CN101360254A - Test system for CMOS image sensor electrical performance - Google Patents
Test system for CMOS image sensor electrical performance Download PDFInfo
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- CN101360254A CN101360254A CNA2007101300713A CN200710130071A CN101360254A CN 101360254 A CN101360254 A CN 101360254A CN A2007101300713 A CNA2007101300713 A CN A2007101300713A CN 200710130071 A CN200710130071 A CN 200710130071A CN 101360254 A CN101360254 A CN 101360254A
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Abstract
The invention provides a test system of electrical property of a CMOS image sensor, wherein, the system comprises a signal source, a control unit, a detecting unit and a data processor, the signal source is used to provide input signals to the sensor under test and provide benchmark signals; the detecting unit is used for detecting output signals of the sensor under test and providing the detected output signals of the sensor under test to the control unit; the control unit is used for adjusting the output signals of the signal source, starting and terminating the test to the sensor under test by the detecting unit and providing the detected output signals of the sensor under test offered by the detecting unit to the data processor; and the data processor is used to judge the electrical property of the sensor under test according to the detected output signals of the sensor under test offered by the control unit. The system can save testing costs to a great extent.
Description
Technical field
The present invention relates to a kind of test macro that is used for transducer, more particularly, relate to a kind of test macro that is used for the cmos image sensor electrical property.
Background technology
At present, the range of application of cmos image sensor begins to become extensively, comprises digital camera, camera, video telephone, 3G mobile, video conference, intelligent safety system, reversing radar of vehicle, toy, and purposes such as industry, medical treatment.In the cmos image sensor volume production, to its carry out simple and effective test become essential.
For cmos image sensor, its test mainly is divided into electric performance test and image property test.Electric performance test mainly comprises: open circuit and/or short-circuit test, be used to judge whether circuit damages in the chip, and the dynamic duty testing current is used for the dynamic power consumption of estimated sensor; The static working current test is used for quiescent dissipation of estimated sensor or the like.
In the semiconducter IC testing service, in general, the equipment of employing is automatic test equipment, is called for short testboard.It is connected with probe station, can be used for wafer sort,, just can be used for finished product test if be connected with manipulator.At present, have a lot of specialized vendors to produce this automatic test equipment, and its versatility is very strong, promptly adopts this kind automatic test equipment to carry out quantitatively or test qualitatively the various performances of each adhesive integrated circuit.But the common price of this kind automatic test equipment is very expensive, for only need be concerning a kind of or manufacturer that an adhesive integrated circuit is tested, can not use the function that this kind automatic test equipment is provided fully, make input-output ratio low excessively, especially for cmos image sensor, because it does not need to carry out logic testing and timing sequence test, so adopt automatic test equipment to make testing cost than higher.
Summary of the invention
The testing cost that the present invention is directed to prior art provides a kind of test macro that can reduce the cmos image sensor electrical property of testing cost than problem of higher.
The invention provides a kind of test macro that is used for the cmos image sensor electrical property, wherein, described system comprises signal source, control unit, detecting unit and data processor: signal source, be connected with transducer to be measured, control unit and detecting unit, be used for input signal being provided and reference signal being provided to transducer to be measured; Detecting unit is connected with transducer to be measured, signal source and control unit, is used to detect signal of sensor to be measured and provides detected signal of sensor to be measured to control unit; Control unit, be connected with signal source, detecting unit and transducer to be measured, the output signal, startup and the termination detecting unit that are used for the conditioning signal source offer data processor to the test of transducer to be measured and with the signal of sensor detected to be measured that detecting unit provides; And data processor, be connected with control unit, be used for judging the electrical property of transducer to be measured according to the signal of sensor detected to be measured that control unit provides.
System of the present invention provides a kind of test macro that is specifically designed to the cmos image sensor electrical property, its circuit structure is simple, the signal source and the detecting unit of specialization only are provided for the electric performance test of cmos image sensor, can finish electric performance test and don't unnecessary unit is provided, can save testing cost to a great extent.
Description of drawings
Fig. 1 is the block diagram of test macro of the present invention;
Fig. 2 is the block diagram of signal source of the present invention;
Fig. 3 is the block diagram of detecting unit of the present invention;
Fig. 4 is the block diagram of control unit of the present invention;
Fig. 5 is the block diagram that comprises the test macro of switching network of the present invention;
Fig. 6 is the block diagram of switching network of the present invention.
