CN101431040A - Lifter structure - Google Patents
Lifter structure Download PDFInfo
- Publication number
- CN101431040A CN101431040A CNA200710157990XA CN200710157990A CN101431040A CN 101431040 A CN101431040 A CN 101431040A CN A200710157990X A CNA200710157990X A CN A200710157990XA CN 200710157990 A CN200710157990 A CN 200710157990A CN 101431040 A CN101431040 A CN 101431040A
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- China
- Prior art keywords
- film magazine
- magazine
- control system
- servo
- laser sensor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention relates to a magazine accurate movement technique during the production of a semiconductor wafer, in particular to a raiser structure for accurately positioning wafers in a magazine, solving the problem that after production, a wafer cannot be correctly sent back to the original magazine from which the wafer is fetched. The raiser structure is provided with a magazine placing and fixing device, a servo control system and laser sensors. The magazine placing and fixing device is connected with the servo control system driving the magazine placing and fixing device to ascend and descend, and the laser sensors are corresponding to the wafers in the magazine. The magazine placing and fixing device, the laser sensor, the servo control system and the laser sensor are respectively arranged on the frame which is provided with a photoelectric sensor to control a servo system. The invention has the advantages of simple and reliable structure, down cost, high control accuracy, stable movement, etc.
Description
Technical field
The present invention relates to the accurate Motion Technology of film magazine in the semiconductor wafer course of processing, specifically a kind of lifter structure that wafer in the film magazine is accurately located.
Background technology
Wafer in the semiconductor wafer course of processing, needs the wafer in the film magazine is carried out accurate localization, so that can be got, be sent to manipulator accurately.Present semiconductor equipment mostly is furnished with two cover lifters, gets, send sheet respectively.And present lifter just carries out simply mobile in a certain direction, the wafer in the film magazine is not positioned in the moving process.So just can not confirm whether there is wafer in the film magazine, can not confirm the accurate position of wafer.So wafer can not be sent back to original getting in the sheet film magazine accurately after machining, can only deliver to special sending in the sheet film magazine.
Summary of the invention
In order to overcome above-mentioned deficiency, the purpose of this invention is to provide a kind of lifter structure that semiconductor wafer processing is carried out the High Accuracy Control requirement for film magazine that satisfies, solve wafer and after machining, can not be sent back to the original medium problem of sheet film magazine of getting accurately.
To achieve these goals, technical solution of the present invention:
A kind of lifter structure, this lifter structure are provided with places and stator box device, servo-control system, laser sensor, places and the stator box device connects the servo-control system that drives its lifting, and laser sensor is corresponding with wafer in the film magazine.
Described lifter structure, placement and stator box device, laser sensor, servo-control system, laser sensor are installed on respectively on the framework, and framework is the four sides frame structure of left side vertical plate, upper end fixed head, right side riser, lower end fixed head formation.
Described lifter structure, laser sensor are the laser correlation structure that radiating portion and receiving unit constitute, and have the square hole that supply can passes through on the fixed head of upper end, and radiating portion and receiving unit are installed on the relative position of upper end fixed head square hole respectively.
Described lifter structure, the left side vertical plate outside is equipped with the left side mounting panel, and the riser outside in right side is equipped with the right side mounting panel.
Described lifter structure, servo-control system is provided with servomotor, ball-screw, line slideway, ball-screw links to each other with the axle head of servomotor by shaft coupling, install on the nut of ball-screw and place and the stator box device, line slideway is installed on the left side vertical plate or right side riser of framework.
Described lifter structure, placement and stator box device are provided with film magazine base plate, film magazine placing plate, film magazine locating piece are installed, at film magazine the base plate top is installed the film magazine placing plate is housed, film magazine is installed on the film magazine locating piece on the film magazine placing plate, film magazine is by film magazine locating piece location, and film magazine is installed the base plate bottom and linked to each other with slide block on the line slideway.
Described lifter structure is equipped with sensing chip on slide block, install and the corresponding photoelectric sensor of sensing chip on the framework.
Described lifter structure, the bottom that film magazine is installed base plate is provided with floor.
The present invention has following advantage:
1. the present invention is simple and reliable for structure, and cost-saved.
2. the present invention adopts the motion of servo-control system control film magazine, the control precision height, and motion is steadily.Servo-control system realizes the film magazine lifting by the mode transmission of driven by motor ball-screw.In addition, also have the guide rail guiding, steadily reliable.
3. the present invention by the scanning of laser sensor, can determine total how many wafers in the film magazine by the accurate location of laser sensor realization to wafer in the film magazine accurately, and the residing position of each wafer.The positional information that can store each wafer by control system, after the wafer process process was finished, manipulator will send back to wafer when getting sheet in the residing position, thereby realizes getting, send sheet a shared film magazine.In addition, when not piling wafer in the film magazine, also can process, get the position that the sheet manipulator can be avoided film magazine hollow automatically according to canned data.
