CN101210805B - Transmission modules coaxiality measurement method based on focal plane imaging method - Google Patents
Transmission modules coaxiality measurement method based on focal plane imaging method Download PDFInfo
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- CN101210805B CN101210805B CN2007101448797A CN200710144879A CN101210805B CN 101210805 B CN101210805 B CN 101210805B CN 2007101448797 A CN2007101448797 A CN 2007101448797A CN 200710144879 A CN200710144879 A CN 200710144879A CN 101210805 B CN101210805 B CN 101210805B
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- wave band
- microlens
- ccd detector
- focal plane
- coordinate
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Abstract
The invention relates to a method for measuring the coaxiality between emission modules based on focal plane imaging, which belongs to the measurement field and solves the problems that emergent lightbeams of different wavebands can not be detected by the same detector, and the coaxiality of the emergent light beams should be accurately measured when exchanged. The method comprises the followingsteps of: firstly imaging lights output from the emission modules of 800 nm waveband at a light spot coordinate (x1, y1); then installing a small aperture and recording the coordinate of central position of the small aperture (x2, y2); positioning a CCD detector of 1550 nm waveband and recording the coordinate of central position of the small aperture (x3, y3); recording the coordinates of imagesof lights output from the emission modules of 1550 nm waveband (x4, y4); and finally calculating the direction angular deviation and the pitch angular deviation: Alpha is equal to [(x1-x2)-(x4-x3)]/F,Beta is equal to [(y1-y2)-(y4-y3)]/F. By using equipment such as long-focal-depth collimators and CCD detectors with microlens for lights of different wavebands, the invention can increase the measurement accuracy up to 0.5 Mu rad based on the focal plane imaging method.
Description
Technical field
The present invention relates to fields of measurement, be specifically related to transmission modules coaxiality measuring method based on the focal plane imaging method.
Background technology
For adapting to the measurement of 800nm, 1550nm two wave band optics system performance parameters, test macro need change its emission laser beam wavelength.Adopt modular design, at the different transmitter module of different emission design, shared same emitting antenna is the effective means that realizes this function.When optical system is tested, can realize exporting different wave length by the mode of changing module.
Because it is high that test macro requires the exit direction of emission light beam, when therefore changing different transmitter module, requirement can accurately be measured the right alignment of intermodule outgoing, and as benchmark the Laser emission direction of intermodule is adjusted.The method that there is no is at present measured it, particularly for 800nm, 1550nm wave band, can not use same detector that outgoing beam is surveyed, and measurement brings very big difficulty to transmission modules coaxiality.
Summary of the invention
The present invention is in order to solve the light beam of different-waveband, can not use same detector that outgoing beam is surveyed, require the problem that accurately to measure the right alignment of intermodule outgoing during replacing, and proposed a kind of transmission modules coaxiality measuring method based on the focal plane imaging method.
Step of the present invention is as follows:
Step 1: to the output photoimaging of 800nm wave band of laser transmitter module 6: 800nm wave band of laser transmitter module 6 at first is installed on mechanical carrying platform 4, and send laser beam by telescopic system 5, laser beam focuses on through long burnt parallel light tube 1, on imaging screen 3, become the some picture, record is carried out in the 2 pairs of imaging point positions of 800nm wave band ccd detector that have microlens, and coordinate is (x
1, y
1);
Step 2: aperture is installed: close laser transmitting system, imaging screen before the microlens 3 is removed, replace with the shadow shield 7 with aperture, accurately survey the aperture center by the 800nm wave band ccd detector 2 that has microlens again, writing down its coordinate is (x
2, y
2);
Step 3: 1550nm wave band ccd detector 8 location: the 800nm wave band ccd detector 2 that will have microlens removes, be replaced by the 1550nm wave band ccd detector 8 that has same microlens, accurately survey the aperture center by the 1550nm wave band ccd detector 8 that has microlens, writing down its coordinate is (x
3, y
3);
Step 4: 9 of 1550nm wave band of laser transmitter module is exported photoimagings: 1550nm wave band of laser transmitter module 9 is installed on mechanical carrying platform 4, and send laser beam by telescopic system 5, laser beam focuses on through long burnt parallel light tube 1, on the imaging screen 3 of replacing shadow shield 7, become the some picture, carry out record by the 8 pairs of imaging point positions of 1550nm wave band ccd detector that have microlens, coordinate is (x
4, y
4);
Step 5: draw orientation angle deviation and luffing angle deviation: be respectively along azimuth axis orientation angle deviation α, luffing angle deviation β between 800nm wave band of laser transmitter module 6 and the 1550nm wave band of laser transmitter module 9:
α＝[(x
1-x
2)-(x
4-x
3)]/F，β＝[(y
1-y
2)-(y
4-y
3)]/F
Wherein F is the focal length of long burnt parallel light tube 1.
