CN113245696A - Laser beam direction adjusting device - Google Patents

Laser beam direction adjusting device Download PDF

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Publication number
CN113245696A
CN113245696A CN202110805971.3A CN202110805971A CN113245696A CN 113245696 A CN113245696 A CN 113245696A CN 202110805971 A CN202110805971 A CN 202110805971A CN 113245696 A CN113245696 A CN 113245696A
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CN
China
Prior art keywords
reflector
laser beam
hole
beam direction
direction adjusting
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Granted
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CN202110805971.3A
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Chinese (zh)
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CN113245696B (en
Inventor
何秋婷
扈金富
杨军红
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Guangdong Zhuojie Laser Technology Co.,Ltd.
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Guangdong Guangdong Hong Kong Macao Dawan District Hard Science And Technology Innovation Research Institute
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Priority to CN202110805971.3A priority Critical patent/CN113245696B/en
Publication of CN113245696A publication Critical patent/CN113245696A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention provides a laser beam direction adjusting device, comprising: a mirror; the reflecting mirror is arranged on one side surface of the reflecting mirror seat, and the other side surface of the reflecting mirror seat is provided with two first threaded holes; the reflector bracket is provided with a first through hole, the side surface of the reflector bracket is provided with a convex edge, and a first screw penetrates through the first through hole and is connected with the first threaded hole. When the reflector bracket and the reflector base are fixed by the first screws, the side surface of the reflector base is contacted with the convex edge on the reflector bracket, and the adjustment of the reflector base by taking the axis of the convex edge as a rotating shaft is realized through different screwing amounts of the two first screws in the first threaded holes on the reflector base, so that the adjustment of the reflector is realized, namely the incident angle between a laser beam and the reflector can be adjusted; the laser beam direction adjusting device does not need complex program control, has small volume, simple structure and convenient adjustment, and is convenient to be integrated into a small laser.

Description

Laser beam direction adjusting device
Technical Field
The invention relates to the technical field of laser processing, in particular to a laser beam direction adjusting device.
Background
In semiconductor laser applications, the optical path design often requires changing the direction of the laser beam. In practical applications, due to errors in manufacturing, assembly, and the like, a structure is required to adjust the directivity of the laser beam to be within an error-allowable range. In the prior art, the adjustment of multiple directions of a laser beam is controlled by using a program, and in the scheme, besides a mechanical structure, a control component needs to be introduced, a control program needs to be written and the like. The precision of program control is high, which causes the whole adjusting device to have complex structure, large volume and high cost, and is not suitable for the miniaturized light path design of the laser. The prior art also discloses a manual adjustment multidimensional adjusting device, which reduces the automatic control part compared with the technical scheme of controlling the adjustment of multiple directions of laser beams by using a program, but the whole adjusting device is relatively complex in structure, has more parts, cannot be miniaturized, and is not convenient to integrate into a small laser.
Based on the technical defects of the current laser beam direction adjusting device, improvement on the technical defects is needed.
Disclosure of Invention
In view of the above, the present invention provides a laser beam direction adjustment apparatus, which solves or at least partially solves the technical drawbacks of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a laser beam direction adjusting apparatus comprising:
a mirror;
the reflector is arranged on one side surface of the reflector seat, and the other side surface of the reflector seat is provided with two first threaded holes;
the reflector bracket is provided with a first through hole corresponding to the first threaded hole, a convex edge is arranged on the side surface, close to the reflector base, of the reflector bracket and is perpendicular to a connecting line between the centers of circles of the two first through holes, the distance between the convex edge and the two first through holes is equal, and a first screw penetrates through the first through hole and is connected with the first threaded hole.
Preferably, in the laser beam direction adjusting device, a diameter of the first through hole is larger than a diameter of the first threaded hole.
Preferably, the laser beam direction adjusting device further comprises a reflector base plate, a guide groove is formed in the reflector base plate and is parallel to the laser beam, a guide edge is arranged at the position, corresponding to the guide groove, of the bottom of the reflector support, and the guide edge is located in the guide groove and can move relative to the guide groove.
Preferably, the laser beam direction adjusting device, still be equipped with the second screw hole on the speculum bottom plate, be equipped with the second through-hole on the speculum support corresponding to second screw hole department, a second screw passes the second through-hole and with the second screw hole is connected.
Preferably, in the laser beam direction adjusting device, the diameter of the second through hole is larger than the diameter of the second threaded hole.
Preferably, the laser beam direction adjusting apparatus, the mirror support includes:
the first through hole and the convex edge are arranged on the vertical plate;
and the horizontal plate is fixed on the bottom surface of the vertical plate, and the guide edges are arranged at the bottom of the horizontal plate.
Preferably, in the laser beam direction adjusting device, elastic supporting members are respectively disposed on the other side surface of the reflector base between the rib and the first through hole.
