CN101419896B - Long arc discharge lamp and ultraviolet radiation device with the same - Google Patents
Long arc discharge lamp and ultraviolet radiation device with the same Download PDFInfo
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- CN101419896B CN101419896B CN 200810170998 CN200810170998A CN101419896B CN 101419896 B CN101419896 B CN 101419896B CN 200810170998 CN200810170998 CN 200810170998 CN 200810170998 A CN200810170998 A CN 200810170998A CN 101419896 B CN101419896 B CN 101419896B
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Abstract
The invention provides a long-arc discharge lamp having a formation which can prevent the cooling sheath from being damaged even if the luminotron is broken when the lamp is started and ultraviolet irradiator having long-arc discharge lamp. Wherein the long-arc discharge lamp comprises a pair of electrodes collocated distantly in the closed space formed in the illuminating part and sealed in the luminotron having luminescent substance; and a protecting tube set on the radial outer flank of the luminotron along the tubular axle of the luminotron to support or get near to said illuminating part; wherein the radial outer flank of said protecting tube is set with a fragment catching body.
Description
Technical field
The present invention relates in order to the drying that will be used in printing ink or coating, the photochemical reaction ultraviolet radiation source of device of hardening of resin processing, or when being used in the crystal liquid substrate that semiconductor substrate, liquid crystal display are used and being exposed, the long arc discharge lamp that adopts as the ultraviolet radiation source of exposure device.
Background technology
This kind light source for ultraviolet ray irradiation, when lighting a lamp, cause the excessive condition of high temperature for fear of discharge lamp, the general known ground that has as the mode that patent documentation 1 for example discloses, in the footpath of discharge lamp towards periphery, set and possess the liquid circulation of allowing in the water cold sleeve of the stream of inside, by allowing cooling fluid circulate in the inside of this water cold sleeve, a cooling discharge lamp is simultaneously lit a lamp and is carried out driver.
Figure 11 is the cutaway view that shows the formation summary of the light source for ultraviolet ray irradiation that possesses water cold sleeve in the past.Light source for ultraviolet ray irradiation, for possessing: radiate ultraviolet straight tube-like discharge lamp A, and with the set water cold sleeve B of mode of the radial outside that surrounds discharge lamp A.Discharge lamp A is to light a lamp from the terminal feeding electric power at two ends, radiates hot line and ultraviolet ray from luminous tube.Water cold sleeve B is for having: the inner tube C of quartz glass system and outer tube D in the dual pipe shape of end-enclosed, near the two ends close to outer tube D, are being connected: in order to allow cooling fluid flow to its inboard admission port E, discharge outlet F.Symbol GA, GB are jut; Symbol H is the tubular filter of the low melting point glass system of absorption hot line; Symbol IA, IB are for locking protuberance; Symbol JA, JB are the tubular interval thing.
In ultraviolet lamp shown in Figure 11, the cooling fluid that imports from admission port E again from discharge outlet F discharge, makes the driving of lighting a lamp of the luminous tube of discharge lamp A by the space between inner tube C and the inner tube D by this under the state that is cooled.
But, in this kind light source for ultraviolet ray irradiation, light a lamp the time when elongated when the accumulation of discharge lamp A, cause the mechanicalness strength decreased because the luminous tube of discharge lamp A is accumulated ultraviolet strain, thus usually can't resist luminous tube when lighting a lamp high pressure conditions and cause breakage.Therefore, find and to produce: for light source for ultraviolet ray irradiation in the past, because the usual pressure of pressure ratio in the luminous tube of discharge lamp when lighting a lamp driving significantly increases, so when the luminous tube of discharge lamp A breaks, the sheet glass of luminous tube can disperse towards being provided in luminous tube water cold sleeve B on every side, be subject to the impact of this sheet glass that disperses, have the problem of water cold sleeve B breakage.
Like this, when the impact of the fragment of the luminous tube that is dispersed, when causing water cold sleeve B damaged, cause the cooling fluid of the inside that is circulated in water cold sleeve B to escape to the inside of exposure device etc., be installed in the precision machinery of the inside of exposure device, be subject to the problem that the cooling fluid infiltration produces injury.
In in recent years, be accompanied by for promote crystal liquid substrate that semiconductor substrate or liquid crystal display use etc. when the fabrication schedule treatment effeciency and must promptly carry out exposure-processed, therefore require to increase the ultraviolet activity that radiates from luminous tube for discharge lamp.For so requirement, owing to must increase and enclose in luminous tube, enclosed volume such as the luminescent substance of mercury etc., so when discharge lamp is lit a lamp driving, make and become superfluous high pressure conditions in the luminous tube, owing to produced easily the situation that luminous tube breaks than more increase in the past, therefore became the problem of the above-mentioned water cold sleeve breakage of easy generation.
No. the 3651094th, patent documentation 1 Japanese patent of invention
Summary of the invention
By above problem, so even the object of the present invention is to provide a kind of possess discharge lamp the luminous tube when driving of lighting a lamp break also can avoid cooling collar also the structure of breakage long arc discharge lamp and possess the ultraviolet radiation device of long arc discharge lamp.
