CN1531009A - Medium barrier discahrge light device and ultraviolet illuminating device - Google Patents
Medium barrier discahrge light device and ultraviolet illuminating device Download PDFInfo
- Publication number
- CN1531009A CN1531009A CNA200410039601XA CN200410039601A CN1531009A CN 1531009 A CN1531009 A CN 1531009A CN A200410039601X A CNA200410039601X A CN A200410039601XA CN 200410039601 A CN200410039601 A CN 200410039601A CN 1531009 A CN1531009 A CN 1531009A
- Authority
- CN
- China
- Prior art keywords
- barrier discharge
- gas
- dielectric barrier
- tight container
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 136
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000002826 coolant Substances 0.000 claims description 23
- 239000007789 gas Substances 0.000 description 20
- 238000007789 sealing Methods 0.000 description 20
- 238000009434 installation Methods 0.000 description 18
- 238000005286 illumination Methods 0.000 description 17
- 230000000694 effects Effects 0.000 description 14
- 238000009413 insulation Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000010276 construction Methods 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 239000011733 molybdenum Substances 0.000 description 6
- 230000004224 protection Effects 0.000 description 6
- 230000003321 amplification Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 241000811606 Ancora Species 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000002788 crimping Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000001012 protector Effects 0.000 description 3
- 230000002787 reinforcement Effects 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 241000644035 Clava Species 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000008398 formation water Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M13/00—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
- F16M13/02—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles for supporting on, or attaching to, an object, e.g. tree, gate, window-frame, cycle
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/745—Circuitry for generating timing or clock signals
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0007—Casings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
- H01L2924/145—Read-only memory [ROM]
- H01L2924/1451—EPROM
- H01L2924/14511—EEPROM
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Provided is a dielectric barrier discharge lamp lighting system capable of balancing an ultraviolet irradiation amount to a workpiece along a tube axis direction when the workpiece to be irradiated with an ultraviolet ray is relatively moved perpendicularly to the tube axis. This dielectric barrier discharge lamp lighting system EXF is composed by arranging, in parallel with one another, a plurality of dielectric barrier discharge lamps EXL each equipped with an elongated tubular airtight vessel 1 formed of an ultraviolet-ray transmitting material, an internal electrode 2 enclosed in the airtight vessel 1 along its axial direction and fed with power from one end, an excimer generation gas enclosed in the airtight vessel 1, and an external electrode OE attached to the outside surface of the airtight vessel 1 and acting so as to generate dielectric barrier discharge in the airtight vessel 1 in cooperation with the internal electrode 2 so that power feeding ends for the internal electrodes 2 are alternately adjacent to each other.
Description
Technical field
The ultraviolet lamp that the present invention relates to a kind of dielectric barrier discharge lamp lighting device and use this device.
Background technology
Mists such as rare gas such as rare gas such as xenon or xenon or krypton and chlorine are done silent discharge, produce the Excimer discharge lamp near intrinsic homogeneous radiation, i.e. dielectric barrier discharge lamp has been recorded in a lot of documents and former known by everybody.Dielectric barrier discharge is to form flowing of pulse current by so-called silent discharge.This pulse current has electron stream at a high speed, and since many between stand-down, make that the ultraviolet material of emitting as xenon temporarily is combined into molecule state (quasi-molecule state), when returning ground state, emit a kind of less ultraviolet ray that absorbs again effectively.
In the first existing patented technology, Japanese kokai publication hei 11-111235 communique discloses and has adopted elongated tubular container to carry out the dielectric barrier discharge lamp of dielectric barrier discharge.
In the second existing patented technology, Japanese kokai publication hei 7-272692 communique discloses a kind of transparent and be the dielectric barrier discharge lamp of elongated tubular product such, comprise being arranged at the double light transmission outer electrode of doing first dielectric discharge vessel outside of dielectric barrier discharge, and be the medial electrode that metal bar or metal tube constituted more than 30 or 30 than L/D by the long L in inboard and diameter D.
In the 3rd existing patented technology, disclose a kind of in the TOHKEMY 2001-084966 communique by dielectric barrier discharge lamp that the inventor invented, by tension force effect configuration internal electrode,, prevent that internal electrode is sagging on internal electrode by limit assembly (being ancora) is installed.In this lamp, ancora is made of conducting metal, owing to the part of ancora as internal electrode works, makes that the distance between internal and external electrode diminishes, thereby has improved the activation performance.
In first～the 3rd prior art, the luminous tube that forms comprises elongated gas-tight container, the internal electrode that extends along the direction of principal axis of gas-tight container, and the excimers in the inclosure gas-tight container generate gas (generating gas hereinafter to be referred as quasi-molecule), and has a refrigerating function, while is chimeric for a gas-tight container outside part, above-mentioned fluorescent tube is crimped on the lamp body of depression, and, by outer electrode is set between the two, with the outside of the tight contact of outer electrode at gas-tight container, when making it produce uniform dielectric barrier discharge along tube axial direction, the heat that luminous tube is produced is dispersed apace, thereby luminous efficiency can be maintained higher state.
Can internal electrode be powered from the one or both ends of the internal electrode that is located at gas-tight container inside.And power easier distribution from an end of dielectric barrier discharge lamp.
And, dielectric barrier discharge lamp is because the warm that discharge produced in lighting a lamp, cause luminous efficiency to reduce, by realize the cooling of lamp body at the passage of cooling agents such as the inside of lamp body formation water, cooling agent flows into from an end of lamp body, discharges from the other end, by lamp body coolant impedance discharge lamp, can light dielectric barrier discharge lamp expeditiously with the operating temperature of the best.
But, then lower at opposite end side because distolateral higher in the power supply of internal electrode along the ultraviolet Illumination Distribution of dielectric barrier discharge lamp tube axial direction, therefore be difficult to obtain the ultraviolet Illumination Distribution of homogeneous at tube axial direction.
And, then lower at opposite outflow oral-lateral because higher along the entrance side of the coolant channel that is distributed in lamp body of the ultraviolet illumination of dielectric barrier discharge lamp tube axial direction, therefore be difficult to obtain the ultraviolet Illumination Distribution of homogeneous at tube axial direction.
The ultraviolet lamp that the object of the present invention is to provide a kind of dielectric barrier discharge lamp lighting device and use this dielectric barrier discharge lamp lighting device, when tubular axis has been made right angle orientation and moved, the ultraviolet irradiation amount of workpiece then is able to equilibrium along tube axial direction at the workpiece of need irradiation ultraviolet radiation.
