CN101248379B - 薄硅中的光交叉区 - Google Patents
薄硅中的光交叉区 Download PDFInfo
- Publication number
- CN101248379B CN101248379B CN200580009284XA CN200580009284A CN101248379B CN 101248379 B CN101248379 B CN 101248379B CN 200580009284X A CN200580009284X A CN 200580009284XA CN 200580009284 A CN200580009284 A CN 200580009284A CN 101248379 B CN101248379 B CN 101248379B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 72
- 229910052710 silicon Inorganic materials 0.000 title claims description 16
- 239000010703 silicon Substances 0.000 title claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 32
- 229920005591 polysilicon Polymers 0.000 claims abstract description 32
- 230000001902 propagating effect Effects 0.000 claims abstract description 12
- 230000008859 change Effects 0.000 claims description 28
- 238000005452 bending Methods 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 238000009413 insulation Methods 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract description 20
- 238000010168 coupling process Methods 0.000 abstract description 20
- 238000005859 coupling reaction Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 56
- 238000000059 patterning Methods 0.000 description 14
- 238000005530 etching Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000006096 absorbing agent Substances 0.000 description 5
- 230000002146 bilateral effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000005253 cladding Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000021715 photosynthesis, light harvesting Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12176—Etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Abstract
Description
Claims (9)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US55599304P | 2004-03-24 | 2004-03-24 | |
US60/555,993 | 2004-03-24 | ||
PCT/US2005/009872 WO2005094530A2 (en) | 2004-03-24 | 2005-03-24 | Optical crossover in thin silicon |
US11/089,478 | 2005-03-24 | ||
US11/089,478 US20050213873A1 (en) | 2004-03-24 | 2005-03-24 | Optical Crossover in thin silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101248379A CN101248379A (zh) | 2008-08-20 |
CN101248379B true CN101248379B (zh) | 2011-06-08 |
Family
ID=34989888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200580009284XA Expired - Fee Related CN101248379B (zh) | 2004-03-24 | 2005-03-24 | 薄硅中的光交叉区 |
Country Status (5)
Country | Link |
---|---|
US (2) | US20050213873A1 (zh) |
JP (1) | JP2008504562A (zh) |
CN (1) | CN101248379B (zh) |
CA (1) | CA2560845C (zh) |
WO (1) | WO2005094530A2 (zh) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100745285B1 (ko) * | 2003-04-23 | 2007-08-01 | 시옵티컬 인코포레이티드 | Soi 광학 플랫폼상에 형성된 서브-마이크론 평면 광파디바이스 |
US7672558B2 (en) * | 2004-01-12 | 2010-03-02 | Honeywell International, Inc. | Silicon optical device |
US7177489B2 (en) * | 2004-03-18 | 2007-02-13 | Honeywell International, Inc. | Silicon-insulator-silicon thin-film structures for optical modulators and methods of manufacture |
US7149388B2 (en) * | 2004-03-18 | 2006-12-12 | Honeywell International, Inc. | Low loss contact structures for silicon based optical modulators and methods of manufacture |
US7217584B2 (en) * | 2004-03-18 | 2007-05-15 | Honeywell International Inc. | Bonded thin-film structures for optical modulators and methods of manufacture |
US20050214989A1 (en) * | 2004-03-29 | 2005-09-29 | Honeywell International Inc. | Silicon optoelectronic device |
