CN101173840A - Heat treatment apparatus - Google Patents
Heat treatment apparatus Download PDFInfo
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- CN101173840A CN101173840A CNA2007101458676A CN200710145867A CN101173840A CN 101173840 A CN101173840 A CN 101173840A CN A2007101458676 A CNA2007101458676 A CN A2007101458676A CN 200710145867 A CN200710145867 A CN 200710145867A CN 101173840 A CN101173840 A CN 101173840A
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- Prior art keywords
- heat treatment
- air
- treatment section
- heat
- processed
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Furnace Details (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The invention provides a heat treatment device which includes: a heat treatment component, in which the air is circulated and heated at the same time, with an element for treatment put into a heat treatment part, so as to conduct heat treatment to the element for treatment; an air interchanger, which conduct air interchange to the inside of the heat treatment part through heating and transferring the outer air into the and exhausting the air out of the heat treatment part; and a ventilation volume adjusting device, which makes the ventilation volume of the air interchanger smaller at the time when no heat treatment is conducted by the heat treatment component to the element for treatment than when a heat treatment is conducted by the heat treatment component. The heat treatment device can reduce the whole electricity consumption.
Description
Technical field
The present invention relates to annealing device that processed is heat-treated.
Background technology
In the past, known annealing device was in processed heat treatment section is housed, and circulated by making air, heated described processed, and this processed is heat-treated.
Such annealing device is usually used in the photoresist in FPD (flat-panel monitor) manufacturing process for example and the prebake operation and the back baking operation of organic film.In these operations, in to processed the process of heat-treating that constitutes by glass substrate etc., the volatile ingredient that is contained in the materials such as photoresist can gasify, produce a large amount of sublimates, this sublimate is again after the crystallization, can produce to disperse or attached to the problem around the annealing device.
Countermeasure as this problem, for example, open the spy and to have put down in writing following scheme in the flat 10-141868 communique: suck extraneous air, after heating with heater, in in sending into described heat treatment section, by the air in the described heat treatment section is discharged, taken a breath in the inside of described heat treatment section.By such ventilation, the crystallization again and the heat treated device that just can suppress sublimate adhere on every side.
, in described scavenging period, the extraneous gas heating for being sucked needs very many electric power, will the power consumption of whole annealing device be increased.
Summary of the invention
The purpose of this invention is to provide a kind of annealing device that addresses the above problem.
Another object of the present invention provides a kind of annealing device that can make the power consumption reduction of whole annealing device.
Specifically, annealing device of the present invention comprises: heat processing unit, under processed state that is contained in the heat treatment section,, described processed is heat-treated by making circulation limit, the air limit heating in the described heat treatment section; And air interchanger, after being heated, extraneous gas is sent in the described heat treatment section, and the air in the described heat treatment section is discharged, taken a breath in described heat treatment section inside, it is characterized in that, also comprise the ventilation volume adjusting device, the ventilation volume that makes described air interchanger reduces when than described heat processing unit processed being heat-treated when described heat processing unit is not heat-treated processed.
In addition, annealing device of the present invention comprises: heat treatment section, can pack processed into; Heater heats air, and the interior temperature of described heat treatment section is reached can be to described processed temperature of heat-treating; And air interchanger, taken a breath in described heat treatment section inside, it is characterized in that also comprise the ventilation volume adjusting device, the ventilation volume that makes described air interchanger is in the time beyond described processed is being heat-treated, reduce when heat-treating.
In addition, annealing device of the present invention comprises: heat treatment section, can pack processed into; Heater heats air, and the interior temperature of described heat treatment section is reached can be to described processed temperature of heat-treating; And air interchanger, taken a breath in described heat treatment section inside, it is characterized in that, also comprise the ventilation volume adjusting device, after described processed heat treatment finishes, the ventilation volume of described air interchanger is reduced.
Description of drawings
Fig. 1 is the brief configuration figure of the annealing device of first embodiment of the invention.
Fig. 2 is the block diagram of the ventilation volume adjusting device of first embodiment.
Fig. 3 is the sequential chart of the annealing device of first embodiment.
Fig. 4 is the brief configuration figure of the annealing device of second embodiment of the invention.