Summary of the invention
The invention provides a kind of medium barrier discharge light device, have a plurality of dielectric barrier discharge lamps, comprising: the elongated tubular product such gas-tight container that constitutes by ultraviolet penetrability material; In gas-tight container, axially be provided with and from the internal electrode of feeder ear power supply along it; The quasi-molecule of enclosing in the gas-tight container generates gas; Be located at the gas-tight container outside, in gas-tight container, produce the outer electrode of dielectric barrier discharge with the internal electrode co-operating; Wherein, a plurality of dielectric barrier discharge lamps are to dispose side by side with respect to the mutual mode of adjacency on the contrary of the feeder ear of its internal electrode.
Dielectric barrier discharge lamp lighting device of the present invention, with an end of electrode internally to the feeder ear of a plurality of dielectric barrier discharge lamps of inner electrode power supply mutually on the contrary in abutting connection with configuration.Below, explain at the inscape of dielectric barrier discharge lamp.
＜dielectric barrier discharge lamp 〉
Dielectric barrier discharge lamp comprises that gas-tight container, internal electrode, quasi-molecule generate gas and outer electrode.
＜gas-tight container 〉
By the gas-tight container that ultraviolet penetrability material constitutes, generally can make of synthetic quartz glass.But, for the present invention, so long as be that the material that ultraviolet ray in the vacuum all has a penetrability can use for wavelength.
Gas-tight container wants many output ultraviolet rays, and external diameter is that 12mm or 12mm are above preferable.In addition, want to reduce discharge inception voltage, internal diameter is at 25mm or preferable below the 25mm.Further, can make wall thickness is 2mm or below the 2mm, better in the scope of 0.3mm～1mm.To this, the length of gas-tight container is also unrestricted, can for example can be about 1m for the random length corresponding to required ultraviolet irradiation length.Particularly in the present invention, because can make the tube axial direction equably crimping of outer electrode at gas-tight container easilier by bracing or strutting arrangement, so length also can be for 1m or more than the 1m.
As after exhaust is carried out in the inside of gas-tight container, quasi-molecule being generated the method that gas is enclosed, be that blast pipe is connected on the gas-tight container.In the present invention, be blast pipe to be connected near the of gas-tight container one end and from the side of the outside extending part of lamp body.And, after blast pipe carries out exhaust, quasi-molecule is generated gas enclose in the gas-tight container from blast pipe, form exhaust sealing-off portion by blast pipe being done sealing-off.When gas was discharged by being formed on gas-tight container one distolateral blast pipe, particularly gas-tight container wanted to do sufficient exhaust under 1m or the situation more than the 1m, and there is a little elongated tendency the time.For this reason, also can near the two ends of gas-tight container, form a pair of blast pipe and carry out exhaust simultaneously.Yet, in this case, can form a pair of exhaust sealing-off portion.
In addition, if the gas-tight container tubulose except straight straight tube, has bending also can slightly.In fact, when forming elongated tubular, form some bendings easily,, can form the following bending of maximum 1mm or 1mm for example with respect to the about 1200mm of total length.But the bending of this degree is recognized as straight tube substantially.Gas-tight container for example is being under the situation of arc-shaped bend, and the back surface of circular arc is preferable to the outer electrode configuration.Also the lateral parts of circular arc can be disposed towards outer electrode.Therefore, in the arbitrarily angled scope in above-mentioned centre, dispose towards gas-tight container by outer electrode, outer electrode can be well and the outside crimping of gas-tight container.And the cross sectional shape of pipe is generally circle, also the cross sectional shape that can adopt ellipse, quadrangle etc. to be wanted.
＜internal electrode 〉
Internal electrode can be any structure, for example a plurality of unit grids part can on the direction of principal axis of gas-tight container respectively by the space be configured to latticed, also can adopt the internal electrode of above-mentioned various structures of the prior art arbitrarily.But,, can make to produce ultraviolet amount and relatively become many, so comparatively suitable because that internal electrode forms is latticed.In addition, so-called " a plurality of unit grids parts can on the direction of principal axis of gas-tight container respectively by the space be configured to latticed ", be meant the internal face of unit grids part near gas-tight container, though and on the direction of principal axis of gas-tight container, be separated from each other, also still for conducting electricity the state that connects.And the unit grids part can be continuous with respect to circumferencial direction, also can disconnect.Therefore, this unit grids partly is specifically as follows ring-type (the former state), helical form or coiling shape (latter's state) or mesh-shape etc.Under cancellous situation, decision belongs to the former or the latter according to the structure of this mesh.
In unit grids partly is under the situation of ring-type, has the linking portion that extends along the direction of principal axis of gas-tight container by making it, a plurality of unit grids parts is linked with set pitch (pitch), and have the conduction connection.In addition, by with the structure of linking portion along the extension of central axis of gas-tight container, the integral body of internal electrode is the duplicating of (ring anchor) (being equivalent to the unit grids part) that have a plurality of loop chains with the such shape of based on halogen bulb filament, can utilize equipment to make and make to make and become easy.But, avoid the central shaft of gas-tight container and adopt linking portion directly is connected with the annulus of latticed part and also can.And, linking portion be single line linearity also can, external diameter is that coiling shape below 20% or 20% also can with respect to the internal diameter of gas-tight container.In addition, can impose suitable, preferably 2kg or the tension force more than the 2kg, act at this tension force under the state of central axis direction and encapsulate linking portion.Make tension force do the time spent, internal electrode is preferably made the coiling shape.Even be not the coiling shape, also can make the tension force of central axis direction act on linking portion.No matter which kind of shape linking portion is,, make tension force act on linking portion easily by seal the two ends of linking portion in the both end sides of gas-tight container.But,, and the other end of gas-tight container for example is fixed in situation on the sealing with Support Level by suitable means under, also can make tension force act on linking portion if linking portion only links in the sealing of an end of gas-tight container.
To this, unit grids partly is that this spiral and mesh partly have the function as linking portion under helical form and the cancellous situation, and a plurality of unit grids parts reciprocally make machinery and conductivity links.But, on helical form and mesh-shape unit grids part, be welded with the linking portion that constitutes by single or multiple clava, can give internal electrode better conformality like this.Or use the volume frame to replace claval linking portion, and form helical form and cancellous unit grids part, can get conformality well.And the insulating properties and the conductivity of volume frame are all good.For the grid part, if adopt above-mentioned any structure, then can give the stability of internal electrode global shape, make to install to become easy.
And internal electrode is to form with long-pending pP this mode in determined scope that quasi-molecule described later generates the pressure p (Pa) of gas with the axial pitch P (m) with respect to this unit grids part.
