CN101269748A - Conveyer - Google Patents

Abstract

The invention relates to a conveyor which comprises a housing body, a conveying body, a driving mechanism and an attracting unit attracting subjects in an inner space, wherein, the housing body is defined by a pair of right-left clearance parts and extends in the conveying direction of conveyed subjects with a certain width; the conveying body is collocated at the area close or adjoining to the right-left clearance parts for bearing the conveyed subjects and is supported on the housing body; the driving mechanism is collocated in the space of the housing body for driving the conveyed subjects. Adopting the conveyor, when the attracting unit attracts the inner space of the housing body, air current flowing from exterior into the interior is generated, so that abrasion powder and dust generated in the area near the conveyed subjects collocated below the clearance parts are attracted by the air current not to fly to exterior.

Description

Conveyer

Technical field

The present invention relates to workpiece such as electronic component or mechanical component are carried out the conveyer of conveyance, relate in particular under quartz conductor is made the environment purification of conveyor line etc., be suitable for directly or by the supporting plate bearing-type to containing for example special container (FOUP) etc. of the substrate used of quartz conductor etc. the conveyer that carries out conveyance of the electronic component relevant with quartz conductor.

Background technology

Make in the conveyor line at quartz conductor in the past, known have a following method: in the substrate that quartz conductor is used (wafer) conveyance during to various treatment process (processing equipment), a plurality of substrates are housed in the special-purpose container (FOUP), utilize conveyer this container conveyance.This container is for making the inner sustain environment purification sealed.On the other hand, the environment of conveyance container is in semi-conductive manufacturing conveyor line, so also corresponding requirements purification of conveyer.

Known have a kind ofly be applicable to that this quartz conductor makes the conveyer in the past of conveyor line, it has: by driving the pair of right and left conveyance framework that framework and bearer frame constitute; With pair of right and left conveyance framework bonded assembly transom; Be configured in a plurality of wheels that drive on the framework; Make the interlock of a plurality of wheels and be rotated the endless-belt of driving; By endless-belt being rotated the driver train that drive electric motor etc. constitutes; At (for example, the Japanese Unexamined Patent Application Publication 2003-524544 communiques) such as shells that be located in order to surround driver train under the state that the wheel upper portion is exposed on the conveyance framework.

But, in this conveyer, because pair of right and left conveyance framework is being used the transom combination behind independent the formation separately, so the part number is many, and for guaranteeing the parallelism of left and right sides conveyance framework, must high precision assemble, also must adjust, have to cause expensive problem because of the parallelism of the left and right directions of generation or the decline of levelness in time.In addition, although driver train is surrounded by shell, disperse to the outside from shell and pollute the anxiety that quartz conductor is made track environment but have because of the grade abrasion powder that takes place, dust etc. of sliding part, in the bearer frame side that is not surrounded, also have because of the abrasion powder that slide to take place etc. directly disperses and pollute the anxiety that quartz conductor is made track environment by shell.

Therefore, disperse for preventing these dust etc., if desire is provided with the attraction unit that abrasion powder, dust etc. are initiatively attracted to this device, because left and right sides conveyance framework independence separately, so the attraction unit must be set respectively, thus expensiveization caused.

In addition, the known another kind of conveyer that has in the past, it has: pair of right and left conveyance framework; With pair of right and left conveyance framework bonded assembly transom; The a plurality of rollers be bearing in freely on the pair of right and left conveyance framework and arrange along the conveyance direction are rotated at two ends separately; For propulsive effort being transferred to a plurality of roller one distolateral axle drive shafts that are configured on side's conveyance framework; The driver train that constitutes by drive transmitting belt etc.; Be located at the closed shell of side's conveyance frame side for accommodating driver train; Pipeline with the esoteric dust exhaust of closed housing; (for example Japanese kokai publication hei 11-171336 communiques) such as exhaust units that constitutes by dust-collecting filter and fan etc.

But, in this conveyer, the state that a plurality of rollers are configured to expose fully, the bearing that is located on the opposing party's conveyance framework that a plurality of roller other ends are supported also is in the state that exposes, so have the abrasion powder that takes place from these zones or dust etc. directly to disperse and pollute the anxiety that quartz conductor is made track environment.

Summary of the invention

In view of the above problems, the object of the present invention is to provide a kind of like this conveyer: can obtain to simplify the structure, each mechanism's intensification, the device integral miniaturization, cost degradation, productivity raising etc., and the abrasion powder that can prevent to take place in conveyance action, dust etc. disperse, can easily guarantee the parallelism and the levelness of pair of right and left conveyance framework that housing delimited again, assembling easily is particularly suitable for quartz conductor and makes the environment purification of conveyor line etc. and use down.

The conveyer of the present invention of realizing above-mentioned purpose comprises: will be with certain width to the housing of being delimited by the pair of right and left clearance portion of the conveyance direction of transport object elongation; For the carrying conveyance is configured near the pair of right and left clearance portion by transport object or the zone of adjacency and be bearing in conveyance body on the housing; For driving the driver train that the conveyance body is configured in the enclosure interior space; The attraction unit that the inner space is attracted.

Adopt this structure, when utilizing drive mechanism conveyance body, by conveyance body carrying by the conveyance direction conveyance of transport object to the regulation of delimiting by housing.Here, clearance portion forms Rack (be and form aeroseal and narrow as far as possible width), when by the inner space in the attraction unit attraction housing, the air-flow of inner space can take place to flow into from the outside by clearance portion.Therefore, near the abrasion powder that (or driver train etc. sliding area) taken place the conveyance body, dust etc., disperse to prevent outside portion by attracting the unit to attract with this air-flow.Its result even use this conveyer under environment purification, does not pollute the environment yet, and can keep desired degree of purification.

