CN1941272A - Seal structure for short arc discharge lamp - Google Patents

Seal structure for short arc discharge lamp Download PDF

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Publication number
CN1941272A
CN1941272A CN 200610139398 CN200610139398A CN1941272A CN 1941272 A CN1941272 A CN 1941272A CN 200610139398 CN200610139398 CN 200610139398 CN 200610139398 A CN200610139398 A CN 200610139398A CN 1941272 A CN1941272 A CN 1941272A
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China
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mentioned
sealed tube
discharge lamp
arc discharge
short arc
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CN 200610139398
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CN100583383C (en
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加濑征彦
泽俊行
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Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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Abstract

The present invention provides a seal structure for short arc discharge lamp, to enhance the pressure resistance and thermal load immunity of a short arc discharge lamp to reduce the possibilities of breakage at the time of lighting and transportation. Many sheets of metal foil at a sealing section of a short arc discharge lamp are positioned not to overlap with each other on a circumference. A double sealing is performed using an inner first seal tube of the sealing section and an outer second seal tube. A value is obtained from the equation: lamp current value (A)/ {(number of sheets of metal foil)x(width of metal foil (mm))x(thickness of metal ring (mm))} is less than 2.08. The arc tube side end of the first seal tube is open in the shape of a trumpet. The first seal tube is 2 mm or less in thickness, which is equivalent to the size smaller than 2/3 of the second seal tube in thickness. A length from the arc tube side end of an internal glass component to the side end of the first seal tube is 5 to 12 mm.

Description

The hermetically-sealed construction of short arc discharge lamp
Technical field
The present invention relates to the hermetically-sealed construction of short arc discharge lamp, particularly relate in semiconductor and liquid crystal manufacturing field etc. the structure in the sealed tube of the short arc discharge lamp that uses.
Background technology
Short arc discharge lamp in the past has structure shown in Figure 10.In semiconductor and liquid crystal manufacturing field etc., be used as light source.In short arc discharge lamp, use the sealing support electrode, and keep the airtight conditions of luminous tube.Here, the sealing structure in the past short arc discharge lamp describes.
Between the anode-supported of supporting anodes 2 rod 4 and sealed tube 50, have inner glass parts 14, holding anode support stick 4.Anode-supported rod 4 is welded on the interior metal ring 24.Interior metal ring 24 is between inner glass parts 14 and glass bar 13.Many pieces of thickness is welded on the periphery of interior metal ring 24 smaller or equal to the metal forming 18 of 1mm.Also volume has the metal forming (not illustrating) of having carried out mold pressing processing on this periphery.Many pieces of metal formings 18 separate configuration respectively in a circumferential direction between glass bar 13 and sealed tube 50.Many pieces of metal formings 18 conduct mutually by welding interior metal ring 24 thereon.
Carry out depositedly between glass bar 13 and the sealed tube 50 by metal forming 18 is clipped in, realize the airtight conditions between discharge lamp inside and the outside.Many pieces of metal formings 18 are welded on the periphery of external metallization ring 25.Also volume has the metal forming (not illustrating) of having carried out mold pressing processing on this periphery.External metallization ring 25 is between outer glass parts 15 and glass bar 13.Lead-in wire rod 5 is welded on the external metallization ring 25, and rod 5 provides electric power from going between.The series of gold attribute parts that will offer electric power the anode 2 of discharge lamp inside from the lead-in wire rod 5 of discharge lamp are referred to as installing component with the parts that are made of the glass component that keeps these metallicity parts.The intensity of this sealing and discharge lamp and life-span close association.Below, enumerate some examples of prior art of the sealing structurally associated of short arc discharge lamp.
Patent documentation 1 disclosed " discharge lamp " is to suppress electrode support bar vibration in moving the way, do not power with the discharge lamp of the paper tinsel fracture of molybdenum paper tinsel.This discharge lamp is to have in the sealed tube that is connected with luminous tube, the electrode support bar that has electrode at front end is inserted the discharge lamp of the structure that the tubular element of the quartz glass system of leading to keeps.Make the external diameter in a distolateral luminous tube side end zone of tubular element bigger than the external diameter of another distolateral end regions.