4. to detect the device of wafer be laser correlation structure in the present invention, maximum reduction error rate.
5. the present invention can place different film magazines according to the size of wafer.
Description of drawings
Fig. 1 is the front view of lifter structure of the present invention.
Fig. 2 is the cutaway view of A-A among Fig. 1.
Fig. 3 is the vertical view of Fig. 1.
Fig. 4 is a lifter axis of no-feathering view of the present invention.
Among the figure, 1 left side mounting panel; 2 left side vertical plate; 3 line slideways; 4 slide blocks; 5 film magazines; 6 laser sensors; The 6-1 radiating portion; The 6-2 receiving unit; 7 film magazines are installed base plate; 8 upper end fixed heads; 9 floors; 10 right side risers; 11 right side mounting panels; 12 lower end fixed heads; 13 ball-screws; 14 servomotors; 15 film magazine placing plates; 16 film magazine locating pieces; 17 photoelectric sensors; 18 amplifiers.
Embodiment
Shown in Fig. 1-4, lifter structure of the present invention comprises: place and servo-control system that stator box device, control film magazine accurately move, wafer in the film magazine is scanned and pinpoint laser sensor 6, is used to the frame structure of placing said apparatus and being convenient to install lifter, three photoelectric sensors 17 are installed, so that the control servo system on framework.Film magazine 5 is installed on placement and the stator box device, placement and stator box device connect the servo-control system that drives its lifting, laser sensor 6 is corresponding with wafer in the film magazine 5, places and stator box device, laser sensor 6, servo-control system are installed on the framework respectively; Wherein, servo-control system adopts universal product, and its agent structure comprises servomotor 14, ball-screw 13, line slideway 3 and servo controller etc.Ball-screw 13 links to each other by the axle head of shaft coupling with servomotor 14, installs on the nut of ball-screw 13 and places and the stator box device; Placement and stator box device comprise film magazine installation base plate 7, film magazine placing plate 15, film magazine locating piece 16, at film magazine base plate 7 tops are installed film magazine placing plate 15 is housed, film magazine 5 is installed on the film magazine locating piece 16 on the film magazine placing plate 15, film magazine 5 is by film magazine locating piece 16 location, and film magazine is installed base plate 7 bottoms and linked to each other with slide block 4 on the line slideway 3.Servomotor 14 moves up and down at ball-screw 13 by the rotation drive nut, drives film magazine installation base plate 7 and slide block 4 and moves along line slideway 3, thereby realize moving of film magazine.
As depicted in figs. 1 and 2, the present invention adopts servomotor 14 to drive ball-screw 13 motions, thus the structure that formation film magazine installation base plate 7 and slide block 4 move up and down on line slideway 3.Left side mounting panel 1, left side vertical plate 2, upper end fixed head 8, right side riser 10, right side mounting panel 11, lower end fixed head 12 have been formed the lifter framework; Wherein, left side mounting panel 1 is installed on left side vertical plate 2 outsides, and right side mounting panel 11 is installed on right side riser 10 outsides, and line slideway 3 is installed on the left side vertical plate 2, play the guiding role.Have the square hole that supply can 5 passes through on the fixed head 8 of upper end, film magazine 5 is by being installed on film magazine placing plate 15 behind the square hole.
As shown in figures 1 and 3, laser sensor 6 is equipped with on the top of framework, and when film magazine 5 moved at vertical direction, laser sensor 6 can detect number of wafers in the film magazine, in each groove whether wafer was arranged in the film magazine.Laser sensor 6 is divided into radiating portion 6-1 and receiving unit 6-2, adopts the operation principle of correlation laser, and light sends from an end, is mapped to the other end.Radiating portion 6-1 and receiving unit 6-2 are individually fixed in the relative position of upper end fixed head 8 square holes, to the light time can trim locations guarantee accurate to light, the signal transduction process of laser sensor 6 is: amplifier 18 produces light source, pass to radiating portion 6-1 by optical fiber, after receiving unit 6-2 receives, turn back to amplifier 18 again by optical fiber; Difference according to radiating portion and receiving unit luminous intensity, judge whether the quantity of wafer and wafer, then this signal is delivered to the control system of semiconductor wafer processing, the positional information that can store each wafer by the control system of semiconductor wafer processing, after the wafer process process is finished, manipulator will send back to wafer when getting sheet in the residing position, thereby realizes getting, send sheet a shared film magazine.Film magazine 5 is placed on the film magazine placing plate 15, simultaneously, film magazine locating piece 16 (Fig. 3) is housed on film magazine placing plate 15, its role is to fixedly film magazine 5 positions.Position between this film magazine placing plate 15 and the film magazine locating piece 16 can be adjusted as required.In addition, lifter of the present invention simultaneously can compatible wafers having different sizes, can change the film magazine locating piece 16 of different size according to specific requirement.
