CN101461105A - Laser pulse generating divice and method, and laser working apparatus and method - Google Patents
Laser pulse generating divice and method, and laser working apparatus and method Download PDFInfo
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- CN101461105A CN101461105A CNA2007800202232A CN200780020223A CN101461105A CN 101461105 A CN101461105 A CN 101461105A CN A2007800202232 A CNA2007800202232 A CN A2007800202232A CN 200780020223 A CN200780020223 A CN 200780020223A CN 101461105 A CN101461105 A CN 101461105A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1312—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094076—Pulsed or modulated pumping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Lasers (AREA)
Abstract
Provided is a stabilized laser working apparatus for stabilizing and emitting the pulse output of a solid laser to a workpiece thereby to work the workpiece finely. The laser working apparatus comprises an excitation laser oscillator (46) for optically exciting a Q-switch element (6) and a laser medium (5), which are disposed in a laser oscillator, in advance, and a laser oscillator (41) for irradiating the excitation density of an upper level in the laser medium for a predetermined period with a laser wavelength other than that of an oscillation object, thereby to de-excite and reduce the upper level density. After the de-excitation in the laser resonator, the Q-switch element (6) is set into a laser oscillation blocking (or closed) state, and the optical excitation of the upper level is performed to perform an energy storage of the laser medium for a predetermined period. Next, the Q-switch element (6) is switched to the laser oscillating (ON) state thereby to oscillate and output Q-switch pulses, so that the homogeneous Q-switch pulse outputs for every pulses are introduced to work the workpiece finely irrespective of the Q-switch pulse oscillation interval.
Description
Technical field
The present invention relates to the processing unit (plant) of laser oscillation apparatus that a kind of use is suitable for the circuit structure part etc. of the semiconductor device on the processing semiconductor wafer, change device and the method that also obtains stable height output Q-switched pulse even obtain a kind of pulse repetition frequency.And, realize a kind of microfabrication device and method that under any irradiation sequential, can both obtain stable output all the time.
Background technology
As personnel are known in the industry, the adjustment of the circuit block of miniaturization, correction, processing etc. in the electronics industry are the Q-switched pulse output that obtains from solid state laser by irradiation, are used for removing, the manufacturing process of mark, finishing etc.In this laser processing, each output energy of pulse, waveform of wishing laser changes with respect to repetition rate can obtain the output be scheduled to all the time.For example, be used for the cut-out etc. of the circuit fuse of the defect remedying that semiconductor memory redundant circuit switches, be the cut-out point by scanning unequal interval at high speed and the laser beam irradiation that converges cut off fuse part to the circuit fuse.By carrying out stable impulse waveform, energy exposure according to the instruction of vibrating at a high speed, handle the memory cell of high integration accurately to cut-out point.Uneven situation of the laser pulses irradiate time interval to these processing object things is more, thereby has carried out much making the research of the pulse energy of emitting from laser oscillator, pulsewidth, peak value output homogenizing.In the prior art of these problems of reply, the method for coming stable pulse according to the combination of pulsed laser action device and acousto-optic element (AOM) has as shown in Figure 1 been proposed.
Fig. 1 illustrates the pulse stabilization method that AOM works in each pulse, use the method for being removed the low output pulse that is produced after the Q-switched pulse vibration by AOM.There is the shortcoming that will use expensive AOM device in this method.Describe below.Emit with light collecting part 10 to the laser generation excitation of solid state laser medium 5 from the laser that the semiconductor laser equal excitation is emitted with light source 1.There is intensive reflector 4 therebetween.This intensive reflector is made of light-gathering optics such as lens 3 and solid state laser resonator, and it is strong reflection and have permeability for incentive optical wavelength for optical maser wavelength.Another outgoing mirror 7 of laser resonator is arranged on the opposition side of the intensive reflector 4 of laser medium 5, and the Q switching element 6 that is made of the acoustooptic switch element is set between laser medium 5 and the outgoing mirror 7.Send the action control signal from the control part 11 of laser aid to exciting light source drive division 8, Q switching drive division 9 and with the AOM drive division 12 that is used to control AOM 29 that they are arranged on the laser resonator outside.AOM applies RF power to ultrasonic transducer to generate the Bragg diffraction unit, makes the beam diffraction that passes through.Thereby, when from drive division 12 when the unit applies RF, the part of light beam applies at RF constantly separates by diffraction.Propagate the RF power sound wave in the AOM diffraction element and laser pulse by diffraction grating by light beam amplifier 15 collimations, enter into that speculum 16 is reflected and towards processing object thing 20, focus irradiation is to the surface of processing object thing 20 by lens 18 optically focused, thereby finishes processing.Processing object thing 20 carries out the precision positioning driving by driving platform 23.Driving is a known technology, control signal is finished via control signal wire 26 from control part 11 by drive division 21.
In this structure, laser generation is to carry out with process as shown in Figure 2.Excitation from semiconductor laser is sent in advance with laser beam 2, and laser medium places energized condition in advance.At this, when pulse-triggered be with (a) t1, t3, t5 ... when constantly sending, apply the power of RF1 from drive division 9 to Q switching element 6, increase the intensive reflector 4 of laser oscillator and the loss of the reciprocal light path of laser generation between the outgoing mirror 7, form the state that suppresses resonance.This state the time be t1-t2, t3-t4, t5-t6 ... during continue, accumulate excitation energy in this period in the laser medium 5, this storage capacity roughly with excitation light intensity and t1-t2, t3-t4, t5-t6 ... time proportional.At moment t2, t4, t6, block to the RF of Q switching 6 power supply by drive division 9.Q-switched pulse takes place in laser resonator thus sharp, obtains the output beam 30MIR of (c) through outgoing mirror 7.Therefore then, laser medium is in energized condition, recovers the laser generation gain in laser medium, is in the state that does not apply RF power to Q switching element 6, therefore continuously the oscillating part of low output as shown in the 13SIR of Fig. 2 (c) persistent oscillation.Thereby, comprise Q-switched pulse part 30MIR and continuous output 13SIR among the laser output beam 30IR.