In addition, in the present invention, even generate the inclosure pressure of gas and make under the situation that lamp efficient improves improving quasi-molecule as described later, also can make distance between unit grids part and the gas-tight container internal face is 3mm or below the 3mm.If above-mentioned distance is at 3mm or below the 3mm, and with this understanding, discharge keeps that voltage can be suppressed at 1000V or below the 1000V.
In addition, the material that constitutes internal electrode is not particularly limited, and for example can use the metal of fire resistances such as tungsten, molybdenum and nickel, and the work function of tungsten and molybdenum is relative less, and easy ejected electron is so have the effect that reduces starting resistor.
In addition, when internal electrode is sealed in the end of the gas-tight container that is made of quartz glass, can adopt the seal construction that uses the sealing metal paper tinsel, this sealing metal paper tinsel is used for closely sealing the occasion of quartz glass more.Simultaneously, by with the sealing of quartz glass clamp, the sealing metal paper tinsel can be done airtight sealing.
＜quasi-molecule generates gas 〉
Quasi-molecule generates one or more mixing that gas can use rare gas such as xenon, krypton, argon or helium, or the mist of halogens such as rare gas and fluorine, chlorine, bromine or iodine, for example XeCl, KrCl etc.And the gas that also neon etc. can not produced quasi-molecule is added on quasi-molecule and generates in the gas.
In addition, the quasi-molecule pressure that generates gas can reach 20000Pa or more than the 20000Pa.Following pressure to become headlight efficient improves and ultraviolet ray output increase.But the efficient of lamp is along with the increase of pressure can demonstrate saturated tendency.
＜outer electrode 〉
Outer electrode is arranged on the outside of gas-tight container corresponding to the luminous tube of dielectric barrier discharge lamp.Outer electrode be designed to removable and not removable can.Outer electrode and being encapsulated between the internal electrode of gas-tight container inside produces wall with gas-tight container as dielectric dielectric barrier discharge in the inside of gas-tight container.
In addition, outer electrode has the length identical with its tube axial direction substantially corresponding to internal electrode.Like this, the tube axial direction along luminous tube can produce dielectric barrier discharge.And, with the width of outer electrode tubular axis vertical direction be that the center angle is in 60～300 ° the scope for good generally speaking at tubular axis with gas-tight container.Therefore, under the state of configuring external electrode not, because exposing outside part, the gas-tight container of luminous tube in 300～60 ° scope, forms, the ultraviolet ray that make to see through the gas-tight container wall from above-mentioned exposed portions serve to the outside, and, can do various various objectives utilizations along the long distance irradiation of the tube axial direction leap of luminous tube.But, radiate a large amount of ultraviolet whiles by dielectric barrier discharge, for the ultraviolet ray that will radiate with preferable angular illumination, be preferably in 90～240 ° the scope with the angular range of the tubular axis orthogonal direction of outer electrode.And, more or less freely for the dismounting of outer electrode, and under the elastic force effect of bracing or strutting arrangement, can obtain connecing with respect to suppressing of gas-tight container outside, preferable in the scope below 240 °.Yet in order to satisfy the dismantled and assembled property and the ultraviolet radioactivity of outer electrode simultaneously, 60～240 ° scope is optimum.
Simultaneously, externally electrode is located under the situation of gas-tight container outside removably, can adopt materials such as thin and resilient conductive metal paper tinsel, plate or metal wire, also can adopt thicker rigid body.No matter adopt above-mentioned any material, for inner face towards the gas-tight container of outer electrode, its to ultraviolet luminance factor condition with higher under owing to have effect, therefore certain effect is arranged for the ultraviolet ray amount of obtaining more outward direction as reflection unit.The material that the ultraviolet reflection rate is high can be used for example raffinal or silver etc.Under the situation that outer electrode is made of rigid body, also can be used as lamp body and use.
In addition, outer electrode is that planar or latticed any state all can continuously.And, so-called latticedly is exactly, a large amount of unit grids shapes parts certain interval of being separated by respectively is configured on the gas-tight container direction of principal axis, and the unit grids shape is partly near the internal face of gas-tight container, though the direction of principal axis at gas-tight container is separated from each other in addition, but be in the state that conduction connects.The unit grids part can be continuous with respect to circumferencial direction, but also disjunction.Therefore, under concrete condition, this unit grids part also can be mesh-shape.
The arrangement of＜a plurality of dielectric barrier discharge lamps 〉
A plurality of dielectric barrier discharge lamps, the feeder ear of corresponding internal electrode mutually on the contrary in abutting connection with and arrange.And in the present invention, so-called " feeder ear of corresponding internal electrode mutually on the contrary in abutting connection with " refers to singly that not only with a dielectric barrier discharge lamp be a unit and its feeder ear is configured in left and right sides alternately, refers to that also several is the state of unit configuration.During for the former situation, the equal integralization of quite fine and closely woven ultraviolet illumination can be obtained, and when being the latter, the equal integralization of storage effect can be obtained.
And the quantity of configuration equated and makes the equal integralization of ultraviolet irradiation amount about the quantity of dielectric barrier discharge lamp preferably made.But, if the quantity of dielectric barrier discharge lamp when to be 9 or 9 above, because of about the radical inequality of configuration influence equal integralization hardly, so also can be the odd number root.
＜effect of the present invention 〉
In the present invention, possessed the structure of above explanation, can realize the purpose that the present invention is desired.
Promptly, in this dielectric barrier discharge lamp, owing to produce very strong dielectric barrier discharge near the feeder ear of internal electrode, along the length direction of internal electrode, thereby along the tube axial direction of dielectric barrier discharge lamp, ultraviolet illumination has the tendency that lowers gradually towards non-feeder ear from feeder ear.
To this, as the present invention, because the feeder ear of above-mentioned dielectric barrier discharge lamp distributes and a plurality of configuration arranged side by side at two ends, the left and right sides, when tubular axis has been made right angle orientation and moved, the ultraviolet irradiation amount of workpiece then is able to equilibrium along tube axial direction at the workpiece of need irradiation ultraviolet radiation.And in order to improve the flatteness of ultraviolet illumination, the quantity of dielectric barrier discharge lamp is that even number is better.But the quantity of dielectric barrier discharge lamp is that 9 or 9 are when above, because of left and right sides radical inequality influences equal integralization hardly, so also can be the odd number root.
＜other structure 〉
Though be not necessary inscape of the present invention, can optionally add following structure as required.
1. (relevant lamp socket) switches on easily in order to make dielectric barrier discharge lamp, and the lamp socket of suitable shape and structure can be installed at the gas-tight container two ends.And then, can support luminous tube by bracing or strutting arrangement via lamp socket.