Embodiment
As shown in Figure 1, the test macro that is used for the electrical property of cmos image sensor provided by the invention, comprise signal source 1, control unit 3, detecting unit 2 and data processor 4, wherein: signal source 1, be connected with transducer 100 to be measured, control unit 3 and detecting unit 2, be used for input signal being provided and reference signal being provided to transducer 100 to be measured; Detecting unit 2 is connected with transducer 100 to be measured, signal source 1 and control unit 3, the output signal that is used to detect the output signal of transducer 100 to be measured and detected transducer to be measured 100 is provided to control unit 3; Control unit 3, be connected with signal source 1, detecting unit 2, transducer to be measured 100 and data processor 4, be used for the test of output signal, startup and 2 pairs of transducers 100 to be measured of termination detecting unit in conditioning signal source 1 and the output signal of transducer 100 detected to be measured that detecting unit 2 is provided and offer data processor 4; And data processor 4, being connected with control unit 3, the output signal that the transducer 100 detected to be measured that provides according to control unit 3 is provided is judged the electrical property of transducer 100 to be measured.
In general, measure normally light source of the applied signal source of cmos image sensor, but in test macro of the present invention, the electrical property that only is directed to cmos image sensor is tested, the opto-electronic conversion performance of cmos image sensor is not tested, can adopt the various signal source that can produce the voltage and current signal well known in the art so, as versatile signal generator.As shown in Figure 2, preferably, the signal source 1 of test macro provided by the invention comprises digital to analog converter 11, voltage source 13 and/or current source 12, wherein: digital to analog converter 11, be connected with voltage source 13 and/or current source 12, be used for being connected, the control signal of control unit is converted to analog signal with control unit; And voltage source 13 and/or current source 12, be used for being connected with detecting unit with transducer to be measured, produce the voltage and/or current signal and the reference signal that are used to test.The invention provides signal source and introduced digital to analog converter, can realize for example, can providing 256 grades variation when using 8 figure place weighted-voltage D/A converters, and 4096 grades variation can be provided when using 12 figure place weighted-voltage D/A converters the control of the precision of voltage and current ground.Therefore, for the needed different voltage of various electric performance test projects and/or the measuring-signal of electric current, described signal source can both realize.
The detecting unit of test macro of the present invention can adopt the various functional modules that can detect voltage and/or electric current to realize.As shown in Figure 3, preferably, detecting unit 2 comprises sampling amplifier 21, range selector 22 and analog to digital converter 23, wherein: sampling amplifier 21, be used for being connected with signal source 1 with transducer to be measured, sampling keep and amplification detection to signal of sensor to be measured and the reference signal that provides for detecting unit of signal source; Span-changing device 22 is connected with sampling amplifier 21, is used for selecting range according to the amplitude of detected signal; Analog to digital converter 23 is connected with sampling amplifier 21, is used for being connected with data processor, and the signal of sensor detected to be measured that has been exaggerated is converted to digital signal and exports data processor to.
In test process, the signal of telecommunication that detects the resistance two ends is normally fainter, make analog to digital converter be difficult for accurately changing, thereby need the very high analog to digital converter of sensitivity, this type of analog to digital converter cost height, and detecting unit provided by the invention has been introduced sampling amplifier, makes detected signal be amplified to appropriate value earlier before being implemented analog-to-digital conversion, thereby has saved cost.
As a rule, test process comprises the multinomial test to the different performance index of testing image transducer, therefore the signal from the testing image sensor also just has multinomial, in general, when detected data be in detect range 2/3 to 3/4 the time, data accuracy is higher, thereby the introducing range selector provides different detection ranges.
Detecting unit provided by the invention has been introduced analog to digital converter, can realize precision ground conversion to output image data, for example, can provide 256 grades variation when using 8 analog to digital converters, and 4096 grades variation can be provided when using 12 analog to digital converters.Therefore, can reflect variation of output signals more exactly.
As shown in Figure 4, preferably, the control unit 3 of test macro provided by the invention comprises microcontroller 32, interface conversion circuit 31 and anti-jamming circuit 33, wherein: microcontroller, be connected with interface conversion circuit, be used to carry out the controlled function of described control unit; Interface conversion circuit, be connected with microcontroller, be used for being connected with detecting unit, the signal of input microcontroller and the conversion of signals of microcontroller output are become signal source, transducer to be measured, detecting unit and the discernible signal of microcontroller with signal source, transducer to be measured; And anti-jamming circuit, be connected with microcontroller, be used to shield of the interference of external electromagnetic ripple to microcontroller.As a rule, microcontroller can adopt various little processing integrated circuit commonly used in this area to realize, as single-chip microcomputer, digital signal processor, programmable logic array or the like.Because the desired disposal ability of system of the present invention is not high, preferably, adopt single-chip microcomputer to realize.
Preferably, the data processor of test macro provided by the invention is personal computer or small-sized work station.
