CN101346664B - 掩模坯料及光掩模 - Google Patents

掩模坯料及光掩模 Download PDF

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Publication number
CN101346664B
CN101346664B CN2006800493905A CN200680049390A CN101346664B CN 101346664 B CN101346664 B CN 101346664B CN 2006800493905 A CN2006800493905 A CN 2006800493905A CN 200680049390 A CN200680049390 A CN 200680049390A CN 101346664 B CN101346664 B CN 101346664B
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CN
China
Prior art keywords
film
transmittance
line
range
mask
Prior art date
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Active
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CN2006800493905A
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English (en)
Chinese (zh)
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CN101346664A (zh
Inventor
三井胜
佐野道明
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Hoya Corp
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Hoya Corp
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Publication of CN101346664A publication Critical patent/CN101346664A/zh
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Publication of CN101346664B publication Critical patent/CN101346664B/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CN2006800493905A 2005-12-26 2006-12-26 掩模坯料及光掩模 Active CN101346664B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP371970/2005 2005-12-26
JP2005371970 2005-12-26
PCT/JP2006/325884 WO2007074810A1 (ja) 2005-12-26 2006-12-26 マスクブランク及びフォトマスク

Publications (2)

Publication Number Publication Date
CN101346664A CN101346664A (zh) 2009-01-14
CN101346664B true CN101346664B (zh) 2011-12-14

Family

ID=38218030

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006800493905A Active CN101346664B (zh) 2005-12-26 2006-12-26 掩模坯料及光掩模

Country Status (4)

Country Link
JP (1) JP4906888B2 (enExample)
KR (2) KR101082715B1 (enExample)
CN (1) CN101346664B (enExample)
WO (1) WO2007074810A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI446105B (zh) * 2007-07-23 2014-07-21 Hoya Corp 光罩之製造方法、圖案轉印方法、光罩以及資料庫
CN101809499B (zh) * 2007-09-27 2012-10-10 Hoya株式会社 掩模坯体以及压印用模具的制造方法
JP4934237B2 (ja) * 2007-09-29 2012-05-16 Ｈｏｙａ株式会社 グレートーンマスクの製造方法及びグレートーンマスク、並びにパターン転写方法
CN101821676A (zh) * 2007-10-12 2010-09-01 爱发科成膜株式会社 用于制造灰色调掩模的方法
CN103513508B (zh) * 2012-06-20 2016-08-10 欣兴电子股份有限公司 灰阶光掩膜与制作方法以及以灰阶光掩膜形成沟渠方法
CN107145035A (zh) * 2017-03-30 2017-09-08 惠科股份有限公司 光罩及其主动开关阵列基板的制造方法
JP7166975B2 (ja) * 2019-03-29 2022-11-08 Hoya株式会社 フォトマスクブランク、フォトマスクの製造方法、及び表示装置の製造方法
TW202443301A (zh) * 2023-03-15 2024-11-01 日商尼康股份有限公司 光罩基底、光罩、光罩基底之製造方法、光罩之製造方法、及裝置之製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3262302B2 (ja) * 1993-04-09 2002-03-04 大日本印刷株式会社 位相シフトフォトマスク、位相シフトフォトマスク用ブランクス及びそれらの製造方法
KR100295385B1 (ko) * 1993-04-09 2001-09-17 기타지마 요시토시 하프톤위상쉬프트포토마스크,하프톤위상쉬프트포토마스크용블랭크스및이들의제조방법
JP3289606B2 (ja) * 1996-07-11 2002-06-10 凸版印刷株式会社 ハーフトーン型位相シフトマスク用ブランク及びハーフトーン型位相シフトマスク
JP2004177683A (ja) * 2002-11-27 2004-06-24 Clariant (Japan) Kk 超高耐熱ポジ型感光性組成物を用いたパターン形成方法
JP4385690B2 (ja) * 2003-09-09 2009-12-16 凸版印刷株式会社 液晶表示素子製造用露光マスク及びその製造方法
JP4919220B2 (ja) * 2005-02-28 2012-04-18 Ｈｏｙａ株式会社 グレートーンマスク
JP5076473B2 (ja) * 2005-12-05 2012-11-21 大日本印刷株式会社 マスクブランクおよび階調マスク
JP4961990B2 (ja) * 2005-12-14 2012-06-27 大日本印刷株式会社 マスクブランクおよび階調マスク

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2004-177683A 2004.06.24
JP特开平10-26820A 1998.01.27

Also Published As

Publication number Publication date
JP4906888B2 (ja) 2012-03-28
JP2009187032A (ja) 2009-08-20
KR101210661B1 (ko) 2012-12-11
WO2007074810A1 (ja) 2007-07-05
KR20080088616A (ko) 2008-10-02
KR20110025232A (ko) 2011-03-09
KR101082715B1 (ko) 2011-11-15
CN101346664A (zh) 2009-01-14

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