2. (bracing or strutting arrangement) bracing or strutting arrangement is the device at two ends of the gas-tight container of Supporting Media impedance discharge lamp.In addition, bracing or strutting arrangement can be the structure by the resilient support dielectric barrier discharge lamp.By this structure, the outer electrode that gas-tight container and its outside are provided with relies on the mutual crimping of elastic force to become easy.Elastic force acts on an end of gas-tight container at least, and it is more suitable to act on two ends.Provide the concrete device of elastic force effect to be not particularly limited, for example can support gas-tight container by spring.And, also can use to comprise the support portion of supporting gas-tight container, and provide the bracing or strutting arrangement of the spring portion of elastic force effect side by side with this support portion.
For the bracing or strutting arrangement that supports gas-tight container by spring, this bracing or strutting arrangement be with spring between the fixed part and gas-tight container of bracing or strutting arrangement.Spring can be various structures, the shape that the spring material with shape such as tabular, bar-shaped processes.The bracing or strutting arrangement that makes spring force generation effect is configured in an end of gas-tight container, spring force is acted on the total length of gas-tight container, and outer electrode is crimped on the outside of gas-tight container, one end of gas-tight container is rotatably mounted on the fixed part with the bracing or strutting arrangement that hinge constitutes, and the other end then can be installed on the fixed part by the bracing or strutting arrangement of elastic force effect.
For outer electrode being crimped on the outside of gas-tight container, configurable have the lamp body of the rigidity of extending along the gas-tight container length direction as fixed part.Like this, can compress gas-tight container, but, be convenient to the outside of the tight contact of outer electrode at gas-tight container owing to this moment of clamping outer electrode between lamp body and gas-tight container facing to lamp body.In this case, outer electrode can be formed by the member of softness, uses the high member of ultraviolet reflection to obtain cheap outer electrode easily.And, by suitable cooling device is configured on the lamp body, remove heat on the gas-tight container via outer electrode, effectively ultra violet radiation efficient is remained on higher state.As the coolant of cooling device, for example can allow water etc. in the lamp body internal flow.
(lamp body) lamp body by the thermal conductivity material for example institute such as aluminium and stainless steel constitute, owing to be arranged to and carry out under the heat conducting state between lamp body and the dielectric barrier discharge lamp, so its device as a kind of heat that is produced when removing the bright lamp of dielectric barrier discharge lamp can be used.For strengthening the effect of this lamp body, can cool off lamp body forcibly.For example, can make cooling agent for example water in the lamp body internal flow.Or, form the sag and swell that is easy to heat release in the outside of lamp body, with and/or make fan assembly that force air passes through etc., use the cooling device of prior art rightly.
And, by dielectric barrier discharge lamp is installed on the lamp body, and be easy to the Supporting Media impedance discharge lamp, therefore, can use bracing or strutting arrangement described later.
In addition,, as required, outer electrode is clamped between gas-tight container and the lamp body, makes outer electrode be crimped on the outside of gas-tight container easily by dielectric barrier discharge lamp is installed on the lamp body.Therefore, can use bracing or strutting arrangement described later.
The present invention also provides a kind of medium barrier discharge light device, comprise dielectric barrier discharge lamp and a plurality of dielectric barrier discharge lamps unit, this dielectric barrier discharge lamp unit has the coolant channel that leads to another distolateral flow export from a distolateral inflow entrance in inside, and is made of the elongated lamp body that is arranged on the dielectric barrier discharge lamp length direction.It is characterized by a plurality of dielectric barrier discharge lamps unit side by side configuration make coolant flow inlet adjacency on the contrary mutually.
In the present invention, single dielectric barrier discharge lamp can be the structure of medium barrier discharge light device recited above.
Lamp body except the structure described in first kind of medium barrier discharge light device, can also add coolant channel in inside, and coolant flow inlet and flow export lay respectively at the two ends of lamp body.And, can run through forming coolant channel in the lamp body in lamp body inside, also can carry out heat conducting tubulose coolant channel in lamp body outside welded and installed.
The dielectric barrier discharge lamp of lamp body and monomer makes up and formation dielectric barrier discharge lamp unit, in order in short as far as possible interval, to arrange more dielectric barrier discharge lamp unit, and in few area, guarantee required ultraviolet ray amount, the width of lamp body is preferably narrow.Be preferably in about 120～200% degree of dielectric barrier discharge lamp Breadth Maximum.
A plurality of dielectric barrier discharge lamps unit is opposite to mutually arranging with the inflow entrance of the coolant channel of lamp body.And in the present invention, so-called " inflow entrance opposite mutually in abutting connection with " refers to singly that not only with a dielectric barrier discharge lamp be a unit and its feeder ear is configured in left and right sides alternately, refers to that also several is the state of unit configuration.During for the former situation,,, also can obtain the equal integralization of storage effect even when being the latter's situation though can obtain the equal integralization of quite fine and closely woven ultraviolet illumination.
And the quantity of distributing about the quantity of dielectric barrier discharge lamp preferably makes equates and makes the equal integralization of ultraviolet irradiation amount.But the quantity of dielectric barrier discharge lamp is 9 or 9 when above, and left and right sides radical inequality influences equal integralization hardly, so the odd number root also can.
Therefore, in the present invention by above-mentioned structure, the purpose that the attainable cost invention is desired.
That is, in this kind dielectric barrier discharge lamp, if temperature rises, then luminous efficiency reduces.And the temperature of lamp body rises towards flow export gradually from the inflow entrance of cooling agent.So, the tendency that reduces gradually from inflow entrance towards flow export is arranged along the tube axial direction ultraviolet ray illumination of dielectric barrier discharge lamp.
To this, in the present invention,, when tubular axis has been made right angle orientation and moved, the ultraviolet irradiation amount of workpiece then is able to equilibrium along tube axial direction at the workpiece of need irradiation ultraviolet radiation because the inflow entrance of above-mentioned lamp body distributes and a plurality of alignment arrangements at two ends, the left and right sides.
The present invention also provides a kind of ultraviolet lamp, comprise foregoing first or second kind of medium barrier discharge light device, dispose medium barrier discharge light device the ultraviolet lamp body, be connected on the medium barrier discharge light device and light the high-frequency lighting circuit of dielectric barrier discharge lamp.
In the present invention, so-called " ultraviolet lamp " is meant that all utilize medium barrier discharge light device to produce ultraviolet device.For example, semiconductor stepper, light decontaminating apparatus, photo-hardening device and light drying device etc.And " ultraviolet lamp body " is meant remaining part except medium barrier discharge light device and high frequency generating apparatus in the ultraviolet lamp.
In addition, medium barrier discharge light device can use one or more as required.