Long arc discharge lamp of the present invention, this long arc discharge lamp possesses: in the formed confined space of illuminating part, pair of electrodes is spaced from each other and disposes and enclose the luminous tube of the quartz glass system of luminescent substance; And; radial outside at this luminous tube; along the above-mentioned illuminating part of tubular axis butt of luminous tube and the protection tube of the quartz glass system of the straight tube-like that sets; the outer surface with above-mentioned illuminating part butt part at above-mentioned protection tube is provided with the long arc discharge lamp that the fragment with conductivity catches body; be accommodated in the inside of cooling collar, this cooling collar possesses the stream of the liquid circulation of allowing
Moreover long arc discharge lamp of the present invention is characterized by: above-mentioned fragment catch body from above-mentioned protection tube with above-mentioned illuminating part butt or spaced apart near part.
Moreover; long arc discharge lamp of the present invention; it is characterized by: above-mentioned protection tube is at butt or near the end of the outer surface minor diameter part that dispose, that external diameter is relatively less of above-mentioned illuminating part; be connected with from the outer surface configuration spaced apart of above-mentioned luminous tube, external diameter larger large-diameter portion relatively, and above-mentioned fragment to catch body be the outer surface that is fixed on this large-diameter portion.
Moreover long arc discharge lamp of the present invention is characterized by: above-mentioned protection tube is formed straight tube-like, allows above-mentioned fragment catch the outer surface that the isolated ring-type sept of body is fixed on this protection tube in order to the outer surface from this protection tube.
In addition, long arc discharge lamp of the present invention, this long arc discharge lamp possesses: in the formed confined space of illuminating part, pair of electrodes is spaced from each other and disposes and enclose the luminous tube of luminescent substance; And; radial outside at this luminous tube; be connected to above-mentioned illuminating part and the protection tube that sets along the tubular axis of luminous tube, it is characterized by: the fragment with conductivity catches body, is connected to being set up with the outer surface of above-mentioned illuminating part butt part of above-mentioned protection tube.
Moreover long arc discharge lamp of the present invention is characterized by: above-mentioned fragment catches body and is formed netted.
Moreover long arc discharge lamp of the present invention is characterized by: above-mentioned fragment catches body and is formed by the stainless steel that contains chromium.
Again moreover, ultraviolet radiation device of the present invention is characterized by: the above-mentioned long arc discharge lamp of putting down in writing is contained in the inside of cooling collar, and this cooling collar possesses the stream of the liquid circulation of allowing.
Again moreover, ultraviolet radiation device of the present invention, it is characterized by: between above-mentioned fragment catches body and above-mentioned cooling collar, catch a plurality of supporters of body in order to support fragment, disposed to be spaced from each other and to be arranged in order in the mode of the long side direction of fragment seizure body.
Again moreover, ultraviolet radiation device of the present invention is characterized by: above-mentioned fragment catches the total length of part in the stream that is stuck in above-mentioned cooling collar that body spreads all over above-mentioned protection tube and arranges.
The invention effect
According to long arc discharge lamp of the present invention; because the radial outside in protection tube is provided with fragment seizure body; so positively catch because the damaged fragment that disperses of luminous tube and protection tube can catch body by fragment; and by the inside that this discharge lamp is configured in cooling collar; with respect to cooling collar fierce the impact occurs owing to can prevent fragment, so can solve the problem of so-called cooling collar breakage.
And, according to long arc discharge lamp of the present invention, because fragment catches body from the butt of protection tube or near the illuminating part part configuration spaced apart of luminous tube, therefore can expect to have following effect.
Suppose fragment to catch body be contact at the butt of protection tube or during near the situation of the illuminating part part of luminous tube.In this case, fragment catches body, owing to absorb the light that radiates from illuminating part, or is subject to coming from the heat transmission of protection tube and luminous tube and becomes the condition of high temperature.Therefore; along with owing to be subject to coming from the heat transmission that the fragment that becomes the condition of high temperature catches body; and the temperature that makes protection tube becomes inhomogeneous; the result that the temperature of the illuminating part of the luminous tube that causes butt or dispose near protection tube also becomes inhomogeneous has the anxiety that gives harmful effect for the life-span of discharge lamp.
Yet; fragment catches body; by from the butt of protection tube or near the illuminating part part configuration spaced apart of luminous tube, because the temperature of the illuminating part of the temperature of protection tube and luminous tube all becomes evenly, so positively avoidance meeting gives the anxiety of harmful effect for life-span of discharge lamp.
Moreover; above-mentioned protection tube; because at butt or near the end of the outer surface minor diameter part that dispose, that external diameter is relatively less of above-mentioned luminous tube; be connected with continuously: from the outer surface configuration spaced apart of above-mentioned luminous tube, external diameter larger large-diameter portion relatively; and it is the outer surface that is fixed on this large-diameter portion that above-mentioned fragment catches body; therefore fragment catches body under the isolated state of the outer surface of protection tube, fragment can be caught body and easily be fixed on the protection tube.
Moreover; above-mentioned protection tube forms straight tube-like; outer surface at this protection tube; because be fixed with: allow above-mentioned fragment catch the isolated ring-type sept of body in order to the outer surface from this protection tube; so fragment catches body under the isolated state of the outer surface of protection tube, fragment can be caught body and easily be fixed on the protection tube.
