CN101144895A - Reflecting mirror three-dimensional regulation device - Google Patents

Reflecting mirror three-dimensional regulation device Download PDF

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Publication number
CN101144895A
CN101144895A CNA2007100561468A CN200710056146A CN101144895A CN 101144895 A CN101144895 A CN 101144895A CN A2007100561468 A CNA2007100561468 A CN A2007100561468A CN 200710056146 A CN200710056146 A CN 200710056146A CN 101144895 A CN101144895 A CN 101144895A
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CN
China
Prior art keywords
screw
adjusting
seat
reflector
dimensionally
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Granted
Application number
CNA2007100561468A
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Chinese (zh)
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CN100451714C (en
Inventor
宋云夺
田兴志
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CNB2007100561468A priority Critical patent/CN100451714C/en
Publication of CN101144895A publication Critical patent/CN101144895A/en
Application granted granted Critical
Publication of CN100451714C publication Critical patent/CN100451714C/en
Expired - Fee Related legal-status Critical Current
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Abstract

The present invention relates to a reflector three-dimensionally adjusting mechanism for adjusting the normal direction of the reflector in an optical system. The present invention has the technical proposal that an adjusting seat is fixed on a pedestal, the center of the adjusting seat has a screw thread hole, and a horizontally adjusting bolt is screwed into the top end of the adjusting seat from the screw thread hole to contact with a reflector seat; the reflector seat and the adjusting seat are joined together movably through two-dimensionally adjusting bolts, wherein a line connected by a pair of two-dimensionally adjusting bolts intersects perpendicularly a line connected by another pair of two-dimensionally adjusting bolts at the contact point of the top end of the horizontally adjusting bolt and the reflector seat. The present invention integrates the translation of the normal direction of the reflector with the two-dimensionally obliquity adjusting, has compact structure and excellent stability. Since the reflector uses the contact point of the top end of the horizontally adjusting bolt and the reflector seat as a supporting point, and the supporting point is arranged on the central position of the two pairs of two-dimensionally adjusting bolts, the facula only makes two-directions linear movement, the path of the facula is easy to be controlled, the efficiency and the precision of the adjustment are high.

