CN101300640B - 实现磁隧道结电流传感器的方法 - Google Patents
实现磁隧道结电流传感器的方法 Download PDFInfo
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- CN101300640B CN101300640B CN2006800404795A CN200680040479A CN101300640B CN 101300640 B CN101300640 B CN 101300640B CN 2006800404795 A CN2006800404795 A CN 2006800404795A CN 200680040479 A CN200680040479 A CN 200680040479A CN 101300640 B CN101300640 B CN 101300640B
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- magnetic tunnel
- layer
- tunnel junction
- electric current
- active circuit
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/262,054 US7271011B2 (en) | 2005-10-28 | 2005-10-28 | Methods of implementing magnetic tunnel junction current sensors |
US11/262,054 | 2005-10-28 | ||
PCT/US2006/041148 WO2007053341A2 (en) | 2005-10-28 | 2006-10-20 | Methods of implementing magnetic tunnel junction current sensors |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101300640A CN101300640A (zh) | 2008-11-05 |
CN101300640B true CN101300640B (zh) | 2012-01-11 |
Family
ID=37996915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800404795A Expired - Fee Related CN101300640B (zh) | 2005-10-28 | 2006-10-20 | 实现磁隧道结电流传感器的方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7271011B2 (zh) |
CN (1) | CN101300640B (zh) |
TW (1) | TWI398643B (zh) |
WO (1) | WO2007053341A2 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7547480B2 (en) * | 2005-10-28 | 2009-06-16 | Everspin Technologies, Inc. | Magnetic tunnel junction pressure sensors and methods |
US8657191B2 (en) * | 2007-10-18 | 2014-02-25 | Nxp B.V. | Magnetic detection of back-side layer |
US7977941B2 (en) * | 2009-02-25 | 2011-07-12 | Everspin Technologies, Inc. | Magnetic field sensing device |
TWI457582B (zh) * | 2011-01-20 | 2014-10-21 | Tatung Co | 平面式磁場探測棒 |
WO2013078615A1 (en) * | 2011-11-29 | 2013-06-06 | Honeywell International Inc. | Devices, methods, and systems for sensing current |
US9489607B2 (en) * | 2013-05-17 | 2016-11-08 | Infineon Technologies Ag | Semiconductor device and an identification tag |
EP3757582B1 (en) * | 2017-11-30 | 2021-11-10 | INL - International Iberian Nanotechnology Laboratory | Frequency sensor and method of estimating a frequency |
TWI769819B (zh) * | 2021-05-18 | 2022-07-01 | 宇能電科技股份有限公司 | 電流感測器與裝置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5940319A (en) * | 1998-08-31 | 1999-08-17 | Motorola, Inc. | Magnetic random access memory and fabricating method thereof |
US6153443A (en) * | 1998-12-21 | 2000-11-28 | Motorola, Inc. | Method of fabricating a magnetic random access memory |
CN1345091A (zh) * | 2000-09-28 | 2002-04-17 | 株式会社东芝 | 利用隧道磁阻效应的半导体存储器及其制造方法 |
CN1538539A (zh) * | 2003-01-28 | 2004-10-20 | ���ǵ�����ʽ���� | 形成磁性随机存取存储器的磁性隧道结层的方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0874244B1 (de) * | 1997-04-19 | 2002-01-30 | LUST ANTRIEBSTECHNIK GmbH | Verfahren zum Messen von elektrischen Strömen in n Leitern sowie Vorrichtung zur Durchführung des Verfahrens |
DE19858868C2 (de) * | 1998-12-19 | 2003-06-18 | Micronas Gmbh | Hallsensor |
US20020024333A1 (en) * | 2000-07-07 | 2002-02-28 | Hubert Maiwald | Current sensor |
US6429640B1 (en) * | 2000-08-21 | 2002-08-06 | The United States Of America As Represented By The Secretary Of The Air Force | GMR high current, wide dynamic range sensor |
JP2004079033A (ja) * | 2002-08-12 | 2004-03-11 | Renesas Technology Corp | 不揮発性半導体記憶装置 |
US7123530B2 (en) * | 2003-10-09 | 2006-10-17 | Micron Technology, Inc. | AC sensing for a resistive memory |
US6946698B1 (en) * | 2004-04-02 | 2005-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | MRAM device having low-k inter-metal dielectric |
-
2005
- 2005-10-28 US US11/262,054 patent/US7271011B2/en not_active Expired - Fee Related
-
2006
- 2006-10-20 CN CN2006800404795A patent/CN101300640B/zh not_active Expired - Fee Related
- 2006-10-20 WO PCT/US2006/041148 patent/WO2007053341A2/en active Application Filing
- 2006-10-27 TW TW095139683A patent/TWI398643B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5940319A (en) * | 1998-08-31 | 1999-08-17 | Motorola, Inc. | Magnetic random access memory and fabricating method thereof |
US6153443A (en) * | 1998-12-21 | 2000-11-28 | Motorola, Inc. | Method of fabricating a magnetic random access memory |
CN1345091A (zh) * | 2000-09-28 | 2002-04-17 | 株式会社东芝 | 利用隧道磁阻效应的半导体存储器及其制造方法 |
CN1538539A (zh) * | 2003-01-28 | 2004-10-20 | ���ǵ�����ʽ���� | 形成磁性随机存取存储器的磁性隧道结层的方法 |
Also Published As
Publication number | Publication date |
---|---|
US20070099308A1 (en) | 2007-05-03 |
WO2007053341A3 (en) | 2007-11-15 |
TWI398643B (zh) | 2013-06-11 |
CN101300640A (zh) | 2008-11-05 |
TW200728735A (en) | 2007-08-01 |
WO2007053341A2 (en) | 2007-05-10 |
US7271011B2 (en) | 2007-09-18 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
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ASS | Succession or assignment of patent right |
Owner name: AIWO SPINTEKNOLOGY, INC. Free format text: FORMER OWNER: FREESCALE SEMICONDUCTOR INC. Effective date: 20090508 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20090508 Address after: Arizona, USA Applicant after: Freescale Semiconductor Inc. Address before: Texas in the United States Applicant before: Fisical Semiconductor Inc. |
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C14 | Grant of patent or utility model | ||
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C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Arizona, USA Patentee after: Everspin Technologies Inc. Address before: Arizona, USA Patentee before: Freescale Semiconductor Inc. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120111 Termination date: 20181020 |