Use the high-frequency lighting circuit in order to light medium barrier discharge light device.The high-frequency lighting circuit comprises the high frequency generating apparatus and produces high frequency voltage, the High frequency power feeding medium barrier discharge light device that this bright lamp is required.So-called " high frequency " is meant 10kHz or the above frequency of 10kHz.But be preferably 100kHz～2MHz.And the bright circuit for lamp of high frequency applies 1500V or below the 1500V when medium barrier discharge light device is stablized bright lamp, preferably the high frequency voltage of 700～1000V.Furtherly, the starting resistor of medium barrier discharge light device is 2～2.3kVp-p, is increased to starting resistor by the secondary of the bright circuit for lamp of high frequency is opened voltage, and makes its easy startup.In this case, when parallel-connected inverter being constituted as main body, proper owing to obtain high step-up ratio easily as the means that produce high frequency.So, because the high frequency output waveform is sinusoidal wave, the noise that produces when the bright lamp of medium barrier discharge light device is just fewer.But, except that the high frequency generating apparatus, also can adopt the initial pulse voltage generating apparatus of using simultaneously.Furtherly, though that the bright circuit for lamp of medium barrier discharge light device and high frequency is configured in approaching position is preferable, also can in the position that is configured to be separated from each other.Medium barrier discharge light device is different with general discharge lamp, need not connect with current-limiting apparatus.But,, can according to demand the impedance of appropriate value be connected and bright lamp for lamp current is adjusted to set value.And when medium barrier discharge light device was connected the bright circuit for lamp of high frequency, as long as make outer electrode ground connection, the noise of generation will reduce.
Because it is latticed that internal electrode forms, and be anode, outer electrode is in the negative electrode dielectric barrier discharge, and the ultraviolet ray of radiation becomes many near the unit grids of the electrode part internally, and the ultraviolet ray of radiating in the middle of the unit grids part of adjacency tails off.Therefore, when the pitch of unit grids part is big, the flatteness variation of ultraviolet illumination on the direction of principal axis of gas-tight container not only, simultaneously, ultraviolet illumination also can reduce.And under the internal electrode situation opposite, then can not produce aforesaid situation with the outer electrode phase place.If the pitch of the unit grids of internal electrode part is set in 4mm or below the 4mm, then owing to partly can be covered by the strong zone of uitraviolet intensity of constituent parts lattice portion branch generation respectively between the paddy that ultraviolet illumination is low between the unit grids part, therefore the flatteness of the axial ultraviolet illumination of gas-tight container is when being significantly improved, and ultraviolet illumination also can improve.
And, because pulse lights a lamp and can produce strong afterglow luminescence, so help to improve ultraviolet illumination.
The bright circuit for lamp of high frequency is if voltage pulse output no matter remaining structure why, for example passes through to use the inverter of square wave output, can get the square wave pulse.But the inverter of use sinewave output also can get sinusoidal wave pulse.
Description of drawings
Fig. 1 is the configuration of a plurality of dielectric barrier discharge lamps of first embodiment of explanation dielectric barrier discharge lamp lighting device of the present invention and the schematic diagram of power supply state.
Fig. 2 is the part cutting front view and the left and right side figure of the dielectric barrier discharge lamp of first embodiment.
Fig. 3 is the front view of the luminous tube of first embodiment.
Fig. 4 is the central positive view of the amplification major part of first embodiment.
Fig. 5 is the amplification major part positive view of distolateral lamp socket of the non-power supply of first embodiment and bracing or strutting arrangement.
Fig. 6 is the cutaway view along the VI-VI ' line of Fig. 5.
Fig. 7 is the amplification view of the lamp body of first embodiment.
Fig. 8 is the right view of the lamp body of first embodiment.
Fig. 9 is the configuration of a plurality of dielectric barrier discharge lamps of second embodiment of dielectric barrier discharge lamp lighting device of the present invention and the state of coolant flow.
Figure 10 represents the positive view as the ultraviolet decontaminating apparatus of an embodiment of ultraviolet lamp of the present invention.
Figure 11 is the upward view of ultraviolet decontaminating apparatus.
Figure 12 is the cutaway view along the X-X ' line of Figure 11.
Symbol description
1～gas-tight container; 1a～hollow bulb; 1b～sealing; 1b1～molybdenum foil; 2～internal electrode; 2a～linking part; 2b～grid part; 2c～line part; 3,4～lead-in wire; 11～electrode body part; 12～reinforcement ring portion; 13～sealing ring; 14～lamp socket cylindrical shell; 15～clamping ring portion; 16～spool; 17～insulation disc; 18～insulation protection portion; 19～insulating joint; 20～flat spring; 21～the first arm; 22～the second arms; 23～installation/arrangements of terminal; 23a～installation/terminal fittings; 23b～carrying bolt; 30～lamp socket cylindrical shell; 31～clamping ring portion; 32～insulation disc; 35～installation/arrangements of terminal; 35a～installation/terminal fittings; 35b～bolt; 35c～construction bolt; 36～flat spring; 37～arm; 40～depressed part; 41～coolant channel; 41a～inflow entrance; 51～ultraviolet lamp body; 51a～ultraviolet irradiation chamber; 51b～power supply room; 51c～hinge; 51b1～handle; 51b2～handle; 51b3～protector; 52～lamp circuit;
EXF～dielectric barrier discharge lamp lighting device; EXL～medium barrier discharge light device; LT～luminous tube; OE～outer electrode; The lamp socket of LS1～supply side; SS1～first bracing or strutting arrangement; LS2～distolateral the lamp socket of non-power supply; SS2～second bracing or strutting arrangement; CB～lamp body; EU～medium barrier discharge light device unit; UVW～ultraviolet lamp; EX～medium barrier discharge light device unit; B1, B2～first and second lamp holder; BS1, BS2～first and second lamp head supporting device; LB～lamp body; T～voltage side power supply terminal platform.
Embodiment
Below, with reference to figure explanation specific embodiments of the invention.
Fig. 1 to Fig. 8 represents first embodiment of dielectric barrier discharge lamp lighting device of the present invention.Fig. 1 illustrates the configuration of a plurality of dielectric barrier discharge lamps and the schematic diagram of state.Fig. 2 is the part cutting front view and the left and right sides view of dielectric barrier discharge lamp.Fig. 3 is the front view of luminous tube.Fig. 4 is for amplifying the central positive view of major part.Fig. 5 is the amplification major part positive view of distolateral lamp socket of non-power supply and bracing or strutting arrangement.Fig. 6 is the cutaway view along the VI-VI ' line of Fig. 5.Fig. 7 is the amplification view of lamp body.Fig. 8 is the right side view of lamp body.
