CN101428452A - Machining device - Google Patents

Machining device Download PDF

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Publication number
CN101428452A
CN101428452A CN 200810173195 CN200810173195A CN101428452A CN 101428452 A CN101428452 A CN 101428452A CN 200810173195 CN200810173195 CN 200810173195 CN 200810173195 A CN200810173195 A CN 200810173195A CN 101428452 A CN101428452 A CN 101428452A
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image displaying
input
mentioned
input field
processing conditions
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CN 200810173195
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CN101428452B (en
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德满直哉
坂井真树
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Disco Corp
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Disco Corp
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Abstract

The invention provides a processing apparatus for reducing input errors of numerical data for setting a processing condition. An operation panel (30) display input region (33), an image drawing region (34) and connecting lines (35a-35k) are used as a processing condition to set a picture, a plurality of input fields (33a-33l) for receiving each processing condition numerical data input are arranged in the input region (33); each processing condition content is showed by image drawings (34a-34r) at the image drawing region (34); each input field (33a-33l) in the input region (33) is connected to the corresponding image drawings (34c-34f, 34l-34r) in the image drawing region (34) by the connecting lines (35a-35k).

Description

Processing unit (plant)
Technical field
The present invention relates to a kind of processing unit (plant)s such as topping machanism that comprise guidance panel.
Background technology
Integrated circuit), (large scaleintegration: the wafer of device forms preset thickness by the back side being carried out grinding to LSI large scale integrated circuit) etc. be formed with a plurality of IC (Integrated Circuit:, and be divided into device one by one, thereby be used for electronic equipments such as portable telephone, personal computer by processing unit (plant)s such as cutter sweeps.
About the cutting that utilizes cutter sweep to carry out, the cutting tip of rotation at a high speed is cut in the machined object that remains on the holding unit, cutting tip and holding unit are relatively moved, only carry out machining (for example with reference to patent documentation 1 etc.) thus with the amount of cutting tip incision.
When above-mentioned cutting,, will import according to each machined object the approach of machined object and detailed many processing conditions such as feed speed of holding unit, thereby cut in order to obtain desirable processing result.
Patent documentation 1: TOHKEMY 2003-334751 communique
The setting of processing conditions needs to import multiple numeric data by each machined object as mentioned above, and in when input, the operator will in addition careful attention.Yet, in the guidance panel of existing processing unit (plant), only show the input field of the numeric data of each processing conditions, miss input error sometimes, only after just realize input error in the actual manufacturing procedure during product breakage.
Summary of the invention
The present invention finishes in view of above-mentioned condition, and its purpose is to provide a kind of processing unit (plant) that can reduce the input error of the numeric data that is used for the processing conditions setting.
In order to solve above-mentioned problem and to achieve the goal, processing unit (plant) of the present invention comprises: the holding unit with the maintenance face that keeps machined object; The machining cell that the machined object that remains on this holding unit is processed; Guidance panel with the processing conditions of importing this machining cell, it is characterized in that, the aforesaid operations panel shows that input area, image displaying zone and connecting line set picture as processing conditions, is arranged with a plurality of input fields of the input of the numeric data that is used to accept each processing conditions in the described input area; Described image displaying zone shows the content of each processing conditions with image displaying; Described connecting line couples together each input field in the above-mentioned input area with corresponding image displaying in the above-mentioned image displaying zone.
In addition, processing unit (plant) of the present invention is characterized in that in foregoing invention, and aforesaid operations panel and numeric data in being input to above-mentioned input field change the corresponding image displaying in the above-mentioned image displaying zone in linkage.
In addition, processing unit (plant) of the present invention is in foregoing invention, it is characterized in that, what above-mentioned machining cell had an at a high speed rotation is divided into above-mentioned machined object the cutting tip of device one by one, this processing unit (plant) comprises: Z axle mobile unit, and it moves above-mentioned machining cell on the Z-direction vertical with respect to above-mentioned maintenance face; The y-axis shift moving cell, it is that Y direction is carried out index feed to above-mentioned machining cell at the axis direction of above-mentioned cutting tip; With the X-axis mobile unit, its to above-mentioned holding unit with the X-direction of Z-direction and Y direction quadrature on process feeding, the above-mentioned processing conditions that shows on the aforesaid operations panel comprises: as size, the amount of feeding of above-mentioned Z axle mobile unit, the amount of movement of above-mentioned y-axis shift moving cell and the processing feed speed of above-mentioned X-axis mobile unit of the machined object of object.
Processing unit (plant) of the present invention is set in the picture at the processing conditions of guidance panel, be provided with in the lump and show the input area that is arranged with a plurality of input fields that are used for numeric data input and with the image displaying zone of the content of image displaying performance processing conditions, and each input field and corresponding image displaying couple together with connecting line and show, so to input field input value data the time, the effect of the input error of numeric data is understood, can be reduced to the content with its processing conditions easily.Particularly by image displaying and the numeric data of being imported are changed in linkage, under the situation of the numeric data mistake of being imported, by observing the state of image displaying, can easily find mistake, promote re-entering of numeric data, thereby had the effect of the input error that can reduce numeric data.
Description of drawings
Fig. 1 is the stereoscopic figure of an example of the processing unit (plant) of expression embodiment of the present invention 1.
Fig. 2 is the stereogram that the structure around the machining cell that extracts among Fig. 1 is represented.
Fig. 3 is the general block diagram of topology example of the control module that processing unit (plant) had of expression embodiment 1.
Fig. 4 is illustrated in the front view that the processing conditions that shows on the guidance panel when utilizing this processing unit (plant) to carry out cutting is step by step set an example of picture.
Fig. 5 is the key diagram of the pattern example of the different image displaying data of expression display position.
Fig. 6 is the general flowchart of the operation control example of the incisory processing conditions of expression substep when setting.