In said structure, the conveyance body the inner space of housing be configured in the pair of right and left clearance portion below near, can be adopted the structure of supporting plate by transport object, and this supporting plate have by the pair of right and left clearance portion insert in the inner space and be bearing on the conveyance body foot and by foot's supporting and be positioned at the supporting part that workpiece is carried in the hull outside top.

Adopt this structure, supporting part carries the supporting plate of workpiece, on one side under stabilized conditions with its foot by the pair of right and left clearance portion be carried on be positioned at below the clearance portion near on the left and right sides conveyance body of (inner space) one side carry out conveyance.Thus, can be well on and stable conveyance, utilize the down gust that flows into the inner space by clearance portion from the outside simultaneously, make the abrasion powder that takes place around the conveyance body and dust etc. with this down gust by attracting the unit to suck, prevent to disperse to the outside.

In said structure, supporting plate can adopt its foot freely to insert, break away from the structure of pair of right and left clearance portion.

Adopt this structure, owing to can insert, break away from the foot of supporting plate by clearance portion, so can carry out the installation or removal of supporting plate on this conveyer (conveyance body) easily.

In said structure, housing can adopt following structure, have following side body and last side cover, described following side body comprises will be to the pair of right and left conveyance framework of conveyance direction elongation and the planar framework of below bonded assembly of a pair of conveyance framework, described to go up side cover relative with planar framework and delimit the osed top inner space from the top, simultaneously the and delimitation pair of right and left clearance portion relative with a pair of conveyance framework from the left and right directions inboard.

Adopt this structure, because by the pair of right and left conveyance framework and the last side cover of side body delimited pair of right and left clearance portion and inner space down, so by suitably adjusting the interval of going up side cover (left and right sides edge portion) and pair of right and left conveyance framework, thereby can easily delimit the clearance portion of Rack.

In said structure, pair of right and left conveyance framework and planar framework can adopt integrally formed structure.

Adopt this structure, because pair of right and left conveyance framework and planar framework be by integrally formed, thus do not need erecting work, and by integrally formed and guarantee the parallelism and the levelness of left and right sides framework accurately, so do not need to adjust parallelism and levelness, can reduce manufacturing cost and handling cost.

In said structure, last side cover can adopt with respect to following side body and form mounting or dismounting structure freely.

Adopt this structure, when regularly maintaining,, just can easily check operation or cleaning work by unloading side cover.

In said structure, can adopt following structure: the conveyance body is to hang and be configured in endless-belt in the inner space along conveyance direction (fore-and-aft direction), and the upside belt that is positioned at the endless-belt upside is configured to from the below relative with clearance portion.

Adopt this structure, endless-belt integral body is housed in by following side body and goes up in the inner space that side cover delimit, by transport object clearance portion and by the state lower edge fore-and-aft direction conveyance of upside belt carrying above passing through.Therefore, be suitable for using having workpiece (for example electronic component or contain container of electronic component etc.) is carried out conveyance with noncontact supporting plate by the foot of clearance portion etc., and conveyance body (endless-belt) and driver train all are housed in the inner space, disperse to the outside so can prevent the abrasion powder that taken place or dust etc. more reliably.

In said structure, can adopt following structure: the conveyance body is to hang and have the roller chain that is configured in a plurality of rollers in the inner space along conveyance direction (fore-and-aft direction), and the upside chain that is positioned at the roller chain upside is relative with clearance portion from the below.

Adopt this structure, roller chain integral body is housed in by following side body and goes up in the inner space that side cover delimit, by transport object by above clearance portion and be carried on the state lower edge fore-and-aft direction conveyance of upside chain (a plurality of rollers).

Therefore, be suitable for using having workpiece (for example electronic component or contain container of electronic component etc.) is carried out conveyance with noncontact supporting plate by the foot of clearance portion etc., and conveyance body (roller chain) and driver train all are housed in the inner space, disperse to the outside so can prevent the abrasion powder that taken place or dust etc. more reliably.

Because the conveyance body is the roller chain that rolls,, can prevent generations such as dust effectively with the sucking action that takes place in clearance portion so compare generations such as to suppress abrasion powder with the occasion of sliding.

In addition, in the occasion that the speedup chain is used for roller chain, owing to add by the speed of the speed of driver train conveyance chain with the rotating speed of roller and to come conveyance by transport object, also can be so can keep desired degree of purification with the more speed conveyance.

In said structure, can adopt following structure: the conveyance body is the endless-belt that hangs along conveyance direction (fore-and-aft direction), the upside belt that is positioned at the endless-belt upside be configured in clearance portion near.

Adopt this structure, with expose state with the upside belt of endless-belt be configured in clearance portion near, and be housed in the downside belt by following side body and go up the inner space that side cover delimited, by transport object in the state lower edge fore-and-aft direction conveyance that is carried on the upside belt that exposes.Therefore, contain the upside belt with inside and compare by the occasion of conveyance workpiece such as supporting plate, the conveyance height can reduce that part that the upside belt of carrying workpiece exposes, can be with equipment miniaturization.In addition and since endless-belt (upside belt) be configured in clearance portion near, so can suppress or prevent the air-flow inflow inner space that near take place the upside belt abrasion powder and dust etc. take place with clearance portion abrasion powder or dust etc. are dispersed.

