Summary of the invention
To a kind of fixture and control method thereof be described with embodiment below, whether its conveniently adjusted chucking power and accurate detection clamping arrive the precalculated position.
A kind of fixture, described fixture comprises: a gripper shoe, it is in order to supporting substrate; A plurality of anchor clamps, it comprises a permanent magnet, a plurality of sheet, an electric coil and iron core of supporting respectively; Described permanent magnet and described electric coil are oppositely arranged, and described iron core is arranged on the bearing of trend at described electric coil center and this iron core and described a plurality of sheet that supports keep being synchronized with the movement; After the energising of described electric coil, described iron core and described a plurality of sheet that supports are subjected to the effect of the magnetic force that described electric coil produces and move in a certain direction, and when described iron core moves and pass the center of described electric coil, will make described electric coil produce anti-phase electromotive force; Described permanent magnet moves to and described a plurality of sheets that support is adsorbed after determining the position at described a plurality of sheets that support; One first control module, it is electrically connected on described electric coil, and described first control module comprises a pulse width modulation (PWM) controller, and described pulse width modulation (PWM) controller is controlled the size of the chucking power of described a plurality of anchor clamps by programming; One second control module, it is used for judging according to detecting the anti-phase electromotive force that produces on the described electric coil whether the described substrate of described a plurality of anchor clamps clampings arrives the precalculated position.
And, a kind of fixture control method that adopts the said fixing device, it may further comprise the steps: described pulse width modulation (PWM) controller is exported the described electric coil of a row direct impulse signal controlling and is driven described iron core and wear to described electric coil, drives described a plurality of sheet that supports by the fixed block that links to each other with described iron core simultaneously and moves towards the direction near described permanent magnet; The described sheet that supports moves to the precalculated position, and described permanent magnet adsorbs a plurality of sheets that support of described anchor clamps; Described iron core stop motion, the anti-phase electromotive force that one of described electric coil generation can be detected; Described second control module detects described anti-phase electromotive force that can be detected, and controls described electric coil outage.
With respect to prior art, described fixture and control method thereof, it comes adjustable ground to control the size of the chucking power of described a plurality of anchor clamps by one first control module is set, detect the described substrate of described a plurality of anchor clamps clampings and whether arrive the precalculated position by one second control module is set simultaneously, and outage and described substrate is carried out clamping when detecting clamping and arrive the precalculated position by described permanent magnet, it has not only saved the cost that utilizes manpower that the chucking power of described a plurality of anchor clamps is regulated, also reduce power consumption, reduced the accident of substrate breakage.
The specific embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is described in further detail.
See also Fig. 1 to Fig. 3, the fixture 10 that the embodiment of the invention provides, it comprises a gripper shoe 11, a plurality of anchor clamps 12, first control module 13 and one second control module 14.
Described gripper shoe 11 is in order to supporting substrate 20, and the edge part of its upper surface 110 is provided with alignment pin 15, as first alignment pin 151 and second alignment pin 152.
Described a plurality of anchor clamps 12 comprise a permanent magnet 121, a plurality of sheet 122, an electric coil 123 and iron core 127 of supporting respectively.Described permanent magnet 121 is oppositely arranged with described electric coil 123, and described iron core 127 is arranged on the bearing of trend at these electric coil 123 centers and this iron core 127 keeps being synchronized with the movement with described a plurality of sheets 122 that support.After described electric coil 123 energisings, described iron core 127 and described a plurality of sheet 122 that supports are subjected to the effect of the magnetic force that described electric coil 123 produces and move in a certain direction, and when described iron core 127 moves and pass the center of described electric coil 123, will make described electric coil 123 produce anti-phase electromotive force.Described permanent magnet 121 moves to and described a plurality of sheets 122 that support is adsorbed after determining the position at described a plurality of sheets 122 that support.Certainly, be understandable that, the magnetic force of described permanent magnet 121 should be relatively a little less than, in order to avoid described a plurality of sheet 122 that supports is not before moving to definite position, this permanent magnet 121 directly adsorbs described a plurality of sheet 122 that supports, and, cause substrate 20 fragmentations owing to effect of inertia makes described a plurality of described substrate 20 of sheet 122 bumps that supports.In addition, described a plurality of anchor clamps 12 also further comprise a fixed block 124, many guide rails 125 and a stopper 126 respectively; Describedly a plurality ofly support sheet 122 and described iron core 127 is fixed on the described fixed block 124, described fixed block 124 linear slide are on described many guide rails 125 and drive and describedly a plurality ofly support sheet 122 and described iron core 127 moves in a certain direction, and the edge that described stopper 126 is fixed on described many guide rails 125 skids off described many guide rails 125 to prevent described fixed block 124.
First alignment pin 151 and second alignment pin 152 on described gripper shoe 11 upper surfaces 110, and described a plurality of anchor clamps 12 can be fixed in substrate 20 on the described gripper shoe 11.
