CN101335009B - 垂直磁记录头及其制造方法 - Google Patents

垂直磁记录头及其制造方法 Download PDF

Info

Publication number
CN101335009B
CN101335009B CN200810131811XA CN200810131811A CN101335009B CN 101335009 B CN101335009 B CN 101335009B CN 200810131811X A CN200810131811X A CN 200810131811XA CN 200810131811 A CN200810131811 A CN 200810131811A CN 101335009 B CN101335009 B CN 101335009B
Authority
CN
China
Prior art keywords
main pole
sidepiece
magnetic recording
recording head
insulation course
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200810131811XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101335009A (zh
Inventor
申奎植
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of CN101335009A publication Critical patent/CN101335009A/zh
Application granted granted Critical
Publication of CN101335009B publication Critical patent/CN101335009B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)
CN200810131811XA 2007-06-28 2008-06-24 垂直磁记录头及其制造方法 Expired - Fee Related CN101335009B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020070064603 2007-06-28
KR1020070064603A KR100924695B1 (ko) 2007-06-28 2007-06-28 수직 자기 기록 헤드 및 그 제조방법
KR10-2007-0064603 2007-06-28

Publications (2)

Publication Number Publication Date
CN101335009A CN101335009A (zh) 2008-12-31
CN101335009B true CN101335009B (zh) 2013-02-13

Family

ID=40160113

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200810131811XA Expired - Fee Related CN101335009B (zh) 2007-06-28 2008-06-24 垂直磁记录头及其制造方法

Country Status (4)

Country Link
US (1) US20090002885A1 (enExample)
JP (1) JP2009009689A (enExample)
KR (1) KR100924695B1 (enExample)
CN (1) CN101335009B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8276258B1 (en) 2008-08-26 2012-10-02 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer
US8166631B1 (en) 2008-08-27 2012-05-01 Western Digital (Fremont), Llc Method for fabricating a magnetic recording transducer having side shields
US8720044B1 (en) 2008-09-26 2014-05-13 Western Digital (Fremont), Llc Method for manufacturing a magnetic recording transducer having side shields
US8231796B1 (en) 2008-12-09 2012-07-31 Western Digital (Fremont), Llc Method and system for providing a magnetic recording transducer having side shields
US9036298B2 (en) * 2009-07-29 2015-05-19 Seagate Technology Llc Methods and devices to control write pole height in recording heads
US8375564B1 (en) 2009-12-08 2013-02-19 Western Digital (Fremont), Llc Method for fabricating a pole of a magnetic transducer
US8441757B2 (en) * 2009-12-09 2013-05-14 HGST Netherlands B.V. Perpendicular magnetic write head with wrap-around shield, slanted pole and slanted pole bump fabricated by damascene process
US8277669B1 (en) 2009-12-21 2012-10-02 Western Digital (Fremont), Llc Method and system for providing a perpendicular magnetic recording pole having a leading edge bevel
US8300359B2 (en) * 2009-12-30 2012-10-30 Tdk Corporation Perpendicular magnetic recording head and magnetic recording device
US8432639B2 (en) 2010-05-06 2013-04-30 Headway Technologies, Inc. PMR writer with π shaped shield
US8444866B1 (en) 2010-09-21 2013-05-21 Westen Digital (Fremont), LLC Method and system for providing a perpendicular magnetic recording pole with a multi-layer side gap
US8432637B2 (en) * 2010-11-10 2013-04-30 HGST Netherlands B.V. Wet etching silicon oxide during the formation of a damascene pole and adjacent structure
US8553371B2 (en) 2010-11-24 2013-10-08 HGST Netherlands B.V. TMR reader without DLC capping structure
US8524095B2 (en) 2010-11-24 2013-09-03 HGST Netherlands B.V. Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
US8470186B2 (en) 2010-11-24 2013-06-25 HGST Netherlands B.V. Perpendicular write head with wrap around shield and conformal side gap
US8400733B2 (en) 2010-11-24 2013-03-19 HGST Netherlands B.V. Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET)
US8830623B2 (en) 2011-12-19 2014-09-09 HGST Netherlands B.V. Shield structure for reducing the magnetic induction rate of the trailing shield and systems thereof
US8451563B1 (en) 2011-12-20 2013-05-28 Western Digital (Fremont), Llc Method for providing a side shield for a magnetic recording transducer using an air bridge
US8980109B1 (en) 2012-12-11 2015-03-17 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a combined main pole and side shield CMP for a wraparound shield scheme
US8914969B1 (en) * 2012-12-17 2014-12-23 Western Digital (Fremont), Llc Method for providing a monolithic shield for a magnetic recording transducer
US9042051B2 (en) 2013-08-15 2015-05-26 Western Digital (Fremont), Llc Gradient write gap for perpendicular magnetic recording writer
US9082423B1 (en) 2013-12-18 2015-07-14 Western Digital (Fremont), Llc Magnetic recording write transducer having an improved trailing surface profile
JP2016219070A (ja) * 2015-05-14 2016-12-22 株式会社東芝 磁気記録ヘッド、およびこれを備えたディスク装置
CN114783466B (zh) * 2018-11-22 2023-10-20 新科实业有限公司 用于热辅助磁记录的过渡曲率改进的系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3875019B2 (ja) * 2000-12-26 2007-01-31 アルプス電気株式会社 垂直磁気記録ヘッドおよびその製造方法
JP2004348928A (ja) * 2003-05-26 2004-12-09 Alps Electric Co Ltd 垂直記録磁気ヘッド
JP4104511B2 (ja) * 2003-09-12 2008-06-18 Ｔｄｋ株式会社 垂直磁気ヘッドの製造方法
US7002775B2 (en) * 2003-09-30 2006-02-21 Hitachi Global Storage Technologies Netherlands B.V. Head for perpendicular magnetic recording with a shield structure connected to the return pole piece
JP4260002B2 (ja) * 2003-12-24 2009-04-30 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 磁気ヘッドとその製造方法および磁気記録再生装置
US7322095B2 (en) * 2004-04-21 2008-01-29 Headway Technologies, Inc. Process of manufacturing a four-sided shield structure for a perpendicular write head
US7295401B2 (en) * 2004-10-27 2007-11-13 Hitachi Global Storage Technologies Netherlands B.V. Laminated side shield for perpendicular write head for improved performance
JP2006147023A (ja) * 2004-11-18 2006-06-08 Fujitsu Ltd 薄膜磁気ヘッドおよびその製造方法
US7573683B1 (en) * 2005-07-08 2009-08-11 Maxtor Corporation Write heads with floating side shields and manufacturing methods
US20070035878A1 (en) * 2005-08-10 2007-02-15 Hung-Chin Guthrie Perpendicular head with self-aligned notching trailing shield process
JP2007128581A (ja) * 2005-11-02 2007-05-24 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法
US7978431B2 (en) * 2007-05-31 2011-07-12 Headway Technologies, Inc. Method to make a perpendicular magnetic recording head with a bottom side shield

