CN102252635B - Interference fringe verticality measuring method - Google Patents
Interference fringe verticality measuring method Download PDFInfo
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- CN102252635B CN102252635B CN201110170911A CN201110170911A CN102252635B CN 102252635 B CN102252635 B CN 102252635B CN 201110170911 A CN201110170911 A CN 201110170911A CN 201110170911 A CN201110170911 A CN 201110170911A CN 102252635 B CN102252635 B CN 102252635B
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- interference fringe
- telescope
- fringe
- verticality
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Abstract
The invention provides an interference fringe verticality measuring method. When the prior art is used to measure the interference fringe verticality, an interpretation precision is not high. The invention can solve the above technology problem. The method of the invention comprises the following steps: using cross-graduation of a telescope to align a center of an interference light fringe (or a dark fringe); scanning an interference fringe scope alpha in a pitching direction from bottom to top (or from top to bottom); then using the cross-graduation of the telescope again to align the center of the same interference light fringe (or the dark fringe); reading a horizontal declination angle beta from a two dimensional rotary table; calculating a verticality value gamma according to a scanning angle and a difference value. By using the method of the invention, operation is simple; a nonperpendicularity influence of a CCD target surface in a traditional technology can be overcome; measuring precision of the interferometer interference fringe verticality can be raised; a field of view of detecting the interference fringe can be enlarged.
Description
Technical field
The invention belongs to the interference imaging spectral field of measurement, be specifically related to a kind of interference fringe squareness measurement method, applicable to inteference imaging spectrometer.
Background technology
Consistent with the light spectrum image-forming direction for the aerial image of inteference imaging spectrometer, the necessary verticality that guarantees interference fringe is measured the interference fringe verticality can be controlled interferometer in the process of dress school dress school precision.
Conventional art adopts static interference fringe image, the verticality of coming striped on the interpretation image of gathering of CCD.But influenced with acquisition field of view is little by CCD self verticality influences (the static collection of CCD is the part of interference field, to little possibly the surveying to come out of interference fringe inclination), and interference fringe verticality interpretation precision is not high.
Summary of the invention
The present invention provides a kind of interference fringe squareness measurement method, measures the not high technical matters of interference fringe verticality interpretation precision to solve prior art.
Technical scheme of the present invention is following:
A kind of interference fringe squareness measurement method may further comprise the steps:
(1) but adjust level to the horizontal direction rotation and the two-dimentional turntable of pitch orientation rotation;
(2) telescope is installed on the two-dimentional turntable, telescope is accommodated to the infinite distance;
(3) center of telescopical minute mark signature aligning interference fringe upper end makes telescope scan this interference fringe from top to bottom with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope;
The center of interference fringe lower end aimed in perhaps telescopical minute mark signature, makes telescope scan this interference fringe from bottom to top with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope;
(4) keep telescopical invariant position on pitch orientation this moment, telescope horizontally rotates, and makes telescopical minute mark signature be adjusted to the center of aiming at this interference fringe, reading horizontal drift angle β;
(5) this interference fringe verticality is γ=β/sin α.
Above-mentioned steps (3), (4) are to read angle of pitch α, level angle β according to the scale on the two-dimentional turntable.
The operation of aiming at the center of interference fringe in above-mentioned steps (3), (4) is to adopt the CCD that is arranged at the telescope rear to replace human eye observation to aim at.
Interference fringe in order to aim at both can be a bright fringes, also can be dark fringe; Measure a certain bright fringes or a certain dark fringe all can be accomplished the object of the invention.Certainly, also can survey several stripeds more, average.
The present invention has the following advantages:
1, overcomes the non-perpendicularity influence of conventional art CCD target surface, improved the measuring accuracy of interferometer interference fringe verticality, enlarged the visual field of detecting interference fringe.
2, the present invention is easy and simple to handle, can be widely used in the measurement of other interference fringe verticality such as shearing interferometer interference fringe.
Description of drawings
Fig. 1 is telescope of the present invention and two-dimentional turntable synoptic diagram.
Fig. 2 is the relation of α of the present invention, β, γ.
Fig. 3 is the synoptic diagram of telescopical minute mark signature scanning interferometer of the present invention striped.
The drawing reference numeral explanation:
The 1-telescope, 2-two dimension turntable.