Described gripper shoe 11 is provided with a plurality of through holes 16 corresponding to described a plurality of anchor clamps 12, and it is used to hold described a plurality of anchor clamps 12.Described a plurality of sheet 122 that supports includes a cylinder 1221 respectively, and when described a plurality of when supporting sheet 122 and clamping described substrate 20, the outer circumference surface 1222 of described cylinder 1221 contacts with outward flange 21 retention wires of substrate 20.Be understandable that for the outer circumference surface 1222 that increases described cylinder 1221 frictional force with the outward flange 21 of substrate 20, this outer circumference surface 1222 can adopt rubber to coat.
Described first control module is electrically connected on described electric coil 13, it comprises a pulse width modulation (Pulse Width Modulation, PWM) controller (figure does not show), described PWM controller also is that described electric coil 123 is drawn described a plurality of size of supporting the power of sheet 122 by the size of the chucking power of the described a plurality of anchor clamps 12 of programmed controlled system.
Described second control module 14 is used for judging according to detecting the anti-phase electromotive force that produces on the described electric coil 123 whether the described substrate 20 of described a plurality of anchor clamps 12 clampings arrives the precalculated position.It comprises a sampled signal transmitter (figure does not show), a sampled signal receiver (figure does not show) and an on-off controller (figure does not show).
In addition, the heat that produces when preventing 123 energisings of described electric coil is to substrate 20 diffusions, and described fixture 10 also further comprises a thermal insulation layer 17, and it is arranged at described gripper shoe 11 away from a side of described substrate 20 and approach described electric coil 123.
See also Fig. 1 to Fig. 4, the control method of the fixture 10 that the embodiment of the invention provides may further comprise the steps:
Described pulse width modulation (PWM) controller is exported the described iron core 127 of described electric coil 123 drivings of a row direct impulse signal controlling and is worn to described electric coil 123, drives described a plurality of sheets 122 that support by the fixed block 124 that links to each other with described iron core 127 simultaneously and moves towards the direction near described permanent magnet 121.Particularly, shown in Fig. 4 (a), at T in the time period, the described PWM controller row cycle of exporting is the described electric coil 123 of direct impulse signal controlling of t, in the t1 stage of each cycle t, described this direct impulse signal of PWM control output, in the t2 stage of each cycle t, described PWM output pulse signal is zero, because pulse signal off and on leads on described electric coil 123, according to Faradic electricity magnetic induction electricity rule, described pulse signal will and produce a forward magnetic field in the inside of described electric coil 123 on every side, this forward magnetic field can make 127 magnetization of described iron core, and make described iron core 127 be subjected to this forward magnetic field magnetic force effect and wear to described electric coil 123; Simultaneously, because described iron core 127 and described a plurality of sheet 122 that supports all be connected on the described fixed block 124, so described a plurality of sheet 122 that supports moves towards the direction near described permanent magnet 121 along described many guide rails 125 also under the drive of described fixed block 124.In addition, preferred, the ferromagnetic material that described iron core 127 optional usefulness have the magnetic memory effect, thus can make described iron core 127 in certain time period after magnetize it in described forward magnetic field, the magnetic in the time of still can keeping it by described forward magnetic field magnetisation.
Certainly, be understandable that, said process only limits to described a plurality of when supporting sheet 122 and touching described substrate 20, described permanent magnet 121 promptly simultaneously will these a plurality of situations of supporting sheet 122 absorption, in actual application, it also might be such situation, promptly, described a plurality of moving to earlier with described substrate 20 to sheet 122 contacts, and be at this moment, described a plurality of also distant to the described permanent magnet 121 of sheet 122 distances, so, described a plurality of sheet 122 that supports also needs further towards the direction motion of described permanent magnet 121 and finally by described permanent magnet 121 absorption, in this process, Yi Bian described a plurality of sheet 122 that supports also need push away described substrate 20 motions.Described PWM output pulse is shown in 4 (b) under this kind situation, can be divided into two time periods to be analyzed.At T1 in the time period, it was that the direct impulse signal of t acts on the described electric coil 123 in one row cycle that described PWM controller is controlled output equally, the pulse signal of described PWM output is identical with Fig. 4 (a) in this time period T1, and this T1 time period correspondence and describedly a plurality ofly moved to the stage that contacts with described substrate 20 earlier to sheet 122.Correspondingly, described a plurality of in the process that sheets 122 are further also finally adsorbed by described permanent magnet 121 towards the direction motion of permanent magnet 121, also be that T2 is in the time period, by Fig. 4 (b) as can be seen, though the direct impulse signal cycle of PWM output this moment also is t, but the time t3 of the direct impulse of PWM output is bigger than t1 in each cycle t, this is because in this time period T2, described electric coil 123 not only will provide described a plurality of power of supporting sheet 122 motions, and described a plurality of power that sheet 122 promotes described substrate 20 motions of supporting also will be provided simultaneously.Similarly, in the t4 stage of each cycle t, described PWM output pulse signal is zero, also is that described PWM controls described electric coil 123 outages.From the above, can realize control by programming Control to the chucking power of each different bite in the clamping process to PWM.