US20060063679A1 (en) * | 2004-09-17 | 2006-03-23 | Honeywell International Inc. | Semiconductor-insulator-semiconductor structure for high speed applications |
US20070101927A1 (en) * | 2005-11-10 | 2007-05-10 | Honeywell International Inc. | Silicon based optical waveguide structures and methods of manufacture |
US7362443B2 (en) * | 2005-11-17 | 2008-04-22 | Honeywell International Inc. | Optical gyro with free space resonator and method for sensing inertial rotation rate |
US7442589B2 (en) * | 2006-01-17 | 2008-10-28 | Honeywell International Inc. | System and method for uniform multi-plane silicon oxide layer formation for optical applications |
US7514285B2 (en) * | 2006-01-17 | 2009-04-07 | Honeywell International Inc. | Isolation scheme for reducing film stress in a MEMS device |
US7454102B2 (en) * | 2006-04-26 | 2008-11-18 | Honeywell International Inc. | Optical coupling structure |
US7469085B1 (en) * | 2007-07-12 | 2008-12-23 | International Business Machines Corporation | Method and apparatus for minimizing propagation losses in wavelength selective filters |
JP4991596B2 (ja) * | 2008-02-26 | 2012-08-01 | 株式会社東芝 | 光導波回路及びそれを用いたマルチコア中央処理装置 |
US8655124B2 (en) * | 2008-09-04 | 2014-02-18 | Hewlett-Packard Development Company, L.P. | Dielectric waveguide intersection with reduced losses |
ES2335078B1 (es) * | 2008-12-30 | 2011-06-14 | Das Photonics, S.L. | Estructura de cruce entre guias fotonicas integradas. |
TW201217844A (en) * | 2010-06-30 | 2012-05-01 | Ibm | Design for reducing loss at intersection in optical waveguides |
CN102749676B (zh) * | 2012-06-15 | 2014-08-06 | 浙江工业大学 | 一种基于线性锥形多模干涉原理的十字交叉波导 |
US20130343704A1 (en) * | 2012-06-26 | 2013-12-26 | Acacia Communications Inc. | Compact mode-size transition using a focusing reflector |
US9478840B2 (en) * | 2012-08-24 | 2016-10-25 | City University Of Hong Kong | Transmission line and methods for fabricating thereof |
US9810843B2 (en) | 2013-06-10 | 2017-11-07 | Nxp Usa, Inc. | Optical backplane mirror |
US10230458B2 (en) | 2013-06-10 | 2019-03-12 | Nxp Usa, Inc. | Optical die test interface with separate voltages for adjacent electrodes |
US9442254B2 (en) | 2013-06-10 | 2016-09-13 | Freescale Semiconductor, Inc. | Method and apparatus for beam control with optical MEMS beam waveguide |
US9766409B2 (en) | 2013-06-10 | 2017-09-19 | Nxp Usa, Inc. | Optical redundancy |
US9435952B2 (en) | 2013-06-10 | 2016-09-06 | Freescale Semiconductor, Inc. | Integration of a MEMS beam with optical waveguide and deflection in two dimensions |
US9360622B2 (en) * | 2014-01-27 | 2016-06-07 | Huawei Technologies Co., Ltd. | Low loss optical crossing and method of making same |
WO2016008116A1 (zh) * | 2014-07-16 | 2016-01-21 | 华为技术有限公司 | 交叉波导 |
US9618698B2 (en) | 2014-11-06 | 2017-04-11 | Huawei Technologies Co., Ltd. | Optical waveguide crossings |
WO2016090534A1 (zh) * | 2014-12-08 | 2016-06-16 | 华为技术有限公司 | 波导装置及包括其的芯片 |
EP3153899A1 (en) * | 2015-10-09 | 2017-04-12 | Caliopa NV | Optical coupling scheme |
US9709738B1 (en) * | 2016-03-11 | 2017-07-18 | Huawei Technologies Co., Ltd. | Waveguide crossing |
US10031287B1 (en) | 2017-02-02 | 2018-07-24 | International Business Machines Corporation | Waveguide architecture for photonic neural component with multiplexed optical signals on inter-node waveguides |
CN106980154A (zh) * | 2017-04-19 | 2017-07-25 | 浙江工业大学 | 基于多模干涉原理的椭圆形十字交叉波导 |
CN106980153B (zh) * | 2017-04-19 | 2019-05-31 | 浙江工业大学 | 一种基于多模干涉原理的椭圆形十字交叉波导的制作方法 |
US10859683B2 (en) * | 2017-05-25 | 2020-12-08 | Ours Technology, Inc. | Solid-state light detection and ranging (LIDAR) system with real-time self-calibration |
