CN101378616A - Atmosphere plasma cylindrical microwave excitation cavity - Google Patents
Atmosphere plasma cylindrical microwave excitation cavity Download PDFInfo
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- CN101378616A CN101378616A CNA2008100462683A CN200810046268A CN101378616A CN 101378616 A CN101378616 A CN 101378616A CN A2008100462683 A CNA2008100462683 A CN A2008100462683A CN 200810046268 A CN200810046268 A CN 200810046268A CN 101378616 A CN101378616 A CN 101378616A
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Abstract
The invention belongs to the field of microwave plasma excitation technique and relates to an excitation chamber without an igniter or ignitor under atmosphere pressure. The excitation chamber comprises a cylindrical resonator which works under a TM<010> mode, an input waveguide and a flange; the cylindrical resonator consists of a cylinder (1), a chamber top cover (2) and a chamber bottom cover (3); the side wall of the cylinder (1) is opened with a micro-wave coupling window (9); a metal cylinder (4) is arranged above the central round hole of the chamber top cover (2); a coaxial external conductor (5) is arranged below the central round hole of the chamber bottom cover (3); the bottom of the coaxial external conductor (5) is provided with a short circuit board which is provided with holes at the center while the bottom of the side wall is provided with a tangent air inlet (7); and the coaxial external conductor (5) is internally provided with a coaxial hollow internal conductor (6) by the central holes. The excitation chamber has low microwave consumption and high conversion efficiency, can excite the atmosphere plasma torch in the chamber without the need of igniters or ignitors under smaller micro-wave powers and can be used for various microwave industries, more specially as the boiler igniter.
Description
Technical field
The invention belongs to microwave plasma excitated technical field, particularly atmospheric pressure or be higher than under the atmospheric pressure Strong design of the excitation cavity of no igniter or ignitor and use.
Background technology
Microwave plasma is the low temperature plasma of the quasi-equilibrium of a kind of high electron density of electrodless discharge and temperature, it and direct current, radio frequency plasma is compared, has lot of advantages and particularity, therefore over surplus in the of nearly ten year, obtained to use extremely widely, especially in microelectric technique, the new material preparation is with synthetic, space technology, chemical, waste disposal, the metal refine, packaging material and pharmacy industry, thin film deposition, plasma polymerization, microcircuit is fabricated onto welding, the instrument sclerosis, synthesizing of ultra micro powder, plasma spray coating, plasma metallurgy, the plasma chemical industry.And as the application of microwave plasma flare also in continuous expansion, as environmental protection, the species analysis in the chemical and biological warfare, surface treatment is Yu Pen Tu, sterilization, welding and cutting, the technical fields such as igniting of various boiler internal combustion bodies.
In the microwave industrial application, both at home and abroad at present microwaves that adopt 915MHz and two frequency ranges of 2450MHz more, and especially the latter uses more generally, cheap because power grade is complete, size is less.For microwave discharge, for example hundreds of handkerchief to 1 handkerchief more than thousand is the most easy excitated under low pressure, and its microwave field Strong is about 200v/cm when 2450MHz, and at hyperbar during as 1 atmospheric pressure, the microwave field Strong that produce discharge has just surpassed 3 * 10
4V/cm, both differ more than two orders of magnitude.Therefore, at atmospheric pressure Strong (〉=10
5Handkerchief) can produce microwave plasma flare (APT) down, just need bigger microwave power.So adopt a terminal shortcircuit usually, and 1/4th coaxial resonant cavitys of other end open circuit, or one section stationary field that the compression waveguide forms, use the microwave electric field that improves on the discharge position, these excitation apparatus often need in position mounting points firearm or ignitor, could be under certain microwave power, produce initial discharge, carry out the transition to the formation of whole torch again, this just makes whole apparatus structure complicated, and has increased cost.
Summary of the invention
How to design the microwave waveguide excitation cavity, just can not spend too big microwave power, and not have under the situation of any igniter or ignitor, excitation atmospheric pressure (〉=10
5Handkerchief) air produces plasma flare, is technical problem to be solved by this invention.
