CN1790092A - High precision light beam coaxiality adjusting method - Google Patents
High precision light beam coaxiality adjusting method Download PDFInfo
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- CN1790092A CN1790092A CN 200510127369 CN200510127369A CN1790092A CN 1790092 A CN1790092 A CN 1790092A CN 200510127369 CN200510127369 CN 200510127369 CN 200510127369 A CN200510127369 A CN 200510127369A CN 1790092 A CN1790092 A CN 1790092A
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Abstract
The invention discloses a coaxial adjustment method of high-precision light beam with launching optical circuit and receiving optical circuit, which comprises the following steps: launching the laser beam through the launching optical circuit 1 of detected optical system; focusing the light into image point at the focal point of long focal parallel optical pipe through beam splitter 2 and optical antenna 3; detecting the flare position of image point through CCD detector; receiving, recording and calculating the image point and location data through image gathering card and computer; closing 1; adjusting the eight holes' center of dark slide 8 to the flare position; setting the illuminating light source 9 at 4 focal point; launching the light beam to the detected optical system and receiving optical circuit 10 through 9 hole, 4 and 2.
Description
Technical field
The present invention relates to the emission light path of optical system of the transmit-receive sharing same antenna and the method for adjustment of receiving light path right alignment.
Background technology
When the optical system of the development transmit-receive sharing same antenna, one of important parameter that the right alignment of emission light path and receiving light path is strict with.Existing coaxiality adjusting method, being by launching light path through the antenna output light field, utilizing angle prism that it is entered receiving light path along former road reflected back receiving antenna, is reference axis with this incident light, receiving light path is adjusted, to guarantee the alignment of emission, receiving light path.Because the restriction of angle prism machining precision, light field is not strict returns by former road in emission, makes the precision of emission, receiving light path right alignment only can reach tens of μ rad, can not satisfy the high-precision applications demand.Process owing to the large aperture angle prism is difficult on the other hand, so the method is difficult to be applied in the wide aperture antenna optical system.
Summary of the invention
The purpose of this invention is to provide a kind of high precision light beam coaxiality adjusting method, with overcome existing light beam coaxiality adjusting method precision low, be difficult to satisfy the demand of high-precision applications and the defective that can not be used for the wide aperture antenna optical system.Method of the present invention realizes as follows: one, at first by emission light path 1 emission of lasering beam of tested optical system, the long burnt parallel light tube 4 of laser beam incident behind the expansion bundle of the reflection of spectroscope 2 and optical antenna 3, be focused into some picture at the focus place of long burnt parallel light tube 4, utilize translucent screen 5 picture to be received at the place, focal plane of long burnt parallel light tube 4, facula position with 6 pairs of points of the ccd detector picture that has microlens 6-1 is measured, and is received, writes down and calculated by the image and the position data of image pick- up card 11 and 7 pairs of points of computing machine picture; Two, close emission light path 1, change the translucent screen before the microlens 6-1 5 into have aperture 8-1 shadow shield 8, under the monitoring of ccd detector 6, the point of step 1 is adjusted to as facula position in the center of aperture 8-1; Three, remove ccd detector 6, at the place, focal position of long burnt parallel light tube 4 lighting source 9 is installed, lighting source 9 is by aperture 8-1, long burnt parallel light tube 4, optical antenna 3 and the spectroscope 2 receiving light path 10 emission light beams to tested optical system; Four, the light beam of crossing spectroscope 2 with transmission in the step 3 is that reference axis is adjusted receiving light path 10, thereby it is coaxial to make receiving light path 10 and transmission cross the light beam of spectroscope 2.