As shown in Figure 1, the bottom that film magazine is installed base plate 7 is provided with floor 9, and floor 9 works to reinforce film magazine base plate 7 is installed, and can prevent that film magazine installation base plate 7 from causing phenomenon uneven above it to take place because of an end is stressed.
As shown in Figure 4, lifter structure of the present invention is equipped with sensing chip on slide block 4, by three photoelectric sensors 17 on the framework, controls three positions of initial point, upper limit, lower limit of servo system respectively.Initial point also claims zero-bit, i.e. the initial position of this lifter.Upper limit is meant the highest order when film magazine rises, and is limited to the lowest order that is meant when film magazine descends down.In the present embodiment, 3 photoelectric sensors can be installed on the left side vertical plate 2 corresponding with sensing chip on the slide block 4.
Claims (8)
1. lifter structure, it is characterized in that: this lifter structure is provided with places and stator box device, servo-control system, laser sensor, place and the stator box device connects the servo-control system that drives its lifting, laser sensor is corresponding with wafer in the film magazine.
2. according to the described lifter structure of claim 1, it is characterized in that: placement and stator box device, laser sensor, servo-control system, laser sensor are installed on respectively on the framework, and framework is the four sides frame structure of left side vertical plate (2), upper end fixed head (8), right side riser (10), lower end fixed head (12) formation.
3. according to the described lifter structure of claim 2, it is characterized in that: laser sensor (6) is the laser correlation structure of radiating portion (6-1) and receiving unit (6-2) formation, have the square hole that supply can (5) passes through on the upper end fixed head (8), radiating portion (6-1) and receiving unit (6-2) are installed on the relative position of upper end fixed head (8) square hole respectively.
4. according to the described lifter structure of claim 2, it is characterized in that: left side vertical plate (2) outside is equipped with left side mounting panel (1), and right side riser (10) outside is equipped with right side mounting panel (11).
5. according to the described lifter structure of claim 2, it is characterized in that: servo-control system is provided with servomotor (14), ball-screw (13), line slideway (3), ball-screw (13) links to each other by the axle head of shaft coupling with servomotor (14), install on the nut of ball-screw (13) and place and the stator box device, line slideway (3) is installed on the left side vertical plate (2) or right side riser (10) of framework.
6. according to claim 1 or 5 described lifter structures, it is characterized in that: placement and stator box device are provided with film magazine base plate (7), film magazine placing plate (15), film magazine locating piece (16) are installed, at film magazine base plate (7) top is installed film magazine placing plate (15) is housed, film magazine (5) is installed on the film magazine locating piece (16) on the film magazine placing plate (15), film magazine (5) is by film magazine locating piece (16) location, and film magazine is installed base plate (7) bottom and linked to each other with slide block (4) on the line slideway (3).
7. according to the described lifter structure of claim 6, it is characterized in that: on slide block (4), sensing chip is installed, installs and the corresponding photoelectric sensor of sensing chip (17) on the framework.
8. according to the described lifter structure of claim 6, it is characterized in that: the bottom that film magazine is installed base plate (7) is provided with floor (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710157990XA CN101431040B (en) | 2007-11-07 | 2007-11-07 | Lifter structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710157990XA CN101431040B (en) | 2007-11-07 | 2007-11-07 | Lifter structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101431040A true CN101431040A (en) | 2009-05-13 |
| CN101431040B CN101431040B (en) | 2011-11-09 |
Family
ID=40646329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710157990XA Expired - Fee Related CN101431040B (en) | 2007-11-07 | 2007-11-07 | Lifter structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101431040B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103811384A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer box inclination and homing device |
| CN108585353A (en) * | 2018-04-28 | 2018-09-28 | 李涛 | A kind of sewage disposal system and its working method |
| CN112731422A (en) * | 2020-12-25 | 2021-04-30 | 上海广川科技有限公司 | Device and method for carrying out wafer positioning detection |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4253365B2 (en) * | 1997-10-17 | 2009-04-08 | オリンパス株式会社 | Wafer transfer device |
| CN201117646Y (en) * | 2007-11-07 | 2008-09-17 | 沈阳芯源微电子设备有限公司 | Raiser structure |
-
2007
- 2007-11-07 CN CN200710157990XA patent/CN101431040B/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103811384A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer box inclination and homing device |
| CN103811384B (en) * | 2012-11-06 | 2016-06-01 | 沈阳芯源微电子设备有限公司 | Film magazine tilts and homing device |
| CN108585353A (en) * | 2018-04-28 | 2018-09-28 | 李涛 | A kind of sewage disposal system and its working method |
| CN112731422A (en) * | 2020-12-25 | 2021-04-30 | 上海广川科技有限公司 | Device and method for carrying out wafer positioning detection |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101431040B (en) | 2011-11-09 |
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| C14 | Grant of patent or utility model | ||
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Granted publication date: 20111109 Termination date: 20171107 |