Again; the fragment that possesses conductivity catches body; when being arranged at the situation of above-mentioned protection tube and outer surface above-mentioned illuminating part butt part for butt; owing to can with the charged homogenizing that gives that fragment catches the body part that is provided with of protection tube, be attached to unevenly the outer surface of protection tube so can prevent atrament.Therefore, the Illumination Distribution that is positioned at tube axial direction of long arc discharge lamp can be maintained at necessarily.
Moreover, by being caught system, fragment reticulates, even the fragment of luminous tube and protection tube reaches in dispersing, also can more positively catch these fragments on a large scale.
Moreover, catch body by fragment and consisted of by the stainless steel that contains chromium, can positively avoid fragment and catch digestion of metallic ion in the body to being circulated in the interior cooling fluid of cooling collar.
Again moreover; according to ultraviolet radiation device of the present invention; because with above-mentioned long arc discharge lamp; be contained in the inside of the cooling collar of the stream that possesses the liquid circulation of allowing; so discharge lamp is when lighting a lamp driving; by allowing liquid circulation in cooling collar, clip butt or can cool off luminous tube near the protection tube that illuminating part sets.
Again moreover, by catching between body and the above-mentioned cooling collar at above-mentioned fragment, catch a plurality of supporters of body in order to support fragment, for being spaced from each other and disposing to be arranged in order the mode that catches the long side direction of body in fragment, even during the situation that the total length of fragment seizure body is grown, catch body to the deflection of vertical direction lower side owing to can prevent fragment, catch body contact cooling collar so can prevent fragment.Thus; even by catching discharge lamp when damaged and the luminous tube that disperses causes fragment seizure body to be impacted with the fragment of protection tube; because this impact is catching body via fragment and can cooling collar not conducted, and occurs damaged so can positively avoid cooling collar.
Again moreover; fragment catch body owing to be and in the stream that is stuck in above-mentioned cooling collar of above-mentioned protection tube the total length of part arrange; even so be accompanied by that luminous tube breaks and during situation that protection tube also breaks; because these fragments positively are captured by fragment catches body, be connected to the device interior that taking out on the cooling collar drawn mechanism etc. so can prevent that the fragment of luminous tube and protection tube from flowing into.
Description of drawings
Fig. 1 (A) be long arc discharge lamp of the present invention the formation summary in the whole cutaway view of long side direction; Fig. 1 (B) is in A-A ' cutaway view radially.
Fig. 2 is a distolateral part amplification view that amplifies long arc discharge lamp shown in Figure 1.
Fig. 3 is formation summary that ultraviolet radiation device of the present invention is described, in the whole cutaway view of long side direction.
Fig. 4 be cooling collar the formation summary in the cutaway view of long side direction
Fig. 5 (A) be illustrate long arc discharge lamp of the present invention another example in the cutaway view of long side direction; Fig. 5 (B) is in B-B ' cutaway view radially,
Fig. 6 be illustrate long arc discharge lamp of the present invention another example in the cutaway view of long side direction.
Fig. 7 be illustrate ultraviolet radiation device of the present invention another example in the cutaway view of long side direction.
Fig. 8 be illustrate ultraviolet radiation device of the present invention another example in the cutaway view of long side direction.
Fig. 9 (A) be illustrate long arc discharge lamp of the present invention another example be in C-C ' cutaway view radially in the whole cutaway view of long side direction: Fig. 9 (B).
Figure 10 be the explanation possess long arc discharge lamp shown in Figure 9 ultraviolet radiation device summary, in the whole cutaway view of long side direction.
Figure 11 is the cutaway view of the formation summary of the light source for ultraviolet ray irradiation that possesses water cold sleeve in the past.
Symbol description
1: long arc discharge lamp
3: ultraviolet radiation device
10: luminous tube
11: illuminating part
12: envelope is ended section
13: electrode
14: metal forming
15: outer lead
20: protection tube
21: minor diameter part
22: large-diameter portion
23: basal component
30: fragment catches body
31: elastic component
32: supporter
40: cooling collar
41: tubular element
42: flow-path constituting body
5: long arc discharge lamp
50: protection tube
52: sept
6: long arc discharge lamp
60: fragment catches body
61: ring-shaped protrusion
Embodiment
Fig. 1 be long arc discharge lamp of the present invention the formation summary in whole cutaway view and the radial cross-section of long side direction.Fig. 2 is a distolateral part amplification view that amplifies long arc discharge lamp shown in Figure 1; Fig. 3 be the explanation ultraviolet radiation device of the present invention the formation summary in the whole cutaway view of long side direction; Fig. 4 be cooling collar the formation summary in the cutaway view of long side direction.
As shown in Figure 1; long arc discharge lamp 1 (below; also only be called discharge lamp); be to make luminous tube 10 and protection tube 20 its central shafts separately as one man be equipped with the dual pipe structure of protection tube 20 at the radial outside of luminous tube 10, be provided with netted fragment with respect to protection tube 20 and catch body 30.
Luminous tube 10 such as being by constitutor such as institute such as ultraviolet material such as seeing through of quartz glass etc., possesses: the bar-shaped envelope that has the straight tube-like illuminating part 11 of confined space S and be connected in the two ends of this illuminating part 11 is ended section 12,12.In the confined space S of illuminating part 11, the pair of electrodes 13,13 by tungsten consists of for being spaced from each other, disposes on the tubular axis of luminous tube 10 in opposite directions, and encloses luminescent substance and the rare gas have such as mercury etc.In the confined space S of illuminating part 11, so that mercury and rare gas, the mercury density in confined space S is 0.002mg/mm
3More than, and the pressure of the rare gas in confined space S is to enclose about 0.1 air pressure.Envelope is ended section 12, is to bury underground by the mode that the metal forming 14 that is made of molybdenum, 14 is extended with the tubular axis along luminous tube 10, utilizes so-called collapsed seal method to seal to end into airtight.Metal forming 14 is connected in the base end part of electrode 13 in front, and is connected in the leading section that ends the extended outer lead 15 in the outside of section 12 towards envelope in base end side.
Luminous tube 10 is in the both ends of illuminating part 11, is formed with towards envelope to end the 11A of oblique cone section, the 11A that section 12,12 its external diameters dwindle gradually, is connecting envelope in the 11A of this oblique cone section, 11A and is ending section 12,12.Be opposite in the 11A of this oblique cone section, dispose pair of electrodes 13,13 each.
The protection tube 20 that so consists of; radial outside in luminous tube 10; minor diameter part 21 is with under butt and even the state near illuminating part 11; the 21A of oblique cone section, 21A are opposite at the illuminating part 11 formed oblique cone 11A of section, 11A, and make large- diameter portion 22,22 be opposite in envelope to end section 12,12 and dispose.By this so that between the 11A of oblique cone section, the 11A of the 21A of oblique cone section, the 21A of protection tube 20 and luminous tube 10, and large- diameter portion 22,22 and envelope end between the section 12,12, spread all over respectively the space that circumferencial direction forms ring-type.
By protection tube 20 butts and even near illuminating part 11; when allowing liquid circulation in the inside of the cooling collar of the radial outside that is installed in protection tube 20 described later; owing to the heat of illuminating part 11 can be dispelled the heat to cooling fluid via the minor diameter part 21 of protection tube 20, so can efficient cool off well illuminating part 11.When considering cooling effectiveness, minor diameter part 21 and illuminating part 11, are preferably the following distance of 50 μ m and come spaced apart for good at least below 100 μ m with the interval.
So; because between the 11A of oblique cone section, the 11A of the 21A of oblique cone section, the 21A of protection tube 20 and luminous tube 10; by the space K that is formed with ring-type as shown in Figure 2; so that 13,13 radially the 11A of oblique cone section, 11A are difficult for being cooled in illuminating part 11 towards electrode, therefore can prevent from resulting from being clipped in electrode 13,13 with the 11A of oblique cone section between area of space SA accumulate unevaporated mercury and cause self-luminescent part 11 to radiate the generation of bad situation of the ultraviolet activity reduction of (radiation).
In protection tube 20, the opening ground that firmly is formed at the two ends of this tube axial direction in order to blocking out of the ordinary embeds and is fixed with basal component 23,23.Basal component 23, such as being insulating material institute constitutor by pottery etc., in the formed through hole of middle body radially, insert and to be connected with a part of ending the extended outer lead 15 in the outside of section 12 towards envelope, and the end face of base end side that makes the end face of its base end side and outer lead 15 is with the position state at grade fixed outer wire 15 that gets off.
Fragment catches body 30, is to form to have the netted of drum, and its central shaft is that the mode that is positioned on the tubular axis separately of luminous tube 10, protection tube 20 fixes on protection tube 20.Specifically; fragment catches body 30; its position that is opposite in the minor diameter part 21 of protection tube 20 is spaced apart from minor diameter part 21; and the both ends 30A of its central axis direction; 30A utilizes the elastic component 31 of ring-type to be fixed in protection tube 20 under the state of the large-diameter portion 22 that is connected to protection tube 20,22 outer surface.In addition; fragment catches body 30, when considering that not only illuminating part 11 considers that also envelope is ended section 12,12 breakage, compared to the base end part 14A of metal forming 14; so that fragment catches end 30A, the 30A of the long side direction of body 30, it is good being configured in the more close outer end that is positioned at the tube axial direction of protection tube 20.
Such fragment catches body 30, such as being that metal by the stainless steel that contains chromium etc. consists of.By enforcement like this, can prevent from consisting of fragment and catch the metal dissolving of body 30 in the cooling fluid that is circulated in the cooling collar described later.
Such discharge lamp is that the electric supply installation that will not illustrate is connected in pair of outer wire 15,15, for example by the driving of lighting a lamp of the condition of lighting a lamp of 6A, 420V, 2500W, the ultraviolet ray of thus outside of illuminating part 11 being radiated wavelength 250-400nm.In addition, also can be and enclose the long arc metal halide lamp that ferric iodide etc. is arranged, at this moment, can strengthen the radiation of 350-450nm.
As shown in Figure 3; ultraviolet radiation device 3; consisted of by: discharge lamp 1 and the cooling collar 40 that is arranged on the radial outside of discharge lamp 1, between the inner peripheral surface of the outer peripheral face of protection tube 20 and cooling collar 40, possessed the liquid circulation of allowing in the stream L of the tube axial direction of protection tube 20.
