CN101371175B - 宽带光耦合到薄的soi cmos集成光路 - Google Patents
宽带光耦合到薄的soi cmos集成光路 Download PDFInfo
- Publication number
- CN101371175B CN101371175B CN2007800022329A CN200780002232A CN101371175B CN 101371175 B CN101371175 B CN 101371175B CN 2007800022329 A CN2007800022329 A CN 2007800022329A CN 200780002232 A CN200780002232 A CN 200780002232A CN 101371175 B CN101371175 B CN 101371175B
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- CN
- China
- Prior art keywords
- silicon
- waveguide
- thin
- soi structure
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
- G02B6/4231—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment with intermediate elements, e.g. rods and balls, between the elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75796206P | 2006-01-11 | 2006-01-11 | |
US60/757,962 | 2006-01-11 | ||
PCT/US2007/000813 WO2007082059A2 (en) | 2006-01-11 | 2007-01-11 | Wideband optical coupling into thin soi cmos photonic integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101371175A CN101371175A (zh) | 2009-02-18 |
CN101371175B true CN101371175B (zh) | 2010-11-03 |
Family
ID=38257039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800022329A Active CN101371175B (zh) | 2006-01-11 | 2007-01-11 | 宽带光耦合到薄的soi cmos集成光路 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7415184B2 (zh) |
JP (1) | JP5131856B2 (zh) |
KR (1) | KR101258725B1 (zh) |
CN (1) | CN101371175B (zh) |
CA (1) | CA2636930C (zh) |
WO (1) | WO2007082059A2 (zh) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8971679B2 (en) * | 2002-08-28 | 2015-03-03 | Optonet Inc. | Apparatus and method for passive alignment of optical devices |
US7706644B2 (en) * | 2007-07-26 | 2010-04-27 | Lightwire, Inc. | Offset launch mode from nanotaper waveguide into multimode fiber |
US8121450B2 (en) * | 2007-12-12 | 2012-02-21 | Lightwire, Inc. | Coupling between free space and optical waveguide using etched coupling surfaces |
US8352873B2 (en) * | 2008-06-06 | 2013-01-08 | Apple Inc. | Media content and chat integration |
WO2010044746A1 (en) * | 2008-10-16 | 2010-04-22 | Agency For Science, Technology And Research | An integrated assembly and a method of manufacturing the same |
US8437585B2 (en) * | 2010-12-07 | 2013-05-07 | Intel Corporation | Low-cost passive optical waveguide using Si substrate |
US8938142B2 (en) | 2010-12-15 | 2015-01-20 | Cisco Technology, Inc. | Silicon-based opto-electronic integrated circuit with reduced polarization dependent loss |
US8842945B2 (en) | 2011-08-09 | 2014-09-23 | Soitec | Methods of forming three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates |
US8728863B2 (en) | 2011-08-09 | 2014-05-20 | Soitec | Methods of forming bonded semiconductor structures including interconnect layers having one or more of electrical, optical, and fluidic interconnects therein, and bonded semiconductor structures formed using such methods |
US8617925B2 (en) | 2011-08-09 | 2013-12-31 | Soitec | Methods of forming bonded semiconductor structures in 3D integration processes using recoverable substrates, and bonded semiconductor structures formed by such methods |
US9229169B2 (en) | 2011-08-16 | 2016-01-05 | International Business Machines Corporation | Lens array optical coupling to photonic chip |
US8901576B2 (en) | 2012-01-18 | 2014-12-02 | International Business Machines Corporation | Silicon photonics wafer using standard silicon-on-insulator processes through substrate removal or transfer |
US9329336B2 (en) * | 2012-07-06 | 2016-05-03 | Micron Technology, Inc. | Method of forming a hermetically sealed fiber to chip connection |
GB2506406A (en) | 2012-09-28 | 2014-04-02 | Ibm | Optical adaptor with horizontal and vertical reference surfaces |
GB2506408A (en) | 2012-09-28 | 2014-04-02 | Ibm | Aligning optical components with optical waveguides using a cavity and two step structures |
US20140161385A1 (en) * | 2012-12-07 | 2014-06-12 | Telefonaktiebolaget Lm Ericsson (Publ) | Method and Apparatus for Coupling to an Optical Waveguide in a Silicon Photonics Die |
KR102064908B1 (ko) | 2013-01-25 | 2020-01-10 | 삼성전자주식회사 | 광 커플링 시스템 및 이를 포함하는 광 센서 |
US9164235B1 (en) | 2014-07-02 | 2015-10-20 | Cisco Technology, Inc. | Dual tip optical coupler |
JP6380069B2 (ja) * | 2014-12-11 | 2018-08-29 | 住友電気工業株式会社 | 光送信モジュール |
US9618699B2 (en) | 2015-03-15 | 2017-04-11 | Cisco Technology, Inc. | Multilayer photonic adapter |
US9921378B2 (en) * | 2015-04-17 | 2018-03-20 | Cisco Technology, Inc. | Optical bench for aligning an optical device |
US9874693B2 (en) | 2015-06-10 | 2018-01-23 | The Research Foundation For The State University Of New York | Method and structure for integrating photonics with CMOs |
US9933566B2 (en) | 2015-11-13 | 2018-04-03 | Cisco Technology, Inc. | Photonic chip with an evanescent coupling interface |
US10025033B2 (en) | 2016-03-01 | 2018-07-17 | Advanced Semiconductor Engineering, Inc. | Optical fiber structure, optical communication apparatus and manufacturing process for manufacturing the same |