The present invention proposes to be applied in the high-precision optical test macro method of the accurate measurement of right alignment between the different wave length laser emitting module.Utilize the devices such as ccd detector of long burnt parallel light tube, different-waveband band microlens, measuring accuracy can be brought up to more than the 0.5 μ rad based on the focal plane imaging method.
Description of drawings
Fig. 1 is an apparatus structure synoptic diagram in the step 1; Fig. 2 is an apparatus structure synoptic diagram in the step 2; Fig. 3 is an apparatus structure synoptic diagram in the step 3; Fig. 4 is an apparatus structure synoptic diagram in the step 4.
Embodiment
Embodiment one: in conjunction with Fig. 1～4 explanation present embodiments, the present embodiment step is as follows:
Step 1: 800nm wave band of laser transmitter module 6 is exported photoimagings: 800nm wave band of laser transmitter module 6 at first is installed on mechanical carrying platform 4, and send laser beam by telescopic system 5, laser beam focuses on through long burnt parallel light tube 1, on imaging screen 3, become the some picture, record is carried out in the 2 pairs of imaging point positions of 800nm wave band ccd detector that have microlens, and coordinate is (x
1, y
1);
Step 2: aperture is installed: close laser transmitting system, imaging screen before the microlens 3 is removed, replacement has the shadow shield 7 of aperture, accurately surveys the aperture center by the 800nm wave band ccd detector 2 that has microlens again, and writing down its coordinate is (x
2, y
2);
Step 3: 1550nm wave band ccd detector 8 location: the 800nm wave band ccd detector 2 that will have microlens removes, replacing has the 1550nm wave band ccd detector 8 of same microlens, accurately survey the aperture center by the 1550nm wave band ccd detector 8 that has microlens, writing down its coordinate is (x
3, y
3);
Step 4: 1550nm wave band of laser transmitter module 9 is exported photoimagings: 1550nm wave band of laser transmitter module 9 is installed on mechanical carrying platform 4, and send laser beam by telescopic system 5, laser beam focuses on through long burnt parallel light tube 1, on the imaging screen 3 of replacing shadow shield 7, become the some picture, carry out record by the 8 pairs of imaging point positions of 1550nm wave band ccd detector that have microlens, coordinate is (x
4, y
4);
Step 5: draw orientation angle deviation and luffing angle deviation: be respectively along azimuth axis orientation angle deviation α, luffing angle deviation β between 800nm wave band of laser transmitter module 6 and the 1550nm wave band of laser transmitter module 9:
α＝[(x
1-x
2)-(x
4-x
3)]/F，β＝[(y
1-y
2)-(y
4-y
3)]/F
Wherein F is the focal length of long burnt parallel light tube 1.
Embodiment two: present embodiment and embodiment one difference are that the focal length of long burnt parallel light tube 1 is 12m, and bore is 400mm.Other composition is identical with embodiment one with step.
Embodiment three: present embodiment and embodiment one difference are that imaging screen 3 adopts translucent screen.Other composition is identical with embodiment one with step.
Embodiment four: present embodiment and embodiment one difference are that shadow shield 7 adopts pinhole filter, and hole diameter is 0.1mm.Other composition is identical with embodiment one with step.
Embodiment five: present embodiment and embodiment one difference are that the magnification of the microlens on 800nm wave band ccd detector 2 and the 1550nm wave band ccd detector 8 is 1 times.Other composition is identical with embodiment one with step.