Fig. 5 is the block diagram of the ventilation volume adjusting device of second embodiment.
Fig. 6 is the sequential chart of the annealing device of second embodiment.
Fig. 7 is the sequential chart of variation.
Fig. 8 is the sequential chart of the annealing device of the 3rd embodiment.
The specific embodiment
Below, detailed description is used to implement preferred implementation of the present invention with reference to accompanying drawing.
Fig. 1 is the structure chart of the annealing device 1A of first embodiment of the invention.This annealing device 1A is used for the manufacturing process of FPD, and the what is called that is arranged in the clean room purifies baking oven.
Described annealing device 1A has apparatus main body 2, and apparatus main body 2 has the adiabatic chamber 20 that is made of the cingens space of adiabatic wall.The inside of adiabatic chamber 20 is divided into left and right sides two parts with next door 24.The part in 24 left sides, next door is a heat treatment section 21, and 24 right sides, next door are divided into air-conditioning part 23.Form opening on the next door 24, filter 31 is set in this opening.Can allow gas communication by this opening.In addition, though not expression among the figure also is provided with the communication passage that is communicated with heat treatment section 21 inside and air-conditioning part 23 inside in apparatus main body 2.
Be provided with work mounting s part 22 in described heat treatment section 21 inside, it can be supported to up and down side by side state to a plurality of processed W (being designated hereinafter simply as workpiece).And workpiece W packs into the state on this work mounting s part 22 of being bearing in the heat treatment section 21.Workpiece W for example is a glass substrate etc.
In described air-conditioning part 23, be provided with heater 32 and pressure fan 33.Heater 32 as heater produces heat (Joule heat) owing to switching on, to the air heat in the air-conditioning part 23.Pressure fan 33 is sent in the heat treatment section 21 after making the air in the air-conditioning part 23 pass through filter 31.Then, when air being sent in the heat treatment section 21 with pressure fan 33, the air in the heat treatment section 21 just returns in the air-conditioning part 23 by the communication passage of not representing among the figure.Turn back to the air in the air-conditioning part 23, again with heater 32 heating.Like this, the air in the heat treatment section 21 and air-conditioning part 23 between heat when circulating, so just carried out heat treatment to being contained in heat treatment section 21 interior workpiece W.That is, heater 32 and pressure fan 33 heat by making the limit of circulating, air limits in the heat treatment section 21, thereby have constituted the heat processing unit 3 that workpiece W is heat-treated.In addition, heater 32 can be the air heat of circulation between heat treatment section 21 and air-conditioning part 23 to the temperature that can heat-treat workpiece W.
In addition, heater 32 is not only just to work when workpiece W is heat-treated, and works in non-heat treatment time yet.That is,, also to allow heater 32 carry out work in advance, make heat treatment section 21 interior temperature can remain on the temperature of regulation thus even when not being contained in workpiece W in the heat treatment section 21.
Aspirating air pipe 41 is connected on the described air-conditioning part 23, and discharge duct 42 is connected on the described heat treatment section 21.Be provided with fan (being also referred to as air blast) 43 in the stage casing of discharge duct 42.Then, when fan 43 work, the air in the heat treatment section 21 is just discharged by discharge duct 42, and extraneous gas sucks from aspirating air pipe 41 thereupon simultaneously, and delivers in the air-conditioning part 23.Deliver to the extraneous gas in the air-conditioning part 23, after heating with heater 32, deliver in the heat treatment section 21 by filter 31.Like this, just taken a breath in heat treatment section 21 inside.That is, aspirating air pipe 41, discharge duct 42, fan 43 and heater 32 when delivering to heat treatment section 21 in after the extraneous gas heating, are discharged the air in the heat treatment section 21, thus the air interchanger 4 that formation is taken a breath to heat treatment section 21 inside.And heater 32 is this air interchanger 4 and described heat processing unit 3 common uses.In addition, air interchanger also can be made of aspirating air pipe 41, discharge duct 42 and fan 43, and heater 32 uses as just a key element of heat processing unit 3.
Described aspirating air pipe 41 has an import pipe 41c who imports extraneous gas, and from this import pipe 41c two flow ipe 41a, 41b along separate routes.Extraneous gas flow in the air-conditioning part 23 by two flow ipe 41a, 41b.In addition, also import pipe 41c can be set, and directly import extraneous gas by flow ipe 41a, 41b.