Fig. 7 is the general flowchart of the subprogram (sub-routine) of the input data judgment processing example in the presentation graphs 6.
The general principal view of the demonstration example of the guidance panel when Fig. 8 is the input of the vicious numeric data of expression.
Fig. 9 is the front view that the processing conditions that shows on the guidance panel when being illustrated in the laser processing device that utilizes embodiment of the present invention 2 machined object being carried out Laser Processing is set an example of picture.
Figure 10 is the front view that processing conditions that expression SUB_SEQ pattern is used is set an example of picture.
The general principal view of the demonstration example of the guidance panel when Figure 11 is the input of the vicious numeric data of expression.
Label declaration
10: processing unit (plant); 11: holding unit; 11a: maintenance face; 20: machining cell; 21a: cutting tip; 30: guidance panel; 33: input area; 33a~331: input field; 34: the image displaying zone; 34a~34r: image displaying; 35a~35k: connecting line; 50:X axle mobile unit; 60:Z axle mobile unit; 70:Y axle mobile unit; 80: guidance panel; 83: input area; 83a~83g: input field; 84: the image displaying zone; 84a~84h: image displaying; 85a~85e: connecting line; 93: input area; 93a~93f: input field; 94: the image displaying zone; 94a~94i: image displaying; 95a~95f: connecting line; W: machined object.
The specific embodiment
Following with reference to description of drawings as being used to implement the processing unit (plant) of optimum way of the present invention.
(embodiment 1)
Present embodiment 1 represents to be applied to comprise the example of the topping machanism of the machining cell with cutting tip as processing unit (plant).Fig. 1 is the stereoscopic figure of an example of the processing unit (plant) of expression embodiment of the present invention 1, and Fig. 2 extracts the stereogram that the structure around its machining cell is represented.The processing unit (plant) 10 of present embodiment 1 is applied to along the topping machanism of cutting apart preset lines cutting machined object W, as schematic configuration, as shown in Figure 1, this processing unit (plant) 10 comprises holding unit 11, image unit 12, machining cell 20, guidance panel 30 and control module 40.
Machining cell 20 is unit of two cutting modes that two cutting tips are carried out stock removal action along can walking abreast of Y direction arranged opposite, machined object W's on the maintenance face 11a that remains on holding unit 11 cuts apart preset lines, carry out hemisect by the first cutting tip 21a, carry out the full cutting of the intact part of hemisect by second cutting tip.At this, in machining cell 20, the first cutting tip 21a side comprises: main shaft 22a can be equipped with the first cutting tip 21a on it with freely loading and unloading; With shell 23a cylindraceous, it supports this main shaft 22a and this main shaft 22a can rotate, and shell 23a comprises the not shown drive source of drive shaft 22a rotation.In machining cell 20, complete incisory second blade side constitutes too, and it comprises shell 23b etc.
In addition, the first cutting tip 21a and second cutting tip are the cutting grinding tools as thin as a wafer with general toroidal shape.In present embodiment 1, the first cutting tip 21a that hemisect is used uses than the complete thicker blade of incisory second cutting tip.
As shown in Figure 2, image unit 12 is arranged on the sidepiece of shell 23a, image unit 12 is microscopes that CCD camera etc. is installed, this CCD camera is taken the surface that remains on the machined object W on the holding unit 11, image unit 12 be used for the first cutting tip 21a with respect to should cut cut apart preset lines the calibration of location usefulness.
Holding unit 11 has maintenance face 11a, and described maintenance face 11a keeps the machined object W of the wafer-like of the state that becomes one through retainer belt T and framework F, and as shown in Figure 2, holding unit 11 is connected with drive source 13 and can rotates.Drive source 13 is fixed on the mobile foundation 14.
Guidance panel 30 is contact type panel structures, it is provided in the easy observation and maneuverable position in the housing of processing unit (plant) 10, under the control of the control module 40 that is built in processing unit (plant) 10, guidance panel 30 is except showing the captured image of image unit 12, also be also used as and show the display floater follow the required various information that processing handles etc., and carry out key demonstration etc., described key demonstration is used to carry out the required input operations such as processing conditions setting of machining cell 20.
At this, processing unit (plant) 10 comprises X-axis mobile unit 50, Z axle mobile unit 60 and the y-axis shift moving cell 70 that is used to carry out the required feed motion of stock removal action.Fig. 2 represents the topology example with respect to the feed mechanism of the first cutting tip 21a, but also has same spline structure symmetrically with respect to the feed mechanism of second cutting tip.
X-axis mobile unit 50 is used for by mobile foundation 14 is moved along X-direction, and holding unit 11 is processed feeding with respect to the first blade 21a of machining cell 20 along X-direction.X-axis mobile unit 50 has: be provided in ball-screw 51, the impulse motor 52 that is connected with an end of ball-screw 51 on the X-direction and be parallel to the pair of guide rails 53 that ball-screw 51 ground are arranged, be combined with the not shown nut that is arranged on mobile foundation 14 bottoms on ball-screw 51.Ball-screw 51 constitutes and is driven by impulse motor 52 and rotate, and mobile foundation 14 is being guided along X-direction by guide rail 53 thereupon and moving.
Z axle mobile unit 60 is used for moving along Z-direction with respect to wall portion 16 by the support 15 of the shell 23a that makes the supporting first blade 21a, make the first blade 21a lifting of machining cell 20, thereby control is to the approach of machined object W.Z axle mobile unit 60 has: be provided in ball-screw 61 on the Z-direction on a face of wall portion 16, make the impulse motor 62 that this ball-screw 61 rotates and be parallel to the pair of guide rails 63 that ball-screw 61 ground are arranged, the not shown nut and the ball-screw 61 of support 15 inside screw.Support 15 constitutes: by being driven by impulse motor 62, ball-screw 61 rotates, and together everywhere, support 15 is being guided along the Z-direction lifting by guide rail 63 therewith, and the first cutting tip 21a that is supported on support 15 is also along the Z-direction lifting.