The present invention since the position of aperture with to launch light path emission laser beam imaging point position identical, so lighting source shines the incident light that goes in the receiving light path and the emission light shaft coaxle of tested optical system.The receiving light path that utilizes this incident light to adjust tested optical system for benchmark can guarantee the alignment of its emission and receiving system.The present invention utilizes long-focus parallel light tube, high precision ccd detector, Computerized image processing system, and the reference axis and the right alignment of emission light path are brought up to the order of magnitude of 0.1 μ rad, satisfies high precision and adjusts requirement.It is useless among the present invention to angle prism,, can not be subjected to the more unmanageable restriction of large aperture angle prism, the method can be widely used in have in the light transmitting and receiving system of large aperture optical antenna.
Description of drawings
Fig. 1 is the synoptic diagram of step 1 of the present invention, and Fig. 2 is the synoptic diagram of step 2 of the present invention, and Fig. 3 is step 3 of the present invention and four a synoptic diagram.
Embodiment
Embodiment one: specify present embodiment below in conjunction with Fig. 1 to Fig. 3.Present embodiment realizes by following steps: one, at first by emission light path 1 emission of lasering beam of tested optical system, laser beam via the expansion bundle of the reflection of spectroscope 2 and optical antenna 3 after the long burnt parallel light tube 4 of incident, be focused into some picture at the focus place of long burnt parallel light tube 4, utilize translucent screen 5 (common frosted glass gets final product) picture to be received at the place, focal plane of long burnt parallel light tube 4, facula position with 6 pairs of points of the ccd detector picture that has microlens 6-1 is measured, and is received by the image and the position data of image pick- up card 11 and 7 pairs of points of computing machine picture, record and calculating; Two, close emission light path 1, change the translucent screen before the microlens 6-1 5 into have aperture 8-1 shadow shield 8, under the monitoring of ccd detector 6, the point of step 1 is adjusted to as facula position in the center of aperture 8-1; Three, remove ccd detector 6, at the place, focal position of long burnt parallel light tube 4 lighting source 9 is installed, lighting source 9 is by aperture 8-1, long burnt parallel light tube 4, optical antenna 3 and the spectroscope 2 receiving light path 10 emission light beams to tested optical system; Four, the light beam of crossing spectroscope 2 with transmission in the step 3 is that reference axis is adjusted receiving light path 10, thereby it is coaxial to make receiving light path 10 and transmission cross the light beam of spectroscope 2.
Grow the burnt parallel light tube of length that burnt parallel light tube 4 is selected focal length 12m, bore 400mm for use and had supporting lighting source in the present embodiment.The MTV-1801 planar array type ccd video camera that ccd detector 6 selects for use Taiwan Min Tong company to produce, its major parameter is as follows: spectral response range 400nm~1100nm; Several 795 (H) * 596 (V) of pixel; Pixel dimension 10 μ rad; Line frequency 15625Hz; Field frequency 50Hz; Resolution 600TVL; Detection sensitivity 0.02lx; Signal to noise ratio (S/N ratio) is greater than 46dB; Working temperature-10 ℃~50 ℃; Power supply DC12V (2W).The beam deflection scope of correspondence ± 1mrad, effective pixel number of getting CCD is 500 (H) * 500 (V), utilizes this CCD hot spot detecting for spaces precision can reach 1 μ m.Microlens 6-1 selects the COMPUTAR MLM-3XMP type microlens of Japanese CBC company for use, and its major parameter is as follows: enlargement ratio 0.3~1.0, operating distance 90mm, focal length 90mm, D/f=1: 4.5.The video capture card that image pick-up card 11 adopts based on 1394 agreements is imported computing machine 7 with image information.Aperture 8-1 diameter on the shadow shield 8 is 0.1mm, adopt pinhole filter as aperture, aperture is located as for the parallel light tube focal plane, monitoring aperture center under the situation of ccd detector invariant position, adjust simultaneously, its center is overlapped as facula position with system under test (SUT) emission light path point.
Embodiment two: the difference of present embodiment and embodiment one is: in step 1 computing machine 7 passing threshold determining methods read incide ccd detector 6 point as the hot spot gray-scale value, and calculate the spot center coordinate by formula (1), (2).
