CN101220502B - 垂直布里奇曼生长炉及炉内温度场优化方法 - Google Patents
垂直布里奇曼生长炉及炉内温度场优化方法 Download PDFInfo
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- CN101220502B CN101220502B CN200710018783A CN200710018783A CN101220502B CN 101220502 B CN101220502 B CN 101220502B CN 200710018783 A CN200710018783 A CN 200710018783A CN 200710018783 A CN200710018783 A CN 200710018783A CN 101220502 B CN101220502 B CN 101220502B
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- 238000010438 heat treatment Methods 0.000 claims abstract description 46
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CN200710018783A CN101220502B (zh) | 2007-09-30 | 2007-09-30 | 垂直布里奇曼生长炉及炉内温度场优化方法 |
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CN200710018783A CN101220502B (zh) | 2007-09-30 | 2007-09-30 | 垂直布里奇曼生长炉及炉内温度场优化方法 |
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CN101220502A CN101220502A (zh) | 2008-07-16 |
CN101220502B true CN101220502B (zh) | 2010-05-19 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102517624A (zh) * | 2011-12-16 | 2012-06-27 | 华中科技大学 | 一种多段控温晶体生长炉 |
CN104165898A (zh) * | 2014-08-21 | 2014-11-26 | 共慧冶金设备科技(苏州)有限公司 | 大温度梯度布里奇曼炉 |
CN104651924B (zh) * | 2015-03-09 | 2017-06-06 | 中国工程物理研究院化工材料研究所 | 管式生长炉 |
CN108645219A (zh) * | 2018-06-19 | 2018-10-12 | 浙江德清蓝雅晶体纤维有限公司 | 管式电阻炉膛 |
CN108531975A (zh) * | 2018-06-29 | 2018-09-14 | 汉能新材料科技有限公司 | 一种半导体合成装置和合成方法 |
CN115074833A (zh) * | 2022-06-23 | 2022-09-20 | 浙江康鹏半导体有限公司 | 砷化镓加长晶体生长热场及工艺技术 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5769944A (en) * | 1995-12-19 | 1998-06-23 | Korea Institute Of Science And Technology | Vertical gradient freeze and vertical Bridgman compound semiconductor crystal growth apparatus capable of applying axial magnetic field |
US6290773B1 (en) * | 1998-06-03 | 2001-09-18 | Hitachi Cable Ltd. | Method and apparatus for fabricating single crystal |
CN1623014A (zh) * | 2002-03-19 | 2005-06-01 | 株式会社日矿材料 | CdTe单晶和CdTe多晶及其制备方法 |
CN2851293Y (zh) * | 2005-07-21 | 2006-12-27 | 北京工物科技有限责任公司 | 一种可实时观察晶体生长状况的晶体生长炉 |
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- 2007-09-30 CN CN200710018783A patent/CN101220502B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5769944A (en) * | 1995-12-19 | 1998-06-23 | Korea Institute Of Science And Technology | Vertical gradient freeze and vertical Bridgman compound semiconductor crystal growth apparatus capable of applying axial magnetic field |
US6290773B1 (en) * | 1998-06-03 | 2001-09-18 | Hitachi Cable Ltd. | Method and apparatus for fabricating single crystal |
CN1623014A (zh) * | 2002-03-19 | 2005-06-01 | 株式会社日矿材料 | CdTe单晶和CdTe多晶及其制备方法 |
CN2851293Y (zh) * | 2005-07-21 | 2006-12-27 | 北京工物科技有限责任公司 | 一种可实时观察晶体生长状况的晶体生长炉 |
Non-Patent Citations (2)
Title |
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徐亚东等.籽晶垂直布里奇曼法生长大尺寸CdZnTe单晶体.人工晶体学报35 6.2006,35(6),1180-1184. |
徐亚东等.籽晶垂直布里奇曼法生长大尺寸CdZnTe单晶体.人工晶体学报35 6.2006,35(6),1180-1184. * |
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