Be provided with AOM 29 in the external beam light path of laser resonator, so RF power RFD enters this AOM 29 from drive division 12, shown in Fig. 2 (d), it applies sequential and finishes the back at Q-switched pulse 30MIR and overlap with the oscillating phase of continuous oscillation part 13SIR.Continuous oscillation part 13SIR is by AOM 29 diffraction, therefore separates with Q-switched pulse 30MIR, obtains as shown in Figure 1 the light beam 13SIR as other direction.It is illustrated by CW optical laser action part 14.Separate with Q-switched pulse part 30MIR and continuous laser part 13SIR not towards processing object thing 20.Thereby, have only Q-switched pulse 30MIR irradiation processing object thing 20, and processing is contributed.
In this existing structure, AOM 29 need be set in the oscillator outside, with pulse resonance synchronously and the control action sequential.There is following shortcoming in it: exist because loss and the power loss of AOM 29 use AOM 29 will cause the increase of installation cost, the place need be set.And when laser beam wavelength changed, AOM 29 need make angle is set, produce the necessity of optics end face antireflection film change etc. again constrained optimization is set.
And, in repetition pulse vibration output, for fear of first pulse phenomenon different, disclose technology in No. 4337442 specification of United States Patent (USP) with light source excitation intensity decline before the Q-switched pulse vibration of excitation Nd:YAG laser medium with succeeding impulse output.It discloses following method: necessarily and like this continue continuous pump in order to make pulse output, thereby by Q switching blocking-up vibration, make the method for Q-switched pulse vibration after having accumulated the energy that is used for Q-switched pulse, and before the Q-switched pulse vibration, reduce method in advance from the adjustment laser generation high potential level distribution numbers such as method of the excitation density of exciting light source for the vibration that before Q-switched pulse vibration, stops the scheduled period.
Patent documentation 1: No. 4337442 specification of United States Patent (USP)
Patent documentation 2: No. 5018152 specification of United States Patent (USP)
Patent documentation 3: No. 5291505 specification of United States Patent (USP)
Patent documentation 4: No. 5339323 specification of United States Patent (USP)
Patent documentation 5: No. 5812569 specification of United States Patent (USP)
Patent documentation 6: No. 5982790 specification of United States Patent (USP)
Patent documentation 7: No. 6038241 specification of United States Patent (USP)
Patent documentation 8: No. 6418154 specification of United States Patent (USP)
Patent documentation 9: No. 6009110 specification of United States Patent (USP)
Patent documentation 10: No. 6683893 specification of United States Patent (USP)
Patent documentation 11: No. 6931035 specification of United States Patent (USP)
Patent documentation 12: No. 6172325 specification of United States Patent (USP)
Patent documentation 13: No. 5719372 specification of United States Patent (USP)
Patent documentation 14: No. 4412330 specification of United States Patent (USP)
Patent documentation 15: Japanese Unexamined Patent Application Publication 2002-518834 communique
Summary of the invention
The present application problem to be solved is the homogenizing of repetition Q-switched pulse output.Even the time interval that promptly provides a kind of pulse to repeat changes the laser pulse generating divice and the method for the stable Q-switched pulse laser generation output that also can obtain not rely on this variation, and laser processing device and the method for using this laser pulse generating divice and method is provided.
Comprise in order to solve above-mentioned problem, to the invention is characterized in: laser medium, laser resonator and the Q switching element that carries out the laser generation inhibition by the Q value of controlling described laser resonator, and the de-energisation source of described laser medium; Thereby make described de-energisation source operate first scheduled time discharged energy accumulation from laser medium unit; Thereby suppress second scheduled time of signal accumulates predetermined power in described laser medium unit by apply laser generation to the Q switching element; And the unit that stops to send laser generation inhibition signal in order to obtain Q switching laser pulse vibration output to described Q switching element.
In addition, it is characterized in that having the driving source of described laser medium, also have the excitation density that reduces described driving source in the unit of described release energy accumulation or stop or block the unit that encourages.In addition, it is characterized in that, also have in the unit of described energy accumulation with described laser generation suppress signal level be set at do not have enough vibrations suppress can level the unit.In addition, also have in the unit of described release energy accumulation first scheduled time was set at unit more than zero.
In addition, it is characterized in that having:
Laser medium, laser resonator and the Q switching element that carries out the laser generation inhibition by the Q value of controlling described laser resonator;
Thereby by will not have enough vibration suppress can level laser generation suppress signal and apply the scheduled time to described Q switching element and in described laser medium, accumulate the unit of predetermined power;
To suppress the unit that signal stops to the laser generation that described Q switching element sends in order to obtain Q switching laser pulse vibration output.
In addition, it is characterized in that having:
Laser medium, laser resonator and the Q switching element that carries out the laser generation inhibition by the Q value of controlling described laser resonator;
Provide unit to described laser medium through the pumping signal of ovennodulation;
Thereby apply the scheduled time to described Q switching element and in described laser medium, accumulate the unit of predetermined power by laser generation being suppressed signal; And the unit that will stop to the laser generation inhibition signal that described Q switching element sends in order to obtain Q switching laser pulse vibration output.
In addition, it is characterized in that having:
Laser medium, laser resonator and the Q switching element that carries out the laser generation inhibition by the Q value of controlling described laser resonator;
Thereby apply the unit that laser generation suppresses signal energy accumulation in described laser medium to described Q switching element;
In order to obtain Q switching laser pulse vibration output and to come the modulated laser vibration to suppress the unit of signal based on origination interval from preceding subpulse to have with state from the corresponding loss of the origination interval of preceding subpulse.
And, the invention is characterized in the light path of Q switching laser pulse, to have nonlinear optical element.In addition, the present invention is a kind of laser processing device that makes from the pulse of these laser pulse generating divices output irradiation processing object thing, and the processing object thing is display unit such as electronic device such as connecting line, electric capacity, resistance, inductance on the semiconductor substrate or liquid crystal indicator, el display device, plasma display system.
On the other hand, the invention is characterized in and comprise:
Laser medium, laser resonator are set, carry out the step in the de-energisation source of Q switching element that laser generation suppresses and laser medium by the Q value of control laser resonator; Thereby make the de-energisation source operate for first scheduled time and emit the step of energy accumulation from laser medium; Thereby applied for second scheduled time to the Q switching element and in laser medium, accumulate the step of predetermined power by laser generation being suppressed signal; Stop to send the step that laser generation suppresses signal in order to obtain Q switching laser pulse vibration output to the Q switching element.