Basic ideas of the present invention are by designing a high quality factor (high Q
oValue) arc chamber is as the excitation cavity of plasma, and the multiplier effect of electric field just can excite atmospheric pressure (〉=10 during owing to the resonant cavity interior resonance under the situation that need not any igniter or ignitor
5Handkerchief) generation and the formation of air plasma torch (APT) down.High Q
oLossy microwave is low in the chamber, the microwave field Strong during resonance than row ripple or standing wave state electric field Strong down many, so just saved required microwave power greatly, thereby improved conversion efficiency.
Technical scheme of the present invention is as follows:
A kind of atmosphere plasma cylindrical microwave excitation cavity as shown in Figure 1, 2, comprises working in TM
010The cylindrical cavity of pattern, input waveguide and waveguide flange.Cylindrical cavity is made of cylinder 1, cavity top cover 2 and cavity bottom 3.Have microwave coupling window 9 on described cylinder 1 sidewall.Input waveguide 11 1 ends link to each other with waveguide flange 12, and the other end is fixedly linked with the cylinder side wall of having opened microwave coupling window 9.Cavity top cover 2 and cavity bottom 3 centers all have circular hole, and cavity top cover 2 center holes top has cavity top metal cylinder 4, and cavity bottom 3 center holes below has cavity bottom coaxial outer conductor 5.Cavity bottom coaxial outer conductor 5 bottoms are the short board of center drilling, and the sidewall bottom has tangential admission hole 7; Cavity bottom coaxial outer conductor 5 inside are placed with coaxial hollow inner conductor 6 by its center drilling.
But described cylinder 1 sidewall also perforate is settled a tuning bolt 8, when the microwave source frequency of oscillation is offset to some extent, can obtain correct resonance by the degree of depth that enters cavity of adjusting tuning bolt 8.
Can place a quartz glass tube 13 in described top metal cylinder 4 and the bottom coaxial outer conductor 5.
Described cylinder 1 sidewall also can be driven 3 to 5 peepholes 10, so that the production of observation atmosphere plasma torch, observation simultaneously empty 10 also can be used for testing atmosphere plasma torch temperature.
When atmosphere plasma cylindrical microwave excitation cavity of the present invention was worked, microwave source was by microwave coupling window 9 feed-ins of input waveguide 11 from cylinder 1 sidewall.Whole cylindrical microwave excitation cavity works in TM
010Pattern, the maximum characteristics of this pattern are: microwave electric field is constant steady state value vertically in the chamber, radially is by first kind Bezier zero-order function J
o(kr) distribute, have maximum field Strong in cylindrical center (r=0), slow along radius change, and have higher intrinsic quality factor (Q
oValue), need not any igniter or ignitor and can produce initial ionization and discharge, thereby carry out the transition to the generation and the formation of plasma flare in the quartz ampoule at this place.
Need to prove: 1, quartz glass tube 13 provides the space that plasma flare produces and keeps, and places too high plasma flare simultaneously and burns out waveguide excitation cavity; 2, have the through hole of certain pore size in the coaxial hollow in the inner wire 6, send into from tail end so that air to be provided, front end is as the usefulness of the metallic nozzle of air-flow; 3, have 2 to 4 apertures in coaxial outer conductor 5 bottoms along the tangent to periphery direction,, make plasma flare keep stable and away from quartzy tube wall so that from these tangential holes, send into tangential eddy airstream; 4, can open 3 to 5 inspection holes 10 on cylinder 1 sidewall, inspection hole 10 can be used as plasma flare temperature test hole simultaneously.