Among (downside among Fig. 1) flow ipe 41a in described flow ipe 41a, 41b, be provided with and adjust the manual adjustments air door 44A that air quantity is used, in another root (upside among Fig. 1) flow ipe 41b, be provided with and adjust the automatic damper 51A that air quantity is used.
Described discharge duct 42 has two outflow pipeline 42a, 42b of the air outflow that makes in the heat treatment section 21, and flow air in these two outflow pipeline 42a, 42b is compiled the derivation pipeline 42c that derive to the outside back.In addition, be provided with described fan 43 in the stage casing of deriving pipeline 42c.
Flow out among the pipeline 42a on (right side among Fig. 1) in described outflow pipeline 42a, 42b, is provided with to adjust the manual adjustments air door 44B that air quantity is used, and flows out among the pipeline 42b with (left side among Fig. 1) at another, is provided with and adjusts the automatic damper 51B that air quantity is used.
Be arranged on the automatic damper 51A among the described flow ipe 41b and be arranged on automatic damper 51B among the described outflow pipeline 42b, constituted ventilation volume adjusting device 5A shown in Figure 2.This ventilation volume adjusting device 5A also has the damper control section 52 that is used to adjust automatic damper 51A, 51B aperture except having automatic damper 51A, 51B.
The driving of described damper control section 52 control automatic damper 51A, 51B is so that when described heat processing unit 3 was not heat-treated workpiece W, comparison workpiece W reduced the ventilation volume of air interchanger 4 when heat-treating.Below with reference to sequential chart shown in Figure 3, specify the control that damper control section 52 is carried out.
At first, when not sending into workpiece W in the heat treatment section 21, damper control section 52 drives automatic damper 51A, 51B to the direction of closing flow ipe 41b and outflow pipeline 42b, makes automatic damper 51A, 51B become full closing state.As long as it is just passable that the ventilation volume of this moment can make the static pressure in the heat treatment section 21 remain unchanged, and the aperture of manual adjustments air door 44A, 44B is set at the degree that can guarantee such ventilation volume.In addition, Ci Shi automatic damper 51A, 51B is not the state that must be in Close All.That is, the relation of utilization and manual adjustments air door 44A, 44B can allow flow ipe 41b or outflow pipeline 42b be in the state of opening slightly.
When sending into workpiece W in the heat treatment section 21, damper control part 52 just drives automatic damper 51A, 51B to the direction of opening flow ipe 41b and outflow pipeline 42b.At this moment, in order to prevent the air themperature disorder in the heat treatment section 21, damper control part 52 will make automatic damper 51A, 51B become the state of standard-sized sheet in official hour (for example 10 minutes) lining at leisure.In case workpiece W is sent in the heat treatment section 21, just begins to carry out the heat treatment of workpiece W with heat processing unit 3.Be accompanied by heat treatment, volatile ingredient begins to be evaporated from workpiece W, but since heat treatment just begin, its growing amount seldom, so so also no problem.
Here, so-called workpiece W is sent into moment in the heat treatment section 21, be meant to be arranged on the Workpiece detecting device that detects for example photoelectric sensor (not having among the figure to represent) of having or not workpiece and so in the annealing device, detect the moment of workpiece W.In addition, be assembled at annealing device 1A under the situation on the production line of FPD manufacturing process, upstream device that also can be outside scheming etc. obtains the signal that workpiece is sent into.In addition, in this case, also can be shown in arrow a among Fig. 3, before the stipulated time that workpiece is sent into, just obtain signal from upstream device etc., shown in double dot dash line among Fig. 3, before the actual moment of sending into, just begin to drive automatic damper 51A, 51B at workpiece W.