In said structure, can adopt following structure: the conveyance body is a plurality of rollers that are configured in the clearance portion zone with noncontact, and the upper portion of a plurality of rollers is projected into the outside to carry by transport object from clearance portion.

Adopt this structure, because a plurality of rollers are configured in the clearance portion zone with noncontact and its upper portion is outstanding laterally, so in the state lower edge fore-and-aft direction conveyance by the roller upper portion carrying of exposing, the while produces to the in-to-in air-flow in the gap of the housing of roller and delimitation clearance portion by transport object.Therefore, and accommodate roller fully and compare by the occasion of conveyance workpiece such as supporting plate, the conveyance height can reduce that part that the upside belt of carrying workpiece exposes, can be with equipment miniaturization.Around roller, utilize the abrasion powder that can prevent from reliably to be taken place or dust etc. to disperse to the outside in the inner space to the in-to-in air-flow.

In said structure, can adopt following structure: the attraction unit is included in the downside of housing left and right directions substantial middle and arranges a plurality of attraction paths that attract mouth and be communicated with these a plurality of attraction mouths that are provided with along conveyance direction (fore-and-aft direction).

Adopt this structure, when attracting the inner space of delimiting by housing,, attract path to be communicated with, so can take place on one's own initiative from the air-flow of clearance portion decline with this attractions mouth owing to attract mouth to be located at the housing downside.

In said structure, can adopt following structure: the attraction unit is included in down the left and right directions substantial middle of side body and arranges a plurality of attraction paths that attract mouth and be communicated with a plurality of attraction mouths that are provided with along conveyance direction (fore-and-aft direction).

Adopt this structure, when attraction reached the inner space of side cover delimitation by following side body, because the attraction mouth is located at down on the side body, the attraction path was communicated with this attraction mouth, so even unload side cover, also can be attracted to the air-flow of below.Thus, the occasion that side cover is maintained on unloading is dispersed by making the action of attraction unit also provide protection against wear powder, dust etc.In addition and since a plurality of attract mouthful to arrange in the substantial middle of side body down be provided with, so can prevent such zone of depositing, as a whole even each corner also can attract effectively.In addition, as long as because an attractor such as fan that attractive force takes place is set, so can will attract the unit to oversimplify and cost degradation.

In said structure, can adopt following structure: on housing, be provided with and make by the part of transport object engaging and the guide part that leads along conveyance direction (fore-and-aft direction).

Adopt this structure, under the state that exposes conveyance body (for example the upside belt of endless-belt, the upper portion of roller etc.), carrying the occasion of being carried out conveyance by transport object, by with the guide part of housing to being led by the part of transport object (for example from the outstanding downwards portion that is directed to that forms of supporting plate), thereby can not make and hold left and right directions partially, direction conveyance forwards, backwards reliably by transport object.

As mentioned above, adopt conveyer of the present invention, but implementation structure is oversimplified, each mechanism's intensification, device integral miniaturization, cost degradation, productivity raising etc., and the abrasion powder that can prevent to take place in conveyance action, dust etc. disperse, and can easily guarantee the parallelism and the levelness of pair of right and left conveyance framework that housing delimited again, can easily assemble.

Description of drawings

Fig. 1 is the front view of an example of expression conveyer of the present invention.

Fig. 2 is the birds-eye view of conveyer shown in Figure 1.

Fig. 3 is the cutaway drawing of the conveyance direction of conveyer shown in Figure 1.

Fig. 4 is a conveyer and the cutaway view rectangular direction of conveyance direction shown in Figure 1.

Fig. 5 is the view sub-anatomy with the framed structure exploded representation of conveyer shown in Figure 1.

Fig. 6 be expression with supporting plate as by the variation of transport object, and the cutaway view of the conveyer of the rectangular direction of conveyance direction.

Fig. 7 is another example of expression conveyer of the present invention, is the part sectional view of its conveyance direction.

Fig. 8 is a conveyer and the cutaway view rectangular direction of conveyance direction shown in Figure 7.

Fig. 9 is the birds-eye view of the another example of expression conveyer of the present invention.

Figure 10 is a conveyer and the cutaway view rectangular direction of conveyance direction shown in Figure 9.

Figure 11 is the cutaway view of the variation of presentation graphs 9 and conveyer shown in Figure 10.

Figure 12 is the birds-eye view of the another example of expression conveyer of the present invention.

Figure 13 is a conveyer and the cutaway view rectangular direction of conveyance direction shown in Figure 12.

Figure 14 is the cutaway view of the variation of expression Figure 12 and conveyer shown in Figure 13.

The specific embodiment

Below, with reference to description of drawings best example of the present invention.

To shown in Figure 5, this conveyer has as Fig. 1: the following side body 10 that constitutes a housing part; Constitute last side cover 20 with following side body 10 bonded assembly housing parts; Be housed in by the endless-belt 30 in the internal space S of side body 10 and upward side cover 20 delimitations down as the conveyance body; Drive the driver train 40 of endless-belt 30; For attracting internal space S and following side body 10 bonded assemblys as the gas exhaust duct 50 of attraction unit and attractor 60 etc.