Patent documentation 2 disclosed " short-arc mercury lamp " is the short-arc mercury lamp that minimizing occurs in the interior stress of sealing or strain realizes long lifetime, is the short-arc mercury lamp that does not have electrode axis to depart from the sealing process.Pair of electrodes is arranged opposite in the discharge space of illuminating part.In discharge space, enclose mercury and rare gas are arranged.After the two ends of illuminating part, sealing is arranged.Use comes support electrode by the electrode plug that sealing keeps.Between electrode plug and sealing, get involved quartz glass body is arranged.The interior metal cylinder is connected with the electrode plug.Sealing is connected with the interior metal cylinder with metal forming.The external metallization cylinder is connected with the interior metal cylinder with metal forming by sealing.Foreign current imports body and is connected with the external metallization cylinder.Between interior metal cylinder and external metallization cylinder, get involved the gas-tight seal quartz glass body is arranged.When the thickness of establishing the interior metal cylinder is T1, the thickness of external metallization cylinder is T2, and sealing is satisfied: 2≤T1≤L/6,2≤T2≤L/6 when being L with the length of metal forming.
Patent documentation 3 disclosed " discharge lamp " is that the glass component or the inner lead rod that prevent to be configured in the sealed tube portion keep with simplified generation crackle, and then can prevent gas leakage or the breakage of sealed tube portion, can obtain the discharge lamp in long useful life.The glass component that column is arranged in the internal configurations of the sealed tube portion of seal.Dispose metallic plate around a side of portion's side at glass component in the face of emitting space.Be configured to make the cardinal extremity of inner lead rod to be fixed on the metallic plate, and make front end extend to luminous tube in portion.Front end at the inner lead rod is provided with electrode.The inner lead rod that disposes glass between the inner peripheral surface of the periphery of inner lead rod and sealed tube portion keeps using cylindrical shell.The outer distolateral opposite side in the face of sealed tube portion at glass component disposes the outside lead rod.Metal forming is extended along the periphery of glass component, and the one end is connected with metallic plate, and its other end is electrically connected with the outside lead rod.Between glass component and metallic plate, dispose metal forming.
When patent documentation 4 disclosed " short arc discharge lamp " is a natural cooling behind the paper tinsel sealing process, make sealed tube etc. the short arc discharge lamp of crackle not occur.At cylindrical outer peripheral face, on axis direction, dispose many pieces of power supply molybdenum foils, use sealed tube to carry out the paper tinsel sealing.Butt is configured on the cylindrical end face and has welded power supply has the deposited molybdenum foil that prevents to use with intervention between the side face of the 1st current collection disk of the end of molybdenum foil and the sealed tube inwall.Between the side face and sealed tube inwall of the 2nd current collection disk, between cylindrical both ends of the surface and the 1st current collection disk and the 2nd current collection disk, also getting involved the deposited molybdenum foil that prevents to use between the 1st current collection disk and the 1st hollow wall thickness pipe and between the 2nd current collection disk and the 2nd hollow wall thickness pipe.
[patent documentation 1] TOHKEMY 2000-003695 communique
[patent documentation 2] TOHKEMY 2000-173544 communique
No. 3228073 communiques of [patent documentation 3] Japan Patent
No. 3475815 communiques of [patent documentation 4] Japan Patent
Yet the sealing structure of short arc discharge lamp in the past has following problem.Because the electric current that flows in the electroconductive component (for example, becket) increases, thereby the heating that is caused by Joule heat is quite big.Therefore, surpass 1200 ℃ of the annealing points of quartz glass owing to the radiant heat of the Joule heat in when energising and discharge makes the sealing temperature sometimes, discharge lamp is damaged.And, compare with the inner glass parts when greatly and quite thin when the becket external diameter, sealing takes place in manufacturing process easily to be destroyed.And,, thereby when discharge lamp transports, be damaged easily because electrode weight load imposes on the conductive metal paper tinsel.
