CN101230239B - 高效高精度蓝宝石抛光液及其制备方法 - Google Patents
高效高精度蓝宝石抛光液及其制备方法 Download PDFInfo
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- CN101230239B CN101230239B CN2008100207798A CN200810020779A CN101230239B CN 101230239 B CN101230239 B CN 101230239B CN 2008100207798 A CN2008100207798 A CN 2008100207798A CN 200810020779 A CN200810020779 A CN 200810020779A CN 101230239 B CN101230239 B CN 101230239B
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- polishing
- high accuracy
- agent
- effective high
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- 238000005498 polishing Methods 0.000 title claims abstract description 62
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 21
- 239000010980 sapphire Substances 0.000 title claims abstract description 21
- 239000007788 liquid Substances 0.000 title claims description 12
- 238000002360 preparation method Methods 0.000 title claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 12
- 239000002245 particle Substances 0.000 claims abstract description 12
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000007787 solid Substances 0.000 claims abstract description 10
- 239000000725 suspension Substances 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 22
- 239000012530 fluid Substances 0.000 claims description 19
- 239000013543 active substance Substances 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 9
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 claims description 8
- OKIZCWYLBDKLSU-UHFFFAOYSA-M N,N,N-Trimethylmethanaminium chloride Chemical compound [Cl-].C[N+](C)(C)C OKIZCWYLBDKLSU-UHFFFAOYSA-M 0.000 claims description 6
- DWANEFRJKWXRSG-UHFFFAOYSA-N 1,2-tetradecanediol Chemical compound CCCCCCCCCCCCC(O)CO DWANEFRJKWXRSG-UHFFFAOYSA-N 0.000 claims description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 4
- 239000004471 Glycine Substances 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 239000011591 potassium Substances 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 238000004140 cleaning Methods 0.000 abstract description 4
- 238000010668 complexation reaction Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000004094 surface-active agent Substances 0.000 abstract 1
- 238000003756 stirring Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000005303 weighing Methods 0.000 description 4
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 235000015320 potassium carbonate Nutrition 0.000 description 2
- 239000005995 Aluminium silicate Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- PZZYQPZGQPZBDN-UHFFFAOYSA-N aluminium silicate Chemical compound O=[Al]O[Si](=O)O[Al]=O PZZYQPZGQPZBDN-UHFFFAOYSA-N 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- -1 amine compound Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 150000008040 ionic compounds Chemical class 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100207798A CN101230239B (zh) | 2008-02-26 | 2008-02-26 | 高效高精度蓝宝石抛光液及其制备方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100207798A CN101230239B (zh) | 2008-02-26 | 2008-02-26 | 高效高精度蓝宝石抛光液及其制备方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101230239A CN101230239A (zh) | 2008-07-30 |
| CN101230239B true CN101230239B (zh) | 2011-02-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100207798A Active CN101230239B (zh) | 2008-02-26 | 2008-02-26 | 高效高精度蓝宝石抛光液及其制备方法 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101230239B (zh) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101870853B (zh) * | 2010-06-25 | 2013-02-06 | 孙韬 | 微碱性蓝宝石抛光液及其制备方法 |
| CN102585705B (zh) * | 2011-12-21 | 2014-02-05 | 上海新安纳电子科技有限公司 | 一种用于蓝宝石衬底的化学机械抛光液及其应用 |
| CN103184010A (zh) * | 2012-04-05 | 2013-07-03 | 铜陵市琨鹏光电科技有限公司 | 一种用于led用蓝宝石衬底片精密抛光的抛光液 |
| CN102775916B (zh) * | 2012-07-16 | 2015-01-07 | 芜湖海森材料科技有限公司 | 一种提高蓝宝石表面质量的抛光组合物 |
| CN103484026A (zh) * | 2013-09-30 | 2014-01-01 | 江苏中晶科技有限公司 | 高效陶瓷抛光液及其制备方法 |
| CN103753381B (zh) * | 2013-11-12 | 2016-06-22 | 江苏吉星新材料有限公司 | A-面蓝宝石晶片的表面抛光方法 |