Preferably, the laser beam direction adjusting device, another side of the reflector base is provided with a slot along the direction parallel to the axis of the rib, and the elastic support is installed in the slot.
Preferably, the laser beam direction adjusting device is provided with a rubber cushion.
Preferably, the laser beam direction adjusting device, still include the fixed plate, the third screw hole has been seted up on the fixed plate, a mounting groove has been seted up to reflector seat a side, the speculum is located in the mounting groove, the fixed plate lid is located on the speculum, reflector seat another side with correspond third screw hole department on the speculum and all be equipped with the third through-hole, a second screw pass the third through-hole in proper order and with third screw hole spiro union.
Compared with the prior art, the laser beam direction adjusting device has the following beneficial effects:
(1) the invention relates to a laser beam direction adjusting device, which comprises a reflector seat and a reflector bracket, wherein the reflector seat is provided with two first threaded holes, the reflector bracket is correspondingly provided with a first through hole, the reflector bracket is also provided with a convex rib, when the reflector bracket is fixed with the reflector seat by a first screw, the side surface of the reflector seat is contacted with the convex rib on the reflector bracket, and the reflector seat is adjusted by taking the axis of the convex rib as a rotating shaft through different screwing amounts of the two first screws in the first threaded holes on the reflector seat, so that the adjustment of a reflector is realized, namely the incident angle between a laser beam and the reflector can be adjusted; the laser beam direction adjusting device does not need complex program control, is small in size, simple in structure and convenient to adjust, and is convenient to integrate into a small laser;
(2) according to the laser beam direction adjusting device, the diameter of the first through hole is larger than that of the first threaded hole, so that a certain adjusting gap is formed in the reflector base in the length direction of the convex edge, the reflector base moves along the length direction of the convex edge while being attached to the convex edge, and the position of a laser beam incident to the reflecting surface of the reflector can be further adjusted;
(3) the laser beam direction adjusting device also comprises a reflector bottom plate, wherein a guide groove is formed in the reflector bottom plate, a reflector bracket is correspondingly provided with a guide edge, and the guide edge moves relative to the guide groove, so that the reflector and a reflector seat can be driven to move, and the distance between the reflector and a laser beam can be further adjusted;
(4) according to the laser beam direction adjusting device, the reflector bottom plate is also provided with a second threaded hole, the reflector bracket is correspondingly provided with a second through hole, and the diameter of the second through hole is larger than that of the second threaded hole, so that the reflector seat has a certain adjusting allowance in the direction of the guide groove, and the distance from the reflector to a laser beam is adjusted;
(5) according to the laser beam direction adjusting device, the elastic supporting piece is arranged on the other side face of the reflector base, so that the elastic supporting piece plays a role in buffering and supporting in the adjusting process of the reflector base by taking the axis of the convex rib as a rotating shaft, and the adjusting structure is more stable;
according to the laser beam direction adjusting device, the reflector is arranged in the mounting groove through the fixing plate, so that the reflector is stably arranged in the mounting groove and does not shake, and the adjusting structure is more stable.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a laser beam direction adjusting apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a mirror mount according to an embodiment of the present invention;
FIG. 3 is a schematic view of a mirror support according to one embodiment of the present invention;
FIG. 4 is a schematic view of a mirror mounted on a mirror mount according to one embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a fixing plate according to an embodiment of the present invention;
FIG. 6 is a top view of a mirror mount and mirror support in accordance with one embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of illustrating the invention and are not to be construed as limiting the application.
As shown in fig. 1 to 2, an embodiment of the present application provides a laser beam direction adjusting apparatus, including:
a reflector 1;
the reflecting mirror base 2, the reflecting mirror 1 is mounted on one side of the reflecting mirror base 2, another side of the reflecting mirror base 2 has two first threaded holes 21;
the reflector bracket 3 is provided with a first through hole 31 corresponding to the first threaded hole 21, the side surface of the reflector bracket 31 close to the reflector base 2 is provided with a convex edge 4, the convex edge 4 is perpendicular to the connection line between the circle centers of the two first through holes 31, the distance from the convex edge 4 to the two first through holes 31 is equal, and a first screw passes through the first through hole 31 and is connected with the first threaded hole 21.