Wherein, n is the number of pixel in the sample window, g
iBe the gray-scale value of pixel, B is a sampling threshold, and u (x) is a unit-step function, (x
i, y
i) be the coordinate of pixel.So be provided with, facula position coordinate that can the point of quantification picture improves the aperture 8-1 and the registration accuracy of point as facula position of shadow shield 8.Other step is identical with embodiment one.
Claims (2)
1, high precision light beam coaxiality adjusting method, it is characterized in that realizing as follows: one, at first by emission light path (1) emission of lasering beam of tested optical system, the long burnt parallel light tube (4) of laser beam incident behind the expansion bundle of the reflection of spectroscope (2) and optical antenna (3), be focused into some picture at the focus place of long burnt parallel light tube (4), utilize translucent screen (5) picture to be received at the place, focal plane of long burnt parallel light tube (4), with the ccd detector that has microlens (6-1) (6) facula position of a picture is measured, received by image pick-up card (11) and computing machine (7) image and position data to a picture, record and calculating; Two, close emission light path (1), the translucent screen (5) that microlens (6-1) is preceding changes the shadow shield (8) that has aperture (8-1) into, under the monitoring of ccd detector (6), the point of step 1 is adjusted to as facula position in the center of aperture (8-1); Three, remove ccd detector (6), lighting source (9) is installed at place, focal position at long burnt parallel light tube (4), and lighting source (9) is by aperture (8-1), long burnt parallel light tube (4), optical antenna (3) and spectroscope (2) receiving light path (10) the emission light beam to tested optical system; Four, the light beam of crossing spectroscope (2) with transmission in the step 3 is that reference axis is adjusted receiving light path (10), thereby it is coaxial to make receiving light path (10) and transmission cross the light beam of spectroscope (2).
2, high precision light beam coaxiality adjusting method according to claim 1, it is characterized in that computing machine in step 1 (7) passing threshold determining method read incide ccd detector (6) point as the hot spot gray-scale value, and calculate the spot center coordinate by formula (1), (2):
Wherein, n is the number of pixel in the sample window, g
iBe the gray-scale value of pixel, B is a sampling threshold, and u (x) is a unit-step function, (x
i, y
i) be the coordinate of pixel.
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CNB200510127369XA CN100370306C (en) | 2005-12-21 | 2005-12-21 | High precision light beam coaxiality adjusting method |
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Cited By (13)
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CN101210806B (en) * | 2007-12-20 | 2010-04-21 | 哈尔滨工业大学 | measuring method of angle deviation along azimuth axis direction and pitching angle deviation of laser emission axis and mechanical base level normal based on secondary light source |
CN101210805B (en) * | 2007-12-20 | 2010-06-16 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
CN101852924A (en) * | 2010-05-28 | 2010-10-06 | 西安理工大学 | Automatic light beam capturing device and light beam capturing method |
CN101086530B (en) * | 2007-07-04 | 2011-03-30 | 中国航空工业第一集团公司第六一三研究所 | 1.064um laser range finder transmitting antenna debugging method and apparatus |
CN101551451B (en) * | 2008-04-03 | 2011-09-21 | 南京理工大学 | Adjustment and installation device for optical antenna of semiconductor laser range instrument |
CN101592787B (en) * | 2008-05-28 | 2011-11-23 | 北京中视中科光电技术有限公司 | Device for adjusting light path and method thereof |
CN103217766A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Method adopting beam expanding lens to adjust laser beams to be coaxial |