Summary of the invention
The objective of the invention is to solve above-mentioned problem in the past, be not easy to destroy when the bright lamp of short arc discharge lamp or in moving, and improve resistance to pressure and heat-resisting load.
In order to solve above-mentioned problem, in the present invention, provide a kind of by sealed tube being deposited over the hermetically-sealed construction of the short arc discharge lamp that seals on outer glass parts, metal forming, interior metal ring, external metallization ring, glass bar and the inner glass parts, when piece number of establishing metal forming is n, the width of metal forming is W, and the external diameter of becket is OD Ring(mm), the thickness of becket is t RingAnd lamp current value satisfies when being I (A) (mm):
I/(n×W×t ring)<2.08
n×W<π×OD ring
And, make the external diameter of interior metal ring, external metallization ring, glass bar, inner glass parts and outer glass parts identical.Sealed tube is by as constituting near the 1st sealed tube of the inboard of the side of axle with as the 2nd sealed tube in the outside of abaxial side, and uses the 1st sealed tube and the 2nd sealed tube to carry out dual-seal.The luminous tube side end that makes the 1st sealed tube is to be the horn-like shape of opening.When the thickness of establishing the 1st sealed tube is t Inside(mm), and the thickness of the 2nd sealed tube be t Outside(mm) time, satisfy:
1.5t inside<t outside
t inside≤2。
The value of the length a (mm) of the luminous tube side end face of luminous tube side end face to the 1 sealed tube of glass component internally is set at the scope of 5<a<12.Between the luminous tube side end face of luminous tube and the 1st sealed tube, be provided with thinner wall section.
By above-mentioned formation, can improve interior pressure of destruction of the sealing of short arc discharge lamp.And, the patience of heat load is also improved.And, be not easy to take place in the discharge lamp light or the destruction in moving.Particularly, the fail safe of the discharge lamp during the bright lamp of high input significantly improves.
Description of drawings
Fig. 1 is the summary outside drawing of the short arc discharge lamp in the embodiments of the invention.
Fig. 2 is the figure of the installation portion of the short arc discharge lamp in the embodiments of the invention.
Fig. 3 is the partial enlarged drawing of the installation portion of the short arc discharge lamp in the embodiments of the invention.
Fig. 4 is the curve chart that the relation of the electric current of the short arc discharge lamp in the embodiments of the invention and the outer surface temperature peak of sealing is shown.
Fig. 5 is the figure that the state in the 1st sealed tube that the installing component of the short arc discharge lamp in the embodiments of the invention is enclosed in is shown.
Fig. 6 is the figure that the state in the 2nd sealed tube that the installing component with horn shape of the short arc discharge lamp in the embodiments of the invention is inserted in is shown.
Fig. 7 is the figure that the state in the 2nd sealed tube that the installing component of the short arc discharge lamp in the embodiments of the invention is enclosed in is shown.
Fig. 8 is the length and the curve chart that destroys interior relation of pressing that the flare of the short arc discharge lamp in the embodiments of the invention is shown.
Fig. 9 is the curve chart that the relation of the input electric power of the short arc discharge lamp in the embodiments of the invention and sealing temperature is shown.
Figure 10 is the summary outside drawing of discharge lamp in the past.
Embodiment
Below, be elaborated to being used to implement best mode of the present invention with reference to Fig. 1~Fig. 9.
[embodiment]
Embodiments of the invention are a kind of short arc discharge lamps, this discharge lamp makes many pieces of metal formings not overlapping on circumference, and use the 1st inboard sealed tube and the 2nd sealed tube in the outside to carry out dual-seal, the value that makes lamp current value (A)/{ (metal forming piece number) * (metal forming width (mm)) * (metallic ring thickness (mm)) } is less than 2.08, make the luminous tube side end employing of the 1st sealed tube be the horn-like shape of opening, the thickness that makes the 1st sealed tube is smaller or equal to 2mm and 2/3 thin than the thickness of the 2nd sealed tube, and making internally, the length of the end face of end face to the 1 sealed tube of the luminous tube side of glass component is 5~12mm.
