch 112, part flame even fall on the upper substrate 121 causes the cleaning fault.Shown in Fig. 2 B, plasma torch 112 has dropped on the outside of liquid crystal panel 12, and has broken away to be cleaned regionally 124, therefore will not have due cleaning efficacy.
Summary of the invention
At above-mentioned technical problem, when utilizing plasma cleans, the present invention produces high temperature, and make the temperature-sensitive unit that is attached on the object to be cleaned be subjected to temperature effect and color changes, confirm cleaning path.
One of purpose of the present invention is to provide a kind of plasma cleans machine, and it comprises carrier, plasma gun, temperature-sensitive unit and adjustment unit.The object to be cleaned that the plasma gun nationality is sent to by carrier by the plasma torch cleaning.The temperature-sensitive unit is attached at object to be cleaned, and color changed when this temperature-sensitive unit passed through plasma gun along first direction, and sent the adjustment signal.Adjustment unit is connected to carrier and plasma gun, adjusts this plasma spray gun and this carrier in the relative position of second direction according to adjusting signal.
According to the present invention, the temperature-sensitive unit comprises the temperature-sensitive test paper that has scale, and this temperature-sensitive test paper color under being subjected to greater than 80 degrees centigrade temperature effect changes.Adjust signal and be and utilize the scale on this temperature-sensitive test paper and obtain.Plasma gun produces plasma torch, and this plasma torch temperature is greater than 100 degrees centigrade.
Another object of the present invention is to provide a kind of plasma cleans method, utilize plasma gun to clean object to be cleaned, it comprises following steps:
The temperature-sensitive unit is attached on this object to be cleaned;
Color changed when this temperature-sensitive unit passed through this plasma spray gun along first direction, confirmed cleaning path according to change color;
If this cleaning path is defective, adjust this plasma spray gun and this object to be cleaned in the relative position of second direction.
According to the present invention, this temperature-sensitive unit comprises the temperature-sensitive test paper, and this temperature-sensitive test paper has scale in second direction.Temperature-sensitive test paper color under being subjected to greater than 80 degrees centigrade temperature effect changes.Adjust the relative position of this plasma spray gun and this object to be cleaned according to the scale on the temperature-sensitive test paper.Have zone to be cleaned on the object to be cleaned, defective this cleaning path that is meant of this cleaning path is not in this zone to be cleaned.Object to be cleaned is positioned on the carrier, and this object to be cleaned moves with this carrier and adjusts this object to be cleaned and this plasma spray gun in the relative position of second direction.If cleaning path is qualified, keep this moment object to be cleaned with plasma gun in the relative position of second direction, and make this object to be cleaned and this plasma spray gun mobile in opposite directions along first direction, finish cleaning operation.
By the present invention, can quantize the cleaning path of plasma cleans machine, reduce debugging and confirm the cleaning path time, guaranteed the cleaning effect of plasma cleans.
Description of drawings
Fig. 1 is for being cleaner work schematic diagram ideally;
Fig. 2 A and Fig. 2 B are respectively the cleaner work schematic diagram under the failure condition;
Fig. 3 is the structural representation of plasma cleans machine of the present invention;
Fig. 4 is the temperature-sensitive test paper schematic diagram of one embodiment of the invention;
Fig. 5, Fig. 6 and Fig. 7 are respectively the fundamental diagram of one embodiment of the invention;
Fig. 8 is a plasma cleans method flow diagram of the present invention.
The specific embodiment
For making purpose of the present invention, structure, feature and function thereof there are further understanding, cooperate embodiment to be described in detail as follows now.
The invention provides a kind of plasma cleans machine and plasma cleans method, following embodiment is primarily aimed at the cleaning of liquid crystal panel portion of terminal, but need to prove, the present invention is not limited only to this.See also Fig. 3, Fig. 3 is the structural representation of plasma cleans machine 30 of the present invention.Plasma cleans machine 30 comprises carrier 33 and plasma gun 31, and plasma gun 31 nationalitys are cleaned the object of being sent to by carrier 33 to be cleaned 32 by the plasma cleans mode.Plasma gun 31 produces plasma torch 312, and in actual applications, plasma torch 312 temperature are greater than 100 degrees centigrade.Plasma cleans machine 30 also comprises temperature-sensitive unit 34 and adjustment unit 35.