Y-axis shift moving cell 70 is used for coming the first blade 21a of machining cell 20 is carried out index feed with respect to holding unit 11 along Y direction by wall portion 16 is moved along Y direction, and wherein said wall portion 16 is through the shell 23a of the support 15 supportings first blade 21a.Y-axis shift moving cell 70 has: be provided in ball-screw 71, the impulse motor 72 that is connected with an end of ball-screw 71 on the Y direction and be parallel to the pair of guide rails 73 that ball-screw 71 ground are arranged, be combined with the not shown nut of the inside that is arranged on mobile foundation 17 on ball-screw 71, described mobile foundation 17 forms as one with wall portion 16.Ball-screw 71 constitutes and is driven by impulse motor 72 and rotate, and mobile foundation 17 is being guided along Y direction by guide rail 73 thereupon and moving.
At this substep cutting action of 10 couples of machined object W of processing unit (plant) of present embodiment 1 is described.In the processing unit (plant) 10 of present embodiment 1, use the first cutting tip 21a to carry out moving with the hemisect that predetermined approach forms cutting slot along cutting apart preset lines from the surface of machined object W, and use second cutting tip that the cutting slot that has carried out hemisect is partly cut entirely concurrently with this hemisect action, thus that machined object W is separated by each device.
At first, utilize the incision feeding of Z axle mobile unit 60, the first cutting tip 21a that makes at a high speed rotation is cut among the machined object W on the holding unit 11 with predetermined penetraction depth, utilize 50 pairs of holding units 11 of X-axis mobile unit to process feeding along X-direction simultaneously, thereby thus the preset lines of cutting apart on the machined object W is carried out machining and formed the cutting slot that hemisection is slit into respect to the first cutting tip 21a of machining cell 20.About the unidirectional ensuing machining of cutting apart preset lines, then, come similarly to carry out repeatedly by utilizing y-axis shift moving cell 70 to carry out index feed along Y direction with the amount of cutting apart the preset lines width with respect to 11 couples first cutting tip 21a of holding unit.In addition, for unidirectional all cut apart that preset lines has formed hemisect and cutting slot after, rotation by holding unit 11 makes machined object W half-twist, utilize the first cutting tip 21a to cut apart preset lines and carry out same machining repeatedly, thereby form the cutting slot that hemisection is slit into for newly being provided on the X-direction all.
Cut entirely concurrently along cutting apart the hemisect action that preset lines carries out with this first cutting tip 21a that utilizes, in the described full cutting, second cutting tip that the incision feeding by Z axle mobile unit on one side makes rotation at a high speed is cut among the machined object W on the holding unit 11 with predetermined penetraction depth, by the X-axis mobile unit holding unit 11 is processed feeding with respect to second cutting tip along X-direction on one side, the cutting slot that the hemisection on the machined object W is slit into carries out machining thus.The full cutting of the cutting slot that is slit into about unidirectional ensuing hemisection then by utilizing the y-axis shift moving cell to carry out index feed along Y direction with the amount of cutting apart the preset lines width with respect to 11 pairs second cutting tips of holding unit, similarly carries out repeatedly.In addition, after the cutting slot that is slit into for unidirectional all hemisections has carried out full cutting, rotation by holding unit 11 makes machined object W half-twist, utilize second cutting tip that the intact cutting slot of hemisect that newly is provided on the X-direction is carried out same full cutting processing repeatedly, thereby be divided into device one by one.
Next the structure of the control system that the processing unit (plant) 10 of present embodiment 1 is had is described.Fig. 3 is the general block diagram of topology example of the control module 40 that had of processing unit (plant) 10 of expression present embodiment 1.Control module 40 constitutes based on microprocessor 41, and described microprocessor 41 comprises the arithmetic processing apparatus that is made of for example CPU etc. and ROM, RAM etc. and is used for being responsible for the integral body control of processing unit (plant) 10.Machining cell 20, X-axis mobile unit 50, y-axis shift moving cell 70 and Z axle mobile unit 60 are connected with microprocessor 41, control actions such as processing action and shift action by this microprocessor 41.In addition, microprocessor 41 reads the demonstration information required with respect to guidance panel 30 from storage part 42 and panel display frame storage part 43, and through display control unit 44 control displaying contents, and analyze the input information on guidance panel 30, be instructed to operate, for the action control of each several part with show control etc.Store the display frame information to guidance panel 30 in panel display frame storage part 43, this display frame information setting has the display pattern of operated key corresponding with various patterns etc.In the present embodiment, as one in this display frame information, store processing conditions described later in the panel display frame storage part 43 and set the basic display pattern-information that picture uses and the various image displaying information of distortion usefulness thereof.
In addition, during 41 pairs of image units of microprocessor 12 control calibration and the shooting action of joint-cutting when checking, and carry out the processing controls of the image information that image unit 12 photographs.Processing controls as this image information, carry out such control: the image information that image unit 12 is photographed directly is stored in the storage part 42, perhaps will utilize 45 pairs of image informations of image processing part to carry out data that image handles etc. and be stored in the storage part 42.
The demonstration example of the guidance panel 30 of present embodiment 1 then is described.Fig. 4 is illustrated in the front view that the processing conditions that shows on the guidance panel 30 when utilizing this processing unit (plant) 10 to carry out cutting is step by step set an example of picture.Guidance panel 30 probably is made of primary area (main area) 31 and soft key panel (software keyboard area) 32, in predetermined menu screen, when selecting the incisory processing conditions of operation substep to set pattern, under the control of microprocessor 41 and display control unit 44, as shown in Figure 4, in the primary area 31 of guidance panel 30, set picture as the incisory processing conditions of substep, be provided with in the lump simultaneously and show input area 33 and image displaying zone 34.