In each figure, dielectric barrier discharge lamp lighting device EXF is a plurality of, and in Fig. 1, the dielectric barrier discharge lamp unit EU of 4 lamps is closely in abutting connection with configuration.Each dielectric barrier discharge lamp unit EU is combined by indivedual single dielectric barrier discharge lamp EXL and lamp body CB.Dielectric barrier discharge lamp EXL total length is 1295mm, effective luminous long 1130mm.Below, explain at each inscape.
＜dielectric barrier discharge lamp EXL〉in the present embodiment, dielectric barrier discharge lamp EXL is made of luminous tube LT, outer electrode OE, the distolateral distolateral lamp socket LS2 and the second bracing or strutting arrangement SS2 of lamp socket LS1, the first bracing or strutting arrangement SS1, non-power supply of power supply.And T is a voltage side power supply terminal platform among the figure.
＜luminous tube LT〉luminous tube LT as shown in Figure 3, gas-tight container 1 generates gas, internal electrode 2 and 3,4 of a pair of lead-in wires by quasi-molecule and constitutes.
Gas-tight container 1 total length is 1200mm, is made of ultraviolet penetrability material, has the hollow bulb 1a of elongated, cylindrical of external diameter 18mm, internal diameter 16mm and the sealing 1b that is formed at hollow bulb 1a two ends.Sealing 1b is the inner punching press seal construction of burying molybdenum foil 1b1 underground.Near hollow bulb 1a one end, the exhaust sealing-off 1c of portion is outstanding from the side, and the exhaust sealing-off 1c of portion is forming on the position of gas-tight container 1 one end 40mm.
In the inside of the hollow bulb 1a of gas-tight container 1, enclose the xenon that generates gas as quasi-molecule.
Internal electrode 2 is made of linking part 2a, a plurality of unit grids part 2b and two ends line part 2c.Linking part 2a is the metal fine coiling that forms of the tungsten line by line footpath 0.26mm and form the structure of the coil 2a of external diameter 1.2mm as main body.Unit grid part 2b serves as for example many link portions that are disposed at the ring-type of linking part 2a of 15mm of interval with a constant pitch.Two ends line part 2c stretches at the two ends of linking part 2a and forms.Then, internal electrode 2 is welded on two ends line part 2c at the end of the molybdenum foil 1b1 of the sealing 1b that is formed at gas-tight container 1 two ends under the state of the tension force effect of about 2kg.The linking part 2a of internal electrode 2 is installed under the state of gas-tight container 1, by tension force stretching.
A pair of lead-in wire 3,4 and be embedded in the molybdenum foil 1b1 welding that the inner is formed at the sealing 1b at gas-tight container 1 two ends, expose to the outside from sealing 1b the bottom.But lead-in wire 4 is owing to form non-feeder ear, and gas-tight container 1 envelope is ended the back and cut off outside exposed division and become short size.And, as required, the exposed division after coating thermal endurance insulator and hiding conductive lambda line 4 cuts off.
＜outer electrode OE〉outer electrode OE mainly as shown in Figure 4, comprise electrode major part 11, strengthen ring portion 12 and sealing ring 13.And, about 220 ° of the cross-sectional openings angle of electrode body part 11, bend to the groove shape body that is substantially circular arc with highly purified aluminium sheet, leap is embedded in the outside of gas-tight container 1 towards the rough total length in internal electrode 2 zones of the gas-tight container 1 of luminous tube LT.Strengthen ring portion 12 and be made of conductive metal, an end is overlapped in the end of electrode body part 11 from upside, and the other end inserts in the opening of aftermentioned feeder ear lamp socket LS1.Sealing ring 13 is between strengthening ring portion 12 and outside towards gas-tight container 1, the sealing that the inside of feeder ear lamp socket LS1 is done waterproof, preserved moisture.
The lamp socket LS1 of＜feeder ear〉feeder ear lamp socket LS1 mainly as shown in Figure 4, have function to internal electrode 2 power supply of luminous tube LT, constituted by lamp socket cylindrical shell 14, clamp ring portion 15, spool 16, insulation disc 17 and insulation protection portion 18.Lamp socket cylindrical shell 14 embraces the end of luminous tube LT supply side for end cylindrical shell is arranged.And, have little opening in bottom center.Clamp ring portion 15 conductions and mechanically be fixed on the peristome of lamp socket cylindrical shell 14,, clamp the supply side end of luminous tube LT and be fixed on the lamp socket cylindrical shell 14 via reinforcement ring portion 12 and the sealing ring 13 of outer electrode OE.
Spool 16 conductions are connected between the lead-in wire 3 and installation/arrangements of terminal described later 23 of luminous tube LT derivation.Insulation disc 17 is that central authorities have the ceramic disk of smaller opening, and the bottom from the 14 insulation ground protections of lamp socket cylindrical shell from lamp socket cylindrical shell 14 is via the spool 16 of above-mentioned opening importing.Insulation protection portion 18 is the ceramic cylinder shape, by importing spool 16 in the lamp socket cylindrical shell 14 at internal run-through, is maintained fixed and insulate.
＜the first bracing or strutting arrangement SS1〉the first bracing or strutting arrangement SS1 mainly as shown in Figure 4, by the lamp socket LS1 of resilient support feeder ear.Then, the first bracing or strutting arrangement SS1 is made of insulating joint 19, flat spring 20, the first arm 21, second arm 22, installation/arrangements of terminal 23.
Insulating joint 19 1 ends are fixed on the front end of second arm 22, and board 19a is outstanding from the other end.And board 19a is to 22 insulation of second arm.
The flat spring 20 whole L fonts that are, the elastic force applying unit 20a of formation pars intermedia bending.And an end of flat spring 20 is connected with the lamp socket cylindrical shell 14 insulation ground of the distolateral lamp socket LS1 that powers via the insulating joint 19 and second arm 22.Then, the other end of flat spring 20 is fixed on installation/arrangements of terminal 23.
The bottom of the first arm 21 is welded on the rearward end of lamp socket cylindrical shell 14, and the insulation protection portion 18 of the lamp socket LS1 of feeder ear is fixed on the lamp socket cylindrical shell 14.
Second arm 22 mainly as shown in Figure 4, its bottom is welded on the leading section of lamp socket cylindrical shell 14 of the lamp socket LS1 of feeder ear.