Characteristics of the present invention and effect:
Atmosphere plasma cylindrical microwave excitation cavity of the present invention works in TM
010Pattern, the maximum characteristics of this pattern are: microwave electric field is constant steady state value vertically in the chamber, radially is by first kind Bezier zero-order function J
o(kr) distribute, have maximum field Strong in cylindrical center (r=0); Microwave electric field is slow along radius change in the chamber, and has higher intrinsic quality factor (Q
oValue).This helps the puncture and the discharge of gas in the quartz ampoule, and formation plasma flare, therefore, atmosphere plasma cylindrical microwave excitation cavity of the present invention has that lossy microwave is low, conversion efficiency is high, under less microwave power, need not any igniter or ignitor, just can play atmosphere plasma torch (APT) at the chamber underexcitation.The present invention can be applicable to many microwave commercial Application technical fields, especially as the usefulness of the igniter of various boiler internal combustion bodies.
Description of drawings
Fig. 1 is the side direction generalized section of atmosphere plasma cylindrical microwave excitation cavity provided by the invention.
Fig. 2 is the horizontal section schematic diagram of atmosphere plasma cylindrical microwave excitation cavity provided by the invention.
Embodiment
Below in conjunction with accompanying drawing 1 and 2 and case study on implementation the present invention is further illustrated.
Case study on implementation structure diagram of the present invention comprises: work in TM as shown in Figures 1 and 2
010The cylindrical cavity cylinder 1 of pattern, cavity top cover 2, cavity bottom 3, cavity top metal cylinder 4, cavity bottom coaxial outer conductor 5, the coaxial hollow inner conductor 6 of coaxial line double as metallic nozzle, tangential admission hole, coaxial outer conductor 5 bottom 7, tuning bolt 8, cylindrical cavity and outer waveguide microwave coupling window 9, peephole 10 on the cavity wall, connect waveguide 11, waveguide flange 12, quartz glass tube 13, plasma flare 14.
The concrete parameter and the sizing specification of the each several part structure of the implementation case are as follows:
The implementation case is according to operating frequency f
o=2450MHz and the size that designs in order to improve the intrinsic quality factor of cylindrical cavity as much as possible, should adopt the high fine copper of conductance as manufactured materials after machining, should comprise that the inner surface of cylinder and top cover and bottom is silver-plated at its whole cavity.Cavity cylinder 1 internal diameter is 92～96mm, and wall thickness is 6～8mm, highly is 50～80mm; (f when the frequency of oscillation source slightly is offset
o≠ 2450MHz), can obtain correct resonance by the depth size of adjusting tuning bolt 8; Cavity top cover 2 is all dead with 1 weldering of main cavity cylinder with cavity bottom 3, and should guarantee welding quality; The internal diameter of top metal cylinder 4 is 24 to 28mm, and this cylinder is one by circular waveguide, prevents that microwave power from spilling from here; The internal diameter of bottom coaxial outer conductor 5 is 24 to 28mm, and external diameter is 30 to 34mm, and the diameter of coaxial hollow inner conductor 6 is 8 to 10mm, in the through hole of 3mm is arranged; Coupling fenestra 9 be shaped as lonely face rectangle, it is of a size of c * d=45 * 26mm; The inspection hole aperture is 3mm, 3～5 of quantity, and 1 font is arranged vertically; The internal diameter of quartz glass tube 13 is 20 to 24mm, and external diameter is 23 to 27mm, and input waveguide 11 is BJ26, the long a=86.4mm of its broadside, narrow side length b=43.2mm; Ring flange is the FD26 of standard; Tangential admission pipe caliber 8mm is cut in bottom coaxial line and inserts on the outer conductor internal diameter circumference and weld extremely; Tracheae quantity is 2 to 4; Be mutually 180 ° or 90 ° respectively, make the air-flow that enters in the coaxial line when quartz ampoule moves, be vortex shape, guarantee the stable of plasma flare.
What be connected with cylindrical cavity ring flange 12 is the waveguide component of BJ26 standard, as three pin tuners, and three end circulators, directional coupler etc., these elements and system do not belong to part of the present invention.