Cooling collar 40 as shown in Figure 4, is by the tubular element 41 of the straight tube-like that disposes with the tubular axis coaxial manner of luminous tube 10 and protection tube 20, and the cross section forms L word shape, is fixed in the flow-path constituting body 42 at the two ends of tubular element 41,42 formations.Tubular element 41 is by seeing through from the ultraviolet material institute constitutor that illuminating part 11 radiates, for example being made of quartz glass.Flow-path constituting body 42 is to possess: be fixed in the tubular element fixed part 42A at tubular element 41 two ends, and the end of being fixed in the large-diameter portion 22 of protection tube 20, external diameter is than the protection tube fixed part 42B of tubular element fixed part 42A less.Tubular element fixed part 42A, 42A are the two ends that folder Jie O type ring 43 is fixed in respectively tubular element 41.Protection tube fixed part 42B, 42B are the large- diameter portions 22,22 that folder Jie O type ring 43 is fixed in respectively protection tube 20.
Foundation is with the ultraviolet radiation device 3 shown in the figure; the end of the tube axial direction of tubular element 41 is to be fixed in tubular element fixed part 42A, and surpasses the both ends of tubular element 41 and the end of the tube axial direction of the protection tube 20 that extends is to be fixed in protection tube fixed part 42B.So; cooling collar 40; be by tubular element 41 and be fixed on a pair of flow-path constituting body 42 at its two ends, 42 separations; use so that the stream L of liquid circulation and form; become shown in the arrow among the figure; the cooling fluid that imports from a side flow-path constituting body 42 is that the outer peripheral face along protection tube 20 flows and after passing through, and is discharged from from the opposing party's flow-path constituting body 42.As cooling fluid, for example, can use the pure water than resistance 1～10M Ω cm.
In ultraviolet radiation device 3 so, utilization is connected in the pair of outer wire 15 of discharge lamp 1,15 electric supply installation (not illustrating), to applying high voltage between the pair of electrodes 13,13, by between electrode 13,13, producing discharge, the driving discharge lamp 1 of lighting a lamp.Discharge lamp 1 is lit a lamp drive after, from a side flow-path constituting body 42 cooling fluid is imported to the inside of cooling collar 40, and by making cooling fluid along the tube axial direction of protection tube 20 and passing through, is situated between and by protection tube 20 illuminating part 11 is cooled off.
For the long arc discharge lamp as previously discussed, it is long to be subject to accumulation time one of lighting a lamp, and when luminous tube 10 is accumulated ultraviolet strain, has that the luminous tube 10 of lighting a lamp when driving breaks and simultaneously so that the situation that protection tube 20 breaks.At this moment; according to discharge lamp of the present invention; because the radial outside at protection tube 20 disposes fragment seizure body 30; so even luminous tube 10 or the fragment of protection tube 20 disperse towards the tubular element 41 of cooling collar shown in Figure 3 40; this fragment also can be caught body 30 by fragment and positively catch, so can not allow the tubular element 41 of cooling collar 40 that the anxiety of breakage is arranged.Therefore, according to the ultraviolet radiation device 3 that uses discharge lamp of the present invention, the cooling fluid that needn't worry to circulate among the stream L in the cooling collar 40 can spill, and also can not give bad impact to peripheral machine.
Particularly, enclosing 0.002mg/mm in the confined space S for illuminating part 11
3Above mercury, the interior pressure of confined space S of lighting a lamp when driving is the above long arc discharge lamps 1 of 2 air pressure, accumulate ultraviolet strain at illuminating part 11 more greatly and easily by the ultraviolet activity that the electrical discharge arc of illuminating part 11 interior generations radiates, and, confined space S can become high pressure conditions when lighting a lamp of discharge lamp drives, because luminous tube 10 becomes the state of easy breakage, catch body 30 so be necessary to arrange fragment of the present invention.
And; in the long arc discharge lamp of the present invention, fragment catches body 30, owing to be with butt and be fixed in the large-diameter portion 22 of protection tube 20; rather than to be connected to: butt and even dispose near the mode of the minor diameter part 21 of the protection tube 20 of illuminating part 11, therefore can expect to have following effect.That is it is spaced apart from the minor diameter part 21 of protection tube 20 to catch body 30 by fragment, can not cause the temperature heterogeneity of minor diameter part 21 and illuminating part 11.In addition, because near minor diameter part 21, the flowing of cooling fluid that is circulated in the cooling collar 40 can not become inhomogeneous, so can avoid the non-uniform temperature of minor diameter part 21 and illuminating part 11.Therefore, for long arc discharge lamp of the present invention, can positively avoid resulting from the breakage of protection tube 20 that the non-uniform temperature of minor diameter part 21 and illuminating part 11 causes and luminous tube 10.
Secondly, for another example of long arc discharge lamp of the present invention, and another example of relevant ultraviolet radiation device of the present invention, illustrate with Fig. 5 to Fig. 8.Fig. 5 be illustrate long arc discharge lamp of the present invention another example in the cutaway view of long side direction and in cutaway view radially; Fig. 6 be illustrate long arc discharge lamp of the present invention another example in the cutaway view of long side direction; Fig. 7 and Fig. 8 be illustrate ultraviolet radiation device of the present invention another example in the cutaway view of long side direction.In addition, in Fig. 5 to Fig. 8, for the formation common with Fig. 1 to Fig. 4, sign is with prosign and description thereof is omitted.
