CN101243298A - 通过浸没干涉仪显微镜的断层成像 - Google Patents

通过浸没干涉仪显微镜的断层成像 Download PDF

Info

Publication number
CN101243298A
CN101243298A CN200680029559.0A CN200680029559A CN101243298A CN 101243298 A CN101243298 A CN 101243298A CN 200680029559 A CN200680029559 A CN 200680029559A CN 101243298 A CN101243298 A CN 101243298A
Authority
CN
China
Prior art keywords
medium
interferometer
focussing plane
tripping device
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200680029559.0A
Other languages
English (en)
Chinese (zh)
Inventor
阿诺·杜波依斯
阿尔伯特-克洛德·博卡拉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of CN101243298A publication Critical patent/CN101243298A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN200680029559.0A 2005-08-08 2006-08-04 通过浸没干涉仪显微镜的断层成像 Pending CN101243298A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0508428A FR2889584B1 (fr) 2005-08-08 2005-08-08 Imagerie tomographique par microscope interferometrique a immersion
FR0508428 2005-08-08

Publications (1)

Publication Number Publication Date
CN101243298A true CN101243298A (zh) 2008-08-13

Family

ID=36297684

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200680029559.0A Pending CN101243298A (zh) 2005-08-08 2006-08-04 通过浸没干涉仪显微镜的断层成像

Country Status (7)

Country Link
US (1) US20080246972A1 (enExample)
EP (1) EP1913331A1 (enExample)
JP (1) JP2009505051A (enExample)
CN (1) CN101243298A (enExample)
CA (1) CA2617983A1 (enExample)
FR (1) FR2889584B1 (enExample)
WO (1) WO2007017589A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105852800A (zh) * 2015-02-09 2016-08-17 黄升龙 三维光学相干断层扫描装置及其应用
CN105980810A (zh) * 2013-12-20 2016-09-28 国家科学研究中心 光学断层摄影装置和方法
US10422744B2 (en) 2016-10-04 2019-09-24 Industrial Technology Research Institute Interferometer and imaging method therefor

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010025864A (ja) * 2008-07-23 2010-02-04 Hamamatsu Photonics Kk 干渉測定装置
DE102010007728A1 (de) * 2010-02-12 2011-09-29 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zum Scannen eines Objekts und Mikroskop
JP5930620B2 (ja) * 2011-06-28 2016-06-08 キヤノン株式会社 光干渉断層装置および方法
TWI490542B (zh) 2013-05-07 2015-07-01 Univ Nat Taiwan A scanning lens and an interference measuring device using the scanning lens
JP6534889B2 (ja) * 2015-07-31 2019-06-26 オリンパス株式会社 倒立型顕微鏡および倒立型顕微鏡システム
JP6697762B2 (ja) * 2016-05-16 2020-05-27 パナソニックＩｐマネジメント株式会社 光干渉測定装置及び光干渉測定方法
AU2019207864B2 (en) 2018-01-12 2023-12-14 Damae Medical Dynamic focusing system for an optical device
WO2022133433A1 (en) * 2020-12-15 2022-06-23 Alfred E. Mann Institute For Biomedical Engineering At The University Of Southern California Optical coherence tomography (oct) system with a multi-pass dispersion compensation cell
CN115031623A (zh) * 2022-05-12 2022-09-09 中国电子科技集团公司第十一研究所 一种白光干涉显微物镜