CN108110605B (zh) * | 2017-06-23 | 2020-06-30 | 青岛海信宽带多媒体技术有限公司 | 一种硅基激光器 |
US10627496B2 (en) * | 2017-08-24 | 2020-04-21 | Toyota Motor Engineering & Manufacturing North America, Inc. | Photonics integrated phase measurement |
CN107678091A (zh) * | 2017-11-20 | 2018-02-09 | 中山大学 | 一种紧凑的光波导交叉耦合器 |
CN108169849B (zh) * | 2017-12-19 | 2019-11-12 | 武汉邮电科学研究院 | 多通道星形光交叉 |
US10247969B1 (en) * | 2018-06-21 | 2019-04-02 | PsiQuantum Corp. | Photon sources with multiple cavities for generation of individual photons |
US10365425B1 (en) * | 2018-07-11 | 2019-07-30 | International Business Machines Corporation | Optical waveguide crossing structure |
US10816725B2 (en) * | 2018-09-18 | 2020-10-27 | Globalfoundries Inc. | Waveguide intersections incorporating a waveguide crossing |
US10718903B1 (en) | 2019-06-14 | 2020-07-21 | Globalfoundries Inc. | Waveguide crossings with a non-contacting arrangement |
US10989877B2 (en) | 2019-07-10 | 2021-04-27 | Globalfoundries U.S. Inc. | Non-planar waveguide structures |
US10989873B1 (en) | 2019-10-25 | 2021-04-27 | Globalfoundries U.S. Inc. | Waveguide crossings having arms shaped with a non-linear curvature |
US11320590B2 (en) * | 2020-03-31 | 2022-05-03 | Globalfoundries U.S. Inc. | Polarizers based on looped waveguide crossings |
CN112180507B (zh) * | 2020-09-25 | 2023-06-20 | 联合微电子中心有限责任公司 | 多波导交叉器件、波导芯片及其形成方法 |
US11467341B2 (en) | 2020-11-10 | 2022-10-11 | Globalfoundries U.S. Inc. | Waveguide crossings including a segmented waveguide section |
CN112945907B (zh) * | 2021-01-29 | 2023-09-19 | 中国科学院微电子研究所 | 一种集成光交叉波导的传感阵列及生化检测系统 |
EP4350403A1 (en) * | 2021-05-24 | 2024-04-10 | Nanjing Lycore Technologies Co., Ltd. | Photonic device, crossed waveguide, waveguide layer and manufacturing method therefor |
CN114035268B (zh) * | 2021-12-17 | 2022-06-28 | 季华实验室 | 一种光交叉波导单元 |
CN115085008B (zh) * | 2022-07-15 | 2023-04-25 | 上海新微半导体有限公司 | 基于soi和iii-v半导体的混合集成可调谐激光器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4961619A (en) * | 1989-03-02 | 1990-10-09 | At&T Bell Laboratories | Low loss waveguide intersection |
US5157756A (en) * | 1989-08-30 | 1992-10-20 | Nec Corporation | Optical waveguide circuit with intersections |
CN1353826A (zh) * | 1999-03-31 | 2002-06-12 | 布里斯托尔大学 | 应用垂直耦合的波导结构的光学交叉点开关 |
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US5544268A (en) * | 1994-09-09 | 1996-08-06 | Deacon Research | Display panel with electrically-controlled waveguide-routing |
GB2317023B (en) * | 1997-02-07 | 1998-07-29 | Bookham Technology Ltd | A tapered rib waveguide |
US6198860B1 (en) * | 1998-09-22 | 2001-03-06 | Massachusetts Institute Of Technology | Optical waveguide crossings |
US6826173B1 (en) * | 1999-12-30 | 2004-11-30 | At&T Corp. | Enhanced subscriber IP alerting |
US6775043B1 (en) * | 2000-08-21 | 2004-08-10 | Blue Sky Research | Reflector assemblies for optical cross-connect switches and switches fabricated therefrom |
US20040028336A1 (en) | 2001-09-04 | 2004-02-12 | Feuer Mark D. | Method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides |
WO2002057829A1 (en) * | 2001-01-17 | 2002-07-25 | The Whitaker Corporation | Optical cross connect |
WO2002084372A2 (en) * | 2001-04-13 | 2002-10-24 | Movaz Networks, Inc. | Reconfigurable free space wavelength cross connect |
JP2003131054A (ja) * | 2001-10-24 | 2003-05-08 | Nippon Telegr & Teleph Corp <Ntt> | 平面型光回路 |