Fig. 1 is the summary outside drawing of the short arc discharge lamp in the embodiments of the invention.In Fig. 1, luminous tube 1 is a pipe of having enclosed the quartz glass system of mercury.Anode 2 is positive lateral electrodes.Negative electrode 3 is minus side electrodes.
Fig. 2 is the figure of the installation portion of short arc discharge lamp.In Fig. 2, anode-supported rod 4 is hardwares of supporting anodes.Lead-in wire rod 5 is the electroconductive members that are used for supply capability.The 1st sealed tube 11 is glass components cylindraceous that gas-tight seal is used.The 2nd sealed tube 12 is cylindric parts of the prolongation of luminous tube.Glass bar 13 is glass components that the lead-in wire rod is connected with the anode-supported bar structure.Inner glass parts 14 are glass components of holding anode support stick.Outer glass parts 15 are the glass components that keep the lead-in wire rod.Interior metal ring 24 is molybdenum system members that anode-supported rod and metal forming are electrically connected.External metallization ring 25 is molybdenum system members that lead-in wire rod and metal forming are electrically connected.Horn shape portion 31 is ends of the lamp private side of the 1st sealed tube, is the part that is the funnel-form expansion.Discharge space S encloses to have mercury vapor to produce the space of discharge.
Fig. 3 is the partial enlarged drawing of the installation portion of short arc discharge lamp.In Fig. 3, junction surface 32 is the sphere portion of luminous tube and the seam of the 2nd sealed tube.End face 33 is ends of the lamp private side of the 1st sealed tube.Electrode side end face 34 is ends of the lamp private side of inner glass parts.Exposed portions serve 36 is parts that the 2nd sealed tube exposes in discharge space.t InsideBe the thickness of the 1st sealed tube.t OutsideBe the thickness of the 2nd sealed tube.
Fig. 4 is the curve chart that the relation of the electric current of short arc discharge lamp and the outer surface temperature peak of sealing is shown.Fig. 5 is the figure that the state in the 1st sealed tube that the installing component of short arc discharge lamp is enclosed in is shown.In Fig. 5, the 1st sealed tube 41 is the 1st sealed tubes before the encapsulation.Fig. 6 is the figure that the state in the 2nd sealed tube that the installing component with horn shape of short arc discharge lamp is inserted in is shown.In Fig. 6, the 2nd sealed tube 42 is the 2nd sealed tubes before the encapsulation.Fig. 7 is the figure that the state in the 2nd sealed tube that the installing component of short arc discharge lamp is enclosed in is shown.Fig. 8 is the length and the curve chart that destroys interior relation of pressing that the flare of short arc discharge lamp is shown.Fig. 9 is the curve chart that the relation of the input electric power of short arc discharge lamp and sealing temperature is shown.
Structure to the short arc discharge lamp of the present invention of above-mentioned formation is elaborated.At first, with reference to Fig. 1 the overall structure of short arc discharge lamp is described.The luminous tube 1 that short arc discharge lamp has central portion to expand has relative an antianode 2 and negative electrode 3 in luminous tube 1.This short arc discharge lamp has installation portion, this installation portion by from the discharge lamp outside to the series of gold attribute parts of the electrode supply capability of discharge lamp inside with keep the glass component of these metallicity parts to constitute.
Below, with reference to Fig. 2 and Fig. 3 installation portion structure is described.Between the 2nd sealed tube 12 that is connected with luminous tube 1 and installing component, get involved the 1st sealed tube 11 is arranged.It is deposited that installing component and the 1st sealed tube 11 use burners etc. to heat, and the 1st sealed tube 11 and the 2nd sealed tube 12 to use burners etc. to heat deposited, and be sealed to the airtight conditions of keeping between luminous tube inside and the outside.The 1st sealed tube 11 has the horn shape that diameter increases towards end face 33.