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5208648A (en) * 1991-03-11 1993-05-04 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
JP2875181B2 (ja) * 1995-03-17 1999-03-24 株式会社生体光情報研究所 断層撮影装置
EP1399730B1 (fr) * 2001-06-29 2012-09-05 Université Libre de Bruxelles Procede et dispositif destines a l'obtention par microscopie d'images en trois dimensions d'un echantillon
JP2004061330A (ja) * 2002-07-30 2004-02-26 Rikogaku Shinkokai 光学フィルタ及び表面形状測定装置
DE10244552B3 (de) * 2002-09-25 2004-02-12 Robert Bosch Gmbh Interferometrische Messeinrichtung
US6927860B2 (en) * 2003-05-19 2005-08-09 Oti Ophthalmic Technologies Inc. Optical mapping apparatus with optimized OCT configuration
TWI335417B (en) * 2003-10-27 2011-01-01 Zygo Corp Method and apparatus for thin film measurement
JP2005201660A (ja) * 2004-01-13 2005-07-28 Mitsui Medical Clinic コンタクトレンズの３次元表面形状測定方法
US7375821B2 (en) * 2004-12-03 2008-05-20 Veeco Instruments, Inc. Profilometry through dispersive medium using collimated light with compensating optics
FR2881222A1 (fr) * 2005-01-25 2006-07-28 Debiotech Sa Procede de mesure de volume par profilometrie optique de surface dans un dispositif micromecanique et ensemble destine a une telle mesure
US7630085B2 (en) * 2005-04-19 2009-12-08 Texas Instruments Incorporated Interferometers of high resolutions

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105980810A (zh) * 2013-12-20 2016-09-28 国家科学研究中心 光学断层摄影装置和方法
CN105980810B (zh) * 2013-12-20 2020-06-19 国家科学研究中心 光学断层摄影装置和方法
CN105852800A (zh) * 2015-02-09 2016-08-17 黄升龙 三维光学相干断层扫描装置及其应用
CN105852800B (zh) * 2015-02-09 2021-03-16 黄升龙 三维光学相干断层扫描装置及其应用
US10422744B2 (en) 2016-10-04 2019-09-24 Industrial Technology Research Institute Interferometer and imaging method therefor

Also Published As

Publication number Publication date
WO2007017589A1 (fr) 2007-02-15
JP2009505051A (ja) 2009-02-05
FR2889584A1 (fr) 2007-02-09
US20080246972A1 (en) 2008-10-09
CA2617983A1 (fr) 2007-02-15
FR2889584B1 (fr) 2008-07-11
EP1913331A1 (fr) 2008-04-23

Similar Documents

Publication Publication Date Title
JP6460364B2 (ja) 軸外し反射位相顕微鏡システムおよび軸外し位相顕微鏡のための方法
JP6273142B2 (ja) 構造物体を検査するための光学装置及び方法
US10317656B2 (en) Optical coherence tomography apparatus and method using line confocal filtering
JP2007533977A5 (enExample)
Nguyen et al. Accurate quantitative phase digital holographic microscopy with single-and multiple-wavelength telecentric and nontelecentric configurations
US20100002950A1 (en) Methods and apparatus for wavefront manipulations and improved 3-D measurements
US7525666B2 (en) Interferometric measuring device
CN101243298A (zh) 通过浸没干涉仪显微镜的断层成像
Federici et al. Wide-field, full-field optical coherence microscopy for high-axial-resolution phase and amplitude imaging
JP2009162539A (ja) 光波干渉測定装置
CA2963297A1 (fr) Optical telemetry device
Boettcher et al. Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)
US6704112B1 (en) Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses
US12270646B2 (en) Broadband interferometric confocal microscope
CA3163791C (en) Devices and methods for line-scanning microscopy
JP2006516762A (ja) トレンチの特性を測定するために干渉共焦点顕微鏡法で使用される漏洩被挟導波モード
KR101407062B1 (ko) 향상된 축방향 콘트라스트를 가지는 광학 간섭 단층 영상 장치 및 이를 위한 다중면을 구비한 기준 반사경
CN111474141B (zh) 一种干涉显微成像方法及干涉显微镜
Kühn et al. Measurements of corner cubes microstructures by high-magnification digital holographic microscopy
TRỊNH et al. Shearing interference microscope for step‐height measurements
KR20170004352A (ko) 디지털 홀로그램을 이용한 3차원 구조물 내 입자들의 위치 결정 방법
JP3871183B2 (ja) 光学素子の３次元形状測定方法及び測定装置
Quinten Optical Surface Metrology: Methods
Adinda-Ougba et al. Compact low-cost lensless digital holographic microscope for topographic measurements of microstructures in reflection geometry
Quan et al. Study on the use of white light interferometry for multifiber-end surface profile measurement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20080813