CN101371175A - 宽带光耦合到薄的soi cmos集成光路 - Google Patents
宽带光耦合到薄的soi cmos集成光路 Download PDFInfo
- Publication number
- CN101371175A CN101371175A CNA2007800022329A CN200780002232A CN101371175A CN 101371175 A CN101371175 A CN 101371175A CN A2007800022329 A CNA2007800022329 A CN A2007800022329A CN 200780002232 A CN200780002232 A CN 200780002232A CN 101371175 A CN101371175 A CN 101371175A
- Authority
- CN
- China
- Prior art keywords
- waveguide
- silicon
- soi
- thin
- lens element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
- G02B6/4231—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment with intermediate elements, e.g. rods and balls, between the elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75796206P | 2006-01-11 | 2006-01-11 | |
US60/757,962 | 2006-01-11 | ||
PCT/US2007/000813 WO2007082059A2 (en) | 2006-01-11 | 2007-01-11 | Wideband optical coupling into thin soi cmos photonic integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101371175A true CN101371175A (zh) | 2009-02-18 |
CN101371175B CN101371175B (zh) | 2010-11-03 |
Family
ID=38257039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800022329A Active CN101371175B (zh) | 2006-01-11 | 2007-01-11 | 宽带光耦合到薄的soi cmos集成光路 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7415184B2 (zh) |
JP (1) | JP5131856B2 (zh) |
KR (1) | KR101258725B1 (zh) |
CN (1) | CN101371175B (zh) |
CA (1) | CA2636930C (zh) |
WO (1) | WO2007082059A2 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103890625A (zh) * | 2011-08-16 | 2014-06-25 | 国际商业机器公司 | 透镜阵列与光子芯片的光学耦合 |
CN104541191A (zh) * | 2012-07-06 | 2015-04-22 | 美光科技公司 | 形成气密密封光纤到芯片连接的方法 |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8971679B2 (en) * | 2002-08-28 | 2015-03-03 | Optonet Inc. | Apparatus and method for passive alignment of optical devices |
US7706644B2 (en) * | 2007-07-26 | 2010-04-27 | Lightwire, Inc. | Offset launch mode from nanotaper waveguide into multimode fiber |
US8121450B2 (en) * | 2007-12-12 | 2012-02-21 | Lightwire, Inc. | Coupling between free space and optical waveguide using etched coupling surfaces |
US8352873B2 (en) * | 2008-06-06 | 2013-01-08 | Apple Inc. | Media content and chat integration |
WO2010044746A1 (en) * | 2008-10-16 | 2010-04-22 | Agency For Science, Technology And Research | An integrated assembly and a method of manufacturing the same |
US8437585B2 (en) * | 2010-12-07 | 2013-05-07 | Intel Corporation | Low-cost passive optical waveguide using Si substrate |
US8938142B2 (en) | 2010-12-15 | 2015-01-20 | Cisco Technology, Inc. | Silicon-based opto-electronic integrated circuit with reduced polarization dependent loss |
US8842945B2 (en) | 2011-08-09 | 2014-09-23 | Soitec | Methods of forming three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates |
US8728863B2 (en) | 2011-08-09 | 2014-05-20 | Soitec | Methods of forming bonded semiconductor structures including interconnect layers having one or more of electrical, optical, and fluidic interconnects therein, and bonded semiconductor structures formed using such methods |
US8617925B2 (en) | 2011-08-09 | 2013-12-31 | Soitec | Methods of forming bonded semiconductor structures in 3D integration processes using recoverable substrates, and bonded semiconductor structures formed by such methods |
US8901576B2 (en) | 2012-01-18 | 2014-12-02 | International Business Machines Corporation | Silicon photonics wafer using standard silicon-on-insulator processes through substrate removal or transfer |
GB2506406A (en) | 2012-09-28 | 2014-04-02 | Ibm | Optical adaptor with horizontal and vertical reference surfaces |
GB2506408A (en) | 2012-09-28 | 2014-04-02 | Ibm | Aligning optical components with optical waveguides using a cavity and two step structures |
US20140161385A1 (en) * | 2012-12-07 | 2014-06-12 | Telefonaktiebolaget Lm Ericsson (Publ) | Method and Apparatus for Coupling to an Optical Waveguide in a Silicon Photonics Die |
KR102064908B1 (ko) | 2013-01-25 | 2020-01-10 | 삼성전자주식회사 | 광 커플링 시스템 및 이를 포함하는 광 센서 |