Below, describe with reference to the curve chart of Fig. 4 becket installing component.Fig. 4 is illustrated in the relation to the temperature peak of electric current under the situation of 18 energisings of one piece of metal forming in the discharge lamp sealing and sealing outside.Near metal forming 18 and interior metal ring 24 solder joints, the sealing temperature reaches the highest.In the sealing of embodiment, the temperature that is caused by energising rises and is significantly suppressed, and also can not destroy even rise in the temperature of sealing under 1200 ℃ the situation.The annealing point of quartz glass is near 1200 ℃.During energising, be necessary the maximum temperature in the sealing is suppressed at this below temperature.If the current density of metal forming 18 and interior metal ring 24 engaging portion is ρ.This current density ρ can obtain from formula (1), and wherein, establishing electric current is I (A), and the width of metal forming 18 is W (mm), and piece number of metal forming 18 is n, and the thickness of becket is t Ring(mm).
ρ=I/(n×W×t ring) (1)
Therefore, according to the curve chart of the experimental result of Fig. 4, when the electric current of 100 (A) flows into one piece of metal forming, it is 1200 ℃.And, according to table 2, if establish width W=12 (mm) of metal forming 18, piece number n=1 of metal forming 18, and the thickness t of becket Ring=4 (mm), the current density ρ when then the temperature of sealing is 1200 ℃ is 2.08 (A/mm according to formula (1) 2).
That is, according to experimental result, when the current density at junction surface less than 2.08 (A/mm 2) time, the maximum temperature in the sealing is no more than 1200 ℃, as long as thereby current density ρ satisfy the relation of formula (2).
ρ=I/(n×W×t ring)<2.08 (2)
If the external diameter of interior metal ring 24 is OD Ring(mm), in order to prevent overlapping between the metal forming, as long as the width of metal forming amounts to the circumferential length smaller or equal to becket, thereby these values are necessary to satisfy the relation of formula (3).
n×W<π×OD ring (3)
Therefore, so long as satisfy the sealing of formula (2) and (3), the metal forming 18 in the sealing just can not be overlapping.Simultaneously, the temperature during energising can not reach the annealing point of quartz glass, can obtain destroying more resistive sealing.
The external diameter of inner glass parts 14 and outer glass parts 15 when ignoring metal foil thickness, expectation be to have the value that equates with the becket external diameter.It is the reasons are as follows.To be configured in the operation that interior electrode of sealing or glass component etc. are assembled before can being reduced at sealing.Can obtain the inner big outside airtight conditions of luminous tube more reliably.Prevent the becket oxidation, the operation when pipe box is installed becomes easy.
Below, with reference to Fig. 5, Fig. 6 and Fig. 7, use the operation of the installing component of becket to describe to sealing.Fig. 5 is the figure that the state in the 1st sealed tube 41 that the installing component that uses becket is enclosed in is shown.Installing component is enclosed in the 1st sealed tube 41, makes in the 1st sealed tube to be in negative pressure state, use burner etc. heats, and carries out the 1st sealed tube and installing component deposited.Use burner etc. that the 1st sealed tube 11 is heated and come undergauge, deposited at least electrode side end face to inner glass parts 14.When deposited insufficient between the 1st sealed tube 11 and the inner glass parts 14, the starting point of breaking when becoming lamp and lighting.Melt-coating part between the 1st sealed tube 11 and the inner glass parts 14 is necessary fully to heat break-in.The 1st sealed tube 11 that is deposited on the inner glass parts 14 is the position cut-out of a (mm) in the electrode side end face 34 of distance inner glass parts 14.
In addition, be under the situation of diameter greater than the external diameter of inner glass parts of the 1st sealed tube 11 of position of a (mm) in distance electrode side end face 34, the diameter that forms the 1st sealed tube is the horn shape that increases towards the direction of principal axis of anode 2 sides of the electrode side end face 34 of glass component 14 internally.And,, also can make this horn shape even, make 11 hole enlargements of the 1st sealed tube using burner etc. to when being deposited over the 1st sealed tube 11 on the inner glass parts 14 by undergauge and heating.