The operation principle of the implementation case is as follows: when microwave source (being operated in 2450MHz) power enters the input flange dish 12 and the input waveguide 11 of cylindrical cavity of the present invention behind necessary control and detecting element, enter in the main cavity through coupling window 9 again, produce TM
010The resonance of pattern, the microwave electric field during resonance are radially by first kind Bezier zero-order function J
o(kr) distribute, (r=0) electric field maximum slowly descends by the Bezier zero-order function then on the cavity central shaft, up to the cavity wall place is zero, and electric field vertically is a steady state value, and the ideal distribution of this both direction has been created the advantageous conditions very of this chamber excitation atmosphere plasma.Meanwhile, one section coaxial line of cavity bottom and cavity junction, also be in the antinode place that the coaxial line internal and external conductor produces standing wave, the inner wire while is as the metallic nozzle of gas, Pen Chu gas then, promptly near the Strong electric field place spout is punctured and ionization by microwave electric field, forms microwave plasma flare 14 thereby produce continuous discharge by avalanche effect; Observation aperture 10 on the wall of chamber is for the usefulness of flame in the observation chamber and instrument detection.
Because the intrinsic quality factor of this cylindrical cavity is higher, Q
oTheoretical value can reach more than 30,000; Simultaneously, because the size of appropriate design coupling window makes the standing wave ratio of input voltage of cylindrical cavity of the present invention be not more than 1.5.Therefore, when lower microwave input power, it is bigger to enter intracavity power, and the electric field multiplier effect when adding resonance can encourage stable atmosphere microwave plasma flare (APT) at an easy rate under the situation of no any igniter or ignitor.Experiment shows that when microwave power 1.5kW, can play diameter at the cylindrical cavity underexcitation is the atmosphere plasma torch that 18 to 20mm length surpass 20cm, and central temperature surpasses 3000 degree.
Claims (7)
1, a kind of atmosphere plasma cylindrical microwave excitation cavity comprises working in TM
010The cylindrical cavity of pattern, input waveguide and waveguide flange; Cylindrical cavity is made of cylinder (1), cavity top cover (2) and cavity bottom (3); Have microwave coupling window (9) on described cylinder (1) sidewall; Input waveguide (11) one ends link to each other with waveguide flange (12), and the other end is fixedly linked with the cylinder side wall of having opened microwave coupling window (9); Cavity top cover (2) and cavity bottom (3) center all have circular hole, and cavity top cover (2) center hole top has cavity top metal cylinder (4), and cavity bottom (3) center hole below has cavity bottom coaxial outer conductor (5); Cavity bottom coaxial outer conductor (5) bottom is the short board of center drilling, and the sidewall bottom has tangential admission hole (7); Cavity bottom coaxial outer conductor (5) is inner to be placed with coaxial hollow inner conductor (6) by its center drilling.
2, atmosphere plasma cylindrical microwave excitation cavity according to claim 1, it is characterized in that, perforate and settle a tuning bolt (8) on described cylinder (1) sidewall, when the microwave source frequency of oscillation is offset to some extent, obtain correct resonance by the degree of depth that enters cavity of adjusting tuning bolt (8).
3, atmosphere plasma cylindrical microwave excitation cavity according to claim 1 is characterized in that, places a quartz glass tube (13) in described top metal cylinder (4) and the bottom coaxial outer conductor (5).
4, atmosphere plasma cylindrical microwave excitation cavity according to claim 1 is characterized in that, has 3 to 5 peepholes (10) on described cylinder (1) sidewall.
5, atmosphere plasma cylindrical microwave excitation cavity according to claim 1 is characterized in that, the number in described tangential admission hole (7) is 2 to 4.
6, atmosphere plasma cylindrical microwave excitation cavity according to claim 1 is characterized in that, described cylindrical microwave excitation cavity adopts fine copper to make, and inner surface is silver-plated.