Temperature-sensitive unit 34 is attached at object 32 to be cleaned, and this temperature-sensitive unit 34 color through plasma gun 31 time changes, and sends the adjustment signal.Please in conjunction with Fig. 4, Fig. 4 is temperature-sensitive test paper 341 schematic diagrames of one embodiment of the invention.Temperature-sensitive unit 34 comprises the temperature-sensitive test paper 341 that has scale.In one embodiment, temperature-sensitive test paper 341 color under being subjected to greater than 80 degrees centigrade temperature effect changes.This adjustment signal can utilize the scale on the temperature-sensitive test paper 341 to obtain, and concrete principle is detailed later.Need to prove that temperature-sensitive unit 34 can also be to comprise other temperature-sensing element, both can as long as its color under the plasma torch influence can change.
See also Fig. 5, Fig. 6 and Fig. 7, it is respectively the fundamental diagram of one embodiment of the invention.As shown in Figure 5, object to be cleaned is the liquid crystal panel that comprises upper substrate 321 and infrabasal plate 323, has to be cleaned regionally 324 on the infrabasal plate 323, and the temperature-sensitive test paper 341 that will have scale is attached to regional 324 places to be cleaned.In actual applications, can be with a certain scale of temperature-sensitive test paper 341 corresponding to be cleaned regional 324 a certain reference position, the quantity of temperature-sensitive test paper 341 and size are also unrestricted.
In conjunction with Fig. 3 and shown in Figure 6, when object 32 to be cleaned 31 moves as straight line along first direction X towards plasma gun, change color through regional 324 o'clock to be cleaned, with cleaning path 311 overlapping areas 342 can because of high temperature take place on the temperature-sensitive test paper 341 along cleaning path 311 in plasma torch 312.As the twill shadow region among Fig. 6, this zone 342 just in time overlaps with to be cleaned regional 324, and then the cleaning path 311 of explanation plasma torch 312 this moment is qualified.Maintenance object 32 to be cleaned this moment makes object 32 to be cleaned move along first direction X straight line in the position of the relative plasma gun 31 of second direction A, can finish cleaning operation.In another embodiment, also can be only to move plasma gun 31 and fixing object 32 to be cleaned, or both be mobile in opposite directions simultaneously along first direction X, its principle does not repeat them here with last identical.
In conjunction with Fig. 3 and shown in Figure 7, when plasma torch 312 along cleaning path 311 ' through to be cleaned regional 324 the time, on the temperature-sensitive test paper 341 with cleaning path 311 ' overlapping areas 342 ' change color can take place because of high temperature.As the twill shadow region among Fig. 7, this zone 342 does not overlap with to be cleaned regional 324, and then the cleaning path 311 ' of explanation plasma torch 312 this moment is underproof.Cleaning path 311 ' can obtain by the observation of the scale on the temperature-sensitive test paper 341 with regional 324 distance parameter to be cleaned on the second direction A, and flows to adjustment unit 35 as adjusting signal.In one embodiment, adjusting signal can obtain based on the scale value that video camera grasps on the temperature-sensitive test paper 341.
See also Fig. 8, Fig. 8 is a plasma cleans method flow diagram of the present invention.This plasma cleans method is utilized plasma gun 31 cleanings object 32 to be cleaned, and it comprises following steps:
S801 is attached to temperature-sensitive unit 34 on the object 32 to be cleaned.Temperature-sensitive unit 34 comprises temperature-sensitive test paper 341, and temperature-sensitive test paper 341 has scale in second direction A.Temperature-sensitive test paper 341 color under being subjected to greater than 80 degrees centigrade temperature effect changes.
S803, color changed when this temperature-sensitive unit 34 passed through plasma gun 31 along first direction X, confirmed cleaning path according to change color.
S805, whether differentiate this cleaning path qualified?
S807 if cleaning path is defective, adjusts this plasma spray gun 31 and this object 32 to be cleaned in the relative position of second direction A.Have to be cleaned regionally 324 on the object 32 to be cleaned, cleaning path is defective to be meant that this cleaning path is not at this in to be cleaned regional 324.
This plasma cleans method also comprises according to the scale on the temperature-sensitive test paper 341 adjusts plasma gun 31 and object 32 to be cleaned in the relative position of second direction A.Object 32 to be cleaned can be positioned on the carrier 33, and this object 32 to be cleaned moves with this carrier 33 and adjusts this object to be cleaned 32 and this plasma spray gun 31 in the relative position of second direction A.In actual applications, first direction X can be vertical mutually with second direction A.