After the heat treatment of the workpiece W that is undertaken by heat processing unit 3 finishes, workpiece W is taken out from heat treatment section 21, after workpiece W being taken out from heat treatment section 21 and passes through official hour, in other words, detect from described Workpiece detecting device and to begin when not having workpiece through behind the official hour, damper control part 52 just drives automatic damper 51A, 51B to the direction of closing flow ipe 41b and outflow pipeline 42b, makes automatic damper 51A, 51B become full closing state.At this moment, in order to prevent the air themperature disorder in the heat treatment section 21, or for the air that contains volatile ingredient that remains in the heat treatment section 21 is discharged, damper control section 52 will make automatic damper 51A, 51B be in full-shut position in official hour (for example 10 minutes).That is, the ventilation volume when workpiece W does not heat-treat, the ventilation volume when heat-treating than workpiece W is lacked.In addition, also can when workpiece W takes out, begin to drive automatic damper 51A, 51B from heat treatment section 21 according to the growing amount of volatile ingredient.
Like this, in the annealing device 1A of first embodiment, because the ventilation volume when suppressing non-heat treatment with ventilation volume adjusting device 5A, so when non-heat treatment, reduce heater 32 and be used to heat the needed electric power of extraneous gas, thereby can reduce the power consumption of whole annealing device.
In addition, in the first embodiment, what represent is that two flow ipe 41a, 41b and outflow pipeline 42a, 42b are set respectively, if but the damper that adopts the band narrow slit is as damper 51A, 51B automatically, then can save a flow ipe 41a and outflow pipeline 42a and manual adjustments air door 44A, 44B.
Below, the annealing device 1B of second embodiment of the invention is described with reference to Fig. 4～Fig. 6.In addition, every component part identical with first embodiment all adopts same Reference numeral, and omits its explanation.
In the annealing device 1B of second embodiment, aspirating air pipe 41 and discharge duct 42 all constitute with a pipeline respectively, in these two aspirating air pipes 41 and discharge duct 42, are provided with manual adjustments air door 44A, 44B.
As shown in Figure 6, described fan control part 53 makes fan 43 remain on the slow-speed of revolution when not being sent to workpiece W in the heat treatment section 21, when being sent to workpiece W in the heat treatment section 21, in official hour (for example 10 minutes), the rotating speed of fan 43 is increased gradually.
In addition, identical with first embodiment, so-called workpiece W is sent into moment in the heat treatment section 21, be meant to be arranged on the Workpiece detecting device that detects for example photoelectric sensor (not having among the figure to represent) of having or not workpiece and so in the annealing device, detect the moment of workpiece W.In addition, be assembled at annealing device 1B under the situation on the production line of FPD manufacturing process, also can obtain the signal that workpiece is sent into from upstream device etc., can also be before the certain hour that workpiece is sent into obtain signal, so that just begin to increase the rotating speed of fan 43 before sending into from workpiece W is actual from upstream device etc.
When sending into workpiece W in the heat treatment section 21, just begin to carry out the heat treatment of workpiece W with heat processing unit 3, workpiece W is being sent in the heat treatment section 21, and through after the official hour, to workpiece W from heat treatment section 21 before taking out during in, fan control part 53 keeps the rotating speed of fan 43, with the ventilation volume of guaranteeing to stipulate.
After the heat treatment of the workpiece W that is undertaken by heat processing unit 3 finishes, workpiece W is taken out from heat treatment section 21, fan control part 53 reduces the rotating speed of fan 43 in official hour (for example 10 minutes) after workpiece W takes out from heat treatment section 21 and passes through certain hour gradually.In addition, identical with first embodiment, also can workpiece W when heat treatment section 21 takes out, the rotating speed of fan 43 is reduced.
Like this, just can obtain the effect identical with first embodiment.
In addition, as shown in Figure 7, when not being sent to workpiece W in the heat treatment section 21, fan control part 53 just makes fan 43 stop, and perhaps, also can before workpiece W is sent to heat treatment section 21 fan 43 be rotated with the slow-speed of revolution.Perhaps, shown in the double dot dash line among Fig. 7, also can before workpiece W is sent into heat treatment section 21, fan 43 be stopped, in case send into workpiece W, with regard to drive fan 43.
Below, the annealing device of third embodiment of the invention is described.The figure of this annealing device has omitted, but it is on the ventilation volume adjusting device 5A in the annealing device 1A of first embodiment, increases the fan control part 53 of second embodiment.That is, ventilation volume adjusting device 5A comprises damper control section 52 and fan control part 53.