Here, the left side that for example the occupies primary area 31 roughly input area 33 of half is that a plurality of input field 33a~331 are aggregated into the zone that vertical row are arranged demonstration, and described a plurality of input field 33a~331 are used to accept to carry out the input as each required processing conditions of the processing of substep cutting.Input area 33 comprises specifically: the horizontal stroke corresponding with the shape of workpiece (machined object W), the very little input field 33a~33c of linear foot; Input field 33d, the 33e at each groove CH1, CH2 of the branch tolerance (index feed amount) of y-axis shift moving cell 70; Input field 33f, the 33g of rotating speed relevant and cutting residual volume (amount of feeding of cutting tip) with Z1 blade (the first cutting tip 21a); Input field 33h, the 33i of rotating speed relevant and cutting residual volume (amount of feeding of cutting tip) with Z2 blade (second cutting tip); With workpiece (machined object W) thickness and relevant input field 33j, the 33k of band T thickness; And with the relevant input field 331 of feed speed (processing feed speed) of 50 pairs of holding units 11 of X-axis mobile unit.
On the other hand, the right side that for example occupies primary area 31 roughly half image displaying zone 34 are zones of the content of each processing conditions in the cutting of performance substep in the display set that carries out with image displaying.Under the situation of present embodiment 1, the image displaying as showing in the image displaying zone 34 for example comprises: the circular planar form of expression workpiece (machined object W) or image displaying 34a, the 34b of quadrangular plan shape; Be marked on these image displayings 34a, 34b image displaying 34c, 34d last, that form by the dimension line of planar dimension of expression workpiece (machined object W); And the image displaying 34e, the 34f that are marked among image displaying 34a, the 34b, form by the dimension line of the Y-axis index feed amount of expression each groove CH1, CH2.In addition, as the image displaying that shows in this image displaying zone 34, for example comprise: image displaying 34g~34k, their performances comprise the cross-section structure separately that adds the Ministry of worker of Z1 blade (the first cutting tip 21a), Z2 blade (second cutting tip), holding unit 11, workpiece (machined object W) and band T; The image displaying 341, the 34m that are marked among image displaying 34g, the 34h, form by the arrow of the rotating speed of expression Z1 blade (the first cutting tip 21a) and Z2 blade (second cutting tip); Be marked on image displaying 34g, 34h under, the image displaying 34n, the 34o that form by the dimension line of the cutting residual volume of expression Z1 blade (the first cutting tip 21a) and Z2 blade (second cutting tip); The image displaying 34p that is marked among the image displaying 34i, forms by the arrow of the feed speed of expression holding unit 11; And be marked on image displaying 34j, 34k last, by expression workpiece (machined object W) and the image displaying 34q, the 34r that are with the dimension line of the thickness of T to form.
In addition, operating the processing conditions setting picture that is presented on the primary area 31 by the selection of processing conditions setting pattern is that basic processing conditions is set picture, and its mode with cutting process is step by step set such image displaying accordingly for: Z1 blade (the first cutting tip 21a) is that hemisect state, Z2 blade (second cutting tip) are the full cut state that is cut into band T to workpiece (machined object W).
In addition, set in picture at the incisory processing conditions of this substep, also show connecting line 35a~35k in the lump simultaneously, connecting line 35a~35k couples together each input field 33a~331 in the input area 33 with corresponding image displaying in the image displaying zone 34.Promptly, connecting line 35a connects the image displaying 34c on input field 33a, 33b and image displaying 34a, the 34b, connecting line 35b connects input field 33c and the image displaying 34d that is marked on image displaying 34a, the 34b, connecting line 35c connects input field 33d and the image displaying 34e that is marked among image displaying 34a, the 34b, and connecting line 35d connects input field 33e and the image displaying 34f that is marked among image displaying 34a, the 34b.
In addition, connecting line 35e connects input field 33f and the image displaying 341 that is marked among the image displaying 34g, connecting line 35f connects input field 33g and the image displaying 34n that is marked under the image displaying 34g, connecting line 35g connects input field 33h and the image displaying 34m that is marked among the image displaying 34h, and connecting line 35h connects input field 33i and the image displaying 34o that is marked under the image displaying 34h.In addition, connecting line 35i connects input field 33j and the image displaying 34q that is marked on the image displaying 34j, connecting line 35j connects input field 33k and the image displaying 34r that is marked on the image displaying 34k, and connecting line 35k connects input field 331 and the image displaying 34p that is marked among the image displaying 34i.
In addition, in the right hurdle in primary area 31, show definite key 36a, enter key 36b and ESC Escape 36c etc.Determine that key 36a is used for determining that final processing conditions sets the key of pressing under the input data conditions in the picture.Enter key 36b is used for determining the key pressed under the situation to the numeric data of input field 33a~331 inputs temporary transient.ESC Escape 36c is used for forwarding the key of pressing under the situation of other pattern pictures to from processing conditions setting picture.
In addition, the soft key panel 32 in the guidance panel 30 is the zones that show desirable keyboard with the selection operation of function switching push button 37 accordingly in the mode that can operate.In Fig. 4, represented to show that by the operation of the digital load button 37a in the function switching push button 37 0~9 numerical key such as grade 38 is to carry out the example of numeric data input.In addition, if other buttons in the operating function switching push button 37 then also can carry out literal input etc.In addition, on soft key panel 32, also show cursor and move and import control button 39.
