CN101176006B - Tft基板检查装置 - Google Patents
Tft基板检查装置 Download PDFInfo
- Publication number
- CN101176006B CN101176006B CN200680016715XA CN200680016715A CN101176006B CN 101176006 B CN101176006 B CN 101176006B CN 200680016715X A CN200680016715X A CN 200680016715XA CN 200680016715 A CN200680016715 A CN 200680016715A CN 101176006 B CN101176006 B CN 101176006B
- Authority
- CN
- China
- Prior art keywords
- tft substrate
- tft
- substrate
- inspection chamber
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2862—Chambers or ovens; Tanks
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Toxicology (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Thin Film Transistor (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Liquid Crystal (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005174075 | 2005-06-14 | ||
JP174075/2005 | 2005-06-14 | ||
PCT/JP2006/311784 WO2006134888A1 (ja) | 2005-06-14 | 2006-06-13 | Tft基板検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101176006A CN101176006A (zh) | 2008-05-07 |
CN101176006B true CN101176006B (zh) | 2010-09-01 |
Family
ID=37532250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200680016715XA Expired - Fee Related CN101176006B (zh) | 2005-06-14 | 2006-06-13 | Tft基板检查装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4670870B2 (ko) |
KR (1) | KR20070118137A (ko) |
CN (1) | CN101176006B (ko) |
TW (1) | TWI313142B (ko) |
WO (1) | WO2006134888A1 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4863163B2 (ja) * | 2006-07-10 | 2012-01-25 | 株式会社島津製作所 | Tft基板検査装置 |
KR100920158B1 (ko) * | 2008-06-18 | 2009-10-06 | (주)에이원메카 | 엘씨디 셀 라인의 일직선 셀 에이징 장치 및 셀 에이징방법 |
JP5232671B2 (ja) * | 2009-01-22 | 2013-07-10 | 株式会社アルバック | 処理装置 |
JP5590043B2 (ja) * | 2009-12-10 | 2014-09-17 | 株式会社島津製作所 | Tft基板検査装置およびtft基板検査方法 |
CN105632041A (zh) * | 2014-11-26 | 2016-06-01 | 上海宝钢钢材贸易有限公司 | 自助提单打印系统及方法 |
CN104795339B (zh) * | 2015-03-09 | 2017-10-20 | 昆山龙腾光电有限公司 | 薄膜晶体管阵列基板的检测装置及检测方法 |
KR20220009667A (ko) | 2020-07-16 | 2022-01-25 | 삼성전자주식회사 | 로봇이 구비된 반도체 모듈 검사장치 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6249268A (ja) * | 1985-08-28 | 1987-03-03 | Toshiba Seiki Kk | 電子部品の加熱、冷却方法 |
JPS6285810A (ja) * | 1985-10-11 | 1987-04-20 | Nec Corp | 電子線測長機 |
JPH08105938A (ja) * | 1994-10-06 | 1996-04-23 | Advantest Corp | Icテストハンドラ |
JP3813334B2 (ja) * | 1997-10-24 | 2006-08-23 | 株式会社半導体エネルギー研究所 | リア型プロジェクションtv用の液晶パネルの作製方法 |
JP2001013519A (ja) * | 1999-06-28 | 2001-01-19 | Matsushita Electric Ind Co Ltd | 液晶表示装置用アクティブマトリクスアレイ基板および検査方法および検査装置および液晶表示装置および映像表示装置 |
-
2006
- 2006-05-17 TW TW095117423A patent/TWI313142B/zh not_active IP Right Cessation
- 2006-06-13 WO PCT/JP2006/311784 patent/WO2006134888A1/ja active Application Filing
- 2006-06-13 JP JP2007521285A patent/JP4670870B2/ja not_active Expired - Fee Related
- 2006-06-13 KR KR1020077024560A patent/KR20070118137A/ko not_active Application Discontinuation
- 2006-06-13 CN CN200680016715XA patent/CN101176006B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200644705A (en) | 2006-12-16 |
TWI313142B (en) | 2009-08-01 |
CN101176006A (zh) | 2008-05-07 |
JPWO2006134888A1 (ja) | 2009-01-08 |
KR20070118137A (ko) | 2007-12-13 |
WO2006134888A1 (ja) | 2006-12-21 |
JP4670870B2 (ja) | 2011-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100901 Termination date: 20110613 |