Claims (5)
1. based on the transmission modules coaxiality measuring method of focal plane imaging method, it is characterized in that its step is as follows:
Step 1: to the output photoimaging of 800nm wave band of laser transmitter module (6): 800nm wave band of laser transmitter module (6) at first is installed on mechanical carrying platform (4), and send laser beam by telescopic system (5), laser beam focuses on through long burnt parallel light tube (1), on imaging screen (3), become a picture, the 800nm wave band ccd detector (2) that has microlens carries out record to the imaging point position, and coordinate is (x
1, y
1);
Step 2: aperture is installed: close laser transmitting system, imaging screen before the microlens (3) is removed, replace with the shadow shield (7) with aperture, accurately survey the aperture center by the 800nm wave band ccd detector (2) that has microlens again, writing down its coordinate is (x
2, y
2);
Step 3: 1550nm wave band ccd detector (8) location: the 800nm wave band ccd detector (2) that will have microlens removes, be replaced by the 1550nm wave band ccd detector (8) that has same microlens, accurately survey the aperture center by the 1550nm wave band ccd detector (8) that has microlens, writing down its coordinate is (x
3, y
3);
Step 4: to the output photoimaging of 1550nm wave band of laser transmitter module (9): 1550nm wave band of laser transmitter module (9) is installed on mechanical carrying platform (4), and send laser beam by telescopic system (5), laser beam focuses on through long burnt parallel light tube (1), on the imaging screen (3) of replacing shadow shield (7), become a picture, by the 1550nm wave band ccd detector (8) that has microlens record is carried out in the imaging point position, coordinate is (x
4, y
4);
Step 5: draw orientation angle deviation and luffing angle deviation: be respectively along azimuth axis orientation angle deviation α, luffing angle deviation β between 800nm wave band of laser transmitter module (6) and the 1550nm wave band of laser transmitter module (9):
α=[(x
1-x
2)-(x
4-x
3)]/F, β=[(y
1-y
2)-(y
4-y
3)]/F wherein F be the focal length of long burnt parallel light tube (1).
2. the transmission modules coaxiality measuring method based on the focal plane imaging method according to claim 1 is characterized in that the focal length of long burnt parallel light tube (1) is 12m, and bore is 400mm.
3. the transmission modules coaxiality measuring method based on the focal plane imaging method according to claim 1 is characterized in that imaging screen (3) adopts translucent screen.
4. the transmission modules coaxiality measuring method based on the focal plane imaging method according to claim 1 is characterized in that shadow shield (7) adopts pinhole filter, and hole diameter is 0.1mm.
5. the transmission modules coaxiality measuring method based on the focal plane imaging method according to claim 1 is characterized in that the magnification of the microlens on 800nm wave band ccd detector (2) and the 1550nm wave band ccd detector (8) is 1 times.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101448797A CN101210805B (en) | 2007-12-20 | 2007-12-20 | Transmission modules coaxiality measurement method based on focal plane imaging method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007101448797A CN101210805B (en) | 2007-12-20 | 2007-12-20 | Transmission modules coaxiality measurement method based on focal plane imaging method |
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| CN101210805A CN101210805A (en) | 2008-07-02 |
| CN101210805B true CN101210805B (en) | 2010-06-16 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175257B (en) * | 2010-12-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Laser alignment device for theodolite |
| CN102252635B (en) * | 2011-06-23 | 2012-08-29 | 中国科学院西安光学精密机械研究所 | Interference fringe verticality measuring method |
| CN103737427B (en) * | 2013-12-27 | 2016-04-13 | 华中科技大学 | A kind of lathe is done more physical exercises the checkout gear of the axle depth of parallelism and method |
| CN105444993B (en) * | 2014-08-28 | 2018-05-04 | 汉口学院 | A kind of optical system general performance test |
| CN107179049A (en) * | 2017-05-27 | 2017-09-19 | 中国科学院上海技术物理研究所 | The optical measuring device and method of a kind of high-precision shafting running accuracy |
| KR102568462B1 (en) * | 2017-06-26 | 2023-08-21 | 트리나미엑스 게엠베하 | A detector for determining the position of at least one object |
| CN107796324B (en) * | 2017-11-27 | 2023-08-11 | 罗琪 | Displacement measuring device and method based on light pipe |
| CN109520446A (en) * | 2018-12-14 | 2019-03-26 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of measurement method of revolution at a high speed shafting dynamic inclination error |
| CN110926380B (en) * | 2019-12-30 | 2021-07-09 | 苏州迅镭激光科技有限公司 | Method for measuring coaxiality of optical element of laser cutting head |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2034264U (en) * | 1988-10-20 | 1989-03-15 | 北京红旗机械厂 | Coaxiality measuring apparatus |
| CN1790092A (en) * | 2005-12-21 | 2006-06-21 | 哈尔滨工业大学 | High precision light beam coaxiality adjusting method |
-
2007
- 2007-12-20 CN CN2007101448797A patent/CN101210805B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2034264U (en) * | 1988-10-20 | 1989-03-15 | 北京红旗机械厂 | Coaxiality measuring apparatus |
| CN1790092A (en) * | 2005-12-21 | 2006-06-21 | 哈尔滨工业大学 | High precision light beam coaxiality adjusting method |
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