Thus, set in the picture at the incisory processing conditions of substep, carry out like this when the numeric data of each processing conditions of input: desirable input field 33a~331 in the input area 33 are specified in operation that touch to specify or move and import by cursor control button 39, as shown in Figure 4, import desirable numeric data by the operation of numerical key 38, and press enter key 36b or definite key 36a.When such numeric data input, in the primary area 31 of guidance panel 30, it or not the input field that only shows numeric data, but be provided with in the lump and show the input area 33 that is arranged with a plurality of input field 33a~331 that are used for numeric data input, with the image displaying zone 34 that shows the content of processing conditions with image displaying 34a~34r, and each input field 33a~331 and corresponding image displaying couple together by connecting line 35a~35k and show, so the time to input field 33a~331 input value data, compare with the literal performance in the input area 33, the content of its processing conditions is more readily understood by image displaying 34a~34r, can reduce the input error of numeric data.
For example the time to input field 33g input value data, be shown as the content of the processing conditions that this input field 33g of " Z1 cutting residual volume (highly) (mm) " sets by literal, corresponding with image displaying 34n as can be known by following the trail of connecting line 35f as dimension line, by observing this image displaying 34n, can visually easily discern this is to set the hurdle of Z1 blade (the first cutting tip 21a) to the amount of feeding of workpiece (machined object W), thereby can promote correct numeric data input.To other input fields 33a~33f and 33h~331 input value data the time too.
In addition, if each input field is configured near the pairing image displaying the position, then also can omit connecting line, according to present embodiment 1,, a plurality of input field 33a~331 can be concentrated and line up as input area 33 by using connecting line 35a~35k, as long as carry out the input operation of numeric data successively according to this arrangement, compare with the situation of decentralized configuration, comprise that it is good that input operation all becomes in the specifying in of input field.
In addition, in order easily to judge the correctness of the numeric data of being imported in input field 33a~331 of setting picture by aforesaid processing conditions, so the control module 40 of the processing unit (plant) 10 of present embodiment 1 is controlled the demonstration of display floater 30 in the following manner: be input to numeric data in input field 33a~331 and change the state of the image displaying 34a~34r in the image displaying zone 34 in linkage, simply.At this for the purpose of simplifying the description, the example to cutting residual volume (highly) in the various image displayings, Z1 blade (the first cutting tip 21a) and Z2 blade (second cutting tip) describes.
In order roughly to judge the correctness of the numeric data relevant, as long as know Z1 blade and the approximate location of Z2 blade on Z-direction with the cutting residual volume of the amount of feeding of representing Z-direction.Therefore, as the image displaying data that add Ministry of worker place that should be presented in the image displaying zone 34, as shown in Figure 5, as long as can free selectively prepare four kinds of different patterns 1~4 of display position.The such pattern example of pattern 1 expression: image displaying 34g, the 34h of expression blade are cut among the image displaying 34i of expression workpiece more shallowly.Pattern 2 presentation videos are described the roughly middle pattern example that 34g, 34h are cut into image displaying 34i.The such pattern example of pattern 3 expressions: image displaying 34g, 34h cut entirely to the image displaying 34i of expression workpiece, and are cut into the image displaying 34k of expression band T.Pattern 4 presentation videos describe 34g, 34h be not cut into the expression workpiece image displaying 34i in the pattern example.
Image displaying in the form of these patterns 1~4 can freedom selectively be stored in the panel display frame storage part 43 with data instance in advance as its distortion, selects required pattern under the judgement indication of microprocessor 41.In addition, about these patterns 1~4, around the Z1 blade, select the image displaying of pattern 2 to be used for basic processing conditions setting picture, around the Z2 blade, select the image displaying of pattern 3 to be used for basic processing conditions setting picture, and be used for demonstration shown in Figure 4.
Here, in the numeric data to input field 33a~331 inputs, establishing Z1 cutting residual volume is Z1, Z2 cutting residual volume is Z2, and the thickness of workpiece is W, and tape thickness is T, for with the demonstration change control example of the image displaying of the numeric data imported interlock, describe with reference to Fig. 6~Fig. 8.Fig. 6 is the general flowchart of the operation control example of the incisory processing conditions of expression substep when setting, Fig. 7 is the general flowchart of the subprogram of the input data judgment processing example in the presentation graphs 6, the general principal view of the demonstration example of the guidance panel when Fig. 8 is the input of the vicious numeric data of expression.
At first in the initial menu picture of guidance panel 30, when selecting the incisory processing conditions of substep to set pattern (step S1: be), microprocessor 41 accesses the video data that the incisory basic processing conditions of corresponding substep is set picture from panel display frame storage part 43, shows as shown in Figure 4 the processing conditions setting picture (step S2) that comprises input area 33, image displaying zone 34 and connecting line 35a~35k by display control unit 44 on the primary area 31 of guidance panel 30.In this picture showed, the input of the appointment of required input field 33a~331 and the numeric data by numerical key 38 etc. was carried out repeatedly, up to pressing enter key 36b (step S3: be step S4: be step S5).When the input of numeric data being arranged and supress enter key 36b for all input field 33a~331 (step S5: be), microprocessor 41 is carried out input data judgment processing (step S6) according to the numeric data of being imported.When judging through this input data judgment processing that numeric data by operator's input is correct and supressing (step S7: be) when determining key 36a, finish the setting of the incisory processing conditions of substep.
At this, in the input data judgment processing of step S6, as shown in Figure 7, judge that at first whether cutting residual volume Z1 is greater than tape thickness T (step S11).If Z1 is not more than T (step S11: not), then be the numeric data that is cut into band T, so will change to pattern 3 (step S12) from basic pattern 2 with the demonstration of relevant image displaying on every side of Z1 blade.On the other hand, if Z1〉T (step S11: be), judge that then cutting residual volume Z1 is whether less than the thickness of workpiece and band and (T+W) (step S13).If T+W is not more than Z1 (step S13: not), then be the numeric data that workpiece is not had fully incision, so will change to pattern 4 (step S14) from basic pattern 2 with the demonstration of relevant image displaying on every side of Z1 blade.If T+W〉Z1 (step S13: be), then the hemisect as the substep cutting is in the normal scope, keeps basic pattern 2 with the demonstration of relevant image displaying on every side of Z1 blade.