Fig. 6 illustrates the position that at the electrode end surface of distance inner glass parts is a (mm) is cut off the 1st sealed tube in the figure that the installing component that forms horn shape is inserted in the state in the 2nd sealed tube 42.Fig. 7 illustrates the installing component that the position that at the electrode end surface of distance inner glass parts is a (mm) is cut off the 1st sealed tube and is enclosed in the 2nd sealed tube 42, and anode 2 is configured in state on the desired locations in the discharge space S.Make the 2nd sealed tube interior (in the luminous tube) be in negative pressure state, use burner etc. heats, and makes the 2nd sealed tube and the 1st sealed tube deposited.Equally, for negative electrode relative in discharge space 3, seal too.
[table 1]
Test film Thickness (mm) Press in destroying * (MPa) Safety coefficient (being design basis more than 1.5) Thickness as outside/inboard thickness
The 1st sealed tube The 2nd sealed tube
Embodiment
1 3 4.6 1.84 3.0
4 4.7 1.88 4.0
5 5.3 2.12 5.0
2 3 3.9 1.56 1.5
4 4.3 1.72 2.0
5 4.4 1.76 2.5
3 3 3.4 1.36 1.5
4 2.0 0.80 2.0
5 1.7 0.68 2.5
Conventional example 0 4 1.52 2.0
*) to press in destroying be the average of 10 test films
Below, describe with reference to the thickness of table 1 pair the 1st sealed tube 11 and the 2nd sealed tube 12.Table 1 is in the hydrostatic test of the high-pressure state of having simulated discharge lamp, obtains the table of pressing in destroying with the relation of the thickness of the 1st sealed tube 11 of sealing and the 2nd sealed tube.From the result shown in the table 1, by the combination of the 1st sealed tube 11 and the 2nd sealed tube 12, press in the destruction compared with in the past hermetically-sealed construction, can make and press liter in the destruction.Has the tendency that the 1st sealed tube 11 is thick more, the interior pressure of destruction descends more.As long as in press the interior pressure of pressures/effect in the destruction do the time spent value more than or equal to 1.5, then when bright lamp, just be not easy to destroy, this is known from experience in the past.If establishing the thickness of the 1st sealed tube 11 is t Inside(mm), the thickness of the 2nd sealed tube 12 is t Outside(mm), and the interior pressure during bright lamp is to the maximum about 2.5MPa, then as known from Table 1, and by satisfying 1.5t Inside<t OutsideAnd t Inside≤ 2 relation can make anti-destructiveness significantly improve.
Below, the length a (mm) to flare describes with reference to the curve chart of Fig. 8.Fig. 8 is the table of the relation of pressure in the destruction that illustrates in length a shown in Figure 3 (mm) and the hydrostatic test.The thickness of the 1st sealed tube 11 is changed according to 1~3 (mm), and the thickness that makes the 2nd sealed tube 12 is 4 (mm).From the result of Fig. 8 as can be known, by making suitableization of length a (mm), resistance to pressure is improved.Promptly as can be known, under the situation of value of length a (mm), and compare anti-destructive the raising smaller or equal to the situation of 5 (mm) more than or equal to 5 (mm).When a value during more than or equal to 12 (mm), near the mercury when bright lamp is not easy evaporation.Therefore, by being set at the scope of 5<a<12, the rising characteristic deterioration in the time of can not making bright lamp can improve and press in destroying.
Preferably, between the end face 33 of the junction surface 32 of luminous tube 1 and the 2nd sealed tube 12 and the 1st sealed tube 11, the exposed portions serve 36 that the 2nd sealed tube exposes is set in discharge space.This be the reasons are as follows.When the end face 33 of the junction surface 32 of luminous tube 1 and the 2nd sealed tube 12 and the 1st sealed tube 11 near the time, the heat of the burner owing to making the 2nd sealed tube 12 undergauges etc. makes the luminous tube distortion sometimes, and the value as commodity is significantly descended.Exposed portions serve 36 only is the thickness of the 2nd sealed tube, because it is thin to compare with the part of dual-seal, thereby the minimizing of the heat conduction from luminous tube 1 to sealing, the temperature that also can suppress sealing rises.And, by being set at, the thickness of glass near the sealing of inner glass parts 14 makes the 1st sealed tube 11 and the overlapping thickness of the 2nd sealed tube 12, can increase sealing intensity at heavy electrode (particularly anode).