Long arc discharge lamp 5 shown in Figure 5, be by: in the radial outside of luminous tube 10, configuration has the straight tube-like protection tube 50 of circular radial section, and catches body 30 in the netted fragment that the radial outside configuration of protection tube 50 has a drum and consist of.In the outer peripheral face of straight tube-like protection tube 50, be fixed wtih its radial section and form circular sept 52.Utilization allows such sept 52 be clipped in fragment and catches between body 30 and the protection tube 50, can not make fragment catch body 30 from protection tube 50 configurations spaced apart so that the outer peripheral face of protection tube 50 is not contacted with fragment seizure body 30 ground.
For long arc discharge lamp so shown in Figure 55, can expect with Fig. 1 to that shown in Figure 4 in same effect is arranged in fact.And; protection tube 50 and sept 52 and usefulness by straight tube-like; because fragment catches body 30 can be from protection tube 50 configurations spaced apart; so do not form large-diameter portion at the two ends of the tube axial direction of protection tube as not needing as shown in Figures 1 to 4; owing to can easily make discharge lamp, make upper necessary cost so can reduce.
At long arc discharge lamp shown in Figure 66; identical with that shown in Figure 5; be by: in the radial outside of luminous tube 10, configuration has the straight tube-like protection tube 50 of circular radial section, and catches body 60 in the netted fragment that the radial outside configuration of protection tube 50 has a drum and consist of.Fragment catches body 60, ends section's 12 part subsidences by the envelope that is opposite in luminous tube 10 and goes down, and forms the ring-shaped protrusion 61 that extends towards radially inner side and spread all in the integral body of circumferencial direction.So, by catching body 60 in fragment ring-shaped protrusion 61 is set, can make fragment catch body 60 from protection tube 50 configurations spaced apart so that fragment seizure body 60 is not contacted with the outer peripheral face ground of protection tube 50.
For long arc discharge lamp so shown in Figure 66, can expect with that shown in Figure 5 in same effect is arranged in fact.And; discharge lamp 6 is just made in the simple operation that is inserted in the inside of the cylindric fragment seizure body 60 that has been formed with ring-shaped protrusion 61 in advance by the protection tube 50 with straight tube-like; owing to do not need to use as illustrated in fig. 5 as catching the physically member of Different Individual of body with fragment as the sept, so can more be reduced at needed operation in the manufacturing of discharge lamp.
Ultraviolet radiation device 7 shown in Figure 7, to catch between the tubular element 41 of body 30 and cooling collar 40 at netted fragment, be provided with radial section and form circular a plurality of supporters 32, be used for preventing that fragment from catching the central authorities of central axis direction of body 30 towards the vertical direction deflection.A plurality of supporters 32 are to catch under the state of outer peripheral face of body 30 as being connected to fragment cylindraceous take: inner circumferential surface, are spaced from each other and catch the mode that the long side direction of body 30 is arranged in order and be configured in fragment.Each supporter 32, its outer peripheral face can be the inner peripheral surface that is connected to the tubular element 41 of cooling collar 40, perhaps its outer peripheral face also can be spaced apart from the inner peripheral surface of tubular element 41, and emphasis is, catches mode between body 30 and the tubular element 41 and disposes and get final product to be clipped in fragment.
That is a plurality of supporters 32 there is no need to be installed on fragment and catch body 30, also can be fixed in the inner peripheral surface of the tubular element 41 of cooling collar 40.
For ultraviolet radiation device shown in Figure 77, can expect with Fig. 1 to that shown in Figure 4 in same effect is arranged in fact.And; according to form shown in Figure 7; each end 30A, 30A that fragment catches the long side direction of body 30 are each ends that is fixed on the large-diameter portion 22 of protection tube 20; and; when even fragment catches the larger situation of the size total length of long side direction of body 30; catch body 30 to the deflection of vertical direction lower side owing to can prevent fragment, do not catch the worry of inner peripheral surface that body 30 abuts to the tubular element 41 of cooling collar so do not have fragment.By so consisting of; even when because of the fragment that catches luminous tube 10 that discharge lamp 1 disperses when damaged and protection tube 20 so that fragment catches body 30 is impacted; also since this impacts can not catch body 30 and to tubular element 41 conduction of cooling collar 40, so can positively avoid cooling collar 40 breakages occur via fragment.
As previously mentioned; considering 20 (50) the temperature that will make protection tube; during with the uniform situation of temperature of the illuminating part 11 of luminous tube 10, make the fragment of long arc discharge lamp catch body 30, take from butt or spaced apart as good near illuminating part 11 parts of protection tube 20 (50).
On the other hand, mode as described below, for the long arc discharge lamp that uses simultaneously cooling collar, when since coolant in contained metal impurity be attached to the outer surface that is exposed to the protection tube in the coolant, so that the light that radiates from lamp is absorbed, probably can produce the bad situation that the radiation illumination on the plane of illumination that is positioned at object being treated descends by this impurity.When consider removing so bad situation, mode as described later is then so that fragment catches the outer surface that body is connected to protection tube is good.