The described sheet 122 that supports moves to the precalculated position, and promptly described permanent magnet 121 adsorbs a plurality of sheets 122 that support of described anchor clamps 12.A plurality ofly support that sheet 122 moves and described substrate 20 is pushed into when contacting with described first alignment pin 151 or described second alignment pin 152 under the effect of described forward magnetic force when described, described substrate 20 is under the barrier effect of described first alignment pin 151 or described second alignment pin 152, can not further move, also be that described a plurality of sheet 122 that supports has moved to the precalculated position, at this moment, the magnetic force of described permanent magnet 121 generations is with described a plurality of sheets 122 absorption of supporting.It should be noted that this moment, described permanent magnet 121 might not need to keep in touch each other with described a plurality of sheets 122 that support.
Described iron core 127 stop motions, the anti-phase electromotive force (Back-EMF) that described electric coil 123 one of generation can be detected.Particularly, when described iron core 127 when wearing under the drive of described fixed block 124 to described electric coil 123, from the above, because described iron core 127 is by described electric coil 123 magnetization, so this electric coil 123 can magnetic field of corresponding generation, the magnetic flux that this magnetic field will change on described electric coil 123 owing to the change in location of described iron core 127 and described electric coil 123, and because the electromagnetic induction effect makes described electric coil 123 produce an induced electromotive force.According to Lenz's law, faradic magnetic field hinders the variation that causes faradic magnetic flux always, can judge that this induced electromotive force is opposite with the direct impulse sense of PWM controller output, also is that it is an anti-phase electromotive force (Back-EMF).As the above analysis, described a plurality of when supporting sheet 122 and moving to described precalculated position, described iron core 127 is also with the moment stop motion, thereby the anti-phase electromotive force moment that makes that described electric coil 123 produces reduces and reaches the value that certain can be detected.
Described second control module 14 detects described anti-phase electromotive force that can be detected, and controls described electric coil 123 outages.Particularly, at the t2 of each cycle t of Fig. 4 (a) in the time or the t4 of each cycle t of Fig. 4 (b) in the time, the sampled signal transmitter of described second control module 14 emission sampled signal with detect described electric coil 123 whether produce one can be detected anti-phase electromotive force, and one of emission feeds back signal to described sampled signal receiver when detecting this anti-phase electromotive force, controls described electric coil 123 outages by described on-off controller simultaneously.From the above, during described iron core 127 stop motions, described electric coil 123 will produce one can be detected anti-phase electromotive force, correspondingly, this moment, described second control module 14 detected this anti-phase electromotive force, controlled described electric coil 123 simultaneously and cut off the power supply.Because this moment, described permanent magnet 121 adsorbed described a plurality of sheets 122 that support, and described a plurality of sheet 122 that supports has also clamped described substrate 20, so under the situation of not giving described electric coil 123 energisings, described substrate 20 also can be fixed substrate 20 by the magnetic force that described permanent magnet 121 produces.
Certainly, be understandable that, when needs with described a plurality of anchor clamps 12 when described substrate 20 unclamps, can be by the described electric coil 123 of described PWM controller control output one row reverse impulse signal controlling, make 123 pairs of described iron cores 127 of described electric coil apply a deboost and promote described a plurality of sheet 122 that supports and separate with described permanent magnet 121.Particularly, from the above, described iron core 127 is by described forward magnetic field magnetisation and produce a corresponding magnetic, and this iron core 127 is the ferromagnetic materials with magnetic memory effect, so, when described electric coil 123 is logical during with the reverse impulse signal, the magnetic direction that this reverse impulse signal produces will repel each other with the magnetic direction that described iron core 127 produces, and promotes described a plurality of sheet 122 that supports and separates with described permanent magnet 121 thereby make 123 pairs of described iron cores 127 of this electric coil apply a deboost.
In addition, described fixture 10 also can further comprise a time schedule controller 18, and it can be used for controlling the time and the order of the described substrate 20 of described a plurality of anchor clamps 12 clampings.
Fixture 10 and control method thereof that the embodiment of the invention provides, it comes adjustable ground to control the size of the chucking power of described a plurality of anchor clamps 12 by one first control module 13 is set, detect the described substrate 20 of described a plurality of anchor clamps 12 clampings and whether arrive the precalculated position by one second control module is set simultaneously, and outage and carry out clamping when detecting clamping and arrive the precalculated position by 121 pairs of substrates of permanent magnet 20, it has not only saved the cost that utilizes manpower that the chucking power of described a plurality of anchor clamps 12 is regulated, also reduce power consumption, reduced the accident that substrate 20 breaks.
Be understandable that, for the person of ordinary skill of the art, can technical conceive according to the present invention make the change and the distortion of other various correspondences, and all these change the protection domain that all should belong to claim of the present invention with distortion.