Luminous tube side end face 33 by making the 1st sealed tube 11 is for horn-like, can make the 1st sealed tube 11 and the 2nd sealed tube 12 deposited smoothly in the sealing operation of the heat of using burner etc.Because adaptation improves, thereby can prevent from the crackle that takes place from the end face 33 of the melt-coating part of the 1st sealed tube 11 and the 2nd sealed tube 12 to prevent to break by the discharge lamp that crackle causes.And the end face 33 by making the 1st sealed tube 11 is for horn-like, thereby even under the situation of using the 2nd big slightly sealed tube of internal diameter of comparing with the external diameter of the 1st sealed tube 11 to seal, can prevent that also the central shaft of electrode from departing from the central shaft of sealed tube.The periphery of electrode can not contact with the sealed tube inwall, can remain in the 2nd sealed tube.Effective especially to situation that the electrode that carried out Surface Machining is not damaged.Table 2 illustrates the size of sealing parts and the example of material.In addition, in the present embodiment, each sealing uses six pieces of metal formings 18.
[table 2]
Name of parts External diameter Total length Width Thickness Material
Metal forming 18 - - 12 0.03 Molybdenum
Becket 26 4 - - Molybdenum
Inner glass parts 14 26 32 - - Quartz glass
Outer glass parts 15 26 75 - - Quartz glass
Unit (mm)
Below, describe with reference to the curve chart of Fig. 9 relation electric power and temperature.Make three discharge lamps, make its bright under the same conditions lamp, use the radiation thermometer to measure the interior temperature of sealing.Fig. 9 illustrates the electric power that is input to discharge lamp and the relation of sealing temperature.From the temperature measuring result of sealing as can be known, the sealing of embodiment is compared with the discharge lamp of conventional example, and the sealing temperature during same power is low.Therefore, the sealing of embodiment is not easy to take place the destruction that caused by heat load, compares with the lamp of conventional example, to the patience height of heat load.As can be known, when discharge lamp input electric power further improved, the effect performance significantly.
[table 3]
The electrode of drop shutter test departs from the summary that destroys with sealing
No. Anode departs from (mm) Negative electrode departs from (mm) Sealing destroys The sealing specification
1 1.2 0.8 (anode-side) arranged Conventional example
2 1.3 0.7 (anode-side) arranged
3 1.5 0.8 (anode-side) arranged
4 1 0.9 Do not have
5 1.8 0.6 (anode-side) arranged
6 0.2 0 Do not have Embodiment
7 0.1 0 Do not have
8 0.1 0.1 Do not have
9 0 0.2 Do not have
10 0.2 0.1 Do not have
Below, describe with reference to pair the fall anti-destructiveness of situation of table 3.Bring the influence of destruction to investigate to the load that when mobile, acts on lamp.The lamp that will have the sealing of conventional example and embodiment is packed, and makes the experiment of the impact generation effect that causes by falling.The lamp that makes packaging is from the 1m high falling, the variation of the electrode position before and after investigation is fallen and whether destroying from sealing.Table 3 is summaries of experimental result.As can be known, so long as have the lamp of the sealing structure of embodiment,, just have than conventional example excellent characteristic at when carrying, waiting the electrode that causes to depart from or sealing destruction by falling.
As mentioned above, in an embodiment of the present invention, because the sealing of short arc discharge lamp is constituted: make many pieces of metal formings not overlapping on circumference, and use the 1st inboard sealed tube and the 2nd sealed tube in the outside to carry out dual-seal, the value that makes lamp current value (A)/{ (metal forming piece number) * (metal forming width (mm)) * (metallic ring thickness (mm)) } is less than 2.08, make the luminous tube side end employing of the 1st sealed tube be the horn-like shape of opening, the thickness that makes the 1st sealed tube is smaller or equal to 2mm and 2/3 thin than the thickness of the 2nd sealed tube, and make internally that the length of luminous tube side end face to the 1 sealed tube end face of glass component is 5~12mm, thereby the interior pressure of the destruction that can improve sealing, patience to heat load also improves, and is not easy to take place in the bright lamp or the destruction in moving.