US10241264B2 (en) | 2016-07-01 | 2019-03-26 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages |
US10641976B2 (en) * | 2017-02-23 | 2020-05-05 | Ayar Labs, Inc. | Apparatus for optical fiber-to-photonic chip connection and associated methods |
US11487059B2 (en) | 2021-02-19 | 2022-11-01 | Globalfoundries U.S. Inc. | Photonics integrated circuit with silicon nitride waveguide edge coupler |
US11774686B2 (en) * | 2021-05-06 | 2023-10-03 | Globalfoundries U.S. Inc. | Edge couplers including a rounded region adjacent to an opening in the interconnect structure |
US20230095039A1 (en) * | 2021-09-17 | 2023-03-30 | Intel Corporation | Technologies for optical coupling to photonic integrated circuits |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5168535A (en) * | 1985-12-24 | 1992-12-01 | Herzel Laor | Integrated optic switch |
US5481629A (en) * | 1993-08-31 | 1996-01-02 | Fujitsu Limited | Hybrid optical IC with optical axes at different levels |
US6825542B2 (en) * | 2002-01-25 | 2004-11-30 | Denselight Semiconductors Pte Ltd | High speed waveguide photodetector |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5420953A (en) * | 1994-02-17 | 1995-05-30 | The Whitaker Corporation | Optoelectronic integration of holograms using (110) oriented silicon on (100) oriented silicon waferboard |
WO1998045740A1 (de) * | 1997-04-08 | 1998-10-15 | Paul Scherrer Institut | Vorrichtung zum verbinden von optischen elementen und verfahren zur herstellung derselben |
KR100277695B1 (ko) * | 1998-09-12 | 2001-02-01 | 정선종 | 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법 |
US6839474B2 (en) * | 2000-11-16 | 2005-01-04 | Shipley Company, L.L.C. | Optical assembly for coupling with integrated optical devices and method for making |
JP4576756B2 (ja) * | 2001-06-19 | 2010-11-10 | 株式会社日立製作所 | 光信号切替え装置、および、その使用方法 |
GB0201969D0 (en) * | 2002-01-29 | 2002-03-13 | Qinetiq Ltd | Integrated optics devices |
US6832028B2 (en) | 2002-10-08 | 2004-12-14 | Innovative Technology Licensing, Llc | Liquid crystal adaptive coupler for steering a light beam relative to a light-receiving end of an optical waveguide |
JP2005070507A (ja) * | 2003-08-26 | 2005-03-17 | Sumitomo Electric Ind Ltd | 光モジュール及び光結合調心方法 |
US7151738B2 (en) | 2003-11-20 | 2006-12-19 | Seagate Technology Llc | Apparatus and method for coupling light to a thin film optical waveguide |
US7013067B2 (en) * | 2004-02-11 | 2006-03-14 | Sioptical, Inc. | Silicon nanotaper couplers and mode-matching devices |
US7274835B2 (en) * | 2004-02-18 | 2007-09-25 | Cornell Research Foundation, Inc. | Optical waveguide displacement sensor |
-
2007
- 2007-01-11 KR KR1020087019511A patent/KR101258725B1/ko active IP Right Grant
- 2007-01-11 CA CA2636930A patent/CA2636930C/en active Active
- 2007-01-11 CN CN2007800022329A patent/CN101371175B/zh active Active
- 2007-01-11 US US11/652,348 patent/US7415184B2/en active Active
- 2007-01-11 JP JP2008550424A patent/JP5131856B2/ja not_active Expired - Fee Related
- 2007-01-11 WO PCT/US2007/000813 patent/WO2007082059A2/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5168535A (en) * | 1985-12-24 | 1992-12-01 | Herzel Laor | Integrated optic switch |
US5481629A (en) * | 1993-08-31 | 1996-01-02 | Fujitsu Limited | Hybrid optical IC with optical axes at different levels |
US6825542B2 (en) * | 2002-01-25 | 2004-11-30 | Denselight Semiconductors Pte Ltd | High speed waveguide photodetector |
Non-Patent Citations (2)
Title |
---|
JP特开2005-70507A 2005.03.17 |
US 5481629 A,全文. |
Also Published As
Publication number | Publication date |
---|---|
WO2007082059A2 (en) | 2007-07-19 |
WO2007082059A3 (en) | 2008-06-12 |
KR101258725B1 (ko) | 2013-04-26 |
CN101371175A (zh) | 2009-02-18 |
US20070274630A1 (en) | 2007-11-29 |
KR20080108414A (ko) | 2008-12-15 |
WO2007082059B1 (en) | 2008-07-24 |
JP2009523264A (ja) | 2009-06-18 |
CA2636930C (en) | 2014-11-25 |
CA2636930A1 (en) | 2007-07-19 |
US7415184B2 (en) | 2008-08-19 |
JP5131856B2 (ja) | 2013-01-30 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CISCO TECH IND. Free format text: FORMER OWNER: LIGHTWIRE INC. Effective date: 20130627 |
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C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: LIGHTWIRE INC. Free format text: FORMER NAME: SIOPTICAL INC. |
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CP01 | Change in the name or title of a patent holder |
Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: LIGHTWIRE, Inc. Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: SIOPTICAL, Inc. |
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TR01 | Transfer of patent right |
Effective date of registration: 20130627 Address after: California, USA Patentee after: Cisco Technology, Inc. Address before: American Pennsylvania Patentee before: Lightwire, Inc. |