According to the described atmosphere plasma cylindrical microwave excitation cavity of claim 1 to 6, it is characterized in that 7, described cavity cylinder (1) internal diameter is 92～96mm, wall thickness is 6～8mm, highly is 50～80mm; The internal diameter of described top metal cylinder (4) is 24 to 28mm; The internal diameter of described bottom coaxial outer conductor (5) is 24 to 28mm, and external diameter is 30 to 34mm; The diameter of described coaxial hollow inner conductor (6) is 8 to 10mm, in the through hole of 3mm is arranged; Described coupling window (9) be shaped as lonely face rectangle, it is of a size of c * d=45 * 26mm; Described inspection hole (10) aperture is 3mm, and 1 font is arranged vertically; The internal diameter of described quartz glass tube (13) is 20 to 24mm, and external diameter is 23 to 27mm; Described input waveguide (11) is BJ26, the long a=86.4mm of its broadside, narrow side length b=43.2mm; Described ring flange (12) is the FD26 of standard; Aperture, described tangential admission hole (7) is 8mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2008100462683A CN101378616A (en) | 2008-10-13 | 2008-10-13 | Atmosphere plasma cylindrical microwave excitation cavity |
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|---|---|---|---|
| CNA2008100462683A CN101378616A (en) | 2008-10-13 | 2008-10-13 | Atmosphere plasma cylindrical microwave excitation cavity |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291922A (en) * | 2011-07-22 | 2011-12-21 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN102413627A (en) * | 2011-07-22 | 2012-04-11 | 中国科学院空间科学与应用研究中心 | Method for changing parameter of plasma |
| CN102869182A (en) * | 2012-09-12 | 2013-01-09 | 清华大学 | Large-volume microwave plasma generating device based on coupling window radiation |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide direct-feed-type microwave plasma torch device |
| CN104566454A (en) * | 2014-12-16 | 2015-04-29 | 广东新优威印刷装备科技有限公司 | Boiler ignition method |
| CN106063384A (en) * | 2014-03-28 | 2016-10-26 | 安捷伦科技有限公司 | Waveguide-based apparatus for exciting and sustaining a plasma |
| CN106061090A (en) * | 2016-05-31 | 2016-10-26 | 吉林大学 | Secondary-coupling microwave plasma reforming device |
| CN106304602A (en) * | 2016-09-26 | 2017-01-04 | 吉林大学 | A kind of microwave coupling plasma resonant |
| CN106322433A (en) * | 2016-09-29 | 2017-01-11 | 南京三乐微波技术发展有限公司 | Microwave plasma acting cavity capable of achieving automatic ignition |
| CN106793439A (en) * | 2017-02-16 | 2017-05-31 | 浙江全世科技有限公司 | A kind of microwave plasma torch device of automatic ignition |
| CN107290133A (en) * | 2017-06-21 | 2017-10-24 | 清华大学 | A kind of system for realizing intracavitary microwave ignition combustion event visual inspection |
| CN108566717A (en) * | 2018-06-29 | 2018-09-21 | 合肥中科离子医学技术装备有限公司 | Plasma producing apparatus is encouraged using microwave vertical injection |
| CN108770175A (en) * | 2018-05-25 | 2018-11-06 | 中国科学院微电子研究所 | The double coupled resonators of micropore micro-nano structure for microwave plasma generation device |
| CN108770174A (en) * | 2018-05-25 | 2018-11-06 | 中国科学院微电子研究所 | Microwave plasma generation device with the double coupled resonators of micropore micro-nano structure |
| CN108980922A (en) * | 2018-08-16 | 2018-12-11 | 清华大学 | A kind of microwave plasma stove device |
| CN112863993A (en) * | 2021-01-18 | 2021-05-28 | 四川大学 | Large-throughput microwave plasma reaction cavity |
| CN112888134A (en) * | 2021-01-19 | 2021-06-01 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
| CN113923847A (en) * | 2021-10-22 | 2022-01-11 | 西南大学 | Coaxial plasma torch and low-power microwave micro-plasma excitation device |