In addition, it is characterized in that, in described step of emitting energy accumulation, also reduce the excitation density of laser medium or stop or blocking excitation.In addition, it is characterized in that, in described laser medium, accumulate in the step of predetermined power laser generation suppressed signal level be set at do not have enough vibrations suppress can level.In addition, it is characterized in that first scheduled time was more than zero in emitting the step of described energy accumulation.
In addition, it is characterized in that comprising: the step that laser medium, laser resonator is set and carries out the Q switching element of laser generation inhibition by the Q value of control laser resonator; Thereby by will not have enough vibration suppress can the laser generation of level suppress signal and apply the scheduled time to the Q switching element and in laser medium, accumulate the step of predetermined power; And the step that stops to send laser generation inhibition signal in order to obtain Q switching laser pulse vibration output to the Q switching element.
In addition, it is characterized in that comprising: the step that laser medium, laser resonator is set and carries out the Q switching element of laser generation inhibition by the Q value of control laser resonator; Provide step to laser medium through the pumping signal of ovennodulation; Thereby apply the scheduled time to the Q switching element and in laser medium, accumulate the step of predetermined power by laser generation being suppressed signal; Stop to send the step that laser generation suppresses signal in order to obtain Q switching laser pulse vibration output to the Q switching element.
In addition, it is characterized in that comprising: the step that laser medium, laser resonator is set and carries out the Q switching element of laser generation inhibition by the Q value of control laser resonator; Thereby apply laser generation to the Q switching element and suppress the step of signal at the laser medium energy accumulation; In order to obtain Q switching laser pulse vibration output and to come the modulated laser vibration to suppress the step of signal based on origination interval from preceding subpulse to have with state from the corresponding loss of the origination interval of preceding subpulse.
And, the invention is characterized in also to comprise the step that the Q switching laser pulse is transformed to high order harmonic component and exports.In addition, the present invention also comprises the laser processing of the pulse output irradiation processing object thing that takes place with these laser pulse method for generation, and the processing object thing is display unit such as electronic device such as connecting line, electric capacity, resistance, inductance on the semiconductor substrate or liquid crystal indicator, el display device, plasma display system.
According to laser pulse generating divice of the present invention and method, even pulse-recurrence time, interval variation also can obtain not to be subjected to the stable Q-switched pulse of its variable effect.In addition, according to laser pulse processing unit (plant) of the present invention and method, can be with arbitrary sequence equably to the pulse of processing object irradiating laser.In the object processing that utilizes laser pulse, when illumination beam, there be distributed in situation substrate on of Working position not wait, according to the present application, form uneven arbitrary sequence in this case, but also can realize uniform laser pulses irradiate according to Working position.
In addition according to the present application, light beam connects the vibrate selection splitter component of efferent of vibration output and Q-switched pulse in the outsides such as AOM needed in the art, also can realize the processing according to stable Q switching laser pulse.Always obtaining under the situation of high order harmonic component composition, can prevent the de-energisation light component, be blended in Q-switched pulse or the high order harmonic component composition with the light of the wavelength beyond the wavelength of high order harmonic component element conversion from the first-harmonic of laser generation medium.By in laser medium, use the porous optical fiber that porous is set around the core that adopts waveguide, can reduce because the caused refractive index of the variations in temperature in the laser medium changes the influence (this variations in temperature is caused by the Temperature Distribution that forms in the laser medium) that brings, can also improve the stability of laser oscillation mode.
Description of drawings
Fig. 1 is the key diagram that carries out according to the device of the processing method of the laser beam irradiation of the conventional example relevant with the present invention;
Fig. 2 is the action specification figure of the existing apparatus structure of Fig. 1;
Fig. 3 is the structure drawing of device of embodiment 1 and 2;
Fig. 4 is the action specification figure of the device of embodiment 1;
Fig. 5 is the ion energy diagram that is used to illustrate the laser medium of principle of the present invention, and the intracrystalline Nd ion of Nd:YAG energy level is shown.
Fig. 6 is the action specification figure of embodiment 2;
Fig. 7 is the structure drawing of device of embodiment 3 and 4;
Fig. 8 is the action specification figure of embodiment 3;
Fig. 9 is the action specification figure of embodiment 4;
Figure 10 illustrates the different examples of the second higher harmonic resonance device structure.
Description of reference numerals
1: encourage: the excitation laser beam with semiconductor laser light resource 2
3: light-gathering optics 4: laser resonator intensive reflector 4 ': end mirror
5: solid state laser laser medium 6:Q switch element
7: laser resonator outgoing mirror 7 ': outgoing mirror 8: exciting light source drive division
9:Q switch drive portion 10: laser generation excitation light collecting part
11: laser aid control part 12:AOM drive division
14: continuity laser generation part 15: light beam amplifier
16: speculum 18: the processing collector lens
19:Q switching pulse laser generation part 20: processing object thing
21: drive platform drive division 26,27,40: control signal wire
23: drive platform 29: acousto-optic element (AOM)
31: nonlinear optical element 32: wavelength filter
34: beam absorption body 41: the de-energisation laser oscillator
42,43: collimating lens 44: the overlapping device of light beam of polarized light
45: synthetic light beam 46: the excitation semiconductor laser oscillator
50: the laser aid control part.
Embodiment
Below with reference to Fig. 3～Figure 10 the preferred embodiments of the present invention are described.
Use Fig. 3, Fig. 4 to describe embodiments of the invention 1 in detail below.Identical among each explanation label among the figure and Fig. 1 that prior art is described to the employed label of the part of identical function.At this, outgoing mirror 7 ' is to have for first-harmonic to be the strong reflection rate, to be the outgoing mirror of the characteristic of high permeability for second harmonic.Become collimated light beam with laser beam through collimating lens 43 from excitation, import in the overlapping device 44 of light beam of polarized light as the semiconductor laser oscillator 46 of laser pumping light source.On the other hand, the de-energisation that is used to reduce the high-order energy level excitation densities of laser becomes the de-energisation source of the optical maser wavelength outside the laser medium irradiating laser vibrates the purpose wavelength with laser oscillator 41.Become collimated light beam with the laser beam of laser oscillator 41 through collimating lens 42 from de-energisation, import in the overlapping device 44 of light beam of polarized light, overlapping or time goes up skew and is configured in coaxial synthetic light beam 45 and moves ahead on coaxial with these two light beams, the intensive reflector 4 that process light-gathering optics 3 passes through the laser resonator first-harmonic to laser medium 5, thus focus irradiation is in laser medium 5.Between the outgoing mirror 7 ' and Q switching element 6 of laser resonator, nonlinear optical element 31 is set.In this structure, since from the instruction of control part 50 to the Q switching element 6 between laser resonator mirror 4 and the outgoing mirror 7 ', shown in Fig. 4 (b), control the sequential of RF power turn-on and turn-off.