US9164235B1 (en) | 2014-07-02 | 2015-10-20 | Cisco Technology, Inc. | Dual tip optical coupler |
JP6380069B2 (ja) * | 2014-12-11 | 2018-08-29 | 住友電気工業株式会社 | 光送信モジュール |
US9618699B2 (en) | 2015-03-15 | 2017-04-11 | Cisco Technology, Inc. | Multilayer photonic adapter |
US9921378B2 (en) * | 2015-04-17 | 2018-03-20 | Cisco Technology, Inc. | Optical bench for aligning an optical device |
US9874693B2 (en) | 2015-06-10 | 2018-01-23 | The Research Foundation For The State University Of New York | Method and structure for integrating photonics with CMOs |
US9933566B2 (en) | 2015-11-13 | 2018-04-03 | Cisco Technology, Inc. | Photonic chip with an evanescent coupling interface |
US10025033B2 (en) | 2016-03-01 | 2018-07-17 | Advanced Semiconductor Engineering, Inc. | Optical fiber structure, optical communication apparatus and manufacturing process for manufacturing the same |
US10241264B2 (en) | 2016-07-01 | 2019-03-26 | Advanced Semiconductor Engineering, Inc. | Semiconductor device packages |
US10641976B2 (en) * | 2017-02-23 | 2020-05-05 | Ayar Labs, Inc. | Apparatus for optical fiber-to-photonic chip connection and associated methods |
US11487059B2 (en) | 2021-02-19 | 2022-11-01 | Globalfoundries U.S. Inc. | Photonics integrated circuit with silicon nitride waveguide edge coupler |
US11774686B2 (en) * | 2021-05-06 | 2023-10-03 | Globalfoundries U.S. Inc. | Edge couplers including a rounded region adjacent to an opening in the interconnect structure |
US20230095039A1 (en) * | 2021-09-17 | 2023-03-30 | Intel Corporation | Technologies for optical coupling to photonic integrated circuits |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3644309A1 (de) * | 1985-12-24 | 1987-06-25 | Herzl Laor | Integrierter optischer schalter |
JP3302458B2 (ja) | 1993-08-31 | 2002-07-15 | 富士通株式会社 | 集積化光装置及び製造方法 |
US5420953A (en) * | 1994-02-17 | 1995-05-30 | The Whitaker Corporation | Optoelectronic integration of holograms using (110) oriented silicon on (100) oriented silicon waferboard |
WO1998045740A1 (de) * | 1997-04-08 | 1998-10-15 | Paul Scherrer Institut | Vorrichtung zum verbinden von optischen elementen und verfahren zur herstellung derselben |
KR100277695B1 (ko) * | 1998-09-12 | 2001-02-01 | 정선종 | 에스 오 아이 광도파로를 이용한 하이브리드 광집적회로용 기판 제조방법 |
US6839474B2 (en) * | 2000-11-16 | 2005-01-04 | Shipley Company, L.L.C. | Optical assembly for coupling with integrated optical devices and method for making |
JP4576756B2 (ja) * | 2001-06-19 | 2010-11-10 | 株式会社日立製作所 | 光信号切替え装置、および、その使用方法 |
GB2384620A (en) * | 2002-01-25 | 2003-07-30 | Denselight Semiconductors Pte | A high speed waveguide photodetector |
GB0201969D0 (en) * | 2002-01-29 | 2002-03-13 | Qinetiq Ltd | Integrated optics devices |
US6832028B2 (en) | 2002-10-08 | 2004-12-14 | Innovative Technology Licensing, Llc | Liquid crystal adaptive coupler for steering a light beam relative to a light-receiving end of an optical waveguide |
JP2005070507A (ja) * | 2003-08-26 | 2005-03-17 | Sumitomo Electric Ind Ltd | 光モジュール及び光結合調心方法 |
US7151738B2 (en) | 2003-11-20 | 2006-12-19 | Seagate Technology Llc | Apparatus and method for coupling light to a thin film optical waveguide |
US7013067B2 (en) * | 2004-02-11 | 2006-03-14 | Sioptical, Inc. | Silicon nanotaper couplers and mode-matching devices |
US7274835B2 (en) * | 2004-02-18 | 2007-09-25 | Cornell Research Foundation, Inc. | Optical waveguide displacement sensor |
-
2007
- 2007-01-11 KR KR1020087019511A patent/KR101258725B1/ko active IP Right Grant
- 2007-01-11 CA CA2636930A patent/CA2636930C/en active Active
- 2007-01-11 CN CN2007800022329A patent/CN101371175B/zh active Active
- 2007-01-11 US US11/652,348 patent/US7415184B2/en active Active
- 2007-01-11 JP JP2008550424A patent/JP5131856B2/ja not_active Expired - Fee Related
- 2007-01-11 WO PCT/US2007/000813 patent/WO2007082059A2/en active Application Filing
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103890625A (zh) * | 2011-08-16 | 2014-06-25 | 国际商业机器公司 | 透镜阵列与光子芯片的光学耦合 |
CN103890625B (zh) * | 2011-08-16 | 2016-11-09 | 国际商业机器公司 | 透镜阵列与光子芯片的光学耦合 |