It should be noted that, in the laser beam direction adjusting device in the embodiment of the present application, the reflecting mirror 1 is an existing conventional reflecting mirror, the reflecting mirror 1 includes a reflecting surface 11, the laser beam 5 enters the reflecting surface of the reflecting mirror 1 and is reflected, so as to further implement adjustment of the laser beam direction, specifically, in practice, the laser beam 5 enters the reflecting surface with an included angle of 45 ° with the reflecting surface of the reflecting mirror 1; the reflector 1 is installed on one side surface of the reflector base 2, specifically, the reflector 1 can be installed on the reflector base 2 by arranging an installation groove on the reflector base 2 and then installing the reflector in the installation groove; the other side surface of the reflector base 2 is provided with two first threaded holes 21; first through holes 31 are formed in the reflector bracket 3 corresponding to the first threaded holes 21, namely the first through holes 31 correspond to the first threaded holes 21 one by one, meanwhile, convex edges 4 are arranged on the reflector bracket 3, the convex edges 4 are positioned between the two first through holes 31, and the distances from the axis of the convex edges 4 to the centers of the two first through holes 31 are the same; in the embodiment of the present application, the reflector holder 3 is a rectangular plate, the rib 4 is a rectangular plate with a large length-diameter ratio, the projection of the rib 4 on the reflector base 2 is a rectangle, and the length-width ratio of the rectangle is (60-80): 1. In use, a first screw (not shown), also referred to as a screw, a bolt, a threaded rod, etc., is threaded through the first through hole 31 and into the first threaded hole 21. The working principle of the laser beam direction adjusting device is as follows: the collimated laser beam 5 enters the reflector 1, when the reflector support 3 is fixed with the reflector base 2 by the first screws, the side surface of the reflector base 2 far away from the reflector 1 is contacted with the convex ribs 4 on the reflector support 3, and the adjustment of the reflector base 2 by using the axes of the convex ribs 4 as a rotating shaft is realized through different screwing amounts of the two first screws in the first threaded holes 21 on the reflector base 2, so that the adjustment of the reflector 1 is realized, and the incident angle between the laser beam 5 and the reflector 1 can be adjusted.
In some embodiments, the diameter of the first through hole 31 is larger than the diameter of the first threaded hole 21. In the embodiment of the present application, the diameters of the two first through holes 31 are the same and are both larger than the diameter of the first threaded hole 21, so that the reflector base 2 has a certain adjustment gap in the length direction of the rib 4, and the reflector base 2 moves along the length direction of the rib 4 while being attached to the rib 4, so as to adjust the position of the laser beam 5 incident on the reflecting surface of the reflector 1. Specifically, the diameter size relationship between the first through hole 31 and the first threaded hole 21 is determined according to practical situations, for example, the diameter of the first through hole 31 is 1.2-2 times of the diameter of the first threaded hole 21.
In some embodiments, the laser reflector further comprises a reflector base plate 6, wherein a guide groove 61 is formed in the reflector base plate 6, the guide groove 61 is parallel to the laser beam 5 incident on the reflector, a guide rib 32 is arranged at the bottom of the reflector bracket 3 corresponding to the guide groove 61, and the guide rib 32 is located in the guide groove 61 and can move relative to the guide groove 61. In this application embodiment, speculum bottom plate 6 is conventional bottom plate, it can be type cuboid or square or structure, guide way 61 has been seted up on speculum bottom plate 6, 3 bottoms of speculum support correspond the position and are equipped with direction arris 32, direction arris 32 and guide way 61 looks adaptation, direction arris 32 stretches into in the guide way 61 and can follow guide way 61 and move, so can make the relative guide way 61 of speculum support 3 remove, and then drive speculum 1 and speculum seat 2 and remove, can adjust the distance of speculum 1 apart from the laser beam like this.
In some embodiments, the reflector base plate 6 is further provided with a second threaded hole 62, the reflector bracket 3 is provided with a second through hole 33 corresponding to the second threaded hole, and a second screw (not shown) passes through the second through hole 33 and is connected with the second threaded hole. In the embodiment of the present application, the second screw hole 62 is formed on the reflector base plate 6 at one side of the guide groove 61, the second through hole 33 is formed at a corresponding position on the reflector bracket 3, and a second screw, also referred to as a screw, a bolt, a screw rod, etc., passes through the second through hole 33 and then is screwed into the second screw hole, thereby fixing the reflector bracket 3 to the reflector base plate 6.
In some embodiments, the second through hole 33 diameter is larger than the second threaded hole diameter. In this embodiment of the application, the diameter of the second through hole 33 is larger than that of the second threaded hole, so that the reflector base 2 has a certain adjustment allowance in the direction of the guide groove 61, and when the reflector base is used, the reflector base 2 can be moved along the direction of the guide groove 61 according to actual needs, and then the second screw penetrates through the second through hole 33 and then is screwed with the second threaded hole. Specifically, the diameter size relationship between the second through hole 33 and the second threaded hole is determined according to practical situations, for example, the diameter of the second through hole 33 is 1.2-2 times of the diameter of the second threaded hole.
In some embodiments, the number of the second threaded holes formed in the reflector base plate 6 is two, and correspondingly, the number of the second through holes 33 formed in the reflector bracket 3 is also two, and the second through holes 33 correspond to the second threaded holes one by one.