Short arc discharge lamp of the present invention is suitable as resistance to pressure and heat-resisting load height most, when bright lamp or the short arc discharge lamp that is not easy to destroy in moving.

Claims (7)

1. the hermetically-sealed construction of a short arc discharge lamp, this short arc discharge lamp has: the luminous tube of glass, the sealed tube of the glass that is connected with above-mentioned luminous tube, be sealed in the anode in the above-mentioned luminous tube, support the metal anode-supported rod of above-mentioned anode, be sealed in the negative electrode in the above-mentioned luminous tube, support the metal cathode support bar of above-mentioned negative electrode, the interior metal ring of the molybdenum system that is electrically connected with above-mentioned male or female, be used for electric power is offered the lead-in wire rod of above-mentioned male or female, the external metallization ring of the molybdenum system that is electrically connected with above-mentioned lead-in wire rod, many pieces of metal formings that are electrically connected with the circumferential part of above-mentioned interior metal ring and said external becket, support the outer glass parts of above-mentioned lead-in wire rod, support above-mentioned lead-in wire rod, above-mentioned interior metal ring, the said external becket, above-mentioned anode-supported rod or above-mentioned cathode support bar, and the glass bar of above-mentioned metal forming, and the inner glass parts that support above-mentioned anode-supported rod or above-mentioned cathode support bar, this short arc discharge lamp keeps discharge condition by direct current power, the sealing structure is in this short arc discharge lamp, by above-mentioned sealed tube is deposited over the said external glass component, above-mentioned metal forming, above-mentioned interior metal ring, the said external becket, the hermetically-sealed construction that seals on above-mentioned glass bar and the above-mentioned inner glass parts, it is characterized in that, when piece number of establishing above-mentioned metal forming is n, the width of above-mentioned metal forming is W, and the external diameter of above-mentioned becket is OD Ring(mm), the thickness of above-mentioned becket is t RingAnd lamp current value satisfies when being I (A) (mm):
I/(n×W×t ring)<2.08
n×W<π×OD ring
2. the hermetically-sealed construction of short arc discharge lamp according to claim 1 is characterized in that, the external diameter of above-mentioned interior metal ring, said external becket, above-mentioned glass bar, above-mentioned inner glass parts and said external glass component is identical.
3. the hermetically-sealed construction of short arc discharge lamp according to claim 1 and 2, it is characterized in that, above-mentioned sealed tube is by as constituting near the 1st sealed tube of the inboard of the side of axle with as the 2nd sealed tube in the outside of abaxial side, and uses above-mentioned the 1st sealed tube and above-mentioned the 2nd sealed tube to carry out dual-seal.
4. the hermetically-sealed construction of short arc discharge lamp according to claim 3 is characterized in that, the luminous tube side end that makes above-mentioned the 1st sealed tube is to be the horn-like shape of opening.
5. according to the hermetically-sealed construction of claim 3 or 4 described short arc discharge lamps, it is characterized in that, when the thickness of establishing above-mentioned the 1st sealed tube is t Inside(mm), and the thickness of above-mentioned the 2nd sealed tube be t Outside(mm) time, satisfy:
1.5t inside<t outside
t inside≤2。
6. according to the hermetically-sealed construction of any described short arc discharge lamp in the claim 3~6, it is characterized in that, the scope that is set at 5<a<12 from the luminous tube side end face of above-mentioned inner glass parts to the value of the length a (mm) of the luminous tube side end face of above-mentioned the 1st sealed tube.
7. according to the hermetically-sealed construction of any described short arc discharge lamp in the claim 3~6, it is characterized in that, between the luminous tube side end face of above-mentioned luminous tube and above-mentioned the 1st sealed tube, be provided with thinner wall section.
CN200610139398A 2005-09-27 2006-09-27 Seal structure for short arc discharge lamp Active CN100583383C (en)

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CN100583383C (en) 2010-01-20
JP2007095328A (en) 2007-04-12

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