In the example of Fig. 3, excitation still encourages the light with oscillator also can transmit with optical fiber with the only transmission spatially of semiconductor laser oscillator 46, in this case de-energisation is combined and coaxial transmission with its optical fiber with light beam of light source.
De-energisation is doping Nd with the oscillation wavelength of semiconductor laser oscillator 46 at laser medium with laser oscillator 41, excitation
+ 3Under the situation of the Nd:YAG of ion, Nd:YVO4, Nd:YLF etc., use near the wavelength the 808nm in as shown in Figure 5 the known Nd energy diagram as excitation with wavelength, and for de-energisation with near wavelength 0.9 μ m, 1.1 μ m, the 1.3 μ m laser effective.This is because move high-order energy level with the laser of the common employed wavelength of Nd:YAG crystallization that is used for laser medium
4F
3/2In other migration wavelength for starting point 946nm, 1123nm, 1319nm are arranged.In these structures, the action sequence example of each element and control part is described.
In order to set the Working position of processing object thing 20, the signal from control part 50 since the table-drive 23 is driven portion's 21 drivings.The control position of this table-drive also can be the closed loop position control system (not shown) of band encoder.In this stage, before the moment of Fig. 4 t1, drive and apply hyperacoustic Q switching element 6 and excitation semiconductor laser oscillator 46, the RF1 that therefore applies control chart 4 (b) applies the RF of sequential, the exciting power (PL) of starting (c).Q switching element 6 is applied to the ultrasonic transducer of Q switching element 6 from Q switching drive division 9 with RF power, and laser resonator is made as the big laser generation blocking state of loss.On the other hand, applying excitation to laser medium 5 exports with laser, before carrying out laser generation, form the poised state that hot Temperature Distribution is arranged in the laser medium, therefore send vibration instruction to excitation with semiconductor laser oscillator 46 through control signal wire 27 from control part 50.
The Working position of prediction processing object thing 20 arrives the time t3 of the focal point of pairing collector lens 18, thereby is sent the command signal of laser generation course of action by control part 50.At first, apply near the laser of de-energisation wavelength of the counter-rotating distribution density reduction that is used to make the high-order energy level that hereto is energized, so use laser oscillator 41 transmissions to vibrate through control signal wires 40 to de-energisation from control part 50 and instruct.The vibration instruction is to be sent by the triggering signal shown in Fig. 4 (a), by trailing edge beginning de-energisation laser generation in moment t1, t5, t9 shown in (d) of triggering signal.De-energisation laser is become parallel by collimating lens 42 collimations, enter and by the overlapping device 44 of light beam of polarized light, pass through collector lens 3 and shine laser medium 5.The exciting laser light beam that is sent with semiconductor laser oscillator 46 by excitation becomes parallel by collimating lens 43 and makes it coaxial by the overlapping device 44 of light beam of polarized light in advance, this laser medium 5 is encouraged, rise thereby crystal temperature effect takes place, excitation energy is accumulated to the energy level of high-order energy level shown in Fig. 4 (e) dotted line.At this, de-energisation is with the identical crystal space of optical maser wavelength irradiation, and is therefore also luminous to the migration of low level energy level with the wavelength different with the laser generation first-harmonic from upper energy level.Therefore the loss of this light also is unlikely to laser generation greatly to not satisfying the condition that reaches abundant oscillating condition with laser resonator.The level density of the high-order energy level of accumulating so far can be lowered into as shown in Fig. 4 (e) UL-1.
Carry out de-energisation at the fixed time during the t1-t2, only laser medium is encouraged during t2-t3 afterwards, carry out in high-order energy level, taking place the excitation (UL-2) that counter-rotating distributes by exciting laser.Afterwards, shown in Fig. 4 (b), blocking-up is made as (open-minded) state of seeing through to the driving of Q switching element 6 RF power during t3-t4, makes Q-switched pulse 33G vibration.At this, the packing density of high-order energy level is followed laser generation and is reduced (UL-3).The Q-switched pulse output 33G of this moment during time t2-t3 be accumulated in laser medium 5 in energy corresponding and emit the 33G of pulse energy (f) Q0.Once more Q switching is made as blocking-up (closing) state in Q-switched pulse vibration back from moment t4, therefore applies RF power to Q switching element 6.The Q-switched pulse that sends with vibration during the moment t3-t4 of this process is processed first processing object point.Then too to the second processing object object point, obtain the sequential of the Q-switched pulse vibration of obtaining according to position and sweep speed, with based on this time relationship with de-energisation DPL1 duration t5-t6, carry out the laser pumping during the scheduled time t6-t7 afterwards, during time t7-t8, block RF afterwards, make Q-switched pulse 33G vibration.In this case, even under situation about changing as time of Q-switched pulse interlude t3-t7, t7-t11, when being the asynchronism(-nization) during time t4-t5, the t8-t9, during the DPL1 of de-energisation operation (d) imported to the impulse hunting week of Q switching repetitive operation, therefore the high-order energy levels of accumulating respectively in the past from t1, t5, t9 was owing to de-energisation laser reduces.(f) excitation energy of the output energy of the Q-switched pulse shown in Q0 output 33G after by de-energisation set, and realizes thus and the irrelevant output homogenizing of pulse repetition frequency.Thereby, by using the pulse output of these homogenizing, can irrespectively critically carry out the processing of processing object thing with the laser radiation sequential.The 3rd later Q-switched pulse action is the repetition of same processes.
