CN101298655A - 一种纳米叠层TiN梯度膜及其制备方法 - Google Patents
一种纳米叠层TiN梯度膜及其制备方法 Download PDFInfo
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- CN101298655A CN101298655A CNA200710011188XA CN200710011188A CN101298655A CN 101298655 A CN101298655 A CN 101298655A CN A200710011188X A CNA200710011188X A CN A200710011188XA CN 200710011188 A CN200710011188 A CN 200710011188A CN 101298655 A CN101298655 A CN 101298655A
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- gradient film
- tin gradient
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 22
- 238000000151 deposition Methods 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000007733 ion plating Methods 0.000 claims abstract description 13
- 238000004140 cleaning Methods 0.000 claims abstract description 12
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 9
- 239000000956 alloy Substances 0.000 claims abstract description 9
- 229910052786 argon Inorganic materials 0.000 claims abstract description 9
- 239000003960 organic solvent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 8
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical compound ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 229910000601 superalloy Inorganic materials 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 9
- 230000007797 corrosion Effects 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 4
- 229910001432 tin ion Inorganic materials 0.000 abstract description 2
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 229910010038 TiAl Inorganic materials 0.000 description 13
- 238000012360 testing method Methods 0.000 description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- 229910010271 silicon carbide Inorganic materials 0.000 description 11
- 210000001951 dura mater Anatomy 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 208000037656 Respiratory Sounds Diseases 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 229910010037 TiAlN Inorganic materials 0.000 description 5
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 238000005336 cracking Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 230000005764 inhibitory process Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000002929 anti-fatigue Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910001651 emery Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000005542 laser surface treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 206010017472 Fumbling Diseases 0.000 description 1
- 244000137852 Petrea volubilis Species 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002103 nanocoating Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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Abstract
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CNB200710011188XA CN100523273C (zh) | 2007-04-30 | 2007-04-30 | 一种纳米叠层TiN膜的制备方法 |
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CNB200710011188XA CN100523273C (zh) | 2007-04-30 | 2007-04-30 | 一种纳米叠层TiN膜的制备方法 |
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CN101298655A true CN101298655A (zh) | 2008-11-05 |
CN100523273C CN100523273C (zh) | 2009-08-05 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102230159A (zh) * | 2011-05-27 | 2011-11-02 | 沈阳市红十字会医院 | 腹膜透析置管术用导丝/隧道针表面硬质防护膜制备方法 |
CN102660730A (zh) * | 2012-05-02 | 2012-09-12 | 江苏格林视通光学有限公司 | 用于镀制眼镜镜片超加硬发水膜的方法 |
CN104213091A (zh) * | 2014-08-29 | 2014-12-17 | 南京工程学院 | 改善生物医用镁合金表面磁控溅射TiN涂层结合性能的方法 |
CN104674164A (zh) * | 2015-03-24 | 2015-06-03 | 四川大学 | 成分振荡金属氮化物涂层的制备方法 |
CN109457220A (zh) * | 2018-11-14 | 2019-03-12 | 台州中科普尔尼镀膜技术有限公司 | 离子镀Ni-P纳米叠层膜及其制备方法 |
CN109518139A (zh) * | 2018-12-13 | 2019-03-26 | 北京金轮坤天特种机械有限公司 | 一种钛火阻燃涂层及其制备方法 |
CN112077320A (zh) * | 2020-07-29 | 2020-12-15 | 上海梁为科技发展有限公司 | 具有叠层结构的Ti/X金属陶瓷及其制备方法 |
CN112144013A (zh) * | 2019-06-28 | 2020-12-29 | 陕西航天时代导航设备有限公司 | 一种GT35球碗零件内表面TiN厚膜制备方法 |
CN115287588A (zh) * | 2022-08-16 | 2022-11-04 | 中国科学院金属研究所 | 一种TiN梯度纳米硬质涂层及其制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60238481A (ja) * | 1984-05-14 | 1985-11-27 | Sumitomo Electric Ind Ltd | 多重層被覆超硬合金 |
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- 2007-04-30 CN CNB200710011188XA patent/CN100523273C/zh not_active Expired - Fee Related
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102230159A (zh) * | 2011-05-27 | 2011-11-02 | 沈阳市红十字会医院 | 腹膜透析置管术用导丝/隧道针表面硬质防护膜制备方法 |
CN102660730A (zh) * | 2012-05-02 | 2012-09-12 | 江苏格林视通光学有限公司 | 用于镀制眼镜镜片超加硬发水膜的方法 |
CN102660730B (zh) * | 2012-05-02 | 2014-03-19 | 江苏格林视通光学有限公司 | 用于镀制眼镜镜片超加硬发水膜的方法 |
CN104213091A (zh) * | 2014-08-29 | 2014-12-17 | 南京工程学院 | 改善生物医用镁合金表面磁控溅射TiN涂层结合性能的方法 |
CN104213091B (zh) * | 2014-08-29 | 2017-04-12 | 南京工程学院 | 改善生物医用镁合金表面磁控溅射TiN涂层结合性能的方法 |
CN104674164A (zh) * | 2015-03-24 | 2015-06-03 | 四川大学 | 成分振荡金属氮化物涂层的制备方法 |
CN109457220A (zh) * | 2018-11-14 | 2019-03-12 | 台州中科普尔尼镀膜技术有限公司 | 离子镀Ni-P纳米叠层膜及其制备方法 |
CN109457220B (zh) * | 2018-11-14 | 2020-08-21 | 台州中科普尔尼镀膜技术有限公司 | 离子镀Ni-P纳米叠层膜及其制备方法 |
CN109518139A (zh) * | 2018-12-13 | 2019-03-26 | 北京金轮坤天特种机械有限公司 | 一种钛火阻燃涂层及其制备方法 |
CN112144013A (zh) * | 2019-06-28 | 2020-12-29 | 陕西航天时代导航设备有限公司 | 一种GT35球碗零件内表面TiN厚膜制备方法 |
CN112077320A (zh) * | 2020-07-29 | 2020-12-15 | 上海梁为科技发展有限公司 | 具有叠层结构的Ti/X金属陶瓷及其制备方法 |
CN115287588A (zh) * | 2022-08-16 | 2022-11-04 | 中国科学院金属研究所 | 一种TiN梯度纳米硬质涂层及其制备方法 |
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Publication number | Publication date |
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CN100523273C (zh) | 2009-08-05 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Jiangsu Xinghai Group Co., Ltd. Assignor: Institute of metal research, Chinese Academy of Sciences Contract record no.: 2012320000302 Denomination of invention: Nano-stack TiN gradient film and preparation thereof Granted publication date: 20090805 License type: Exclusive License Open date: 20081105 Record date: 20120326 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090805 Termination date: 20130430 |