CN101431122A - 太阳电池减反射膜生产工艺 - Google Patents
太阳电池减反射膜生产工艺 Download PDFInfo
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- CN101431122A CN101431122A CNA2008101628629A CN200810162862A CN101431122A CN 101431122 A CN101431122 A CN 101431122A CN A2008101628629 A CNA2008101628629 A CN A2008101628629A CN 200810162862 A CN200810162862 A CN 200810162862A CN 101431122 A CN101431122 A CN 101431122A
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- reative cell
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 238000005516 engineering process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 24
- 239000010703 silicon Substances 0.000 claims abstract description 24
- 230000008569 process Effects 0.000 claims abstract description 19
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 16
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 229910000077 silane Inorganic materials 0.000 claims abstract description 9
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 3
- 230000007812 deficiency Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 238000007688 edging Methods 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 229910000069 nitrogen hydride Inorganic materials 0.000 claims description 3
- 230000006641 stabilisation Effects 0.000 claims description 3
- 238000011105 stabilization Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000012535 impurity Substances 0.000 abstract description 4
- 238000002161 passivation Methods 0.000 abstract description 4
- 238000000137 annealing Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 230000000903 blocking effect Effects 0.000 abstract description 2
- 230000006378 damage Effects 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 229910020776 SixNy Inorganic materials 0.000 abstract 1
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000006117 anti-reflective coating Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 208000019155 Radiation injury Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008101628629A CN101431122B (zh) | 2008-12-05 | 2008-12-05 | 太阳电池减反射膜生产工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2008101628629A CN101431122B (zh) | 2008-12-05 | 2008-12-05 | 太阳电池减反射膜生产工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101431122A true CN101431122A (zh) | 2009-05-13 |
CN101431122B CN101431122B (zh) | 2010-08-11 |
Family
ID=40646370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2008101628629A Expired - Fee Related CN101431122B (zh) | 2008-12-05 | 2008-12-05 | 太阳电池减反射膜生产工艺 |
Country Status (1)
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CN (1) | CN101431122B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102185012A (zh) * | 2010-12-02 | 2011-09-14 | 江阴浚鑫科技有限公司 | 镀氮化硅减反射膜的方法 |
CN102185010A (zh) * | 2010-12-02 | 2011-09-14 | 江阴浚鑫科技有限公司 | 一种应用于太阳能电池的优化钝化方法 |
CN102244109A (zh) * | 2011-06-30 | 2011-11-16 | 西安黄河光伏科技股份有限公司 | 一种晶硅太阳电池减反射膜及其制备方法 |
CN102306680A (zh) * | 2011-08-23 | 2012-01-04 | 浙江嘉毅能源科技有限公司 | 晶体硅太阳能电池片减反射膜制备工艺 |
CN102610696A (zh) * | 2012-03-22 | 2012-07-25 | 常州亿晶光电科技有限公司 | 太阳能电池管式炉扩散工艺 |
CN114252397A (zh) * | 2021-12-27 | 2022-03-29 | 中国电子科技集团公司第十三研究所 | 一种增透膜剩余反射率测试陪片 |
-
2008
- 2008-12-05 CN CN2008101628629A patent/CN101431122B/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102185012A (zh) * | 2010-12-02 | 2011-09-14 | 江阴浚鑫科技有限公司 | 镀氮化硅减反射膜的方法 |
CN102185010A (zh) * | 2010-12-02 | 2011-09-14 | 江阴浚鑫科技有限公司 | 一种应用于太阳能电池的优化钝化方法 |
CN102244109A (zh) * | 2011-06-30 | 2011-11-16 | 西安黄河光伏科技股份有限公司 | 一种晶硅太阳电池减反射膜及其制备方法 |
CN102306680A (zh) * | 2011-08-23 | 2012-01-04 | 浙江嘉毅能源科技有限公司 | 晶体硅太阳能电池片减反射膜制备工艺 |
CN102610696A (zh) * | 2012-03-22 | 2012-07-25 | 常州亿晶光电科技有限公司 | 太阳能电池管式炉扩散工艺 |
CN114252397A (zh) * | 2021-12-27 | 2022-03-29 | 中国电子科技集团公司第十三研究所 | 一种增透膜剩余反射率测试陪片 |
CN114252397B (zh) * | 2021-12-27 | 2024-06-11 | 中国电子科技集团公司第十三研究所 | 一种增透膜剩余反射率测试陪片 |
Also Published As
Publication number | Publication date |
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CN101431122B (zh) | 2010-08-11 |
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C06 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: ZHEJIANG HONGCHENG SOLAR ENERGY CO., LTD. Free format text: FORMER OWNER: HE XUMEI Effective date: 20110225 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20110225 Address after: 311821 Zhejiang city of Zhuji province An Hua Zhen Hongchen photovoltaic industrial park Zhejiang Hongchen photovoltaic energy Co. Ltd. Patentee after: Zhejiang Hongcheng Solar Energy Co., Ltd. Address before: 311821 Zhejiang city of Zhuji province An Hua Zhen Hongchen photovoltaic industrial park Zhejiang Hongchen photovoltaic energy Co. Ltd. Patentee before: He Xumei |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100811 Termination date: 20121205 |