In above-mentioned illustrated embodiment, the laser that makes excitation usefulness is shown exports PL example with certain intensity work shown in Fig. 4 (c), stop or being in hanging down the laser output PL that output state comes modulated excitation to use but also can make this output in de-energisation, become vibration, thereby accelerate de-energisation speed.
In the above description, for nonlinear optical element 31, processing is with the wavelength that does not need to use first-harmonic in the wavelength, but known nonlinear optical element is set to relative basic wave light beam and satisfies phase place integration condition under the situation of using second harmonic.Thus, Q-switched pulse is transformed to second harmonic, from outgoing mirror 7 ' emission.In this case, ASE composition (the abbreviation of ASE=Amplified Spontaneous Emission that stimulates by first-harmonic composition, the de-energisation wavelength components of the Q-switched pulse that is blended into second harmonic output as required and emit, mean the spontaneous light that sends that is exaggerated) removed by wavelength filter 32, sneak into composition 33IR to 34 importings of beam absorption body, only second harmonic 33G is shone the processing object thing by light beam amplifier 15 collimations and by forming fine spot by collector lens 18 after speculum 16 reflections, thereby can process.
In order to make nonlinear optical element 31 performance nonlinear interactions, need be with input light polarisation.Having in resonator under the situation of the parts of following polarisation, for example is under the situation of laser medium and Nd:YVO, Nd:YLF, also can carry out the polarisation vibration even without special placement polarisation unit, therefore as long as place nonlinear optical element 31.Yet, do not follow at laser medium under the situation of key element of polarisation, outside light path, need to be provided with polarisation unit such as polarizer.The necessity of the polarisation unit here all is common under the situation of placement nonlinear optical element in the present application.
Carry out wavelength conversion with nonlinear optical element and under the situation that is used to process at second harmonic composition with this first-harmonic, the continuous oscillation composition also can be sneaked in the first-harmonic, carries out only obtaining in the major part of second harmonic composition of wavelength conversion the composition of the Q switching element of high conversion efficiency and exports as the second harmonic composition.Even do not carry out wavelength conversion and send, also can remove part beyond the high order harmonic components by wavelength filter 32 with high order harmonic component is coaxial at the continuous wave composition.Thereby, can remove continuous component fully.
By nonlinear optical element 31, the inhibition burden that the interior vibration to Q switching element 6 first-harmonic compositions of resonator suppresses energy can be alleviated greatly.This be because, under the situation of in the past using first-harmonic, for the driving power that makes the Q switching element is not exported continuous output composition, increase the inhibition energy of Q switching element, therefore the RF power that will increase the Q switching element drives suppresses continuous oscillation, or after continuous component output, as illustrating in the prior art, must remove with AOM.Under the former situation, can produce following unfavourable defect mostly: for the maximum power of the RF circuit that strengthens Q switching drive division 9 causes generating heat caused reliability decrease, the load of following the RF modulation element of high duplication increases to the restriction of high-repetition-rate, because the consumed power of Q switching transducer increases the peeling off of the transducer diffracting medium junction surface that causes, ultrasonic vibration with the transducer breakage etc.In the latter case, for the AOM with the high-diffraction efficiency that separates Q switching element composition and continuous oscillation composition is set, need high RF power drive in the AOM transducer, produced with Q switching element 6 in the relevant design constraints of RF driver, become its defective.
During t2-t3, shine exciting light once more with semiconductor laser and come excitation laser medium 5, accumulate the energy (UL-2) of required stimulation level from excitation.The RF that stops Q switching element 6 at t3 applies afterwards, causes the Q-switched pulse vibration, sends Q-switched pulse 33G (UL-3).Then apply RF1 power to Q switching element 6, carry out light stimulus by excitation with 46 pairs of laser mediums of semiconductor laser 5, continuous oscillation composition LP vibrates.Carry out the de-energisation laser radiation by required sequential t5-t6 afterwards, encourage the scheduled time (t6-t7) with semiconductor laser by excitation.Then repeat to make the Q-switched pulse vibration.Even in this cycle, produce output continuously, because conversion efficiency in the nonlinear optical element 31 and power are square proportional, therefore the conversion efficiency of output is compared low overwhelmingly with Q-switched pulse continuously, therefore pass through nonlinear optical element 31 with first-harmonic, separate by wavelength filter 32, can delete thereby become heat by beam absorption body 34.Thereby, only shine conversion composition to the processing object thing, thereby process from the Q-switched pulse of high order harmonic component composition.
T1-t2, t5-t6 and t9-t10 also can be made as zero during the de-energisation.Be made as under the zero situation, can omit de-energisation laser, therefore also can remove de-energisation with controlling function associated with de-energisation with laser oscillator laser sender unit 41, control signal wire 40, collimating lens 42, the overlapping device 44 of light beam of polarized light and the laser aid control part 50 from Fig. 3.
When Q switching element 6 applies RF power, be set the level of vibrating for suppressing fully, under the situation of state diagram 6 (g) the UL '-N that use to suppress high-order energy level counter-rotating distribution number, particularly de-energisation time t1-t2, t5-t6, t9-t10 are made as action under 0 the situation at Fig. 6 (g) (h) shown in (i).In this case, have from the low feature that can both stably obtain the low peak Q switching till the high repetitive operation that repeats to random time.At this moment, the energy of high-order energy level is by shown in Fig. 6 (g).The time experience of the vibration output suitable with Fig. 6 (f) is shown in Fig. 6 (h).Overcome Q switching and suppress the loss that the subject of knowledge and the object of knowledge causes, thus continuous release composition LP ' vibration, proceed to before Q-switched pulse vibration instruction sequencing t3, t7, the t11 till.Therefore, when RF power is closed, apply the 33G that the middle residual gain that suppresses obtains low peak Q-switched pulse (h) Q ' 0 by RF power.By being high order harmonic component with the nonlinear optical element wavelength conversion, obtain the 33G ' of Q switching output (i) QSHG of second harmonic with it.According to this method, high till can not produce leakage oscillationg component LP ' up to repetition rate, can both obtain the constant output of Q-switched pulse 33G and second harmonic output 33G ', therefore obtain irrelevant with pulse recurrence rate, with irrelevant stable high order harmonic component Q-switched pulse of pulse spacing.