| CN104084878A (zh) * | 2014-06-20 | 2014-10-08 | 常州市好利莱光电科技有限公司 | 一种蓝宝石手机面板a向抛光液制备方法 |
| CN106883769A (zh) * | 2017-04-17 | 2017-06-23 | 黄美香 | 一种硅溶胶抛光液 |
| CN107541145B (zh) * | 2017-09-20 | 2019-12-10 | 无锡市恒利弘实业有限公司 | 一种绿色环保抛光硅溶胶及其制备方法 |
-
2008
- 2008-02-26 CN CN2008100207798A patent/CN101230239B/zh active Active
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| Publication number | Publication date |
|---|---|
| CN101230239A (zh) | 2008-07-30 |
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Owner name: SHI FANG |
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Free format text: CORRECT: ADDRESS; FROM: 226600 JIANGSU CHERRICA MICROELECTRONICS NANOMATERIALS CO., LTD., NO. 8, DONGHU ROAD, DEVELOPMENT ZONE, HAI'AN COUNTY, JIANGSU PROVINCE TO: 213100 ROOM 1003, BUILDING 8, MINGSHI JIAYUAN, WUJIN DISTRICT, CHANGZHOU CITY, JIANGSU PROVINCE |
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Effective date of registration: 20110427 Address after: Jiayuan district of Wujin city of Changzhou province Jiangsu Malibu 213100 Building 8 Room 1003 Co-patentee after: Shi Fang Patentee after: Sun Tao Address before: 226600 East Lake Road, Haian County of Jiangsu Province Development Zone No. 8 Jiangsu Ji Ruika micro nano material Co Ltd Patentee before: Sun Tao |
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Free format text: FORMER OWNER: SHI FANG Owner name: JIANGSU SINO KRYSTALS OPTRONICS TECHNOLOGY CO., LT Free format text: FORMER OWNER: SUN TAO Effective date: 20110720 |
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Free format text: CORRECT: ADDRESS; FROM: 213100 ROOM 1003, BUILDING 8, MINGSHI JIAYUAN, WUJIN DISTRICT, CHANGZHOU CITY, JIANGSU PROVINCE TO: 213164 NO. 8, XIHU ROAD, WUJIN HIGH-TECH. INDUSTRIAL DEVELOPMENT ZONE, CHANGZHOU CITY, JIANGSU PROVINCE |
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Effective date of registration: 20110720 Address after: 213164 No. 8, West Lake Road, hi tech Industrial Development Zone, Changzhou, Jiangsu, Wujin Patentee after: Jiangsu MICROTEK Photoelectric Technology Co.,Ltd. Address before: Jiayuan district of Wujin city of Changzhou province Jiangsu Malibu 213100 Building 8 Room 1003 Co-patentee before: Shi Fang Patentee before: Sun Tao |
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Assignee: Jiangsu Sino Krystals Technology Co.,Ltd. Assignor: Jiangsu MICROTEK Photoelectric Technology Co.,Ltd. Contract record no.: 2012320000322 Denomination of invention: Highly-effective high accuracy sapphire polishing liquid and preparation method thereof Granted publication date: 20110216 License type: Exclusive License Open date: 20080730 Record date: 20120328 |
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Effective date of registration: 20221107 Address after: No. 18-69, Changwu Middle Road, Wujin District, Changzhou City, Jiangsu Province, 213,000 Patentee after: Jiangsu Jicui Zhongyi Technology Industry Development Co.,Ltd. Address before: 213164 No.8 Xihu Road, Wujin high tech Industrial Development Zone, Changzhou City, Jiangsu Province Patentee before: Jiangsu MICROTEK Photoelectric Technology Co.,Ltd. |
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Effective date of registration: 20231208 Address after: No. 1-3 Haihu Road, Wujin High tech Industrial Development Zone, Changzhou City, Jiangsu Province, 213000 Patentee after: Jiangsu Wujin High tech Investment Holding Co.,Ltd. Address before: No. 18-69, Changwu Middle Road, Wujin District, Changzhou City, Jiangsu Province, 213,000 Patentee before: Jiangsu Jicui Zhongyi Technology Industry Development Co.,Ltd. |
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Denomination of invention: Efficient and high-precision sapphire polishing solution and its preparation method Effective date of registration: 20231224 Granted publication date: 20110216 Pledgee: Industrial and Commercial Bank of China Changzhou Wujin Branch Pledgor: Jiangsu Wujin High tech Investment Holding Co.,Ltd. Registration number: Y2023980073804 |