Equally, judge that whether cutting residual volume Z2 is greater than tape thickness T (step S15).If Z2 is not more than T (step S15: not), judge that then cutting residual volume Z2 is whether less than the thickness of workpiece and band and (T+W) (step S16).If T+W is not more than Z2 (step S16: not), then be the numeric data that workpiece is not had fully incision, so will change to pattern 4 (step S17) from basic pattern 3 with the demonstration of relevant image displaying on every side of Z2 blade.On the other hand, at T ≦ Z2 and T+W〉under the situation of Z2 (step S16: be), be the numeric data that is not cut into the hemisect state of band T, so will change to pattern 2 (step S18) from basic pattern 3 with the demonstration of relevant image displaying on every side of Z2 blade.And, if T〉and Z2 (step S15: be), then the full cutting as the substep cutting is in the normal scope, keeps basic pattern 3 with the demonstration of relevant image displaying on every side of Z2 blade.
In addition, have at the pattern relevant under the situation of change, connect image displaying and also change in linkage with the change of the image displaying display position of following pattern to change with the position of the connecting line 35e~35h of corresponding input field with image displaying.As long as this control is control in the following manner: preestablish the coordinate position of the tie point on the picture respectively at the image displaying of each pattern, and connect the tie point of corresponding input field.
In addition, under the situation of the image displaying under the change pattern that has carried out as step S12, S14, S17, S18, the operator is used to change the input of numeric data of the numeric data of corresponding input field.In the input (step S19) that the numeric data of utilizing numerical key 38 grades is arranged and supress under the situation of enter key 36b (step S20), carry out the later input data judgment processing of step S11 once more again.(step S19: not), return step S7, wait for pressing and determine key 36a when the image displaying under the change pattern as step S12, S14, S17, S18 disappears, no longer includes the new input of numeric data.
Fig. 8 is illustrated in the incisory processing conditions of basic substep shown in Figure 4 and sets in the picture, imported the numeric data of bit-errors for example and supress input data judgment processing under the situation of enter key 36b, step S6 example as a result in the part of input field 33a~331.For example, the image displaying side corresponding with the numeric data " 0.01 " in being input to input field 33g is according to step S11: not and the processing of step S12, do not show the image displaying demonstration that changes to pattern 3 from the image displaying of basic pattern originally 2.In addition, the image displaying side corresponding with the numeric data " 0.5 " in being input to input field 33i is not according to step S15: not, step S16: not and the processing of step S17, do not show the image displaying demonstration that changes to pattern 4 from the image displaying of basic pattern originally 3.
The change of the state (position) by the corresponding image displaying of such numeric data with being imported, the operator visually can easily notice: the Z1 blade that should carry out hemisect is in full cut state, the Z2 blade that should cut entirely is in cut-in without ball and cuts state, thereby, the numeric data of being imported wrong (digit order number mistake), thus re-entering of value corresponding data promoted.At this moment, about the input field of vicious numeric data, track the input field side by utilizing connecting line from after changing image displaying side, thereby can easily differentiate the input field of this vicious numeric data.In the example depicted in fig. 8, by following the trail of connecting line 35f from the image displaying 34n that is cut into band T with the dimension line performance, the numeric data of input field 33g is wrong as can be known, equally, by following the trail of connecting line 35h from the image displaying 34o with the dimension line performance that floats from workpiece, the numeric data of input field 33i is wrong as can be known.
So, re-enter the numeric data of these input fields 33g, 33i, and press enter key 36b, at this moment the input data judgment processing of step S6 as a result example become basic processing conditions shown in Figure 4 and set display pattern example in the picture, can determine to import data by determining key 36a.
In addition, at Z1 blade and Z2 blade all is under the setting of hemisect state, which which wanting to know under the dark shallow situation of approach, as long as compare the size of both cutting residual volumes, and one side is shown for the image displaying of pattern 1 according to its result, making the opposing party is the image displaying demonstration of pattern 2, represents both different getting final product of set condition.
In addition, for example understand the change example of the image displaying relevant here with the cutting residual volume of blade, in addition, for example for the image displaying relevant with workpiece, except the image displaying of basic square pattern, the image displaying of laterally long pattern and the data in advance of the image displaying of the pattern of vertical length can be stored in the panel display frame storage part 43, so that the state of image displaying (shape) is controlled with the mode that the size that is input to the numeric data among input field 33b, the 33c changes in linkage.The image displaying that divides tolerance about expression, also be except the image displaying of basic square pattern, the image displaying of laterally long pattern and the data in advance of the image displaying of the pattern of vertical length are stored in the panel display frame storage part 43, so that the state of image displaying (shape) is controlled with the mode that the size that is input to the numeric data among input field 33d, the 33e changes in linkage.
(embodiment 2)
In the present embodiment 2, as processing unit (plant), represented to be applied to have the application example of the laser processing device of machining cell, the laser light irradiation unit that described machining cell has machined object irradiated with pulse laser light replaces cutting tip.The holding unit of machined object, with respect to the X-axis mobile unit of holding unit, can similarly constitute with the situation of embodiment 1, so omit to the structure of the laser processing device of present embodiment 2 and the diagram and the explanation of control system with respect to Z axle mobile unit, y-axis shift moving cell and the control system of laser light irradiation unit.
The demonstration example of the guidance panel 80 of present embodiment 2 here is described.Fig. 9 is the front view that the processing conditions that shows on the guidance panel 80 when being illustrated in the laser processing device that utilizes present embodiment 2 machined object being carried out Laser Processing is set an example of picture.In addition, be equivalent to omit the parts such as enter key on the right side in soft key panel and the primary area among Fig. 9 etc. of guidance panel 80 of present embodiment of guidance panel 30 in expression.
