CN101150084A - Correction auxiliary tools - Google Patents
Correction auxiliary tools Download PDFInfo
- Publication number
- CN101150084A CN101150084A CNA2007100481209A CN200710048120A CN101150084A CN 101150084 A CN101150084 A CN 101150084A CN A2007100481209 A CNA2007100481209 A CN A2007100481209A CN 200710048120 A CN200710048120 A CN 200710048120A CN 101150084 A CN101150084 A CN 101150084A
- Authority
- CN
- China
- Prior art keywords
- mechanical arm
- auxiliary tools
- correction auxiliary
- wafer
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 230000001915 proofreading effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
Images
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100481209A CN101150084B (en) | 2007-11-13 | 2007-11-13 | Correction auxiliary tools |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100481209A CN101150084B (en) | 2007-11-13 | 2007-11-13 | Correction auxiliary tools |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101150084A true CN101150084A (en) | 2008-03-26 |
CN101150084B CN101150084B (en) | 2011-06-15 |
Family
ID=39250523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100481209A Active CN101150084B (en) | 2007-11-13 | 2007-11-13 | Correction auxiliary tools |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101150084B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117438356A (en) * | 2023-12-21 | 2024-01-23 | 浙江果纳半导体技术有限公司 | Self-adaptive wafer transmission method, storable medium and wafer transmission equipment |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6914337B2 (en) * | 2003-11-04 | 2005-07-05 | Taiwan Semiconductor Manufacturing Co., Ltd | Calibration wafer and kit |
CN100358820C (en) * | 2005-12-02 | 2008-01-02 | 友达光电股份有限公司 | Substrate-correcting means |
-
2007
- 2007-11-13 CN CN2007100481209A patent/CN101150084B/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117438356A (en) * | 2023-12-21 | 2024-01-23 | 浙江果纳半导体技术有限公司 | Self-adaptive wafer transmission method, storable medium and wafer transmission equipment |
CN117438356B (en) * | 2023-12-21 | 2024-04-19 | 浙江果纳半导体技术有限公司 | Self-adaptive wafer transmission method, storable medium and wafer transmission equipment |
Also Published As
Publication number | Publication date |
---|---|
CN101150084B (en) | 2011-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI MUNICIPAL ELECTRIC POWER COMPANY SHANGHAI Effective date: 20121128 Owner name: STATE GRID CORPORATION OF CHINA Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20121128 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Sheng Fangzheng Inventor after: Zhang Zuan Inventor after: Wang Wenbin Inventor after: Wang Zhengming Inventor before: Wang Zhengming |
|
COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: WANG ZHENGMING TO: SHENG FANGZHENG ZHANG ZUAN WANG WENBIN WANG ZHENGMING Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100031 XICHENG, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20121128 Address after: 100031 Xicheng District West Chang'an Avenue, No. 86, Beijing Patentee after: State Grid Corporation of China Patentee after: Shanghai Electric Power Corporation Patentee after: Shanghai Judongjiaoneng Electric and Electronic Co., Ltd. Address before: 201203 Shanghai Zhangjiang hi tech park GuoShouJing Road No. 818 Patentee before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |