CN101153383A - 离子束电荷量控制方法 - Google Patents
离子束电荷量控制方法 Download PDFInfo
- Publication number
- CN101153383A CN101153383A CNA2006101169031A CN200610116903A CN101153383A CN 101153383 A CN101153383 A CN 101153383A CN A2006101169031 A CNA2006101169031 A CN A2006101169031A CN 200610116903 A CN200610116903 A CN 200610116903A CN 101153383 A CN101153383 A CN 101153383A
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- 238000012360 testing method Methods 0.000 claims abstract description 38
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- 238000009413 insulation Methods 0.000 claims description 51
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- 239000000463 material Substances 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract description 59
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000010884 ion-beam technique Methods 0.000 abstract description 6
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- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000009825 accumulation Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 238000002347 injection Methods 0.000 description 9
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- 230000005684 electric field Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000003472 neutralizing effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
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- 238000010849 ion bombardment Methods 0.000 description 2
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- 229960001866 silicon dioxide Drugs 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
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- 239000013078 crystal Substances 0.000 description 1
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- 239000002019 doping agent Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- VTGARNNDLOTBET-UHFFFAOYSA-N gallium antimonide Chemical compound [Sb]#[Ga] VTGARNNDLOTBET-UHFFFAOYSA-N 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 230000000306 recurrent effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- -1 silicon ion Chemical class 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200610116903A CN101153383B (zh) | 2006-09-30 | 2006-09-30 | 离子束电荷量控制方法 |
US11/618,236 US7501643B2 (en) | 2006-09-30 | 2006-12-29 | Method for controlling charge amount of ion beam and a wafer applied in the method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200610116903A CN101153383B (zh) | 2006-09-30 | 2006-09-30 | 离子束电荷量控制方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101153383A true CN101153383A (zh) | 2008-04-02 |
CN101153383B CN101153383B (zh) | 2010-05-12 |
Family
ID=39255266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200610116903A Expired - Fee Related CN101153383B (zh) | 2006-09-30 | 2006-09-30 | 离子束电荷量控制方法 |
Country Status (2)
Country | Link |
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US (1) | US7501643B2 (zh) |
CN (1) | CN101153383B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103367187A (zh) * | 2012-03-28 | 2013-10-23 | 无锡华润上华科技有限公司 | 离子束均匀性的检测方法 |
CN104347441A (zh) * | 2013-07-26 | 2015-02-11 | 和舰科技(苏州)有限公司 | 离子注入的监控方法 |
CN106653634A (zh) * | 2016-10-09 | 2017-05-10 | 武汉华星光电技术有限公司 | 监控离子植入剂量和植入均匀性的方法 |
CN112259448A (zh) * | 2020-10-14 | 2021-01-22 | 上海华力集成电路制造有限公司 | 栅极形成后的离子注入方法 |
CN113030198A (zh) * | 2021-03-31 | 2021-06-25 | 深圳市溢鑫科技研发有限公司 | 一种直立石墨烯薄膜材料的品质检测分析方法 |
WO2022041270A1 (zh) * | 2020-08-31 | 2022-03-03 | 深圳市大疆创新科技有限公司 | 半导体元件、半导体元件的测试方法和设备 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100560790C (zh) * | 2006-09-30 | 2009-11-18 | 中芯国际集成电路制造(上海)有限公司 | 离子束电荷量控制方法 |
US9315892B2 (en) * | 2013-03-15 | 2016-04-19 | Taiwan Semiconductor Manufacturing Company Limited | Method and apparatus for controlling beam angle during ion implantation of a semiconductor wafer based upon pressure |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10154392A1 (de) * | 2001-11-06 | 2003-05-15 | Philips Corp Intellectual Pty | Ladungsdetektor-Halbleiterbauelement, System aus einem Ladungsdetektor-Halbleiterbauelement und einem Referenz-Halbleiterbauelement, Wafer, Verwendung eines Wafers und Verfahren zur qualitativen und quantitativen Messung einer Aufladung eines Wafers |
US7714414B2 (en) * | 2004-11-29 | 2010-05-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for polymer dielectric surface recovery by ion implantation |
CN100560790C (zh) * | 2006-09-30 | 2009-11-18 | 中芯国际集成电路制造(上海)有限公司 | 离子束电荷量控制方法 |
-
2006
- 2006-09-30 CN CN200610116903A patent/CN101153383B/zh not_active Expired - Fee Related
- 2006-12-29 US US11/618,236 patent/US7501643B2/en active Active
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103367187A (zh) * | 2012-03-28 | 2013-10-23 | 无锡华润上华科技有限公司 | 离子束均匀性的检测方法 |
CN103367187B (zh) * | 2012-03-28 | 2016-03-23 | 无锡华润上华科技有限公司 | 离子束均匀性的检测方法 |
CN104347441A (zh) * | 2013-07-26 | 2015-02-11 | 和舰科技(苏州)有限公司 | 离子注入的监控方法 |
CN104347441B (zh) * | 2013-07-26 | 2018-01-19 | 和舰科技(苏州)有限公司 | 离子注入的监控方法 |
CN106653634A (zh) * | 2016-10-09 | 2017-05-10 | 武汉华星光电技术有限公司 | 监控离子植入剂量和植入均匀性的方法 |
CN106653634B (zh) * | 2016-10-09 | 2019-04-30 | 武汉华星光电技术有限公司 | 监控离子植入剂量和植入均匀性的方法 |
WO2022041270A1 (zh) * | 2020-08-31 | 2022-03-03 | 深圳市大疆创新科技有限公司 | 半导体元件、半导体元件的测试方法和设备 |
CN112259448A (zh) * | 2020-10-14 | 2021-01-22 | 上海华力集成电路制造有限公司 | 栅极形成后的离子注入方法 |
CN112259448B (zh) * | 2020-10-14 | 2022-11-29 | 上海华力集成电路制造有限公司 | 栅极形成后的离子注入方法 |
CN113030198A (zh) * | 2021-03-31 | 2021-06-25 | 深圳市溢鑫科技研发有限公司 | 一种直立石墨烯薄膜材料的品质检测分析方法 |
CN113030198B (zh) * | 2021-03-31 | 2023-11-14 | 深圳市溢鑫科技研发有限公司 | 一种直立石墨烯薄膜材料的品质检测分析方法 |
Also Published As
Publication number | Publication date |
---|---|
US7501643B2 (en) | 2009-03-10 |
CN101153383B (zh) | 2010-05-12 |
US20080078958A1 (en) | 2008-04-03 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
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Effective date of registration: 20111108 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100512 Termination date: 20180930 |
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