CN101416316B - 混合晶向沟道场效应晶体管 - Google Patents

混合晶向沟道场效应晶体管 Download PDF

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Publication number
CN101416316B
CN101416316B CN2006800142167A CN200680014216A CN101416316B CN 101416316 B CN101416316 B CN 101416316B CN 2006800142167 A CN2006800142167 A CN 2006800142167A CN 200680014216 A CN200680014216 A CN 200680014216A CN 101416316 B CN101416316 B CN 101416316B
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China
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source
semiconductor
crystal orientation
effect transistor
region
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Expired - Fee Related
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CN2006800142167A
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English (en)
Chinese (zh)
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CN101416316A (zh
Inventor
约耳·P.·德索扎
德温得拉·K.·萨达纳
凯瑟琳·L.·萨恩格
宋均镛
杨敏
尹海洲
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Core Usa Second LLC
GlobalFoundries Inc
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International Business Machines Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/021—Forming source or drain recesses by etching e.g. recessing by etching and then refilling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H10D62/405—Orientations of crystalline planes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0167—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/08—Manufacture or treatment characterised by using material-based technologies using combinations of technologies, e.g. using both Si and SiC technologies or using both Si and Group III-V technologies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85—Complementary IGFETs, e.g. CMOS
    • H10D84/856—Complementary IGFETs, e.g. CMOS the complementary IGFETs having different architectures than each other, e.g. high-voltage and low-voltage CMOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI

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  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Recrystallisation Techniques (AREA)
CN2006800142167A 2005-04-27 2006-04-21 混合晶向沟道场效应晶体管 Expired - Fee Related CN101416316B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/116,053 2005-04-27
US11/116,053 US7465992B2 (en) 2005-04-27 2005-04-27 Field effect transistor with mixed-crystal-orientation channel and source/drain regions
PCT/US2006/015107 WO2006116098A2 (en) 2005-04-27 2006-04-21 Mixed -crystal-orientation channel field effect transistors

Publications (2)

Publication Number Publication Date
CN101416316A CN101416316A (zh) 2009-04-22
CN101416316B true CN101416316B (zh) 2011-06-29

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Country Status (6)

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US (1) US7465992B2 (enExample)
EP (1) EP1875508A4 (enExample)
JP (1) JP4474479B2 (enExample)
CN (1) CN101416316B (enExample)
TW (1) TWI373135B (enExample)
WO (1) WO2006116098A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7531392B2 (en) * 2006-02-27 2009-05-12 International Business Machines Corporation Multi-orientation semiconductor-on-insulator (SOI) substrate, and method of fabricating same
US20070224785A1 (en) * 2006-03-21 2007-09-27 Liu Mark Y Strain-inducing film formation by liquid-phase epitaxial re-growth
US7642197B2 (en) * 2007-07-09 2010-01-05 Texas Instruments Incorporated Method to improve performance of secondary active components in an esige CMOS technology
US20090057816A1 (en) * 2007-08-29 2009-03-05 Angelo Pinto Method to reduce residual sti corner defects generated during spe in the fabrication of nano-scale cmos transistors using dsb substrate and hot technology
JP5178103B2 (ja) * 2007-09-12 2013-04-10 株式会社東芝 半導体装置およびその製造方法
US20090283829A1 (en) * 2008-05-13 2009-11-19 International Business Machines Corporation Finfet with a v-shaped channel
JP2011146691A (ja) * 2009-12-15 2011-07-28 Sumitomo Chemical Co Ltd 半導体基板、半導体デバイスおよび半導体基板の製造方法
US9577079B2 (en) * 2009-12-17 2017-02-21 Infineon Technologies Ag Tunnel field effect transistors
CN102543744B (zh) * 2010-12-29 2014-12-24 中芯国际集成电路制造(北京)有限公司 晶体管及其制作方法
US8878251B2 (en) 2012-10-17 2014-11-04 Seoul National University R&Db Foundation Silicon-compatible compound junctionless field effect transistor
US9263586B2 (en) 2014-06-06 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Quantum well fin-like field effect transistor (QWFinFET) having a two-section combo QW structure
US9520496B2 (en) * 2014-12-30 2016-12-13 International Business Machines Corporation Charge carrier transport facilitated by strain
US9768254B2 (en) * 2015-07-30 2017-09-19 International Business Machines Corporation Leakage-free implantation-free ETSOI transistors
KR102618493B1 (ko) 2018-08-03 2023-12-27 삼성전자주식회사 반도체 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020130378A1 (en) * 2001-03-15 2002-09-19 Leonard Forbes Technique to mitigate short channel effects with vertical gate transistor with different gate materials
US20040173812A1 (en) * 2003-03-07 2004-09-09 Amberwave Systems Corporation Shallow trench isolation process
US20040217352A1 (en) * 2003-04-29 2004-11-04 Micron Technology, Inc. Strained semiconductor by wafer bonding with misorientation
CN1581497A (zh) * 2003-08-05 2005-02-16 国际商业机器公司 采用晶片键合和simox工艺的不同晶体取向自对准soi
CN1591826A (zh) * 2003-08-25 2005-03-09 国际商业机器公司 集成半导体结构和应变绝缘硅的制造方法及应变绝缘硅

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JPH04335538A (ja) * 1991-05-10 1992-11-24 Mitsubishi Electric Corp 半導体装置およびその製造方法
US7329923B2 (en) * 2003-06-17 2008-02-12 International Business Machines Corporation High-performance CMOS devices on hybrid crystal oriented substrates
US7034362B2 (en) * 2003-10-17 2006-04-25 International Business Machines Corporation Double silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) structures

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020130378A1 (en) * 2001-03-15 2002-09-19 Leonard Forbes Technique to mitigate short channel effects with vertical gate transistor with different gate materials
US20040173812A1 (en) * 2003-03-07 2004-09-09 Amberwave Systems Corporation Shallow trench isolation process
US20040217352A1 (en) * 2003-04-29 2004-11-04 Micron Technology, Inc. Strained semiconductor by wafer bonding with misorientation
CN1581497A (zh) * 2003-08-05 2005-02-16 国际商业机器公司 采用晶片键合和simox工艺的不同晶体取向自对准soi
CN1591826A (zh) * 2003-08-25 2005-03-09 国际商业机器公司 集成半导体结构和应变绝缘硅的制造方法及应变绝缘硅

Also Published As

Publication number Publication date
US7465992B2 (en) 2008-12-16
CN101416316A (zh) 2009-04-22
EP1875508A2 (en) 2008-01-09
US20060244068A1 (en) 2006-11-02
WO2006116098A2 (en) 2006-11-02
JP2008539593A (ja) 2008-11-13
TWI373135B (en) 2012-09-21
WO2006116098A3 (en) 2008-10-30
EP1875508A4 (en) 2009-08-05
JP4474479B2 (ja) 2010-06-02
TW200707736A (en) 2007-02-16

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Granted publication date: 20110629