Embodiment
The present invention interferes the big as far as possible scope of bar in the scanning interferometer field.This interference fringe squareness measurement method may further comprise the steps:
(1) but adjust level to the horizontal direction rotation and the two-dimentional turntable of pitch orientation rotation;
(2) telescope is installed on the two-dimentional turntable, telescope is accommodated to the infinite distance;
(3) center of telescopical minute mark signature aligning interference fringe upper end makes telescope scan this interference fringe from top to bottom with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope according to the scale on the two-dimentional turntable;
The center of interference fringe lower end aimed in perhaps telescopical minute mark signature, makes telescope scan this interference fringe from bottom to top with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope according to the scale on the two-dimentional turntable;
(4) keep telescopical invariant position on pitch orientation this moment, telescope horizontally rotates, and makes telescopical minute mark signature be adjusted to the center of aiming at this interference fringe, according to the scale reading horizontal drift angle β on the two-dimentional turntable;
(5) this interference fringe verticality is γ=β/sin α.
The operation of aiming at the center of interference fringe in above-mentioned steps (3), (4) is to adopt the CCD that is arranged at the telescope rear to replace human eye observation to aim at.
Interference fringe in order to aim at both can be a bright fringes, also can be dark fringe; Measure a certain bright fringes or a certain dark fringe all can be accomplished the object of the invention.Certainly, also can survey several stripeds more, average.
Used two-dimentional turntable precision is 0.5 ", 4 ° of scopes of step (3) pitching scanning are measured interference fringe verticality precision and can be arrived 7.17 ".
Claims (3)
1. interference fringe squareness measurement method may further comprise the steps:
(1) but adjust level to the horizontal direction rotation and the two-dimentional turntable of pitch orientation rotation;
(2) telescope is installed on the two-dimentional turntable, telescope is accommodated to the infinite distance;
(3) center of telescopical minute mark signature aligning interference fringe upper end makes telescope scan this interference fringe from top to bottom with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope;
The center of interference fringe lower end aimed in perhaps telescopical minute mark signature, makes telescope scan this interference fringe from bottom to top with pitch orientation, reads the angle of pitch α of this interference fringe scanning scope;
(4) keep telescopical invariant position on pitch orientation this moment, telescope horizontally rotates, and makes telescopical minute mark signature be adjusted to the center of aiming at this interference fringe, reading horizontal drift angle β;
(5) this interference fringe verticality is γ=β/sin α.
2. interference fringe squareness measurement method according to claim 1 is characterized in that: step (3), (4) are to read angle of pitch α, level angle β according to the scale on the two-dimentional turntable.
3. interference fringe squareness measurement method according to claim 2 is characterized in that: the operation of aiming at the center of interference fringe in step (3), (4) is to adopt the CCD that is arranged at the telescope rear to replace human eye observation to aim at.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110170911A CN102252635B (en) | 2011-06-23 | 2011-06-23 | Interference fringe verticality measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110170911A CN102252635B (en) | 2011-06-23 | 2011-06-23 | Interference fringe verticality measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102252635A CN102252635A (en) | 2011-11-23 |
| CN102252635B true CN102252635B (en) | 2012-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110170911A Expired - Fee Related CN102252635B (en) | 2011-06-23 | 2011-06-23 | Interference fringe verticality measuring method |
Country Status (1)
| Country | Link |
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| CN (1) | CN102252635B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101210805A (en) * | 2007-12-20 | 2008-07-02 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
| CN101298981A (en) * | 2008-05-15 | 2008-11-05 | 天津理工大学 | Method for measuring flat inclination grating diffraction fringe |
| CN101929852A (en) * | 2010-08-11 | 2010-12-29 | 哈尔滨锅炉厂有限责任公司 | Method for detecting coaxiality and verticality of large container by optical instrument |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6065870A (en) * | 1983-09-19 | 1985-04-15 | 大成建設株式会社 | Pillar verticality detecting apparatus |
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2011
- 2011-06-23 CN CN201110170911A patent/CN102252635B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101210805A (en) * | 2007-12-20 | 2008-07-02 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
| CN101298981A (en) * | 2008-05-15 | 2008-11-05 | 天津理工大学 | Method for measuring flat inclination grating diffraction fringe |
| CN101929852A (en) * | 2010-08-11 | 2010-12-29 | 哈尔滨锅炉厂有限责任公司 | Method for detecting coaxiality and verticality of large container by optical instrument |
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| CN102252635A (en) | 2011-11-23 |
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