Embodiment 3 does not connect nonlinear optical element is used in de-energisation with laser oscillator example.Fig. 7 illustrates this structure.Omit explanation with Fig. 1 same section, but in Fig. 7, add nonlinear optical element 31, use in addition to have the outgoing mirror 7 ' that has the strong reflection rate, has the characteristic of high transmission rate for second harmonic for first-harmonic.Operation in this case is shown in Figure 8.(a) exciting laser power is shown.At this is not continuous wave, but modulated mistake.(b) be triggering signal.Trigger signal interval t1-t2, t2-t3, t3-t4 also can be non-constant.By sending triggering signal (being rising edge under this situation), shown in (c), apply vibration to Q switching element 6 and suppress signal RF1.When the laser medium energy accumulation, it is constant that the RF1 application time is made as thus, even therefore trigger signal interval is non-constant, the energy that is accumulated in the laser medium is also constant.By the end that RF1 applies, shown in (d), produce Q-switched pulse 33G, but energy accumulation is constant, therefore can access the Q-switched pulse of energy constant.This pulse directly or by nonlinear optical element 31 is carried out the high order harmonic component conversion, becomes Q-switched pulse 33G ' shown in (e), thereby shines on the processing object 20, and is constant but each pulse energy of irradiation keeps.Thus, corresponding with triggering signal in the present embodiment, RF applies the constant time to Q switching element 6, therefore makes the energy time of accumulating of laser medium 5 become constant, and therefore the effect that can access uniform Q-switched pulse is arranged.In addition, the heat that produces in the laser crystal becomes constant, therefore beam characteristics can be kept constant.
In the present embodiment, the situation of generation continuous wave between Q-switched pulse 33G is arranged by the modulator approach of exciting laser power.As previously mentioned, because the nonlinear characteristic of nonlinear optical element, originally the weak continuous wave of power is very low to the conversion efficiency of high order harmonic component, so has only the first-harmonic composition from what nonlinear optical element 31 sent.First-harmonic is separated by wavelength filter 32, does not therefore shine processing object 20.
Embodiment 4
Embodiment 4 is the examples that make its energy constant in the resonator under the lossy state by the generation Q-switched pulse.Identical with the structure of Fig. 7, its operation is shown in Figure 9.Shown in Fig. 9 (a), the continuous action of exciting laser power.In addition, shown in Fig. 9 (c), apply the vibration that is used at the laser medium energy accumulation to Q switching element 6 and suppress to use the RF signal.Shown in Fig. 9 (b), trigger interval t1-t2, t2-t3, t3-t4, t4-t5 are arbitrarily.To the triggering that takes place with this arbitrary sequence,, suppress to apply modulation DRF1, DRF2, the DRF3 etc. of certain hour to vibration with the intensity of RF signal by the input (under the situation of Fig. 9, being trailing edge) of trigger impulse.It is more little that make that by modulation its modulation voltage depends on the interval (being respectively t3-t4 and t4-t5 to DRF4 and DRF5 for example) and the long more RF signal strength signal intensity of the trigger interval reduction that last time triggered this moment.When the RF signal strength signal intensity that is input to Q switching element 6 died down, shown in (d), the Q value of resonator rose.The energy that is accumulated in thus in the laser medium 5 discharges, and produces Q-switched pulse 30G shown in (e).But to become other embodiment of zero usually different for the RF signal during with pulse generation, when a little less than the RF signal but when not being zero, the rising of Q value is insufficient.Therefore, when a little less than the RF signal but when not being zero, be in laser resonator, to have under the state of to a certain degree loss to vibrate.At this moment, the Q-switched pulse energy of generation is to be determined by energy accumulation in the laser medium and the Q value in the resonator, therefore when the former is big, if make the latter little by control, then can make the generation pulse energy constant.Promptly when from the interval of last time triggering length, energy accumulations are big in the laser medium 5, therefore reduce the modulation degree of RF signal, reduce the Q value in the resonator, when increasing loss produces pulse, can produce the Q-switched pulse with constant energy.
In order to produce the Q-switched pulse of constant energy, make the table of the modulation voltage of expression and triggered time interval corresponding RF signals, by appending in the laser control apparatus 50 among Fig. 7, can implement said method.At interval read required modulation voltage by the reference of his-and-hers watches from trigger impulse, the control by laser control apparatus 50 provides predetermined RF modulation voltage to get final product to Q switching element 6.
In addition, by changing the set point of the RF modulation voltage that offer Q switching element corresponding, be not only and be made as constant energy as shown in this embodiment, but also can provide any energy to each pulse with the triggered time interval.
In the present embodiment, except the energy constant that can make Q-switched pulse, only when output laser the time, improve the Q value, therefore can maximally utilise exciting power, obtain energy and utilize the high effect of effect.
In the structure of second high order harmonic component shown in Figure 10 (SHG) resonator with Fig. 3 and different example shown in Figure 7.In the figure, as the structure of Fig. 7 for not having de-energisation with the structure of laser oscillator 41, but can certainly be applied to have a de-energisation shown in Figure 3 structure in the second harmonic resonator structure of Figure 10 with laser oscillator 41.Identical with Fig. 3 or Fig. 7 on use nonlinear optical element 31 this point.In addition, also be provided with end mirror 4 ', it has total reflection characteristic to first-harmonic and second harmonic.In this structure, first-harmonic has the advantage that improves conversion efficiency by reciprocal in nonlinear optical element 31.
In above embodiment, except being made as second harmonic, also be made as triple-frequency harmonics, four-time harmonic or quintuple harmonics by nonlinear optical element from the wavelength of first-harmonic conversion, be appreciated that this point can realize by using known wavelength conversion technique.
The laser generation method that continuous oscillation output in the output in the present invention and the disclosed fundamental wavelength in the past and Q-switched pulse vibration are sneaked into is different, only Q-switched pulse can also be vibrated by the output of first-harmonic or high order harmonic component conversion, can irrespectively make each Q-switched pulse output homogenizing with the pulse repetition period.Thereby, have and not needing can also realize continuous wave oscillation to export the advantage of the structure of removal device.In addition, by being transformed to high order harmonic component,, under the difference and wavelength filter effect of conversion efficiency, also can only use Q-switched pulse even in first-harmonic, there is continuous component.In the situation of using first-harmonic output with use in the situation of high order harmonic component output under any one situation, all shine the short pulse that is produced according to Q switching with the relative high-velocity scanning under the situation of scanning processing object thing, therefore do not cause irradiation, so thermal impact does not produce yet according to continuous component.Because the reduction of the RF output power of circuit of the Q switching drive division of operating in height repetition working region can also be simplified circuit.