In the predetermined menu screen of guidance panel 80, when selecting the operation processing conditions to set pattern, same with the situation of embodiment 1, under the control of microprocessor and display control unit, as shown in Figure 9, the processing conditions used as Laser Processing in the primary area 81 of guidance panel 80 is set picture, is provided with in the lump simultaneously and shows input area 83 and image displaying zone 84.
Here, the left side that for example the occupies primary area 81 roughly input area 83 of half is that a plurality of input field 83a~83f are aggregated into the zone that vertical row are arranged demonstration, and described a plurality of input field 83a~83f are used to accept to carry out the input of each required processing conditions of Laser Processing.Input area 83 comprises specifically: the horizontal stroke corresponding with the shape of workpiece (machined object W), the very little input field 83a~83c of linear foot; Input field 83d, the 83e at each groove CH1, CH2 of the branch tolerance (index feed amount) of y-axis shift moving cell; Be used for determining the input field 83g of cut mode; And the input field 83h relevant with the spacing track width of Laser Processing.In addition, in input area 83, have cut mode and set picture button 82.
On the other hand, the right side that for example occupies primary area 81 roughly half image displaying zone 84 are zones of the content of each processing conditions in the demonstration concentrated expression Laser Processing of carrying out with image displaying.Under the situation of present embodiment 2, the image displaying as showing in the image displaying zone 84 for example comprises: the circular planar form of expression workpiece (machined object) or image displaying 84a, the 84b of quadrangular plan shape; Be marked on these image displayings 84a, 84b image displaying 84c, 84d last, that form by the dimension line of planar dimension of expression workpiece (machined object); And the image displaying 84e, the 84f that are marked among image displaying 84a, the 84b, form by the dimension line of the Y-axis index feed amount of expression each groove CH1, CH2.In addition, the image displaying as showing in this image displaying zone 84 for example comprises: the image displaying 84g at the spacing track edge of expression workpiece (machined object); Be marked on the image displaying 84h that this image displaying 84g goes up, formed by the dimension line of expression spacing track width.
And, set in the picture the also demonstration simultaneously in the lump of connecting line 85a~85e that each the input field 83a~83g in the input area 83 and corresponding image displaying in the image displaying zone 84 are coupled together at processing conditions that this Laser Processing is used.Promptly, connecting line 85a connects the image displaying 84c on input field 83a, 83b and image displaying 84a, the 84b, connecting line 85b connects input field 83c and the image displaying 84d that is marked on image displaying 84a, the 84b, connecting line 85c connects input field 83d and the image displaying 84e that is marked among image displaying 84a, the 84b, connecting line 85d connects input field 83e and the image displaying 84f that is marked among image displaying 84a, the 84b, and connecting line 85e connects input field 83g and image displaying 84h.
Thus, set in the picture at the processing conditions that Laser Processing is used, when the numeric data of each processing conditions of input, identical with the situation of embodiment 1, carry out as follows: touch to specify or specify desirable input field 83a~83g in the input area 83 by the operation that cursor moved and imported control button, as shown in Figure 9, import desirable numeric data, and press enter key or definite key by the operation of numerical key or text button.When such numeric data input, in the primary area 81 of guidance panel 80, it or not the input field that only shows numeric data, but be provided with in the lump and show the input area 83 that is arranged with a plurality of input field 83a~83g that are used for numeric data input, with the image displaying zone 84 that shows the content of processing conditions with image displaying 84a~84h, and each input field 83a~83g and corresponding image displaying couple together by connecting line 85a~85e and show, so the time to input field 83a~83g input value data, compare with the literal performance in the input area 83, the content of its processing conditions is more readily understood by image displaying 84a~84h, can reduce the input error of numeric data.
In Fig. 9, represented to have selected to specify the picture example of calibration subsequence cut mode (SUB_SEQ) here, as the cut mode in the Laser Processing.This calibration subsequence cut mode is such cooked mode: will be divided into many line of cut ground from the laser beam of laser light illumination unit and shine successively in the bigger spacing track edge of machined object, thereby form groove (forming groove by ablating).
So, set in the picture at the processing conditions shown in Figure 9 that Laser Processing is used, when pressing cut mode setting picture button 82, under the control of microprocessor and display control unit, as shown in figure 10, in the primary area 81 of guidance panel 80, the processing conditions of using as the SUB_SEQ pattern is set picture, is provided with in the lump simultaneously and shows input area 93 and image displaying zone 94.At this, in the SUB_SEQ pattern, need be at the output of intramarginal every line of cut input of spacing track laser, frequency, defocus amount, the amount of feeding and the scale division value of regulating the center apart from spacing track, in input area 93, form with table shows input field 93a~93f, and input field 93a~93f is used for every above-mentioned project of input at six lines of cut of the No.1~No.6 that for example represents the cutting order.
In addition, in image displaying zone 94, on the image displaying 94a at expression spacing track edge, indicate the expression spacing track and regulate the image displaying 94b of center, and show the image displaying 94c~94h of expression line of cut, described line of cut has the numeral 1~6 of expression cutting order respectively, and corresponding with the position of leaving spacing track adjusting center.In addition, go back display image and describe 94i in image displaying zone 94, this image displaying 94i becomes the pointer of expression apart from the positive negative direction of the scale division value of spacing track adjusting center.