Fig. 5 is the block diagram that comprises the test macro of switching network of the present invention.Preferably, test macro provided by the invention also comprises switching network 5, be connected with transducer 100 to be measured with signal source 1, control unit 3 and be connected, be used for optionally the output signal of signal source 1 being offered transducer 100 to be measured according to the control signal of control unit 3.
As shown in Figure 6, described switching network 5 comprises decoder 51, driver 52 and switch 53, wherein: decoder 51, be used for being connected with driver with control unit, the control signal by the decipher control unit produces gating signal; Driver 52 is connected with the control end of switch, is used to adjust the voltage of gating signal; And switch 53, be used for being connected with transducer to be measured with signal source, according to the output signal selection of driver ground the output signal of signal source is offered transducer to be measured.Described decoder, driver and switch can adopt element well known in the art to realize, its concrete structure is not done and given unnecessary details.
In test macro of the present invention, use the benefit of such switching network to be, when carrying out open circuit and/or short-circuit test, in general to go as test cell, will carry out the operation of nominative testing row like this, so, in test process, send the gating signal that is directed to certain delegation to switching network 5 by control unit 3, decoder 51 in the switching network 5, this gating signal of decipher and generation export driver 52 to, driver 52 changes selected current voltage according to this gating signal, opens or closure thereby switch 53 is carried out, and makes test to implement targetedly.
Test macro provided by the invention also comprises interface module, and described street corner module comprises anchor clamps and interface circuit; Wherein anchor clamps are used for clamping transducer to be measured; For the test macro that does not comprise switching network, interface circuit is connected with signal source and detecting unit, is used for the output signal of signal source is transferred to transducer to be measured, and signal of sensor to be measured is transferred to detecting unit.And for the test macro that comprises switching network, interface circuit, be used for being connected, the output signal of signal source be transferred to transducer to be measured by switching network, and signal of sensor to be measured is transferred to detecting unit with signal source, switching network and detecting unit.
Described interface circuit is used to transducer to be measured and the detecting unit interface circuit is set up the conductive path that is electrically connected, in general the conductive path number is corresponding with contact jaw on the transducer to be measured, comprise a plurality of conductive paths, the two ends of each conductive path are connected with detecting unit with transducer to be measured respectively.Described interface circuit is fixed on the anchor clamps.
Test macro provided by the invention also comprises man-machine interface, is connected with control unit, is used for starting and stopping instruction to the test of transducer to be measured to control unit input.Described man-machine interface can be this area various switches commonly used.
Test macro provided by the invention also comprises data transmission interface, is connected between control circuit and the data processor, is used for the speed of transfer of data between control circuit and the data processor and the control of flow.Described data transmission interface can be a various wired or wireless coffret commonly used in this area, as interfaces such as: USB, serial, parallel, infrared, bluetooths.What preferably, can adopt is USB interface.
The method of the image property of described judgement transducer to be measured comprises: judge the open circuit and the short circuit of transducer to be measured according to the amplitude of the detected signal of sensor to be measured of detecting unit, calculate quiescent dissipation or dynamic power consumption according to the detected signal of sensor to be measured of detecting unit.Its computational process can be by the engineering calculation software that those skilled in the art used always, and for example Matlab realizes.
System provided by the invention also comprises the test report output device, is connected with data processor, is used to export test report.Described test report comprises open circuit and/or short-circuit test result, quiescent dissipation or dynamic power consumption.
The following describes the process of the electric performance test of the cmos image sensor that adopts system of the present invention.
At first,, comprise that the output of voltage source, current source is set to 0, the switch in the switching network is all disconnected that the state of data transmission interface is set to ready state, wait for the signal input of man-machine interface by the state of other modules of control unit initialization.
The staff packs cmos image sensor to be tested in the anchor clamps of interface module, presses the control button of man-machine interface then, starts test.
Control unit receives input signal, and the port that is connected with the USB transmission circuit is set to initial state.Software in the data processor receives the commencing signal of control unit, sends the control signal of indication mechanism work, for example " open circuit and/or short-circuit test " signal.Control unit receives " open circuit and/or short-circuit test " signal, at first open a way and/or the signal source state of short-circuit test is provided with (current source for example is set is output as the 100mA electric current), the state (for example with power pins ground connection) of the switch on and off of switching network circuit for open circuit and/or short-circuit test is set then.
Then, control unit is provided with some measurement pins and is connected with current source, reads the data of analog to digital converter, both has been the magnitude of voltage of this pin under the 100mA electric current.Then, disconnection measurement pin is connected with current source, will measure another measurement pin again and be connected with current source.By that analogy, the pin of all transducers to be measured is connected with current source respectively, measures separately.After open circuit and/or short-circuit test were finished, control unit was set to completion status with the port that the USB transmission circuit is connected.
