CN101286072A - Temperature control method and apparatus - Google Patents
Temperature control method and apparatus Download PDFInfo
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- CN101286072A CN101286072A CNA200810061647XA CN200810061647A CN101286072A CN 101286072 A CN101286072 A CN 101286072A CN A200810061647X A CNA200810061647X A CN A200810061647XA CN 200810061647 A CN200810061647 A CN 200810061647A CN 101286072 A CN101286072 A CN 101286072A
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Abstract
The invention discloses a temperature control method, comprising the steps as follows: refrigerating the fluid and leading the temperature of the fluid to be lower than or equal to the given temperature; heating the refrigerated fluid; leading the heated fluid to flow into a temperature control box; measuring the temperature inside the temperature control box and adjusting the heating power by the controlling method, thus leading the temperature inside the temperature control box to achieve a given temperature. The invention also discloses a device used for realizing the method, which comprises a refrigeration module, a heating module, a control module, a temperature control box and a temperature measurement module; the temperature measurement module is arranged in the temperature control box; the input terminal of the control module is connected with the temperature measurement module while the output terminal thereof is electrically connected with the heating module; a pipeline where the fluid flows is connected between the refrigeration module and the heating module. The method and device of the invention are easy to realize an anti-explosive function, have uniform temperature and fast response, and can realize large-power heating or refrigeration.
Description
Technical field
The present invention relates to temperature control, particularly a kind of temperature-controlled process and device.
Background technology
At present, in fields such as semiconductor, process gas analysis, in order to improve the serviceable life and the measuring accuracy of relevant accurate device, need make these device work or be placed in the constant temperature place, as spectrometer, light source, chip etc., this just needs a kind of method and apparatus of temperature control preferably, and then makes work or place to place keep constant temperature.
Temperature control for some less accurate devices, and ambient temperature changes little situation, usually use as lower device: will need the device of constant temperature such as spectrometer to be installed in the temperature control box, and at the outside of described temperature control box installation heating arrangement and refrigerating plant, mounting temperature sensor in temperature control box, temperature sensor connects the input end of control module, and the output terminal of control module connects heating arrangement and refrigerating plant.Usually adopt TEC (semiconductor thermoelectric refrigeration device) as heating arrangement and refrigerating plant.Working method is: record temperature in the temperature control box by described temperature sensor, send control module temperature signal afterwards, control module is by differentiating temperature signal and then making a choice: heating or refrigeration.This method and apparatus has been realized temperature control, but following deficiency is also arranged: 1, the power of TEC refrigerator is little, and efficient is low, cause heating and refrigeration reaction slow, if realize high-power heating and refrigeration, some piles that then need to connect, but can reduce reliability of operation like this; 2, be not easy to realize explosion prevention function, the TEC refrigerator all needs to be electrically connected; 3, heating is inhomogeneous, and the TEC refrigerator only is mounted in a side of temperature control box, therefore, can only heat the part with the refrigeration temperature control case, causes the non-uniform temperature in the temperature control box.
Temperature control for some relatively large accurate devices, and ambient temperature changes situation greatly, usually use as lower device: will need the device of constant temperature to be installed in the analysis cabin, and the device that installs an air-conditioner in described analysis cabin makes to keep constant temperature in the temperature control box.This method and apparatus has been realized powerful heating and refrigeration, but following deficiency is also arranged: 1, the aircondition cost is higher, but also will equip the analysis cabin; 2, be difficult for realizing explosion prevention function that aircondition need be electrically connected, and can realize that the aircondition price of explosion prevention function is higher; 3, accuracy of temperature control is low, and temperature distributing disproportionation is even, and aircondition only is mounted in a side of analyzing in the cabin, therefore, when heating and refrigeration, causes the non-uniform temperature of analyzing in the cabin, and the accuracy of temperature control of aircondition is not high simultaneously; 4, need in the aircondition to use moving component to freeze and heat, reliability is lower.
Summary of the invention
The objective of the invention is to solve above-mentioned deficiency of the prior art, provide a kind of and be easy to realize high-power temperature control, explosion prevention function, and uniformity of temperature profile, swift temperature-controlled process and device.
For achieving the above object, the present invention is by the following technical solutions:
A kind of temperature-controlled process may further comprise the steps:
Cryogenic fluid makes its temperature be less than or equal to predetermined temperature;
Fluid behind the heating and cooling;
Fluid after the heating feeds temperature control box;
Record the temperature in the described temperature control box,, thereby make the temperature in the temperature control box reach predetermined temperature again by the control heating power.
As preferably, described fluid is a gas.
As preferably, by vortex refrigeration modes refrigerant gas.
As preferably, described temperature control box adopts positive-pressure explosion-proof.
In order to realize said method, the invention allows for a kind of like this temperature control equipment, comprise refrigeration module, heating module, control module, temperature control box and temperature-measuring module; Described temperature-measuring module is installed in the described temperature control box, and the input end of described control module is connected with described temperature-measuring module, is electrically connected between output terminal and described heating module; Be connected the pipeline that is connected with fluid between described refrigeration module and heating module, fluid is successively through entering in the described temperature control box behind described refrigeration module and the heating module.
As preferably, described heating module and control module are installed in the described temperature control box.
As preferably, described fluid is a gas.
As preferably, described refrigeration module is the vortex refrigerator.