| CN115822816A (en) * | 2022-11-22 | 2023-03-21 | 北京交通大学 | Liquid single-component thruster based on spray and microwave collaborative ignition |
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2008
- 2008-10-13 CN CNA2008100462683A patent/CN101378616A/en active Pending
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291922A (en) * | 2011-07-22 | 2011-12-21 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN102413627A (en) * | 2011-07-22 | 2012-04-11 | 中国科学院空间科学与应用研究中心 | Method for changing parameter of plasma |
| CN102291922B (en) * | 2011-07-22 | 2013-03-20 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN102869182A (en) * | 2012-09-12 | 2013-01-09 | 清华大学 | Large-volume microwave plasma generating device based on coupling window radiation |
| CN103269561A (en) * | 2013-05-15 | 2013-08-28 | 浙江大学 | Waveguide direct-feed-type microwave plasma torch device |
| CN106063384A (en) * | 2014-03-28 | 2016-10-26 | 安捷伦科技有限公司 | Waveguide-based apparatus for exciting and sustaining a plasma |
| CN104566454A (en) * | 2014-12-16 | 2015-04-29 | 广东新优威印刷装备科技有限公司 | Boiler ignition method |
| CN106061090A (en) * | 2016-05-31 | 2016-10-26 | 吉林大学 | Secondary-coupling microwave plasma reforming device |
| CN106061090B (en) * | 2016-05-31 | 2019-03-12 | 吉林大学 | A kind of secondary coupled microwave plasma reformer |
| CN106304602B (en) * | 2016-09-26 | 2018-07-20 | 吉林大学 | A kind of microwave coupling plasma resonant |
| CN106304602A (en) * | 2016-09-26 | 2017-01-04 | 吉林大学 | A kind of microwave coupling plasma resonant |
| CN106322433A (en) * | 2016-09-29 | 2017-01-11 | 南京三乐微波技术发展有限公司 | Microwave plasma acting cavity capable of achieving automatic ignition |
| CN106793439A (en) * | 2017-02-16 | 2017-05-31 | 浙江全世科技有限公司 | A kind of microwave plasma torch device of automatic ignition |
| CN107290133A (en) * | 2017-06-21 | 2017-10-24 | 清华大学 | A kind of system for realizing intracavitary microwave ignition combustion event visual inspection |
| CN107290133B (en) * | 2017-06-21 | 2019-07-26 | 清华大学 | A kind of system for realizing intracavitary microwave ignition combustion event visual inspection |
| CN108770175B (en) * | 2018-05-25 | 2019-07-16 | 中国科学院微电子研究所 | The double coupled resonators of micropore micro-nano structure for microwave plasma generation device |
| CN108770174A (en) * | 2018-05-25 | 2018-11-06 | 中国科学院微电子研究所 | Microwave plasma generation device with the double coupled resonators of micropore micro-nano structure |
| CN108770175A (en) * | 2018-05-25 | 2018-11-06 | 中国科学院微电子研究所 | The double coupled resonators of micropore micro-nano structure for microwave plasma generation device |
| CN108770174B (en) * | 2018-05-25 | 2019-07-19 | 中国科学院微电子研究所 | Microwave plasma generation device with the double coupled resonators of micropore micro-nano structure |
| CN108566717A (en) * | 2018-06-29 | 2018-09-21 | 合肥中科离子医学技术装备有限公司 | Plasma producing apparatus is encouraged using microwave vertical injection |
| CN108980922A (en) * | 2018-08-16 | 2018-12-11 | 清华大学 | A kind of microwave plasma stove device |
| CN112863993A (en) * | 2021-01-18 | 2021-05-28 | 四川大学 | Large-throughput microwave plasma reaction cavity |
| CN112888134A (en) * | 2021-01-19 | 2021-06-01 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
| CN112888134B (en) * | 2021-01-19 | 2024-03-08 | 成都奋羽电子科技有限公司 | Microwave plasma generating device |
| CN113923847A (en) * | 2021-10-22 | 2022-01-11 | 西南大学 | Coaxial plasma torch and low-power microwave micro-plasma excitation device |
| CN115822816A (en) * | 2022-11-22 | 2023-03-21 | 北京交通大学 | Liquid single-component thruster based on spray and microwave collaborative ignition |
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Open date: 20090304 |