This conveyer, with the supporting plate P that contains the container workpiece W such as (FOUP) of the substrate that quartz conductor uses and carry workpiece W as being carried out conveyance by transport object.Here, supporting plate P has as shown in Figure 1 to Figure 3: the plane supporting part P1 of carrying workpiece W; From the extended downwards P2 of foot in the two ends, the left and right sides of supporting part P1; Combine and be carried on flat base portion P3 on the endless-belt 30 etc. with the lower end of the P2 of foot.Base portion P3 also can be integrally formed as the part of base portion P2.

Following side body 10 has the pair of right and left conveyance framework 11,12 of the elongation of direction X forwards, backwards and with the planar framework 13 of a pair of conveyance framework 11,12 below bonded assemblys etc.A pair of conveyance framework 11,12 and planar framework 13 usefulness aluminiums form as one by drawing.

As shown in Figure 1, the end of conveyance direction (fore-and-aft direction) X of following side body 10 is equipped with next door 14 as required.In the occasion that this conveyer straight-though arrangement uses, seal the end in next door 14, does not then need to seal, so that it forms closed loop when this conveyer annular arrangement is used.

Promptly, owing to side body 10 is integrally formed down, so with compare being formed separately the occasion that conveyance framework 11, conveyance framework 12, planar framework 13 laggard luggages join, do not need erecting work, and the mould of shaping usefulness is a high precision, so conveyance framework 11,12 mutual parallelism and levelnesss can be guaranteed high precision.Reduce the part number thus, do not need to be used to proofread and correct the adjustment operation of parallelism and levelness, but cost-cutting.

As Fig. 4 and shown in Figure 5, pair of right and left conveyance framework 11,12 constitutes symmetrical shape with respect to centre line L, has respectively: longitudinal wall part 11a, 12a; The 11b of upper end flange portion, 12b; The upside support 11c, the 12c that from the inboard way of longitudinal wall part 11a, 12a, give prominence to and form; Extend downside support 11d, the 12d of formation to the inside from the lower end of longitudinal wall part 11a, 12a.

These longitudinal wall part 11a, 12a, the 11b of upper end flange portion, 12b, upside support 11c, 12c and downside support 11d, 12d form boring respectively, are mechanical strength to improve bending stiffness.Section constitution rectangle or triangle that this is hollow, and form to the direction that draws shaping (fore-and-aft direction X) and extend.

As Fig. 3 to shown in Figure 5, the central authorities of the left and right directions Y on planar framework 13, by after be processed to form a plurality of attraction mouth 13a of the perforation above-below direction Z that arranges along fore-and-aft direction X.Be formed with a plurality of embedded hole 13b that the pillar 24 of side cover on described later 20 is chimeric at the upper surface of the internal space S of delimiting planar framework 13.

Here, as shown in Figures 3 and 4,, be provided with the liner 15 of the little and excellent in wear resistance of sliding resistance, to support endless-belt 30 sliding freely at the upper surface of upside support 11c, 12c and downside support 11d, 12d.

As Fig. 4 and shown in Figure 5, last side cover 20 has: from the inboard of the left and right directions Y edge portion 21,22 relative with the 11b of upper end flange portion, the 12b of pair of right and left conveyance framework 11,12; In the relative concavity portion 23 of the planar framework 13 of above-below direction Z and following side body 10; A plurality of pillars 24 of the hollow form that combines with the lower surface of concavity portion 23 etc.Two edge portions 21,22 and concavity portion 23 usefulness aluminiums form as one by drawing, and form the concave shape that caves in to downside for the section constitution of planar while left and right directions Y to conveyance direction (fore-and-aft direction) X elongation.And pillar 24 combines with the lower surface of this concavity portion 23, and the ways 25 of direction X elongation forwards, backwards is installed in the two edge portions 21,22 dismantledly.

Here, because last side cover 20 forms concavity, so can remove useless space with forming necessary Min. with following side body 10 common internal space S of delimiting, add flowing of blast air, can improve attraction (discharge) efficient for abrasion powder and dust etc.

Ways 25 is formed by resin material etc., as Fig. 2 and shown in Figure 4, with the 11b of upper flange portion, the 12b common (being housing) of pair of right and left conveyance framework 11,12, thereby delimit the pair of right and left clearance portion G that extends and constitute Rack to conveyance direction (fore-and-aft direction) X along left and right directions Y.

That is, be assemblied under the state on the following side body 10 will going up side cover 20, ways 25 can be adjusted its installation site (being insert depth), so the suitable width dimensions of the G of adjusting play portion.In addition, the effect of ways 25 is: to being led along fore-and-aft direction (conveyance direction) reliably when limiting the indentation forward motion of being partial to about it by the supporting plate P P2 of foot of a transport object part by the conduct of endless-belt 30 (upside belt 31 described later) carrying conveyance.

And as shown in Figure 5, last side cover 20 is entrenched in to install and remove among the embedded hole 13b freely by pillar 24 and combines with following side body 10.So, form mounting or dismounting freely by last side cover 20 with respect to following side body 10, thereby when carrying out periodic maintenance,, just can easily check operation or cleaning work by unloading side cover 20.

As the endless-belt 30 of conveyance body as shown in Figures 3 and 4, be housed in the internal space S fully and be configured to and be positioned near the below of clearance portion G, utilize driving pulley 41 described later and passive belt wheel (not shown) and be hung on conveyance direction (fore-and-aft direction) X.And, upside support 11c, the 12c (liner 15) that upside belt 31 is supported in conveyance framework 11,12 sliding freely goes up and is configured to relative with clearance portion G, and the P2 of foot (and base portion P3) of the supporting plate P that will enter by clearance portion G carries and transport mobile.In addition, downside belt 32 be supported in sliding freely return on downside support 11d, the 12d (liner 15) of conveyance framework 11,12 mobile.