Installation/arrangements of terminal 23 combines with lamp socket cylindrical shell 15 in the position of separating from lamp socket cylindrical shell 15, the lamp socket LS1 and the first bracing or strutting arrangement SS1 via feeder ear impose on luminous tube LT and outer electrode OE with elastic force, also have the function that is fixed on the voltage side power supply terminal platform T simultaneously.Installation/arrangements of terminal 23 comprises installation/terminal fittings 23a, carrying bolt 23b and construction bolt 23c.Installation/terminal fittings 23a one end is connected on flat spring 20 and the spool 16 by carrying bolt 23b, and the other end is installed on the voltage side power supply terminal platform T with the plumbness as icon by construction bolt 23c.Carrying bolt 23b is via the feeder ear of the distolateral lamp socket LS1 Supporting Media barrier discharge light device EXL of power supply, owing to have the function of terminal fittings, its plate face and medium barrier discharge light device EXL extend approximately abreast simultaneously.Carrying bolt 23b together is connected the other end of spool 16 and flat spring 20 on installation/terminal fittings 23a to machinery and conductivity.
The lamp socket LS2 that＜non-power supply is distolateral〉the distolateral lamp socket LS2 of non-power supply is mainly as shown in Figure 5, though construct similar with the lamp socket LS1 of feeder ear substantially, but can't power to internal electrode 2, constitute by lamp socket cylindrical shell 30, clamping ring portion 31 and insulation disc 32, can make outer electrode OE ground connection.
Lamp socket cylindrical shell 30 embraces the non-supply side end of luminous tube LT for bottom tube-like is arranged.
Clamp ring portion 31 as shown in Figure 6, constituted by two structures of cutting apart, link by a pair of fishbolt 31a, the reinforcement ring portion of outer electrode and sealing ring (indicate) conductivity ground and mechanically be connected the peristome of lamp socket cylindrical shell 30, waterproof, the anti-wetland lamp socket cylindrical shell 30 that is fixedly clamped on the non-supply side end of luminous tube LT simultaneously.
Insulation disc 32 is configured in the inboard of lamp socket cylindrical shell 30 bottoms, and the protection of insulation makes the lamp socket cylindrical shell 30 of lead-in wire 4 ground connection of the internal electrode 2 that is connected in luminous tube LT.
＜the second bracing or strutting arrangement SS2〉the second bracing or strutting arrangement SS2 mainly as shown in Figure 5, by the distolateral lamp socket LS2 of resilient support power supply.The second bracing or strutting arrangement SS2 is made of installation/arrangements of terminal 35, flat spring 36 and arm 37.
Installation/arrangements of terminal 35 comprises installation/terminal fittings 35a, bolt 35b and construction bolt 35c.Installation/terminal fittings 35a is by the distolateral lamp socket LS2 of non-power supply, with the outer electrode OE conductivity of medium barrier discharge light device EXL when being connected the earthing power supply terminal board, because the non-feeder ear of Supporting Media barrier discharge light device EXL, plate face and medium barrier discharge light device EXL extend generally abreast.Bolt 35b is connected flat spring 36 at the end of installation/terminal fittings 35a.Construction bolt 35c will install/is installed on the earthing power supply terminal board that does not indicate to the other end machinery of terminal fittings 35a and conductivity.
Flat spring 36 integral body are the L font, and the intermediate portion forms crooked elastic force applying unit 36a.And an end of flat spring 36 is connected on the lamp socket cylindrical shell 30 of the distolateral lamp socket LS2 of non-power supply by arm 37.Simultaneously, the other end of flat spring 36 is fixed on installation/terminal fittings 35a by terminal bolt 35b.The bottom of arm 37 is welded on the leading section of lamp socket cylindrical shell 30, and its front end is connected on the flat spring 36.
＜lamp body CB〉lamp body CB as shown in Figures 7 and 8, be elongate along luminous tube LT, gas-tight container 1 half following formation section that is embedded in it approximately is semicircular depressed part 40, forms the coolant channel 41 of hollow simultaneously in inside.Coolant channel 41 is to flow into from being configured in lamp body CB one distolateral inflow entrance 41a, to constitute from the mode that is configured in another distolateral flow export (not icon) outflow.And, effective length of illumination of the corresponding luminous tube LT of the length of lamp body CB.Furtherly, the 1c of exhaust sealing-off portion is configured on the position that the end of lamp body CB exposes.The exhaust sealing-off 1c of portion can be configured on any angular position of gas-tight container 1 periphery.
The arrangement of＜a plurality of dielectric barrier discharge lamps unit Eu〉a plurality of dielectric barrier discharge lamps unit Eu with the feeder ear of corresponding dielectric barrier discharge lamp EXL internal electrode about mutual mode of arranging arrange.That is, in Fig. 1, be configured in the right side (right part of lamp unit Eu) of Fig. 1 from the feeder ear of No. the 1st, last number formulary and No. 3, outer electrode is arranged on the left side (left part of lamp unit Eu) of Fig. 1.But outer electrode also can be simultaneously right side ground connection.Corresponding, Fig. 1 is positioned at the left side of Fig. 1 from the feeder ear of No. the 2nd, last number formulary and No. 4.And the utmost point of high frequency electric source S is connected with each feeder ear, another utmost point ground connection.
Fig. 9 is the configuration of a plurality of dielectric barrier discharge lamps of second embodiment of dielectric barrier discharge lamp lighting device of the present invention and the state of coolant flow.In the present embodiment, be distributed in about the inflow entrance 41a at two ends, the back side of lamp body CB and flow export 41b and arrange alternately.That is, in Fig. 9, be configured in the right side (right part of lamp unit Eu) of Fig. 9 from the inflow entrance 41a of No. the 1st, last number formulary and No. 3, flow export 41b is configured in the left side (left part of lamp unit Eu) of Fig. 9.Corresponding, Fig. 9 is positioned at the left side (left part of lamp unit Eu) of Fig. 9 from the inflow entrance 41a of No. the 2nd, last number formulary and No. 4.Wherein, the arrow among the figure is represented the circulating direction of cooling agent.
Figure 10 to Figure 12 represents the ultraviolet decontaminating apparatus as an embodiment of ultraviolet lamp of the present invention, and Figure 10 is a positive view, and Figure 11 is a upward view, and Figure 12 is along the profile of X-X ' line among Fig. 9.In each figure, give identical symbol and omit its explanation with Fig. 1 to Fig. 8 same section.Ultraviolet lamp UVW comprises ultraviolet lamp body 51, lamp circuit 52 and a plurality of medium barrier discharge light devices unit EU.
In the 51a of ultraviolet irradiation chamber, dispose a plurality of medium barrier discharge light device EXF described later.Ultraviolet irradiation chamber 51a is configured in the Handling device top of Work cleaning device regularly, simultaneously below for open, to workpiece (the not indicating) irradiation ultraviolet radiation by following below.In Figure 11, the position that adds oblique line is an effectively irradiation area of expression ultraviolet ray.