As shown in Figure 8, such annealing device can be controlled separately automatic damper 51A, 51B and fan 43, also can carry out association control.For example, drive fan 43 and open automatic damper 51A, 51B simultaneously, or the both sides' that stagger in time driving.
In this external first～the 3rd embodiment, also can heater be set in addition, and aspirating air pipe 41 directly is connected on the heat treatment section 21 in the stage casing of the aspirating air pipe 41 of air interchanger.
Below, the main points of present embodiment are described.
(1) in the present embodiment, because the ventilation volume when utilizing the ventilation volume adjusting device to suppress non-heat treatment,, thereby can reduce the consumption of annealing device overall electric power so air interchanger is used to heat the needed electric power of extraneous gas can reduce non-heat treatment the time.
(2) in the present embodiment, described air interchanger has aspirating air pipe that sucks extraneous gas and the discharge duct of discharging the air in the described heat treatment section, described ventilation volume adjusting device has automatic damper and damper control section that the adjustment air quantity that is separately positioned in described aspirating air pipe and the discharge duct is used.When this damper control section is heat-treated processed at described heat processing unit, drive described automatic damper to the direction of opening described aspirating air pipe and discharge duct, when described heat processing unit is not heat-treated processed, drive described automatic damper to the direction of closing described aspirating air pipe and discharge duct.
(3) in the present embodiment, described air interchanger has discharge duct of discharging the air in the described heat treatment section and the fan that is arranged on described discharge duct stage casing, described ventilation volume adjusting device has the fan control part, this fan control part is when described heat processing unit is heat-treated processed, the rotating speed of described fan is increased, and when described heat processing unit is not heat-treated processed, the rotating speed of described fan is reduced.
(4) in the present embodiment, have the air-conditioning part that separates with described heat treatment section, on one side described heat processing unit make in the described heat treatment section air and described air-conditioning part between circulate, Yi Bian it is heated.
(5) in the present embodiment, the ventilation volume when suppressing non-heat treatment by means of the ventilation volume adjusting device, thus be used to heat the needed electric power of extraneous gas can reduce non-heat treatment the time, thus the power consumption of whole annealing device can be reduced.
Claims (6)
1. annealing device comprises: heat processing unit, under processed state that is contained in the heat treatment section,, described processed is heat-treated by making circulation limit, the air limit heating in the described heat treatment section; And air interchanger, after extraneous gas is heated, be sent in the described heat treatment section, and the air in the described heat treatment section is discharged, taken a breath in described heat treatment section inside, it is characterized in that,
Also comprise the ventilation volume adjusting device, the ventilation volume that makes described air interchanger reduces when than described heat processing unit processed being heat-treated when described heat processing unit is not heat-treated processed.
2. annealing device according to claim 1 is characterized in that,
Described air interchanger has aspirating air pipe that sucks extraneous gas and the discharge duct that the air in the described heat treatment section is discharged;
Described ventilation volume adjusting device has:
Adjust the automatic damper that air quantity is used, be separately positioned in described aspirating air pipe and the discharge duct;
And damper control section, when described heat processing unit is heat-treated processed, drive described automatic damper to the direction of opening described aspirating air pipe and discharge duct, when described heat processing unit is not heat-treated processed, drive described automatic damper to the direction of closing described aspirating air pipe and discharge duct.
3. annealing device according to claim 1 is characterized in that,
Described air interchanger has discharge duct that the air in the described heat treatment section is discharged and the fan that is arranged on described discharge duct stage casing;
Described ventilation volume adjusting device has the fan control part, when described heat processing unit is heat-treated processed, the rotating speed of described fan is increased, and when described heat processing unit is not heat-treated processed, the rotating speed of described fan is reduced.
4. according to any described annealing device in the claim 1 to 3, it is characterized in that,
Also comprise the air-conditioning part that separates with described heat treatment section,
Described heat processing unit make on one side in the described heat treatment section air and described air-conditioning part between circulate, on one side air is heated.
5. annealing device comprises: heat treatment section, can pack processed into; Heater heats air, and the interior temperature of described heat treatment section is reached can be to described processed temperature of heat-treating; And air interchanger, taken a breath in described heat treatment section inside, it is characterized in that,
Also comprise the ventilation volume adjusting device, the ventilation volume that makes described air interchanger is in the time beyond described processed is being heat-treated, and reduces when heat-treating.