Whether allow fragment catch the outer surface that body is connected to protection tube, can do suitable selection in response to purposes and the purpose of long arc discharge lamp.
Fig. 9 illustrates that another example of long arc discharge lamp of the present invention is in the whole cutaway view of long side direction.For Fig. 9, repeat for fear of explanation, so for indicating the symbol identical with Fig. 5 with the common formation of Fig. 5.
The discharge lamp 9 of long arc shown in Figure 9 is by making luminous tube 10, and possesses roughly cylindric protection tube 50 with the external diameter equal inside diameters of illuminating part 11 and be disposed at coaxial upper and become the double pipe structure.Protection tube 50 is to be connected to the outer surface of illuminating part 11 and to dispose.
In protection tube 50, the netted fragment with drum catches body 30, is by elastic component 31 butts of ring-type and is configured in the outer surface of protection tube 50.Fragment catches body 30, and unnecessary spreading all in the total length of protection tube 50 dispose, can be as described later, as long as be connected to: the outer surface at this place that is connected to the illuminating part 11 of protection tube 50.
Fragment catches body 30, such as being that metal by the stainless steel that contains chromium etc. is consisted of, and has conductivity.When consisting of by the metals such as stainless steel that contain chromium, do not have the anxiety in the molten cooling fluid to being circulated in cooling collar of metal that consists of fragment seizure body 30.
Figure 10 is the summary that explanation possesses the ultraviolet radiation device of long arc discharge lamp shown in Figure 9, in the whole cutaway view of long side direction.In Figure 10, repeat for fear of explanation, so for the formation common with the 3rd, 4 figure, indicate the symbol identical with the 3rd, 4 figure.
Ultraviolet radiation device shown in Figure 10 is to possess: with the cooling collar 40 of the identical formation of cooling collar shown in Figure 4.Ultraviolet radiation device shown in Figure 10; the end of the tube axial direction of its tubular element 41; being to be fixed on tubular element fixed part 42A, and surpassing the both ends of tubular element 41 and the end of the tube axial direction of the protection tube 50 that extends, is to be fixed on protection tube fixed part 42B.Like this; cooling collar 40; to form: by tubular element 41 and a pair of flow-path constituting body 42 that is fixed on its two ends; the 42 stream L in order to circulating cooling liquid that are separated out; shown in the arrow among the figure; the cooling fluid that is imported by a side flow-path constituting body 42 is the outer peripheral face along protection tube 50, and by after from the opposing party's flow-path constituting body 42 discharges.As cooling fluid, for example, use the pure water than resistance 1～10M Ω cm.
Long arc discharge lamp shown in Figure 9; when even protection tube 20 breaks the situation of breaking simultaneously with luminous tube 10; because the radial outside at protection tube 20 is disposing fragment seizure body 30; even if therefore the luminous tube 10 or fragment of protection tube 20 disperses towards the tubular element 41 of cooling collar 40; catch body 30 by fragment and also can positively catch this fragment, and do not have the anxiety of tubular element 41 breakages of cooling collar 40.
And; long arc discharge lamp shown in Figure 9; catch body 30 butts and be disposed at the outer surface of protection tube 50 by the fragment with conductivity; owing to can prevent positively that metal impurity contained in the coolant is attached to the outer surface of protection tube 50 partly, so can make the radiation uniform-illumination of the plane of illumination that is positioned at handled object.It is detailed, in following explanation.
Long arc discharge lamp is considered between electrode 13,13 to produce discharge so that luminescent metal is decomposed etc. and forms the electricity slurry in the inside of illuminating part 11 when lighting a lamp, and the electronics that is subject in the electricity slurry flies towards illuminating part 11 bullets, causes thus illuminating part 11 charged.
At protection tube 50, because illuminating part 11 is that point contacts or the line contact with protection tube 50 clipping under the state of minim gap, therefore be considered to become evenly in the carried charge of long side direction.This is because of the part that contacts with protection tube 50 at illuminating part 11, can be less towards the carried charge of protection tube 50, and between illuminating part 11 and protection tube 50, have the gap part, towards the more event of the carried charge of protection tube 50.
When by using in the lump when having the long arc discharge lamp of this kind cooling collar; contained metal impurity ion (for example in coolant; contained metal ion in the running water); can be attracted to the outer surface of charged protection tube 50, the metal impurity that forms black is attached to the outer surface of protection tube 50.
As described above; when the carried charge of the protection tube 50 of long arc discharge lamp makes coolant flow through in the cooling collar under inhomogeneous state; the metal impurity preferentially is attached to the interior more part of carried charge of outer surface of protection tube 50; thus along with the process of the time of lighting a lamp, cause the ferrous metal impurity of volume to be attached to locally the outer surface of protection tube 50.
Therefore, think: because the metal impurity that is attached on the protection tube 50 from illuminating part 11 emitted light absorbs, suffer damage so that be positioned at the uniformity of radiation Illumination Distribution of the plane of illumination of handled object.
Long arc discharge lamp of the present invention; as previously mentioned; catch body 30 for butt and be configured in the outer surface of protection tube 50 owing to have the fragment of conductivity, thus the catching in the zones of body 30 butts with fragment of protection tube 50, can homogenizing towards the carried charge of protection tube 50.Therefore; long arc discharge lamp of the present invention; because the metal impurity is piled up the outer surface of protection tube 50 with spreading all over, can not reduce locally so be positioned at the radiation illumination of the plane of illumination of handled object, the radiation Illumination Distribution that is positioned at this plane of illumination can be given homogenizing.