Data processor receives finishes signal, reads open circuit and/or the short-circuit test data that measure by the USB transmission circuit from control unit then, and the back of converting judges data, and whether analyze open circuit and/or short-circuit test qualified.After finishing " open circuit and/or short-circuit test ", data processor sends next control signal again to control unit (for example " operating current test "), and system carries out the test job of the next item down performance again.
After all test events were finished, the test macro recovering state was to the state of initial setting up, and the staff just can take out the chip that test is finished from anchor clamps, reappose the measurement that chip enters next chip.
Claims (12)
1, a kind of test macro that is used for the electrical property of cmos image sensor is characterized in that, described system comprises signal source, control unit, detecting unit and data processor, wherein:
Signal source is connected with transducer to be measured, control unit and detecting unit, is used for input signal being provided and reference signal being provided to transducer to be measured;
Detecting unit is connected with transducer to be measured, signal source and control unit, is used to detect signal of sensor to be measured and provides detected signal of sensor to be measured to control unit;
Control unit, be connected with data processor with signal source, detecting unit, transducer to be measured, the output signal, startup and the termination detecting unit that are used for the conditioning signal source offer data processor to the test of transducer to be measured and with the signal of sensor detected to be measured that detecting unit provides; And
Data processor is connected with control unit, is used for judging according to the signal of sensor detected to be measured that control unit provides the electrical property of transducer to be measured.
2, system according to claim 1 is characterized in that, described signal source comprises digital to analog converter, voltage source and/or current source, wherein:
Digital to analog converter is connected with voltage source and/or current source, is used for being connected with control unit, and the control signal of control unit is converted to analog signal; And
Voltage source and/or current source are used for being connected with detecting unit with transducer to be measured, produce the voltage and/or current signal and the reference signal that are used to test.
3, system according to claim 1 is characterized in that, described detecting unit comprises sampling amplifier, range selector and analog to digital converter, wherein:
Sampling amplifier is used for being connected with signal source with transducer to be measured, sampling keep and amplification detection to signal of sensor to be measured and the reference signal that provides of signal source;
Span-changing device is connected with sampling amplifier, is used for selecting range according to the amplitude of detected signal; And
Analog to digital converter is connected with sampling amplifier, is used for being connected with data processor, and the signal of sensor detected to be measured that has been exaggerated is converted to digital signal and exports data processor to.
4, system according to claim 1 is characterized in that, described control unit comprises microcontroller, interface conversion circuit and anti-jamming circuit, wherein:
Microcontroller is connected with interface conversion circuit, is used to carry out the controlled function of described control unit;
Interface conversion circuit, be connected with microcontroller, be used for being connected with detecting unit, convert the signal of input microcontroller and the signal of microcontroller output to signal source, transducer to be measured, detecting unit and the discernible signal of microcontroller respectively with signal source, transducer to be measured; And
Anti-jamming circuit is connected with microcontroller, is used to shield the interference of external electromagnetic ripple to microcontroller.
5, test macro according to claim 1, it is characterized in that, described system also comprises switching network, is connected with transducer to be measured with signal source, control unit to be connected, and is used for optionally the output signal of signal source being offered transducer to be measured according to the control signal of control unit.
6, test macro according to claim 5 is characterized in that, described switching network comprises decoder, driver and switch, wherein:
Decoder is connected with driver, is used for being connected with control unit, and the control signal by the decipher control unit produces gating signal;
Driver is connected with the control end of switch, is used to adjust the voltage of gating signal; And
Switch is used for being connected with transducer to be measured with signal source, according to the output signal selection of driver ground the output signal of signal source is offered transducer to be measured.
7, test macro according to claim 1 is characterized in that, described system also comprises interface module, and described street corner module comprises anchor clamps and interface circuit; Wherein:
Anchor clamps are used for clamping transducer to be measured;
Interface circuit is used for being connected with signal source, transducer to be measured and detecting unit, the output signal of signal source is transferred to transducer to be measured, and signal of sensor to be measured is transferred to detecting unit.
8, test macro according to claim 5 is characterized in that, described system also comprises interface module, and described street corner module comprises anchor clamps and interface circuit; Wherein:
Anchor clamps are used for clamping transducer to be measured;
Interface circuit is used for being connected with signal source, switching network and detecting unit, the output signal of signal source is transferred to transducer to be measured by switching network, and signal of sensor to be measured is transferred to detecting unit.