Compared with prior art, the present invention has following technique effect: 1, be easy to realize high-power refrigeration, adopt the vortex refrigeration modes, thereby make the power height of refrigeration, by control vortex refrigerating plant the temperature of gas is freezed to a little less than predetermined temperature, heating module only need provide less heating power can realize thermostatic control like this, and reaction is fast; 2, be easy to realize explosion prevention function, refrigeration adopts the vortex refrigeration modes, need not to be electrically connected, and need not explosion-proof design; Though control module and heating module need be electrically connected, the two is installed in the temperature control box, and the gas of process heating module has been full of whole temperature control box, keeps malleation in the temperature control box thereby make, and then has realized positive-pressure explosion-proof; 3, accuracy of temperature control height, uniformity of temperature profile by the temperature in the temperature-measuring module in the temperature control box monitoring temperature control box, and remove to control heating power by control module, have formed the closed-loop control of temperature; Gas through temperature control charges into temperature control box, thereby makes the uniformity of temperature profile in the temperature control box; 4, reliability height, whole device need not moving component, has improved reliability of operation.
Description of drawings
Fig. 1 is the structural representation of a kind of temperature control equipment of the present invention;
Fig. 2 is the schematic flow sheet of a kind of temperature-controlled process of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is done further detailed description.
Embodiment:
As shown in Figure 1, a kind of temperature control equipment comprises refrigeration module 1, heating module 3, control module 2, temperature control box 11 and temperature sensor 4; Described temperature sensor 4, heating module 3 and control module 2 are installed in the described temperature control box 11, and the input end of described control module 2 is connected with described temperature sensor 4, and 3 of output terminal and described heating modules are electrically connected; Described refrigeration module 1 is connected the pipeline 21 that is connected with fluid with 3 of heating modules, and described fluid is a nitrogen.Install in the described temperature control box 11 and need thermostatically controlled device 12.Described refrigeration module 1 is the vortex refrigerator, and described vortex refrigerator is a prior art, does not repeat them here.Described heating module 3 adopts electric heater.
Present embodiment has also disclosed a kind of temperature-controlled process, as shown in Figure 2, may further comprise the steps:
The control high pressure nitrogen feeds vortex refrigerator 1 with certain flow, and the temperature of the cold airflow that comes out is lower than the predetermined temperature of described temperature control box interior 11;
Nitrogen after the refrigeration feeds heating module 3, the nitrogen after the described refrigeration of heating module 3 heating;
Nitrogen after the heating feeds temperature control box 11, and makes maintenance malleation in the described temperature control box 11, thereby has realized positive-pressure explosion-proof;
Described temperature sensor 4 records the temperature in the described temperature control box 11, signal send described control module 2 then, described control module 2 removes to change the heating power of heating module 3 according to the temperature that records, thereby make the temperature in the temperature control box 11 reach predetermined temperature, and then make maintenance constant temperature in the described temperature control box 11.
It is pointed out that above-mentioned embodiment should not be construed as limiting the scope of the invention.Key of the present invention is that first cryogenic fluid makes its temperature be less than or equal to predetermined temperature; Fluid behind the heating and cooling; Fluid after the heating feeds temperature control box; Record the temperature in the described temperature control box, remove to adjust heating power by control again, thereby make the temperature in the temperature control box reach predetermined temperature.Under the situation that does not break away from spirit of the present invention, any type of change that the present invention is made all should fall within protection scope of the present invention.
Claims (8)
1, a kind of temperature-controlled process may further comprise the steps:
Cryogenic fluid makes its temperature be less than or equal to predetermined temperature;
Fluid behind the heating and cooling;
Fluid after the heating feeds temperature control box;
Record the temperature in the described temperature control box, remove to adjust heating power by control again, thereby make the temperature in the temperature control box reach predetermined temperature.
2, temperature-controlled process according to claim 1 is characterized in that: described fluid is a gas.
3, temperature-controlled process according to claim 2 is characterized in that: by vortex refrigeration modes refrigerant gas.
4, according to claim 2 or 3 described temperature-controlled process, it is characterized in that: described temperature control box adopts positive-pressure explosion-proof.
5, a kind of temperature control equipment comprises refrigeration module, heating module, control module, temperature control box and temperature-measuring module; Described temperature-measuring module is installed in the described temperature control box, and the input end of described control module is connected with described temperature-measuring module, is electrically connected between output terminal and described heating module; It is characterized in that: be connected the pipeline that is connected with fluid between described refrigeration module and heating module, fluid is successively through entering in the described temperature control box behind described refrigeration module and the heating module.
6, temperature control equipment according to claim 5 is characterized in that: described heating module and control module are installed in the described temperature control box.
7, according to claim 5 or 6 described temperature control equipments, it is characterized in that: described fluid is a gas.
8, temperature control equipment according to claim 7 is characterized in that: described refrigeration module is the vortex refrigerator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810061647XA CN101286072A (en) | 2008-05-19 | 2008-05-19 | Temperature control method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810061647XA CN101286072A (en) | 2008-05-19 | 2008-05-19 | Temperature control method and apparatus |
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| CN101286072A true CN101286072A (en) | 2008-10-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA200810061647XA Pending CN101286072A (en) | 2008-05-19 | 2008-05-19 | Temperature control method and apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103398922A (en) * | 2013-07-09 | 2013-11-20 | 广东石油化工学院 | Measurement device and method for thrombus elasticity |
| CN101750504B (en) * | 2008-12-05 | 2013-11-27 | 深圳迈瑞生物医疗电子股份有限公司 | Liquid temperature controlling system and method of biochemistry analyzer |
-
2008
- 2008-05-19 CN CNA200810061647XA patent/CN101286072A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101750504B (en) * | 2008-12-05 | 2013-11-27 | 深圳迈瑞生物医疗电子股份有限公司 | Liquid temperature controlling system and method of biochemistry analyzer |
| CN103398922A (en) * | 2013-07-09 | 2013-11-20 | 广东石油化工学院 | Measurement device and method for thrombus elasticity |
| CN103398922B (en) * | 2013-07-09 | 2015-09-30 | 广东石油化工学院 | A kind of thrombus elastic force measuring device and measuring method thereof |
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Open date: 20081015 |