By the above, for the carried charge that is connected to illuminating part 11 zones with protection tube 50 gives homogenizing, as long as this region division fragment of protection tube 50 is caught body 30, get final product.
Claims (5)
1. ultraviolet radiation device, it is characterized by: possess: in the formed confined space of illuminating part, pair of electrodes is spaced from each other and disposes and enclose the luminous tube of the quartz glass system of luminescent substance; And, at the radial outside of this luminous tube, along the above-mentioned illuminating part of tubular axis butt of luminous tube and the protection tube of the quartz glass system of the straight tube-like that sets,
The outer surface with above-mentioned illuminating part butt part at above-mentioned protection tube is provided with the long arc discharge lamp that the fragment with conductivity catches body, is accommodated in the inside of cooling collar, and this cooling collar possesses the stream of the liquid circulation of allowing.
2. the ultraviolet radiation device of putting down in writing such as claim 1 is characterized by: above-mentioned fragment catches body and is formed netted.
3. the ultraviolet radiation device of putting down in writing such as claim 1 is characterized by: above-mentioned fragment catches body and is formed by the stainless steel that contains chromium.
4. such as each ultraviolet radiation device of putting down in writing of claim 1～3, it is characterized by: catch between body and the above-mentioned cooling collar at above-mentioned fragment, catch a plurality of supporters of body in order to support fragment, by be spaced from each other and be arranged in order in fragment catch body long side direction mode and dispose.
5. such as each ultraviolet radiation device of putting down in writing of claim 1～3, it is characterized by: above-mentioned fragment catches the total length of part in the stream that is stuck in above-mentioned cooling collar that body spreads all over above-mentioned protection tube and arranges.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP273840/2007 | 2007-10-22 | ||
| JP2007273840 | 2007-10-22 | ||
| JP2008131530A JP5266871B2 (en) | 2007-10-22 | 2008-05-20 | Long arc discharge lamp and ultraviolet irradiator with long arc discharge lamp |
| JP131530/2008 | 2008-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101419896A CN101419896A (en) | 2009-04-29 |
| CN101419896B true CN101419896B (en) | 2013-01-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200810170998 Active CN101419896B (en) | 2007-10-22 | 2008-10-21 | Long arc discharge lamp and ultraviolet radiation device with the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5266871B2 (en) |
| CN (1) | CN101419896B (en) |
| TW (1) | TWI442445B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5347875B2 (en) * | 2009-09-29 | 2013-11-20 | ウシオ電機株式会社 | Long arc type discharge lamp |
| CN106292191B (en) * | 2015-05-24 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | Lighting source lamp chamber and equipment enclosure for semiconductor lithography |
| JP6691317B2 (en) * | 2015-10-06 | 2020-04-28 | ウシオ電機株式会社 | Short arc type discharge lamp |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1531009A (en) * | 2003-03-13 | 2004-09-22 | ����ʢ��֥��������˾ | Medium barrier discahrge light device and ultraviolet illuminating device |
| JP2006114420A (en) * | 2004-10-18 | 2006-04-27 | Matsushita Electric Ind Co Ltd | High-pressure discharge lamp |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60182654A (en) * | 1984-02-29 | 1985-09-18 | Toshiba Electric Equip Corp | Light illumination device |
| JPH0594806A (en) * | 1991-02-06 | 1993-04-16 | Hitachi Ltd | Metal halide lamp |
| JP2000156200A (en) * | 1998-11-18 | 2000-06-06 | Nec Home Electronics Ltd | Scatter preventing fluorescent lamp and manufacture thereof |
| JP2002316150A (en) * | 2001-01-26 | 2002-10-29 | Photoscience Japan Corp | Device and method for treating liquid with ultraviolet ray |
| US7786673B2 (en) * | 2005-09-14 | 2010-08-31 | General Electric Company | Gas-filled shroud to provide cooler arctube |
| JP4587130B2 (en) * | 2006-12-08 | 2010-11-24 | ウシオ電機株式会社 | High pressure discharge lamp, manufacturing method thereof, and light irradiation device |
-
2008
- 2008-05-20 JP JP2008131530A patent/JP5266871B2/en active Active
- 2008-08-14 TW TW97131000A patent/TWI442445B/en active
- 2008-10-21 CN CN 200810170998 patent/CN101419896B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1531009A (en) * | 2003-03-13 | 2004-09-22 | ����ʢ��֥��������˾ | Medium barrier discahrge light device and ultraviolet illuminating device |
| JP2006114420A (en) * | 2004-10-18 | 2006-04-27 | Matsushita Electric Ind Co Ltd | High-pressure discharge lamp |
Non-Patent Citations (1)
| Title |
|---|
| JP昭55-46215A 1980.03.31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009123676A (en) | 2009-06-04 |
| TW200919532A (en) | 2009-05-01 |
| TWI442445B (en) | 2014-06-21 |
| CN101419896A (en) | 2009-04-29 |
| JP5266871B2 (en) | 2013-08-21 |
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