Description

Reflecting mirror three-dimensional regulation device
Technical field
The utility model relates to a kind of adjusting mechanism of adjusting the catoptron normal direction.
Background technology
In optical system, usually need to use catoptron to adjust light-struck direction,, just need adjust the direction of catoptron normal in order to make the direction outgoing of the light that incides on the catoptron along system requirements.At present, the adjusting mechanism of catoptron normal direction comprises adjustment seat, two manual adjustment bars in the optical system, and rigidity is propped up piece, two elastic supporting member for supporting optical member, microscope base; Support by two elastic supporting member for supporting optical member between adjustment seat and the microscope base, it is vertical mutually that one of them manual adjustment bar and rigidity are propped up the line that line and another manual adjustment bar and rigidity between the piece prop up between the piece.The defective that this adjusting mechanism exists is: (1) relies on the normal direction of two manual adjustment pole pairs of turn catoptron to adjust, only can carry out the adjustment of two-dimentional inclination angle, and depart from catoptron normal center owing to prop up piece as the rigidity of adjusting fulcrum, the path that hot spot moves is wayward; (2) be that integral body by adjusting mechanism moves and realizes that this method of adjustment can not make catoptron strictly move along normal direction along the translation of minute surface normal direction, thereby it is low to adjust precision.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of reflecting mirror three-dimensional regulation device that the translation of catoptron normal direction and the adjustment of two-dimentional inclination angle are combined, can be good at controlling the path of hot spot, mechanism structure compactness, good stability are adjusted efficient height, precision height.
Reflecting mirror three-dimensional regulation device of the present invention comprises: adjustment seat, and microscope base, two pairs of two dimensions are adjusted screw, Heibei provincial opera screw; Adjustment seat is fixedly mounted on the pedestal, and its central authorities have a threaded hole, and the Heibei provincial opera screw screws in from this threaded hole and contacts with microscope base to the top; Microscope base and adjustment seat adjust by two dimension that screw is movable to be connected, and wherein a pair of two dimension is adjusted the contact point that straight line that screw connects into and another straight line that two dimension adjustment screw is connected into are vertically intersected on Heibei provincial opera screw head and microscope base; The eyeglass of turning back is fixedly mounted on the microscope base, and turn back eyeglass and Heibei provincial opera screw head lay respectively at corresponding position, microscope base both sides.
When catoptron being carried out the three-dimensional adjustment, turn Heibei provincial opera screw at first, catoptron with microscope base along the translation of catoptron normal direction, make from the pedestal first light of drawing cover incident through the eyeglass reflection of turning back, draw the cover outgoing by second and be radiated at hot spot on the target and move to around the target center in the small range; Regulate two dimension and adjust screw, catoptron is that fulcrum rotates with the contact point of Heibei provincial opera screw head and microscope base, and hot spot is moved until target center.The present invention is integrated in one translation of catoptron normal direction and the adjustment of two-dimentional inclination angle, compact conformation, good stability; Because catoptron is a fulcrum with the contact point of Heibei provincial opera screw head and microscope base, the straight line that wherein a pair of two dimension adjustment screw connects into and another are vertically intersected on this fulcrum to the straight line that two dimension adjustment screw connects into, thereby the straight line that hot spot is only made both direction when adjusting two-dimentional inclination angle moves, the hot spot path is controlled easily, adjusts efficient height, precision height.
Be as a further improvement on the present invention: between Heibei provincial opera screw and adjustment seat, have set nut to be connected with the Heibei provincial opera screw thread, after regulating the Heibei provincial opera screw and making hot spot move to around the target center in the small range, the turn set nut makes the Heibei provincial opera screw lock, and this has further improved stability of the present invention.
As another improvement of the present invention be: adjust between screw and the adjustment seat in two dimension and adopt spherical washer, make when adjusting catoptron two dimension inclination angle, can eliminate two dimension and adjust the gap of screw and adjustment seat respective through hole, eliminate and rocked, the adjustment precision is improved greatly.
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Description of drawings
Fig. 1 is a structural representation of the present invention, also is Figure of abstract.Among the figure 1, pedestal, 2, first draws cover, 3, second draws cover, 4, adjustment seat, 5, microscope base, 6, Heibei provincial opera screw, 7, knob, 8, screw rod, 9, two dimension adjusts screw, 10, the eyeglass of turning back, 11, set nut, 12, spherical washer, 13, threaded hole, 14, through hole, 15, threaded hole.
Fig. 2 is that the K of Fig. 1 is to revolved view.Among the figure 4, adjustment seat, 7, knob, 9, two dimension adjusts screw, 11, set nut.
Embodiment
As shown in Figure 1, 2, adjustment seat 4 is connected with pedestal 1 flange, is processed with a threaded hole 13 in the central authorities of adjustment seat 4, and is center four through holes 14 that evenly distribute with this threaded hole 13 on adjustment seat 4, and these four through holes 14 constitute foursquare four summits; Correspondingly be processed with four threaded holes 15 on the microscope base 5 with on four through holes, the 14 corresponding positions of adjustment seat 4; Four two dimensions are adjusted screw 9 and by four through holes 14 of adjustment seat 4 and four threaded holes 15 on the microscope base 5 microscope base 5 and adjustment seat 4 are linked together.Two dimension is adjusted and is adopted spherical washer 12 between screw 9 and the adjustment seat 4, and when catoptron being carried out the adjustment of two-dimentional inclination angle, stability and the precision adjusted have been improved in the gap of having eliminated the through hole 14 on two-dimentional adjustment screw 9 and the adjustment seat 4 like this.Heibei provincial opera screw 6 is made of screw rod 8 and knob 7 two parts, screw rod 8 is by threaded hole 13 precessions of adjustment seat 4 central authorities, the semisphere top of screw rod 8 contacts with 5 of microscope bases, constitute the fulcrum that eyeglass 10 two-dimensional directionals of turning back are adjusted, this fulcrum is that four two dimensions are adjusted the foursquare center that screw 9 constitutes, thereby the straight line that hot spot is only made both direction when utilizing four two dimensions to adjust screws 9 to adjust catoptrons two dimension inclination angles moves, and the hot spot path is controlled easily, adjusts efficient height, precision height.Between the knob 7 and adjustment seat 4 of Heibei provincial opera screw 6, set nut 11 and screw rod 8 thread connection are arranged, after regulating Heibei provincial opera screw 6 and making hot spot move to around the target center in the small range, turn set nut 11 makes 6 lockings of Heibei provincial opera screw, and this has further improved stability of the present invention.Turn back eyeglass 10 by screw retention below microscope base 5, and the dead in line of the normal of the eyeglass 10 of turning back and Heibei provincial opera screw 6, first on the normal of the eyeglass 10 of turning back simultaneously and the pedestal 1 drawn cover 2 and second and drawn the axis of cover 3 and be miter angle.