US9568679B2 (en) | 2011-08-16 | 2017-02-14 | International Business Machines Corporation | Lens array optical coupling to photonic chip |
CN104541191A (zh) * | 2012-07-06 | 2015-04-22 | 美光科技公司 | 形成气密密封光纤到芯片连接的方法 |
US9804350B2 (en) | 2012-07-06 | 2017-10-31 | Micron Technology, Inc. | Method of forming a hermetically sealed fiber to chip connections |
CN104541191B (zh) * | 2012-07-06 | 2018-03-20 | 美光科技公司 | 形成气密密封光纤到芯片连接的方法 |
US10935739B2 (en) | 2012-07-06 | 2021-03-02 | Micron Technology, Inc. | Methods and systems for hermetically sealed fiber to chip connections |
US11536915B2 (en) | 2012-07-06 | 2022-12-27 | Micron Technology, Inc. | Methods and systems for hermetically sealed fiber to chip connections |
Also Published As
Publication number | Publication date |
---|---|
WO2007082059A2 (en) | 2007-07-19 |
WO2007082059A3 (en) | 2008-06-12 |
KR101258725B1 (ko) | 2013-04-26 |
US20070274630A1 (en) | 2007-11-29 |
KR20080108414A (ko) | 2008-12-15 |
WO2007082059B1 (en) | 2008-07-24 |
CN101371175B (zh) | 2010-11-03 |
JP2009523264A (ja) | 2009-06-18 |
CA2636930C (en) | 2014-11-25 |
CA2636930A1 (en) | 2007-07-19 |
US7415184B2 (en) | 2008-08-19 |
JP5131856B2 (ja) | 2013-01-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101371175B (zh) | 宽带光耦合到薄的soi cmos集成光路 | |
US10429597B2 (en) | Interposer assemblies and arrangements for coupling at least one optical fiber to at least one optoelectronic device | |
US10481334B2 (en) | Fiber to chip optical coupler | |
EP3262448B1 (en) | Optically coupling waveguides | |
US20140177995A1 (en) | Optical photonic circuit coupling | |
US11105981B2 (en) | Optical connectors and detachable optical connector assemblies for optical chips | |
US20200278508A1 (en) | Fiberless co-packaged optics | |
US20200393619A1 (en) | Multi-layer silicon photonics apparatus | |
US6744948B1 (en) | Fiber tap monitor based on evanescent coupling | |
Barwicz et al. | Photonic packaging in high-throughput microelectronic assembly lines for cost-efficiency and scalability | |
Snyder et al. | Broadband, polarization-insensitive lensed edge couplers for silicon photonics | |
US20040247248A1 (en) | Passive alignment between waveguides and optical components | |
CN112698448A (zh) | 一种基于棱镜的反射式垂直光耦合结构 | |
CA2256585A1 (en) | Structure for connecting optical fibers to optical waveguide | |
Nakagawa et al. | Lens-coupled laser diode module integrated on silicon platform | |
Bourhis | Fiber-to-waveguide connection | |
Snyder et al. | Developments in packaging and integration for silicon photonics | |
Hoffmann et al. | Fiber ribbon alignment structures based on rhombus-shaped channels in silicon | |
Palen | Optical coupling to monolithic integrated photonic circuits | |
Goto et al. | Hybrid WDM transmitter/receiver module using alignment free assembly techniques | |
Kimura et al. | Low-cost bidirectional optical transmitter/receiver module for subscriber system | |
Haugsjaa et al. | Hybrid wafer scale packaging of laser diodes and multichip module technology | |
Kopp et al. | Silicon photonics packaging: Characterization of a waveguide grating coupler and modeling of the fiber coupling ratio | |
He et al. | U-Groove Assisted Passive Assembly of 30x Single-Mode Fiber Array to Edge Couplers for Silicon Photonics | |
Porte et al. | Epoxy free butt coupling between a lensed fiber and a silicon nanowire waveguide with an inverted taper configuration |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CISCO TECH IND. Free format text: FORMER OWNER: LIGHTWIRE INC. Effective date: 20130627 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: LIGHTWIRE INC. Free format text: FORMER NAME: SIOPTICAL INC. |
|
CP01 | Change in the name or title of a patent holder |
Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: LIGHTWIRE, Inc. Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: SIOPTICAL, Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20130627 Address after: California, USA Patentee after: Cisco Technology, Inc. Address before: American Pennsylvania Patentee before: Lightwire, Inc. |