A plurality of medium barrier discharge light devices unit EX is the state configuration to adjoin each other in the 51a of ultraviolet irradiation chamber.But, for the ease of manufacturing, and the needs of cleaning, medium barrier discharge light device unit EU is dismantled and assembled.
And, circulate in the coolant channel of lamp body CB for making cooling water, be connected with the pipe arrangement of supplying with cooling water at inflow entrance, be connected with the pipe arrangement of water supply and sewage at flow export.
Claims (3)
1. a dielectric barrier discharge lamp lighting device is characterized in that, comprising:
The elongated tubular product such gas-tight container that constitutes by ultraviolet penetrability material; In gas-tight container, be provided with and from the internal electrode of feeder ear power supply along its direction of principal axis; The quasi-molecule that is enclosed in the gas-tight container generates gas; And be located at the gas-tight container outside, in gas-tight container, produce the outer electrode of dielectric barrier discharge with the internal electrode co-operating;
A plurality of dielectric barrier discharge lamps dispose side by side, and the feeder ear of its internal electrode is adjacency on the contrary mutually.
2. a dielectric barrier discharge lamp lighting device is characterized in that, comprises a plurality of dielectric barrier discharge lamps unit that is made of dielectric barrier discharge lamp and elongated lamp body;
Wherein, dielectric barrier discharge lamp, comprise the elongated tubular product such gas-tight container that constitutes by ultraviolet penetrability material, the internal electrode that in gas-tight container, is provided with along its direction of principal axis, the quasi-molecule of enclosing in the gas-tight container generates gas, and is located at the gas-tight container outside, produces the outer electrode of dielectric barrier discharge with the internal electrode co-operating in gas-tight container;
Elongated lamp body has the coolant channel that leads to another distolateral flow export from a distolateral inflow entrance, and is located on the length direction of dielectric barrier discharge lamp;
A plurality of dielectric barrier discharge lamps unit disposes side by side, and the inflow entrance that makes the lamp body cooling agent is adjacency on the contrary mutually.
3. a ultraviolet lamp is characterized in that, comprising:
Dielectric barrier discharge lamp lighting device as claimed in claim 1 or 2;
The ultraviolet lamp body of collocating medium barrier discharge lamp lighting apparatus; And
Be connected in above-mentioned dielectric barrier discharge lamp lighting device, and light the high-frequency lighting circuit of dielectric barrier discharge lamp.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003068974A JP4054699B2 (en) | 2003-03-13 | 2003-03-13 | Dielectric barrier discharge lamp illumination device and ultraviolet irradiation device |
| JP068974/2003 | 2003-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1531009A true CN1531009A (en) | 2004-09-22 |
| CN100511574C CN100511574C (en) | 2009-07-08 |
Family
ID=33286124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410039601XA Expired - Fee Related CN100511574C (en) | 2003-03-13 | 2004-03-12 | Medium barrier discahrge light device and ultraviolet illuminating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4054699B2 (en) |
| KR (1) | KR100615765B1 (en) |
| CN (1) | CN100511574C (en) |
| TW (1) | TW200421406A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101419896B (en) * | 2007-10-22 | 2013-01-23 | 优志旺电机株式会社 | Long arc discharge lamp and ultraviolet radiation device with the same |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4580246B2 (en) * | 2005-01-14 | 2010-11-10 | ハリソン東芝ライティング株式会社 | Ultraviolet light source lighting device and ultraviolet irradiation device |
| JP2010030196A (en) | 2008-07-30 | 2010-02-12 | Fujifilm Corp | Inkjet recording method |
| JP7139808B2 (en) * | 2018-09-13 | 2022-09-21 | 東芝ライテック株式会社 | barrier discharge lamp |
-
2003
- 2003-03-13 JP JP2003068974A patent/JP4054699B2/en not_active Expired - Fee Related
-
2004
- 2004-03-10 TW TW093106291A patent/TW200421406A/en unknown
- 2004-03-12 CN CNB200410039601XA patent/CN100511574C/en not_active Expired - Fee Related
- 2004-03-12 KR KR1020040017038A patent/KR100615765B1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101419896B (en) * | 2007-10-22 | 2013-01-23 | 优志旺电机株式会社 | Long arc discharge lamp and ultraviolet radiation device with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI299876B (en) | 2008-08-11 |
| JP4054699B2 (en) | 2008-02-27 |
| CN100511574C (en) | 2009-07-08 |
| TW200421406A (en) | 2004-10-16 |
| JP2004281149A (en) | 2004-10-07 |
| KR100615765B1 (en) | 2006-08-25 |
| KR20040081389A (en) | 2004-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1258930A (en) | Discharge lamp and bulb shape fluorescent lamp | |
| CN1591769A (en) | Quasi-molecular lampbulb | |
| CN1531009A (en) | Medium barrier discahrge light device and ultraviolet illuminating device | |
| CN100343944C (en) | Medium barrier discharge light device and ultraviolet illuminating device | |
| CN1747122A (en) | Small arc tube and low-pressure mercury discharge lamp | |
| TWI344320B (en) | Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating | |
| TW200606987A (en) | Dielectric barrier discharge excimer light source | |
| JP4977337B2 (en) | Dielectric barrier discharge lamp | |
| CN1645557A (en) | Dielctric shielded discharging lamp and ultraviolet radiating device | |
| JP3481170B2 (en) | Dielectric barrier discharge lamp | |
| CN112582251A (en) | Radio frequency electrodeless excimer curing lamp | |
| CN1805639A (en) | Ultraviolet sources ignition apparatus and ultraviolet illumination apparatus | |
| JP2004349181A (en) | Dielectric barrier discharge lamp device and ultraviolet ray irradiation device | |
| CN101047102A (en) | Discharge lamp device and illumination instrument | |
| RU2559806C1 (en) | Radiation source | |
| CN215731586U (en) | Excimer lamp | |
| JP2005209397A (en) | Dielectric barrier discharge lamp, and ultraviolet-ray irradiation device | |
| JP2004281142A (en) | Dielectric barrier discharge lamp lighting system and ultraviolet irradiation device | |
| JP2012195091A (en) | Discharge lamp | |
| CN216528747U (en) | Excimer lamp | |
| JP2005209398A (en) | Dielectric barrier discharge lamp, and ultraviolet-ray irradiation device | |
| CN208983198U (en) | A kind of energy-saving lamp of good heat dissipation effect | |
| JP2004103564A (en) | Excimer irradiation unit, excimer lamp tube, excimer irradiation line, and excimer lamp | |
| JP2006185656A (en) | Dielectric barrier discharge lamp and ultraviolet-ray irradiation device | |
| CN206441690U (en) | Discharge lamp |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090708 |