AU2002348015A1 (en) * | 2001-10-26 | 2003-05-12 | Brent E. Little | Low loss lateral optical waveguide intersections |
US7006732B2 (en) * | 2003-03-21 | 2006-02-28 | Luxtera, Inc. | Polarization splitting grating couplers |
US7062130B2 (en) * | 2003-05-01 | 2006-06-13 | Arthur Telkamp | Low-loss optical waveguide crossovers using an out-of-plane waveguide |
US7356215B2 (en) * | 2003-08-23 | 2008-04-08 | Hewlett-Packard Development Company, L.P. | Methods and apparatus for selectively coupling optical paths |
US7298949B2 (en) * | 2004-02-12 | 2007-11-20 | Sioptical, Inc. | SOI-based photonic bandgap devices |
-
2005
- 2005-03-24 JP JP2007505183A patent/JP2008504562A/ja active Pending
- 2005-03-24 US US11/089,478 patent/US20050213873A1/en not_active Abandoned
- 2005-03-24 CN CN200580009284XA patent/CN101248379B/zh not_active Expired - Fee Related
- 2005-03-24 WO PCT/US2005/009872 patent/WO2005094530A2/en active Application Filing
- 2005-03-24 CA CA2560845A patent/CA2560845C/en not_active Expired - Fee Related
-
2008
- 2008-06-12 US US12/157,630 patent/US7587106B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4961619A (en) * | 1989-03-02 | 1990-10-09 | At&T Bell Laboratories | Low loss waveguide intersection |
US5157756A (en) * | 1989-08-30 | 1992-10-20 | Nec Corporation | Optical waveguide circuit with intersections |
CN1353826A (zh) * | 1999-03-31 | 2002-06-12 | 布里斯托尔大学 | 应用垂直耦合的波导结构的光学交叉点开关 |
Also Published As
Publication number | Publication date |
---|---|
WO2005094530A3 (en) | 2009-04-09 |
WO2005094530A2 (en) | 2005-10-13 |
CN101248379A (zh) | 2008-08-20 |
JP2008504562A (ja) | 2008-02-14 |
US20080253713A1 (en) | 2008-10-16 |
CA2560845C (en) | 2011-05-24 |
US20050213873A1 (en) | 2005-09-29 |
CA2560845A1 (en) | 2005-10-13 |
US7587106B2 (en) | 2009-09-08 |
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ASS | Succession or assignment of patent right |
Owner name: CISCO TECH IND. Free format text: FORMER OWNER: LIGHTWIRE INC. Effective date: 20131202 Free format text: FORMER OWNER: PIEDE DAVID GOTHOSKAR PRAKASH GHIRON MARGARET MONTGOMERY ROBERT KEITH PATEL VIPULKUMAR PATHAK SOHAM SHASTRI KALPENDU YANUSHEFSKI KATHERINE A. Effective date: 20131202 |
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Owner name: LIGHTWIRE INC. Free format text: FORMER NAME: SIOPTICAL INC. |
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CP01 | Change in the name or title of a patent holder |
Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: SIOPTICAL, Inc. Address after: American Pennsylvania Patentee after: LIGHTWIRE, Inc. Address before: American Pennsylvania Patentee before: LIGHTWIRE, Inc. |
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Effective date of registration: 20131202 Address after: American Pennsylvania Patentee after: Cisco Technology, Inc. Address before: American Pennsylvania Patentee before: Lightwire, Inc. Effective date of registration: 20131202 Address after: American Pennsylvania Patentee after: SIOPTICAL, Inc. Address before: American Pennsylvania Patentee before: SIOPTICAL, Inc. Patentee before: David Piede Patentee before: Prakash Yotuska Patentee before: Margaret Ghiron Patentee before: Robert Case Montgomery Patentee before: Wipkumar Patel Patentee before: Shoham Pathak Patentee before: Kalpandu Chasterley Patentee before: Catherine A. Anushevsky |
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CF01 | Termination of patent right due to non-payment of annual fee |
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