6. annealing device comprises: heat treatment section, can pack processed into; Heater heats air, and the interior temperature of described heat treatment section is reached can be to described processed temperature of heat-treating; And air interchanger, taken a breath in described heat treatment section inside, it is characterized in that,
Also comprise the ventilation volume adjusting device, after described processed heat treatment finishes, the ventilation volume of described air interchanger is reduced.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006247621A JP4273145B2 (en) | 2006-09-13 | 2006-09-13 | Heat treatment equipment |
| JP2006-247621 | 2006-09-13 | ||
| JP2006247621 | 2006-09-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101173840A true CN101173840A (en) | 2008-05-07 |
| CN101173840B CN101173840B (en) | 2012-06-27 |
Family
ID=39291752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101458676A Active CN101173840B (en) | 2006-09-13 | 2007-09-04 | Heat treatment apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4273145B2 (en) |
| KR (1) | KR101380481B1 (en) |
| CN (1) | CN101173840B (en) |
| TW (1) | TW200815723A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI509079B (en) * | 2013-08-01 | 2015-11-21 | Koyo Thermo Sys Co Ltd | Heat treatment device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4727712B2 (en) * | 2008-12-04 | 2011-07-20 | エスペック株式会社 | Ventilation device |
| JP4896952B2 (en) | 2008-12-04 | 2012-03-14 | エスペック株式会社 | Heat treatment equipment |
| JP5503376B2 (en) * | 2010-03-31 | 2014-05-28 | 光洋サーモシステム株式会社 | Heat treatment equipment |
| KR101104201B1 (en) * | 2010-07-13 | 2012-01-10 | (주)에스엠텍 | Heat treatment apparatus for substrate |
| KR101406508B1 (en) * | 2013-03-07 | 2014-06-11 | 김한곤 | Heat treat apparatus for tempering a thin glass |
| KR101467082B1 (en) * | 2013-03-07 | 2014-12-01 | 김한곤 | Heat treat apparatus for tempering a thin glass |
| KR101406576B1 (en) * | 2013-03-07 | 2014-06-11 | 김한곤 | Heat treat apparatus for tempering a thin glass |
| JP5767354B2 (en) * | 2014-03-14 | 2015-08-19 | 光洋サーモシステム株式会社 | Heat treatment equipment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2201398Y (en) * | 1993-12-08 | 1995-06-21 | 地方国营梨树县白云灰厂 | Secondary ventilation apparatus for lime kiln |
| GB2300906B (en) * | 1995-05-18 | 1998-11-04 | Stein Atkinson Strody Ltd | Oven for glass article |
| JP3739233B2 (en) | 1999-06-28 | 2006-01-25 | 光洋サーモシステム株式会社 | Exhaust type batch oven |
| JP3403181B2 (en) * | 2001-03-30 | 2003-05-06 | 東京エレクトロン株式会社 | Heat treatment apparatus and heat treatment method |
| US6830449B1 (en) * | 2004-02-02 | 2004-12-14 | Sis Microelectronics Corporation | Injector robot for replacing a gas injector in a furnace |
| JP2006017357A (en) * | 2004-06-30 | 2006-01-19 | Espec Corp | Heat treatment device |
-
2006
- 2006-09-13 JP JP2006247621A patent/JP4273145B2/en active Active
-
2007
- 2007-08-16 TW TW096130302A patent/TW200815723A/en unknown
- 2007-08-28 KR KR1020070086579A patent/KR101380481B1/en active IP Right Grant
- 2007-09-04 CN CN2007101458676A patent/CN101173840B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI509079B (en) * | 2013-08-01 | 2015-11-21 | Koyo Thermo Sys Co Ltd | Heat treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101380481B1 (en) | 2014-04-01 |
| JP2008070017A (en) | 2008-03-27 |
| JP4273145B2 (en) | 2009-06-03 |
| TWI354762B (en) | 2011-12-21 |
| CN101173840B (en) | 2012-06-27 |
| TW200815723A (en) | 2008-04-01 |
| KR20080024440A (en) | 2008-03-18 |
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