And, set the processing conditions of picture and set in the picture becoming cut mode that this SUB_SEQ pattern uses, the also demonstration simultaneously in the lump of connecting line 95a~95f that the input field 93a~93f of every line of cut in the input area 93 and corresponding image displaying 94c~94h in the image displaying zone 94 are coupled together.Promptly, connecting line 95a connects the image displaying 94f of input field 93a that the line of cut of No.1 uses and the line of cut of representing to indicate numeral 1, connecting line 95b connects the image displaying 94a of input field 93b that the line of cut of No.2 uses and the line of cut of representing to indicate numeral 2, connecting line 95c connects the image displaying 94e of input field 93c that the line of cut of No.3 uses and the line of cut of representing to indicate numeral 3, connecting line 95d connects the image displaying 94b of input field 93d that the line of cut of No.4 uses and the line of cut of representing to indicate numeral 4, connecting line 95e connects the image displaying 94d of input field 93e that the line of cut of No.5 uses and the line of cut of representing to indicate numeral 5, and connecting line 95f connects the image displaying 94c of input field 93f that the line of cut of No.6 uses and the line of cut of representing to indicate numeral 6.
Thus, set in the picture at the processing conditions that the SUB_SEQ pattern is used, when the numeric data of each processing conditions of input, carry out as follows: touch to specify or specify the input field 93a~93f of the desired numbering in the input area 93 by the operation that cursor moved and imported control button, as shown in figure 10, import desirable numeric data by the operation of numerical key, and press enter key or definite key.When such numeric data input, in the primary area 81 of guidance panel 80, it or not the input field that only shows numeric data, but be provided with in the lump and show the input area 93 that is arranged with a plurality of input field 93a~93f that are used for numeric data input, with the image displaying zone 94 that shows the content of processing conditions with image displaying 94a~94f, and the input field 93a~93f of each numbering and the image displaying 94a~94f of corresponding cutting line couple together by connecting line 95a~95f and show, so the time to input field 93a~93f input value data, the content of its processing conditions (line of cut position) is more readily understood by image displaying 94a~94f, can reduce the input error of numeric data.
In addition, in order to set the correctness that picture is easily judged the numeric data of being imported by aforesaid processing conditions, in the laser processing device of present embodiment 2, also the situation with embodiment 1 is identical, not shown control module is controlled the demonstration of display floater 80 in the following manner: promptly, and state, for example position of changing the image displaying 94a~94f in the image displaying zone 94 in linkage with the numeric data that is input among input field 93a~93f.
Figure 11 is illustrated in the processing conditions that basic SUB_SEQ pattern shown in Figure 10 uses and sets in the picture, in the part of input field 93a~93f, imported the numeric data of bit-errors for example and supress under the situation of enter key, input data judgment processing example as a result.For example, image displaying 94e with for scale division value and the input field 93c of the numeric data " 0.2 " of bit-errors ground input institute is corresponding, this image displaying 94e shows the image displaying demonstration that changes to position shown in Figure 11 from the image displaying of position shown in basic Figure 10.
The change of the state (position) by such image displaying corresponding with the numeric data of input, the operator can visually easily notice: about the 3rd line of cut, its scale division value is not in the scope of spacing track width (leaving 0.05mm from the center), and be in the state that breaks away from spacing track, thereby can notice that there be wrong (bit-errors) in the numeric data of being imported, has promoted re-entering of value corresponding data thus.At this moment,, track the input field side from after changing image displaying side, can easily differentiate the input field of this vicious numeric data by utilizing connecting line about the input field of vicious numeric data.
So, re-enter input field 93c scale division value numeric data and press enter key, at this moment import the data judgment processing as a result example become basic processing conditions shown in Figure 10 and set display pattern example in the picture, can determine to import data by determining key.
The invention is not restricted to above embodiment, as long as in the scope that does not break away from purport of the present invention, can carry out various distortion.Promptly, though in embodiment 1,2, processing conditions during substep cut mode by cutting tip is set processing conditions that the SUB_SEQ pattern of picture example and laser processing device uses and is set the picture example and be illustrated, but the processing conditions when being not limited to such cooked mode is set picture, and the processing conditions in the time of also can similarly using various cooked mode is certainly set picture.In addition, the image displaying that shows in the image displaying zone also is not limited to examples shown, as long as can also can suitably change certainly in the mode of easy understanding to the content that the operator presents processing conditions.

Claims (3)

1, a kind of processing unit (plant), this processing unit (plant) comprises: the holding unit with the maintenance face that keeps machined object; The machining cell that the machined object that remains on this holding unit is processed; Guidance panel with the processing conditions of importing this machining cell is characterized in that,
The aforesaid operations panel shows that input area, image displaying zone and connecting line set picture as processing conditions, is arranged with a plurality of input fields of the input of the numeric data that is used to accept each processing conditions in the described input area; Described image displaying zone shows the content of each processing conditions with image displaying; Described connecting line couples together each input field in the above-mentioned input area with corresponding image displaying in the above-mentioned image displaying zone.
2, processing unit (plant) as claimed in claim 1 is characterized in that,
Aforesaid operations panel and numeric data in being input to above-mentioned input field change the corresponding image displaying in the above-mentioned image displaying zone in linkage.
3, processing unit (plant) as claimed in claim 1 or 2 is characterized in that,
What above-mentioned machining cell had an at a high speed rotation is divided into above-mentioned machined object the cutting tip of device one by one,
This processing unit (plant) comprises: Z axle mobile unit, and it moves above-mentioned machining cell on the Z-direction vertical with respect to above-mentioned maintenance face; The y-axis shift moving cell, it is that Y direction is carried out index feed to above-mentioned machining cell at the axis direction of above-mentioned cutting tip; With the X-axis mobile unit, its to above-mentioned holding unit with the X-direction of Z-direction and Y direction quadrature on process feeding,
The above-mentioned processing conditions that shows on the aforesaid operations panel comprises: as size, the amount of feeding of above-mentioned Z axle mobile unit, the amount of movement of above-mentioned y-axis shift moving cell and the processing feed speed of above-mentioned X-axis mobile unit of the machined object of object.
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