Also Published As

Publication number Publication date
US20090002885A1 (en) 2009-01-01
JP2009009689A (ja) 2009-01-15
CN101335009A (zh) 2008-12-31
KR100924695B1 (ko) 2009-11-03
KR20090000497A (ko) 2009-01-07

Similar Documents

Publication Publication Date Title
CN101335009B (zh) 垂直磁记录头及其制造方法
US9466319B1 (en) Perpendicular magnetic recording (PMR) write shield design with minimized wide adjacent track erasure (WATE)
US10657988B2 (en) Method of forming a perpendicular magnetic recording (PMR) write head with patterned leading edge taper
US10347276B2 (en) Perpendicular magnetic recording (PMR) writer with hybrid shield layers
JP5715750B2 (ja) 薄膜磁気ヘッドおよびその製造方法並びにヘッドジンバルアセンブリおよびハードディスク装置
JP5719100B2 (ja) 垂直磁気記録ヘッドおよびその製造方法
US7140095B2 (en) Method of manufacturing a thin film magnetic head
US6922316B2 (en) Thin-film magnetic head and method of manufacturing same
JP5129051B2 (ja) 記録磁極構造、および垂直磁気記録ヘッドにおける記録磁極構造の形成方法
JP5841367B2 (ja) 薄膜磁気ヘッドおよびその製造方法並びにヘッドジンバルアセンブリおよびハードディスク装置
JP2002298309A (ja) 磁気ヘッド及びその製造方法
JP2006018985A (ja) 垂直磁気記録用磁気ヘッドおよびその製造方法
JP2009070548A (ja) 垂直磁気記録ヘッド及びその製造方法
JP2007004958A (ja) 垂直磁気記録用薄膜磁気ヘッド
US7379268B2 (en) Thin-film magnetic head including non-magnetic layer for maintaining flatness of the top surface of pole portion layer
US20060126222A1 (en) Thin film magnetic head, method of manufacturing the same, and magnetic recording apparatus
US7808743B2 (en) Perpendicular magnetic write head having a structure that suppresses unintended erasure of information on a write medium at a non-writing time
JP3366256B2 (ja) 薄膜磁気ヘッド及びその製造方法
US6850390B2 (en) Thin-film magnetic head and method of manufacturing same
JP2005071430A (ja) 垂直磁気記録ヘッドの製造方法
US6940689B2 (en) Thin-film magnetic head comprising a first pole layer having multiple layers including a second layer and a thin-film coil having a portion disposed between the second layer and a coupling portion and method of manufacturing the thin-film magnetic head
JP2004310975A (ja) 薄膜磁気ヘッドおよびその製造方法ならびに薄膜磁気ヘッド用基礎構造物
JP4722452B2 (ja) 磁気ヘッド、ヘッドジンバルアセンブリ、ハードディスク装置及び磁気ヘッドの製造方法
US8169739B2 (en) Perpendicular magnetic write head
JPH11203630A (ja) シールド型磁気抵抗効果薄膜磁気ヘッドおよびその製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130213

Termination date: 20140624

EXPY Termination of patent right or utility model