As Fig. 1 and shown in Figure 3, driver train 40 is configured in by following side body 10 and goes up in the internal space S that side body 20 delimit and be maintained at down in the side body 10, and it has: for propulsive effort being reached pair of right and left driving pulley 41, electrical motor 42 that left and right sides endless-belt 30 links into an integrated entity by S. A. 41a, being clipped in drive belt 43 between electrical motor 42 and the driving pulley 41 etc.

That is, when electrical motor 42 rotations, driving pulley 41 rotates by drive belt 43, and endless-belt 30 rotations are carried out conveyance with the supporting plate P that carries workpiece W along fore-and-aft direction X.

Also can be without S. A. 41a, and the driving pulley 41 about driving with separately electrical motor 42.

Gas exhaust duct 50 as Fig. 1, Fig. 3 to shown in Figure 5, respectively be located at down side body 10 on a plurality of attraction mouthful 13a connections and attraction path 50a of its downstream delimitation and be connected with attractor 60.

As attractor 60, attract, take place then can adopt fan, pump or other mechanism from lateral in-to-in air flow structure at clearance portion G so long as carry out internal space S.

The following describes the action of this conveyer, when electrical motor 42 rotation, when endless-belt 30 being walked about by drive belt 43 and driving pulley 41, be carried on the upside belt 31 by transport object (supporting plate P and workpiece W) along pair of right and left conveyance framework 11,12 and direction X conveyance forwards, backwards.

Here, in this conveyance action, attractor 60 moves, when the air by the internal space S of descending side body 10 and last side cover 20 to delimit is attracted, the down gust of inner space takes place to flow into from the outside by clearance portion G separately shown in arrow among Fig. 4, can form vapor seal.Therefore, with the abrasion powder that sliding area took place of the contact area of the endless-belt 3 of carrying supporting plate P or driver train 40 etc. and dust etc. with this down gust from attracting mouthful 13a to make the exhausr port of the exterior regulation of conveyor line and discharge to being located at quartz conductor through attracting path 50a, can prevent to disperse to the outside from conveyer.Its result even this conveyer is used under the environment purification, can not pollute this environment yet, can keep desired degree of purification.

Here, especially owing to all be housed in endless-belt 30 and driver train 40 in the internal space S and endless-belt 30 be configured near the below of clearance portion G, so by making the down gust that flows into through clearance portion G flow through the zone of endless-belt 30 on one's own initiative, thereby can prevent reliably that the abrasion powder that taken place or dust etc. from dispersing to the outside.

In addition, because the substantial middle at following side body 10 is disposed with a plurality of attractions mouthful 13a, so can prevent from internal space S, to take place the such zone of alluvial, as a whole even each corner also can attract effectively, and because of an attractor such as fan 60 that attractive force takes place only need be set, so device can be oversimplified and cost degradation.

In addition, owing to attract a mouthful 13a to be located at down on the side body 10, attract path 50a to be communicated with, so, also can be drawn onto the air-flow of below even will go up side cover 20 unloads with this attraction mouthful 13a.

Therefore, stopping the conveyance action, unloading the occasion that side cover 20 is maintained, dispersing by making attractor 60 actions also provide protection against wear powder, dust etc.In addition, in maintenance, because side body 10 is configured as one down, thus needn't adjust the parallelism and the levelness of left and right sides conveyance framework 11,12, thus the maintenance operation can be oversimplified.

Its result even this conveyer is used under the environment purification, can not pollute this environment yet, can keep desired degree of purification.

Fig. 6 represents the conduct that is applicable to above-mentioned conveyer is carried out after changing example by the supporting plate P part of transport object.

In this example, supporting plate P has as shown in Figure 6: the plane supporting part P1 of carrying workpiece W; Extend and enter the P2 of foot of internal space S downwards by clearance portion G from the two ends, the left and right sides of supporting part P1; Combine and be carried on base portion P ' of the roughly the same width on the endless-belt 30 etc. with the P2 of this foot.

Here, the width ratio gap G of portion of base portion P3 ' is narrower, and base portion P2 (and base portion P3 ') forms with respect to separately clearance portion G and freely inserts, breaks away from.Therefore, can insert or break away from the P2 of foot of supporting plate P, can easily carry out the installation of the supporting plate P on this conveyer (conveyance body) or unload by clearance portion G.

Fig. 7 and Fig. 8 represent another example of conveyer of the present invention, adopt roller chain promptly to quicken chain 130 as the conveyance body, except the part to the conveyance framework changes, other structure is identical with aforesaid example, therefore, for same structure, put on same-sign and omit explanation.

That is, in this conveyer, as shown in Figures 7 and 8, in internal space S, dispose and quicken chain 130 and driver train 40 ' thereof by side body 10 ' and upward side cover 20 delimitations down.

Quicken chain 130 by forming: interconnective a plurality of plate 130a as lower member; With a plurality of pin 130b of bonded assembly between the plate 130a; Rotate a plurality of roller 130c that are bearing in the path on the pin 130b freely; A plurality of roller 130d with the big footpath of roller 130c arranged coaxial.Here, big footpath roller 130d forms and utilizes friction force and rotate with path roller 130c, when the load that surpasses prescribed level is applied to roller 130d and goes up, and only roller 130c rotation after roller 130d stops.