CN104535296A (en) * | 2014-12-03 | 2015-04-22 | 中国科学院苏州生物医学工程技术研究所 | Coaxiality detection and adjusting method of multiple beams |
CN106950674A (en) * | 2017-05-04 | 2017-07-14 | 中国工程物理研究院激光聚变研究中心 | A kind of device and application method that low-angle is tilted for transmission type optical system |
CN107421473A (en) * | 2017-05-26 | 2017-12-01 | 南京理工大学 | The two beam laser coaxial degree detection methods based on image procossing |
CN107727008A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of active electro-optical system that measures receives and dispatches coaxial device and method |
CN108919480A (en) * | 2018-06-25 | 2018-11-30 | 中国科学院长春光学精密机械与物理研究所 | A kind of automatic alignment apparatus for the same band combination of multi-path laser beam |
CN110058423A (en) * | 2019-04-15 | 2019-07-26 | 中国科学院上海光学精密机械研究所 | High power laser light array parallel output adjustment devices and methods therefor |
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JPH0446691A (en) * | 1990-06-14 | 1992-02-17 | Mitsubishi Heavy Ind Ltd | Method for measuring divergent angle of yag laser beam |
CN1200247C (en) * | 2001-11-02 | 2005-05-04 | 清华大学 | Transverse double-frequency zeeman laser linearity/coaxality measuring mechanism |
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2005
- 2005-12-21 CN CNB200510127369XA patent/CN100370306C/en not_active Expired - Fee Related
Cited By (16)
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CN101086530B (en) * | 2007-07-04 | 2011-03-30 | 中国航空工业第一集团公司第六一三研究所 | 1.064um laser range finder transmitting antenna debugging method and apparatus |
CN101210806B (en) * | 2007-12-20 | 2010-04-21 | 哈尔滨工业大学 | measuring method of angle deviation along azimuth axis direction and pitching angle deviation of laser emission axis and mechanical base level normal based on secondary light source |
CN101210805B (en) * | 2007-12-20 | 2010-06-16 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
CN101551451B (en) * | 2008-04-03 | 2011-09-21 | 南京理工大学 | Adjustment and installation device for optical antenna of semiconductor laser range instrument |
CN101592787B (en) * | 2008-05-28 | 2011-11-23 | 北京中视中科光电技术有限公司 | Device for adjusting light path and method thereof |
CN101852924A (en) * | 2010-05-28 | 2010-10-06 | 西安理工大学 | Automatic light beam capturing device and light beam capturing method |
CN103217766A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Method adopting beam expanding lens to adjust laser beams to be coaxial |
CN104535296B (en) * | 2014-12-03 | 2017-04-05 | 中国科学院苏州生物医学工程技术研究所 | A kind of multiple beam is with shaft detection and method of adjustment |
CN104535296A (en) * | 2014-12-03 | 2015-04-22 | 中国科学院苏州生物医学工程技术研究所 | Coaxiality detection and adjusting method of multiple beams |
CN106950674A (en) * | 2017-05-04 | 2017-07-14 | 中国工程物理研究院激光聚变研究中心 | A kind of device and application method that low-angle is tilted for transmission type optical system |
CN106950674B (en) * | 2017-05-04 | 2022-11-29 | 中国工程物理研究院激光聚变研究中心 | Device for small-angle inclination of transmission type optical system and using method |
CN107421473A (en) * | 2017-05-26 | 2017-12-01 | 南京理工大学 | The two beam laser coaxial degree detection methods based on image procossing |
CN107727008A (en) * | 2017-10-13 | 2018-02-23 | 中国科学院上海技术物理研究所 | A kind of active electro-optical system that measures receives and dispatches coaxial device and method |
CN108919480A (en) * | 2018-06-25 | 2018-11-30 | 中国科学院长春光学精密机械与物理研究所 | A kind of automatic alignment apparatus for the same band combination of multi-path laser beam |
CN108919480B (en) * | 2018-06-25 | 2020-07-21 | 中国科学院长春光学精密机械与物理研究所 | Automatic alignment device for multi-channel laser beam combination in same wave band |
CN110058423A (en) * | 2019-04-15 | 2019-07-26 | 中国科学院上海光学精密机械研究所 | High power laser light array parallel output adjustment devices and methods therefor |
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