S809, if cleaning path is qualified, also promptly this cleaning path to be cleaned regional 324 overlaps with this, then formally begins the plasma cleans operation.
Utilize the present invention, can quantize the cleaning path of plasma cleans machine, reduce debugging and confirm the cleaning path time, guaranteed the cleaning effect of plasma cleans.Compare with traditional range estimation mode, plasma torch is to human eye's injury in the time of also can stopping to estimate.
The present invention is described by above-mentioned related embodiment, yet the foregoing description is only for implementing example of the present invention.Must be pointed out that the embodiment that has disclosed does not limit the scope of the invention.On the contrary, change of being done and retouching without departing from the spirit and scope of the present invention all belongs to scope of patent protection of the present invention.
Claims (7)
1. a plasma cleans machine comprises carrier and plasma gun, and this plasma spray gun nationality cleans object to be cleaned by plasma torch, and this object to be cleaned is transmitted by this carrier, it is characterized in that this plasma cleans machine also comprises:
The temperature-sensitive unit is attached at this object to be cleaned, and color changed when this temperature-sensitive unit passed through this plasma spray gun along first direction, and sent the adjustment signal;
Adjustment unit is connected to this carrier and this plasma spray gun, adjusts this plasma spray gun and this carrier in the relative position of second direction according to this adjustment signal;
This temperature-sensitive unit comprises the temperature-sensitive test paper that has scale, and this temperature-sensitive test paper color under being subjected to greater than 80 degrees centigrade temperature effect changes; This adjustment signal is to utilize the scale on this temperature-sensitive test paper and obtain; This plasma torch temperature is greater than 100 degrees centigrade.
2. a plasma cleans method utilizes plasma gun to clean object to be cleaned, it is characterized in that comprising following steps:
The temperature-sensitive unit is attached at this object to be cleaned;
Color changed when this temperature-sensitive unit passed through this plasma spray gun along first direction, confirmed cleaning path according to change color;
If this cleaning path is defective, adjust this plasma spray gun and this object to be cleaned in the relative position of second direction.
3. plasma cleans method as claimed in claim 2 is characterized in that: this temperature-sensitive unit comprises the temperature-sensitive test paper, and this temperature-sensitive test paper has scale in this second direction.
4. plasma cleans method as claimed in claim 3 is characterized in that also comprising: adjust this plasma spray gun and this object to be cleaned in the relative position of this second direction according to this scale.
5. plasma cleans method as claimed in claim 2, it is characterized in that also comprising: if cleaning path is qualified, maintenance this object to be cleaned this moment and this plasma spray gun are in the relative position of this second direction, and allow this object to be cleaned and this plasma spray gun move in opposite directions along this first direction, finish cleaning operation.
6. plasma cleans method as claimed in claim 2 is characterized in that: have zone to be cleaned on this object to be cleaned, defective this cleaning path that is meant of this cleaning path is not in this zone to be cleaned.
7. plasma cleans method as claimed in claim 2 is characterized in that also comprising: should be positioned on the carrier by object to be cleaned, this object to be cleaned moves with this carrier and adjusts this object to be cleaned and this plasma spray gun in the relative position of this second direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100028650A CN101474627B (en) | 2009-01-20 | 2009-01-20 | Plasma cleaning machine and plasma cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100028650A CN101474627B (en) | 2009-01-20 | 2009-01-20 | Plasma cleaning machine and plasma cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101474627A CN101474627A (en) | 2009-07-08 |
| CN101474627B true CN101474627B (en) | 2010-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009100028650A Expired - Fee Related CN101474627B (en) | 2009-01-20 | 2009-01-20 | Plasma cleaning machine and plasma cleaning method |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103008293B (en) * | 2012-12-25 | 2015-07-08 | 江苏大学 | Tiny hole cleaning method |
| US9941099B2 (en) * | 2014-09-02 | 2018-04-10 | Nike, Inc. | Plasma treatment of an elastomeric material for adhesion |
| CN107900487A (en) * | 2017-10-20 | 2018-04-13 | 河北宝力工程装备股份有限公司 | High temperature removes the device and method of metal surface dirt |
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| CN101474627A (en) | 2009-07-08 |
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Granted publication date: 20100901 Termination date: 20210120 |