Claims (3)

1. a reflecting mirror three-dimensional regulation device comprises adjustment seat, and microscope base is characterized in that also comprising two pairs of two dimension adjustment screws (9), Heibei provincial opera screw (6); Adjustment seat (4) central authorities have a threaded hole (13), and Heibei provincial opera screw (6) screws in from this threaded hole (13) and contacts with microscope base (5) to the top; Microscope base (5) and adjustment seat (4) adjust by two dimension that screw (9) is movable to be connected, and wherein a pair of two dimension is adjusted straight line that screw (9) connects into and another two dimension is adjusted the contact point that straight line that screw (9) connects into is vertically intersected on Heibei provincial opera screw (6) top and microscope base (5); The eyeglass (10) of turning back lays respectively at corresponding position, microscope base (5) both sides with Heibei provincial opera screw (6) top.
2. reflecting mirror three-dimensional regulation device according to claim 1 is characterized in that having set nut (11) to be threaded with Heibei provincial opera screw (6) between Heibei provincial opera screw (6) and adjustment seat (4).
3. reflecting mirror three-dimensional regulation device according to claim 1 is characterized in that adopting spherical washer (12) between two dimension adjustment screw (9) and adjustment seat (4).
CNB2007100561468A 2007-10-11 2007-10-11 Reflecting mirror three-dimensional regulation device Expired - Fee Related CN100451714C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2007100561468A CN100451714C (en) 2007-10-11 2007-10-11 Reflecting mirror three-dimensional regulation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2007100561468A CN100451714C (en) 2007-10-11 2007-10-11 Reflecting mirror three-dimensional regulation device

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CN100451714C CN100451714C (en) 2009-01-14

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Cited By (14)

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CN102096172A (en) * 2011-01-18 2011-06-15 中国科学院长春光学精密机械与物理研究所 Back flexible supporting structure for reflecting mirror of space remote sensor
CN102226850A (en) * 2011-06-17 2011-10-26 中国科学院上海光学精密机械研究所 Three-dimensional angular adjustment mechanism
CN103149664A (en) * 2013-02-21 2013-06-12 海信集团有限公司 Adjusting device for reflector
CN104965288A (en) * 2015-05-27 2015-10-07 中国科学院长春光学精密机械与物理研究所 Lens three-dimensional accurate adjustment installation mechanism
CN105954858A (en) * 2016-06-29 2016-09-21 西安中科微精光子制造科技有限公司 Three-DF (degree of freedom) adjustable reflector device
CN106290313A (en) * 2016-07-25 2017-01-04 钢研纳克检测技术有限公司 A kind of incident illumination observation position adjustment structure being applied to ICP spectrum
CN106291900A (en) * 2016-08-12 2017-01-04 上海大学 A kind of condenser three simple micromatic setting of axle
CN106371189A (en) * 2016-10-31 2017-02-01 中国科学院西安光学精密机械研究所 Mechanical structure for reflex optical path optical system
CN107044619A (en) * 2016-02-05 2017-08-15 深圳市绎立锐光科技开发有限公司 Hot spot pressure texture and light supply apparatus
CN107044620A (en) * 2016-02-05 2017-08-15 深圳市绎立锐光科技开发有限公司 Hot spot pressure texture and light supply apparatus
CN108183384A (en) * 2018-02-09 2018-06-19 武汉晟诺仪器科技有限公司 The laser beam multidimensional precision adjustment unit of integrated active heat radiation structure
CN110825033A (en) * 2019-11-15 2020-02-21 中国科学院长春光学精密机械与物理研究所 Servo control system
CN110888220A (en) * 2019-11-11 2020-03-17 中国科学院上海技术物理研究所 Method for accurately adjusting installation position of turning reflector
CN113245696A (en) * 2021-07-16 2021-08-13 广东粤港澳大湾区硬科技创新研究院 Laser beam direction adjusting device