And, illustrate laser medium by the structure of intensive reflector, but the excitation of laser medium also can be in the stacked excitation of laser diode, irradiation light excitation in addition known side excitation etc. the present invention to be out of shape enforcement with coaxial excitation.
Crystallization with doping Nd is illustrated laser medium, by using the optical waveguide with a kind of laser active material (porous optical fiber) that around core, a plurality of holes is set vertically and central part is made as waveguide, with it as laser medium, can reduce the refractive index that causes by the variations in temperature in the caused laser medium of the Temperature Distribution that forms in the laser medium and change the influence that brings, can also improve the stability of laser oscillation mode.
Several embodiments of the invention more than have been described.Be appreciated that under the prerequisite that does not break away from the invention technological thought that claims put down in writing, can they change.
Industrial applicibility
As embodiments of the invention, be applicable to that the component of semiconductor memory silicon wafer is cut Cut, the finishing of electric capacity, resistance, inductance etc., LCD display floater correction processing, PDP show The laser of the correction processing of device, the finishing of the function of circuit substrate and other semiconductor substrate Precision Machining, the microminiaturization by working width and processing are removed the minimizing of thing etc. and are improved product The product qualification rate, thus the manufacturing cost of electronic unit can be reduced.
Claims (33)
1. a laser pulse generating divice is characterized in that, described device comprises:
Laser medium, laser resonator, the Q switching element that laser generation is suppressed by the Q value of controlling described laser resonator, and the de-energisation source of described laser medium;
Make described de-energisation source operate for first scheduled time to discharge the unit of energy accumulation from laser medium;
Suppress second scheduled time of signal in described laser medium, to accumulate the unit of predetermined power by apply laser generation to the Q switching element; With
Stop to send laser generation and suppress signal to obtain the unit of Q switching laser pulse vibration output to described Q switching element.
2. laser pulse generating divice according to claim 1 is characterized in that, has nonlinear optical element in the light path of Q switching laser pulse.
3. laser pulse generating divice according to claim 1 is characterized in that described device comprises the driving source of described laser medium,
The described unit that emits energy accumulation also comprises the excitation density that reduces described driving source or stops or blocking the unit of excitation.
4. laser pulse generating divice according to claim 1 is characterized in that, the unit of described energy accumulation also comprises the unit that described laser generation inhibition signal level is set at the level with enough vibration inhibition energy.
5. laser pulse generating divice according to claim 4 is characterized in that, the unit of described release energy accumulation also comprises first scheduled time was set at unit more than zero.
6. according to claim 3,4 or 5 described laser pulse generating divices, it is characterized in that in the light path of Q switching laser pulse, having nonlinear optical element.
7. a laser pulse generating divice is characterized in that, described device comprises:
Laser medium, laser resonator, and the Q switching element that laser generation is suppressed by the Q value of controlling described laser resonator;
By will not have enough vibrations suppress can the laser generation of level suppress signal and apply the scheduled time and in described laser medium, accumulate the unit of predetermined power to described Q switching element; With
To suppress the unit that signal stops to the laser generation that described Q switching element sends in order to obtain Q switching laser pulse vibration output.
8. laser pulse generating divice according to claim 7 is characterized in that, has nonlinear optical element in the light path of Q switching laser pulse.
9. a laser pulse generating divice is characterized in that, described device comprises:
Laser medium, laser resonator, and the Q switching element that laser generation is suppressed by the Q value of controlling described laser resonator;
Provide unit to described laser medium through the pumping signal of ovennodulation;
Apply the scheduled time to described Q switching element and in described laser medium, accumulate the unit of predetermined power by laser generation being suppressed signal; With
To suppress the unit that signal stops to the laser generation that described Q switching element sends in order to obtain Q switching laser pulse vibration output.
10. laser pulse generating divice according to claim 9 is characterized in that, has nonlinear optical element in the light path of Q switching laser pulse.
11. a laser pulse generating divice is characterized in that, described device comprises:
Laser medium, laser resonator, and the Q switching element that carries out the laser generation inhibition by the Q value of controlling described laser resonator;
Thereby apply the unit that laser generation suppresses signal energy accumulation in described laser medium to described Q switching element;
Come the unit of modulated laser vibration inhibition signal based on origination interval, thereby export to have and to obtain the vibration of Q switching laser pulse from the corresponding state that loses of the origination interval of preceding subpulse from preceding subpulse.
12. laser pulse generating divice according to claim 11 is characterized in that, has nonlinear optical element in the light path of Q switching laser pulse.
13., it is characterized in that described de-energisation source is a laser according to the described laser pulse generating divice of claim 1 to 12, the luminous wavelength of its de-energisation is carrying out Nd
+ 3Near wavelength 0.9 μ m, the 1.1 μ m of the migration beyond the ion laser vibration first-harmonic, the 1.3 μ m.
14. according to the described laser pulse generating divice of claim 1 to 12, it is characterized in that, described to remove the driving source of laser medium be semiconductor laser, and described laser medium is Nd:YAG, Nd:YVO4, Nd:YLF, and described de-energisation source is a semiconductor laser.
15., it is characterized in that described laser medium is the porous optical fiber that has the doping laser active ion in a plurality of holes at the periphery of the core that forms optical waveguide according to the described laser pulse generating divice of claim 1 to 12.
16., it is characterized in that the first-harmonic of laser generation is from Nd according to claim 2,6,8,10 or 12 described laser pulse generating divices
+ 3The induced emission wavelength of ion is second harmonic, triple-frequency harmonics, four-time harmonic or quintuple harmonics based on the high order harmonic component of described nonlinear optical element.
17. a laser processing device is characterized in that, will shine the processing object thing from the pulse output of the described laser pulse generating divice of claim 1 to 16.
18. laser processing device according to claim 17 is characterized in that, described laser processing object is electronic devices such as the connecting line, electric capacity, resistance, inductance on the semiconductor substrate.
19. laser processing device according to claim 17 is characterized in that, described processing object thing is display unit such as liquid crystal indicator, el display device, plasma display system.
20. a laser pulse method for generation is characterized in that, described method comprises:
Laser medium, laser resonator are set, carry out the step in the de-energisation source of Q switching element that laser generation suppresses and laser medium by the Q value of control laser resonator;
Thereby make the de-energisation source operate for first scheduled time and emit the step of energy accumulation from laser medium;
Thereby applied for second scheduled time to the Q switching element and in laser medium, accumulate the step of predetermined power by laser generation being suppressed signal; With
Stop to send laser generation and suppress signal to obtain the step of Q switching laser pulse vibration output to the Q switching element.
21. laser pulse method for generation according to claim 20 is characterized in that, described method also comprises the step that the Q switching laser pulse is transformed to high order harmonic component and exports.
22. according to claim 20 or 21 described laser pulse method for generation, it is characterized in that, comprise also that in emitting the step of described energy accumulation reduction is to the excitation density of laser medium or stop or blocking excitation.
23. according to claim 20 or 21 described laser pulse method for generation, it is characterized in that, in described laser medium, accumulate the level set that in the step of predetermined power laser generation suppressed signal for do not have enough vibrations suppress can level.
24. laser pulse method for generation according to claim 23 is characterized in that, first scheduled time was more than zero in emitting the step of described energy accumulation.
25. a laser pulse method for generation is characterized in that, described method comprises:
Laser medium is set, laser resonator, and the step of carrying out the Q switching element of laser generation inhibition by the Q value of control laser resonator;
By will not have enough vibration suppress can level laser generation suppress signal and apply the scheduled time and in laser medium, accumulate the step of predetermined power to the Q switching element;
Stop to send laser generation and suppress signal to obtain the step of Q switching laser pulse vibration output to the Q switching element.
26. laser pulse method for generation according to claim 25 is characterized in that, described method also comprises the step that the Q switching laser pulse is transformed to high order harmonic component and exports.
27. a laser pulse method for generation is characterized in that, described method comprises:
Laser medium is set, laser resonator, and the step of carrying out the Q switching element of laser generation inhibition by the Q value of control laser resonator;
Provide step to laser medium through the pumping signal of ovennodulation;
Apply the scheduled time to the Q switching element and in laser medium, accumulate the step of predetermined power by laser generation being suppressed signal;
Stop to send laser generation and suppress signal to obtain the step of Q switching laser pulse vibration output to the Q switching element.
28. laser pulse method for generation according to claim 27 is characterized in that, described method also comprises the step that the Q switching laser pulse is transformed to high order harmonic component and exports.
29. a laser pulse method for generation is characterized in that, described method comprises:
Laser medium is set, laser resonator, and the step of carrying out the Q switching element of laser generation inhibition by the Q value of control laser resonator;
Thereby apply the step that laser generation suppresses signal energy accumulation in laser medium to the Q switching element;
Come the modulated laser vibration to suppress signal based on origination interval from preceding subpulse, thereby to have and the step that obtains Q switching laser pulse vibration output from the corresponding state that loses of the origination interval of preceding subpulse.
30. laser pulse method for generation according to claim 29 is characterized in that, described method also comprises the step that the Q switching laser pulse is transformed to high order harmonic component and exports.
31. a laser processing is characterized in that, described method comprises that the laser pulses irradiate that takes place with the described laser pulse method for generation of claim 20 to 30 arrives the step of processing object thing.
32. laser processing according to claim 31 is characterized in that, the laser processing object is electronic equipments such as the connecting line, electric capacity, resistance, inductance on the semiconductor substrate.
33. laser processing according to claim 31 is characterized in that, the processing object thing is display unit such as liquid crystal indicator, el display device, plasma display system.
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| Country | Link |
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| JP (1) | JPWO2007138884A1 (en) |
| KR (1) | KR20090018165A (en) |
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| CN102371431A (en) * | 2010-08-13 | 2012-03-14 | 豪晶科技股份有限公司 | Laser processing device |
| CN102780155A (en) * | 2012-07-02 | 2012-11-14 | 深圳市大族激光科技股份有限公司 | Input signal controlling device and method of laser Q-switch, and laser device |
| CN109967884A (en) * | 2017-12-14 | 2019-07-05 | 株式会社基恩士 | Laser processing device and laser processing |
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| JP2018006394A (en) * | 2016-06-28 | 2018-01-11 | ウシオ電機株式会社 | Laser-driven light source device |
| US10101181B1 (en) * | 2017-03-30 | 2018-10-16 | Mitutoyo Corporation | Linear displacement sensor using a position sensitive detector |
| JP7488480B2 (en) * | 2019-07-16 | 2024-05-22 | 日亜化学工業株式会社 | Q-switched resonator and pulse generator |
| WO2021181511A1 (en) * | 2020-03-10 | 2021-09-16 | 三菱電機株式会社 | Wavelength conversion laser device and wavelength conversion laser processing machine |
| JP7250231B1 (en) * | 2022-09-15 | 2023-03-31 | 三菱電機株式会社 | Laser device, laser processing device, learning device, reasoning device, laser processing system, and laser processing method |
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| CN102371431A (en) * | 2010-08-13 | 2012-03-14 | 豪晶科技股份有限公司 | Laser processing device |
| CN102371431B (en) * | 2010-08-13 | 2015-06-10 | 豪晶科技股份有限公司 | Laser processing device |
| CN102780155A (en) * | 2012-07-02 | 2012-11-14 | 深圳市大族激光科技股份有限公司 | Input signal controlling device and method of laser Q-switch, and laser device |
| CN102780155B (en) * | 2012-07-02 | 2014-08-06 | 深圳市大族激光科技股份有限公司 | Input signal controlling device and method of laser Q-switch, and laser device |
| CN109967884A (en) * | 2017-12-14 | 2019-07-05 | 株式会社基恩士 | Laser processing device and laser processing |
| CN109967884B (en) * | 2017-12-14 | 2022-06-14 | 株式会社基恩士 | Laser processing apparatus and laser processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090018165A (en) | 2009-02-19 |
| WO2007138884A1 (en) | 2007-12-06 |
| JPWO2007138884A1 (en) | 2009-10-01 |
| TW200810301A (en) | 2008-02-16 |
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