Quicken chain 130 as shown in Figures 7 and 8, be housed in the internal space S fully and be configured to be positioned near the below of clearance portion G, utilize drive sprocket 41 ' described later and be hung on conveyance direction (fore-and-aft direction) X by movable sprocket (not shown).

And, the roller 130c of upside chain 131 rolls and is bearing in freely on conveyance framework 11 ', 12 ' the upside support 11c ', 12 ', and roller 130d is configured to from the below relative with clearance portion G, and the P2 of foot (and base portion P3) of the supporting plate P that will enter by clearance portion G carries and transport mobile.In addition, the roller 130c ' of downside chain 132 rolls and to be bearing in freely on conveyance framework 11 ', 12 ' downside support 11d ', the 12d ', and roller 130d also returns mobile integratedly.

As shown in Figures 7 and 8, driver train 40 ' is configured in the internal space S and remains on down on the side body 10, and has and be pair of right and left drive sprocket 41 ' that acceleration chain 130 about transferring a driving force to links into an integrated entity by S. A. 41a, electrical motor 42, drive belt 43 etc.

Therefore, when electrical motor 42 rotations, drive sprocket 41 ' is rotated by drive belt 43, quicken chain 130 be rotated mobile, while the roller 130d of upside chain 131 roll with carried by transport object (carrying the supporting plate P of workpiece W) along fore-and-aft direction X conveyance.Here, add that with the rotating speed of roller 130d the speed of utilizing driver train 40 ' conveyance to quicken the speed of chain 130 comes conveyance by transport object (carrying the supporting plate P of workpiece W), can carry out the conveyance of more speed.

In this example, because quickening chain 130 and driver train 40 ' all is housed in the internal space S, and quickening chain 130 is configured near the below of clearance portion G, so by making the down gust that flows into through clearance portion G flow through the zone of quickening chain 130 on one's own initiative, thereby can prevent more reliably that the abrasion powder that taken place or dust etc. from dispersing to the outside.

In Fig. 7 and example shown in Figure 8, but the also supporting plate P of application of aforementioned base portion P3 ' narrow width shown in Figure 6.

Fig. 9 and Figure 10 represent the another example of conveyer of the present invention, except to following side body 10 " and go up side cover 20 ", the configuration of endless-belt 30 ' etc. changes, other structure and aforesaid Fig. 1 example extremely shown in Figure 5 is identical.Therefore, for same structure, put on same-sign and omit explanation.

In this conveyer,, following side body 10 as Fig. 9 and shown in Figure 10 " have a pair of right and left conveyance framework 11 to conveyance direction (fore-and-aft direction) X elongation ", 12 " and with a pair of conveyance framework 11 ", 12 " the planar framework 13 of below bonded assembly etc.Pair of right and left conveyance framework 11 ", 12 " as Fig. 9 and shown in Figure 10, relatively centre line L constitutes the shape of symmetry, and has longitudinal wall part 11a, 12a, upside support 11c respectively ", 12c ", downside support 11d, 12d etc.

As Fig. 9 and shown in Figure 10, last side cover 20 " inside form hollowly, can improve bending stiffness is mechanical strength.Section constitution rectangle or triangle that this is hollow, and extend to the direction that draws shaping (fore-and-aft direction X).

Should go up side cover 20 " have an inboard and pair of right and left conveyance framework 11 from left and right directions Y ", 12 " upside support 11c ", 12c " relative support 21 ", 22 ", concavity portion 23, pillar 24 etc.

And, when last side cover 20 " with following side body 10 " when combining, as shown in Figure 9, upside support 11c " and support 21 " between and upside support 12c " with support 22 " between just delimit clearance portion G to the Rack that is extended by the conveyance direction X of transport object (workpiece W).

As Fig. 9 and shown in Figure 10, the state that the upside belt 31 ' that endless-belt 30 ' moves with the upside conveyance exposes externally is bearing in upside support 11c sliding freely ", 12c " and support 21 ", 22 " on, promptly, be configured to from top and the state of clearance portion G in abutting connection with (contact), downside returns mobile downside belt 32 ' and is bearing in sliding freely in internal space S on downside support 11d, the 12d.

Adopt this example, as the state on the upside belt 31 ' that is exposed to be carried on by the workpiece W of transport object along fore-and-aft direction X conveyance.Therefore,, upside belt 31 ' directly carries workpiece W by being exposed, then like that upside belt 31 is housed in inside and compares, can make conveyance highly reduce the such height of the P2 of foot by the occasion that the P2 of foot carries with example shown in Figure 4 as described above, can be with equipment miniaturization.

In addition, endless-belt 30 ' (upside belt 31 ') is in adjacency state so that clearance portion G is sealed, and provide protection against wear powder, dust etc. and disperses to the outside from this zone.On the other hand, in the zone of not holding workpiece W (not loaded), though sometimes at endless-belt 30 ' and delimit the upside support 11c of clearance portion G ", 12c " and support 21 ", 22 " between the situation of minim gap can take place, but the down gust that attractor 60 takes place to internal space S disperses to the outside so can prevent interior abrasion powder that takes place of internal space S or dust etc. reliably.

Figure 11 gives after changing view to the following side body of Fig. 9 and conveyer shown in Figure 10 and the part that goes up side cover.As by transport object, be fit to use workpiece W and supporting plate P ', supporting plate P ' has supporting part P1 and as the P2 of foot that is directed to portion.