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CN101859015B (en) * 2010-07-09 2012-01-25 皇明太阳能股份有限公司 Shape regulating device and regulating method thereof of unit reflecting mirror

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US5353167A (en) * 1992-07-22 1994-10-04 The United States Of America As Represented By The United States Department Of Energy Mirror mount
JP3069699B1 (en) * 1999-07-15 2000-07-24 工業技術院長 Optical element attitude and position adjustment device
JP2006171350A (en) * 2004-12-15 2006-06-29 Sigma Koki Kk Optical element holder
JP4633484B2 (en) * 2005-01-19 2011-02-16 オリンパス株式会社 Optical element support mechanism

Cited By (23)

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Publication number Priority date Publication date Assignee Title
CN102096172A (en) * 2011-01-18 2011-06-15 中国科学院长春光学精密机械与物理研究所 Back flexible supporting structure for reflecting mirror of space remote sensor
US9116259B2 (en) 2011-06-17 2015-08-25 Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences Three dimensional angular adjustable optical mount
CN102226850B (en) * 2011-06-17 2012-10-10 中国科学院上海光学精密机械研究所 Three-dimensional angle adjustment mechanism
WO2012171145A1 (en) * 2011-06-17 2012-12-20 中国科学院上海光学精密机械研究所 Three-dimensional angle adjusting mechanism
CN102226850A (en) * 2011-06-17 2011-10-26 中国科学院上海光学精密机械研究所 Three-dimensional angular adjustment mechanism
CN103149664A (en) * 2013-02-21 2013-06-12 海信集团有限公司 Adjusting device for reflector
CN103149664B (en) * 2013-02-21 2015-01-21 海信集团有限公司 Adjusting device for reflector
CN104965288A (en) * 2015-05-27 2015-10-07 中国科学院长春光学精密机械与物理研究所 Lens three-dimensional accurate adjustment installation mechanism
CN107044620B (en) * 2016-02-05 2021-02-26 深圳光峰科技股份有限公司 Light spot compression structure and light source device
CN107044619B (en) * 2016-02-05 2020-09-11 深圳光峰科技股份有限公司 Light spot compression structure and light source device
CN107044619A (en) * 2016-02-05 2017-08-15 深圳市绎立锐光科技开发有限公司 Hot spot pressure texture and light supply apparatus
CN107044620A (en) * 2016-02-05 2017-08-15 深圳市绎立锐光科技开发有限公司 Hot spot pressure texture and light supply apparatus
CN105954858A (en) * 2016-06-29 2016-09-21 西安中科微精光子制造科技有限公司 Three-DF (degree of freedom) adjustable reflector device
CN105954858B (en) * 2016-06-29 2019-09-27 西安中科微精光子制造科技有限公司 One kind having the adjustable reflector apparatus of Three Degree Of Freedom
CN106290313B (en) * 2016-07-25 2019-03-05 钢研纳克检测技术股份有限公司 A kind of incident light observation position adjustment structure applied to ICP spectrum
CN106290313A (en) * 2016-07-25 2017-01-04 钢研纳克检测技术有限公司 A kind of incident illumination observation position adjustment structure being applied to ICP spectrum
CN106291900B (en) * 2016-08-12 2019-04-02 上海大学 A kind of simple micromatic setting of three axis of condenser
CN106291900A (en) * 2016-08-12 2017-01-04 上海大学 A kind of condenser three simple micromatic setting of axle
CN106371189A (en) * 2016-10-31 2017-02-01 中国科学院西安光学精密机械研究所 Mechanical structure for reflex optical path optical system
CN108183384A (en) * 2018-02-09 2018-06-19 武汉晟诺仪器科技有限公司 The laser beam multidimensional precision adjustment unit of integrated active heat radiation structure
CN110888220A (en) * 2019-11-11 2020-03-17 中国科学院上海技术物理研究所 Method for accurately adjusting installation position of turning reflector
CN110825033A (en) * 2019-11-15 2020-02-21 中国科学院长春光学精密机械与物理研究所 Servo control system
CN113245696A (en) * 2021-07-16 2021-08-13 广东粤港澳大湾区硬科技创新研究院 Laser beam direction adjusting device

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