9, test macro according to claim 1 is characterized in that, described system also comprises man-machine interface, is connected with control unit, is used for starting and stopping instruction to transducer to be measured to control unit input.
10, test macro according to claim 1 is characterized in that, described system also comprises data transmission interface, is connected between control unit and the data processor, is used for the speed of transfer of data between control circuit and the data processor and the control of flow.
11, test macro according to claim 1 is characterized in that, judges that the method for the electrical property of transducer to be measured comprises following at least a:
Judge the open circuit and the short circuit of transducer to be measured according to the amplitude of the detected signal of sensor to be measured of detecting unit;
Calculate quiescent dissipation according to the detected signal of sensor to be measured of detecting unit; And
Calculate dynamic power consumption according to the detected signal of sensor to be measured of detecting unit.
12, test macro according to claim 1 is characterized in that, this system also comprises the test report output device, is connected with data processor, is used to export test report.
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| CN2007101300713A CN101360254B (en) | 2007-07-30 | 2007-07-30 | Test system for CMOS image sensor electrical performance |
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| CN2007101300713A CN101360254B (en) | 2007-07-30 | 2007-07-30 | Test system for CMOS image sensor electrical performance |
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| CN101360254B CN101360254B (en) | 2010-06-16 |
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| CN103399457A (en) * | 2013-07-31 | 2013-11-20 | 南昌欧菲光电技术有限公司 | Automatic focusing function testing system and method for camera module |
| CN103558543A (en) * | 2013-11-20 | 2014-02-05 | 太仓思比科微电子技术有限公司 | Mass production testing method of CIS chip |
| CN104038711A (en) * | 2013-03-05 | 2014-09-10 | 派视尔株式会社 | Image sensor and monitoring system including same |
| CN104469356A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院半导体研究所 | Image sensor characteristic parameter measuring and analyzing system |
| CN104458206A (en) * | 2014-12-08 | 2015-03-25 | 天津大学 | Labview-based image sensor testing system |
| CN104866839A (en) * | 2015-06-03 | 2015-08-26 | 北京释码大华科技有限公司 | Test device and method for testing performance of iris recognition equipment |
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| JP2921937B2 (en) * | 1990-07-18 | 1999-07-19 | 東京エレクトロン株式会社 | IC inspection equipment |
| CN1472700A (en) * | 2003-01-28 | 2004-02-04 | 上海长丰智能卡有限公司 | IC card chip and module chip testing system |
| KR100769860B1 (en) * | 2005-12-12 | 2007-10-24 | 옵토팩 주식회사 | Apparatus and method for testing image sensor package |
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- 2007-07-30 CN CN2007101300713A patent/CN101360254B/en not_active Expired - Fee Related
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| CN104038711B (en) * | 2013-03-05 | 2017-06-13 | 派视尔株式会社 | Imageing sensor and the monitoring system including it |
| CN103399457A (en) * | 2013-07-31 | 2013-11-20 | 南昌欧菲光电技术有限公司 | Automatic focusing function testing system and method for camera module |
| CN103399457B (en) * | 2013-07-31 | 2016-03-30 | 南昌欧菲光电技术有限公司 | Camera module automatic focusing function test macro and method |
| CN103558543B (en) * | 2013-11-20 | 2016-09-07 | 太仓思比科微电子技术有限公司 | A kind of volume production method of testing to CIS chip |
| CN103558543A (en) * | 2013-11-20 | 2014-02-05 | 太仓思比科微电子技术有限公司 | Mass production testing method of CIS chip |
| CN104458206A (en) * | 2014-12-08 | 2015-03-25 | 天津大学 | Labview-based image sensor testing system |
| CN104469356A (en) * | 2014-12-29 | 2015-03-25 | 中国科学院半导体研究所 | Image sensor characteristic parameter measuring and analyzing system |
| CN104866839A (en) * | 2015-06-03 | 2015-08-26 | 北京释码大华科技有限公司 | Test device and method for testing performance of iris recognition equipment |
| CN106249097A (en) * | 2016-08-05 | 2016-12-21 | 歌尔股份有限公司 | A kind of test equipment for photographic head module |
| CN106358038A (en) * | 2016-09-06 | 2017-01-25 | 上海集成电路研发中心有限公司 | Detecting method of pixel performance |
| CN106358038B (en) * | 2016-09-06 | 2018-05-29 | 上海集成电路研发中心有限公司 | A kind of detection method of pixel performance |
| CN111273665A (en) * | 2020-02-12 | 2020-06-12 | 北京海益同展信息科技有限公司 | Inspection robot, wind speed measuring system and wind speed measuring method |
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| CN101360254B (en) | 2010-06-16 |
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