Promptly, in this conveyer, as shown in figure 11, following side body 10 " ' have pair of right and left conveyance framework 11 " ', 12 to conveyance direction (fore-and-aft direction) X elongation " ' and with a pair of conveyance framework 11 " ', 12 " ' the planar framework 13 of below bonded assembly etc.

Pair of right and left conveyance framework 11 " ', 12 " ' constitute the shape of symmetry with respect to centre line L, and have respectively: longitudinal wall part 11a, 12a; Upside support 11c " ', 12c " '; Downside support 11d, 12d; And at upside support 11c " a plurality of circular hole 11e of arranging along conveyance direction (fore-and-aft direction) X of the substantial middle of ', 12c " ' " ', 12e " ' etc.

Last side cover 20 " have an inboard and pair of right and left conveyance framework 11 from left and right directions Y " the upside support 11c of ', 12 " ' " ', 12c " ' relative and delimit the edge portion 21 of clearance portion G " ', 22 " ', concavity portion 23, pillar 24 etc.

And, pair of right and left conveyance framework 11 " and the upside support 11c of ', 12 " ' " medial surface of ', 12c " ' played the P2 of the foot engaging that makes supporting plate P ' (by the part of transport object) and to the function of its pair of right and left guide part that leads along conveyance direction (fore-and-aft direction X).

Adopt this structure, be placed on the occasion of carrying out conveyance on the upside belt 31 ' of endless-belt 30 ' at the supporting plate P ' that will carry workpiece W, because as the left and right sides upside support 11c of guide part " medial surface of ', 12c " ' leads to the P2 of foot, can be so can not held left and right directions Y partially reliably along fore-and-aft direction X conveyance by transport object (workpiece W and supporting plate P '), simultaneously, because the windstream of internal space S takes place to flow into from clearance portion G, so the dispersing of the abrasion powder that can prevent to be taken place, dust etc.In addition, because of abrasion powder that slip took place of upside belt 31 ' etc. by circular hole 11e " ', 12e " ' be inhaled in the internal space S, can prevent to disperse to the outside.

At above-mentioned Fig. 9 to the example shown in Figure 11, by conveyance framework 11 ", 11 " ', 12 ", 12 " ' directly support endless-belt 30 ', but also can support by liner 15 like that as described above.

Figure 12 and Figure 13 represent the another example of conveyer of the present invention, except to following side body 110 and go up side cover 120 and change, adopt a plurality of rollers 230 that link as the conveyance body, other and aforesaid Fig. 9 and example shown in Figure 10 are basic identical.Therefore, for identical structure, put on identical symbol and omit explanation.

In this conveyer, as Figure 12 and shown in Figure 13, following side body 110 has to the pair of right and left conveyance framework 111,112 of conveyance direction (fore-and-aft direction) X elongation and with the planar framework 13 of below bonded assembly of a pair of conveyance framework 111,112 etc.

As Figure 12 and shown in Figure 13, pair of right and left conveyance framework 111,112 constitutes the shape of symmetry with respect to centre line L, and has longitudinal wall part 11a, 12a, the 111c of upper end flange portion, 112c etc. respectively.

As Figure 12 and shown in Figure 13, last side cover 120 has from the inboard of the left and right directions Y edge portion 121,122 relative with the 111c of upper end flange portion, the 112c of pair of right and left conveyance framework 111,112, concavity portion 23, pillar 24 etc.

And, when last side cover 120 combines with following side body 110, as shown in figure 12, just delimited the pair of right and left clearance portion G that is Rack between 111c of upper end flange portion and the edge portion 121 and between 112c of upper end flange portion and the edge portion 122.

As Figure 12 and shown in Figure 13, a plurality of rollers 230 rotate on the fulcrum that is bearing in the 111c of upper end flange portion that is located at pair of right and left conveyance framework 111,112,112c madial wall freely, and, be configured in the zone of clearance portion G separately with noncontact when conveyance direction (fore-and-aft direction) X arranges.And, the upper portion of a plurality of rollers 230 from clearance portion G laterally (top) outstanding with carrying as by the workpiece W of transport object.

Here, for make a plurality of rollers 230 mutually interlock and for separately roller 230 one rotation coaxially, on diameter belt wheel littler or sprocket wheel (not shown), be linked with (not shown) such as chain or belts again than roller 230, by giving rotary driving force to a roller 230, thereby make whole rollers 230 rotations by aforesaid driver train 40,40 ' etc.

Adopt this example, since a plurality of rollers 230 with non-contactly and its upper portion be configured in the zone of clearance portion G laterally highlightedly, so the state of roller 230 upper portion that workpiece W is exposed to be carried on and, and in formed gap around the roller 230, produce to the in-to-in air-flow along fore-and-aft direction X conveyance.

That is, adopt this conveyer, compare, conveyance is highly reduced expose the such height of roller 230 upper portion with the occasion of accommodating roller 230 fully, can be with equipment miniaturization.In addition, around roller 230,, disperse to the outside so can prevent interior abrasion powder that takes place of internal space S or dust etc. reliably owing to produce to the in-to-in air-flow by attractor 60.

Figure 14 carries out after changing view to the last side cover part of Figure 12 and conveyer shown in Figure 13.As by transport object, be fit to use workpiece W and supporting plate P '.That is, as shown in figure 14, in this conveyer, the P2 of foot of supporting plate P ' (by the part of transport object) is engaged with last side cover 120 ', and be wholely set the pair of right and left guide part 126 ' that leads along conveyance direction (fore-and-aft direction) X.

Adopt this structure, in the occasion that carries the supporting plate P ' of workpiece W with roller 230 conveyances, because the guide part 126 ' of last side cover 120 ' leads to the P2 of foot, thus can not held left and right directions Y partially by transport object (workpiece W and supporting plate P '), can be reliably along fore-and-aft direction X conveyance.

In above-mentioned example, the housing of having represented to delimit the pair of right and left clearance portion is by side body 10,10 ', 10 down ", 10 " ', 110 and last side cover 20,20 ", 20 " ', 120,120 ' situation about forming, but be not limited to this, also metal sheet etc. can be formed and form as one, to delimit a pair of clearance portion and inner space.

In above-mentioned example, having represented will be with respect to pair of right and left clearance portion G and be provided with in the substantial middle of housing and a plurality ofly attract mouthful 13a and to attract the situation of path 50a as the attraction unit that attracts in to housing, but be not limited to this, also can a plurality of attractions mouths be set respectively accordingly and attract path with left and right sides clearance portion G, and also can be corresponding with left and right sides clearance portion G, in central authorities the inner space of housing is separated and to form 2 inner spaces, above-mentioned attraction unit (a plurality of attraction mouths and attract path) is set so that separately inner space is attracted.

In above-mentioned example, the mono-conveyer has been described, but be not limited to this, above-mentioned conveyer can be made one unit, arrange a plurality of the use, in quartz conductor is made conveyor line etc., but also indentation ground connects use, is arranged in ring-type with perhaps also can forming the on-cycle carrying channel and uses.

In above-mentioned example, represent the acceleration chain as the roller chain of conveyance body, but be not limited to this, also can adopt common roller chain without speedup (acceleration) mechanism.

As mentioned above, conveyer of the present invention, so long as must be under the environment that purifies the field to being carried out conveyance by transport object, comprise field of semiconductor manufacture certainly, also be suitable in fields such as manufacturing conveyor line such as manufacturing conveyor line such as other electron component or precision optical machineries.

Claims (13)

1. a conveyer is characterized in that, comprising:

Will be with certain width to the housing of being delimited by the pair of right and left clearance portion of the conveyance direction of transport object elongation;

For carrying with conveyance is configured near the described pair of right and left clearance portion by transport object or adjacency regional and be bearing in conveyance body on the described housing;

For driving the driver train that described conveyance body is configured in described enclosure interior space;

The attraction unit that described inner space is attracted.

2. conveyer as claimed in claim 1 is characterized in that, described conveyance body the inner space of described housing be configured in described pair of right and left clearance portion below near,

Described is supporting plate by transport object, this supporting plate have by described pair of right and left clearance portion insert in the described inner space and be bearing on the described conveyance body foot and by the supporting of described foot and be positioned at the supporting part that workpiece is carried in described hull outside top.

3. conveyer as claimed in claim 2 is characterized in that, described supporting plate adopts described foot freely to insert, break away from the structure of described pair of right and left clearance portion.

4. conveyer as claimed in claim 1, it is characterized in that, described housing has following side body and last side cover, described down side body comprises will be to the pair of right and left conveyance framework of described conveyance direction elongation and with the planar framework of below bonded assembly of a pair of conveyance framework, described go up side cover from the top and delimitation osed top described inner space relative with described planar framework, relative with described a pair of conveyance framework and delimit described pair of right and left clearance portion from the left and right directions inboard simultaneously.

5. conveyer as claimed in claim 4 is characterized in that, described pair of right and left conveyance framework and planar framework are integrally formed.

6. conveyer as claimed in claim 4 is characterized in that, the described side cover of going up forms mounting or dismounting freely with respect to described side body down.

7. conveyer as claimed in claim 1 is characterized in that, described conveyance body is to hang and be configured in endless-belt in the described inner space along described conveyance direction,

The upside belt that is positioned at described endless-belt upside is configured to from the below relative with described clearance portion.

8. conveyer as claimed in claim 1 is characterized in that, described conveyance body is to hang and have a roller chain that is configured in a plurality of rollers in the described inner space along described conveyance direction,

The upside chain arrangement that is positioned at described roller chain upside becomes relative with described clearance portion from the below.

9. conveyer as claimed in claim 1 is characterized in that, described conveyance body is the endless-belt that hangs along described conveyance direction,

The upside belt that is positioned at described endless-belt upside be configured in described clearance portion near.

10. conveyer as claimed in claim 1 is characterized in that, described conveyance body is a plurality of rollers that are configured in the zone of described clearance portion with noncontact,

The upper portion of described a plurality of rollers is outstanding laterally to carry by transport object from described clearance portion.

11. conveyer as claimed in claim 1 is characterized in that, described attraction unit is included in the downside of the left and right directions substantial middle of described housing and arranges a plurality of attraction paths that attract mouth, are communicated with described a plurality of attraction mouths that are provided with along described conveyance direction.

12. conveyer as claimed in claim 4 is characterized in that, the left and right directions substantial middle that described attraction unit is included in described down side body along described conveyance direction arrange be provided with a plurality of attract mouthful, with described a plurality of mouthful attraction paths that are communicated with that attract.

13. conveyer as claimed in claim 1 is characterized in that, on described housing, be provided with make by the part of transport object engaging and along the conveyance direction to its guide part that leads.

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