In some embodiments, as shown in fig. 3, the mirror support 3 comprises:
the vertical plate 34, the first through hole 31 and the convex ribs 4 are all arranged on the vertical plate 34;
and a horizontal plate 35 fixed to the bottom surface of the vertical plate 34, and the guide rib 32 is provided at the bottom of the horizontal plate 35.
Specifically, in some embodiments, the horizontal plate 35 is vertically fixed on the bottom surface of the vertical plate 34, an inverted T-shaped structure is formed between the horizontal plate 35 and the vertical plate 34, the projections of the convex ribs 4 and the vertical plate 34 on the reflector base 2 are both rectangular, the lengths of the two rectangles are equal, and the projection width of the reflector base 2 is 30-34 times the projection width of the convex ribs 4. During operation, the lower end face of the reflector base 2 is located on the horizontal plate 35, the side face, close to the vertical plate 34, of the reflector base 2 is in contact with the convex ribs 4 on the vertical plate 34, and the adjustment of the reflector base 2 by taking the axis of the convex ribs 4 as a rotating shaft is realized through different screwing amounts of the two first screws in the first threaded holes 21 on the reflector base 2.
In some embodiments, the second through hole 33 opens on the horizontal plate 35.
In some embodiments, the other side of the mirror base 2 is provided with an elastic support between the rib 4 and the first through hole 31. In the embodiment of the present application, by providing the elastic supporting member on the other side surface of the reflector base 2, the elastic supporting member plays a role in buffering and supporting during the adjustment process of the reflector base 2 using the axis of the rib 4 as the rotating shaft, so that the adjustment structure is more stable.
In some embodiments, the other side surface of the reflector base 2 is provided with a locking groove 22 along the axis direction of the parallel rib 4, and the elastic support is installed in the locking groove 22. In the embodiment of the present application, the locking groove 22 is parallel to the rib 4, the elastic support is also matched with the rib 4 and the locking groove 22, and the elastic support is installed in the locking groove 22.
In some embodiments, the resilient support is a rubber cushion. In the embodiment of this application, the rubber cushion adopts the rubber preparation to form, and is specific, and the rubber cushion can be transparent cushion EVA cushion, silica gel pad, rubber pad, PU rubber pad, PVC rubber pad, the transparent pad of EPDM etc. obviously, elastic support piece can also adopt elastic rubber etc. except the rubber cushion.
In some embodiments, the mirror support further includes a fixing plate 7, the fixing plate 7 has a third threaded hole 71, a mounting groove is formed on one side surface of the reflector base 2, the reflector 1 is located in the mounting groove, the fixing plate 7 covers the side surface of the reflector 1 away from the mounting groove, third through holes 23 are formed on the other side surface of the reflector base 2 and the reflector 1 corresponding to the third threaded hole 71, and a third screw sequentially penetrates through the third through holes 23 and is screwed with the third threaded hole 71.
In the above embodiment, as shown in fig. 4 to 5, the fixing plate 7 is used to fix the reflector in the mounting groove of the reflector base 2, specifically, the fixing plate 7 is provided with a third threaded hole 71, and the other side surface of the reflector base 2 and the reflector 1 corresponding to the third threaded hole 71 are both provided with a third through hole 23, and the third through hole 23 and the third through hole of the reflector base 2 and the reflector 1 are passed through by a third screw and then screwed with the third threaded hole 71 of the fixing plate 7, so that the reflector 1 can be stably mounted in the mounting groove without shaking, and the adjustment structure is more stable. The third screw is also referred to herein as a screw, bolt, threaded rod, etc. Specifically, in practice, two third threaded holes 71 and two third through holes 23 are provided, and correspond to each other. It should be noted that in the embodiment of the present application, the fixing plate 7 is disposed on the reflector 1 and located on the non-reflective surface thereof, that is, the fixing plate 7 is not disposed on the reflective surface 11 of the reflector 1.
Specifically, referring to fig. 6, in some embodiments, the projection of the reflector 1 on the horizontal plane is a pentagon, the width of the projection of the reflector holder 2 on the horizontal plane is slightly larger than the width of the projection of the reflector 1 on the horizontal plane, the width of the projection of the vertical plate 34 on the horizontal plane is equal to the width of the projection of the reflector holder 2 on the horizontal plane, and the collimated laser beam 5 enters the reflecting surface 11 of the reflector 1 and is reflected by the reflecting surface 11 to form the adjusted beam 8.
To sum up, the laser beam direction adjusting device that this application provided has following beneficial effect:
1. the laser beam direction adjusting device provided by the embodiment of the application comprises a reflector seat and a reflector support, wherein two first threaded holes are formed in the reflector seat, first through holes are correspondingly formed in the reflector support, a convex rib is further formed in the reflector support, when the reflector support and the reflector seat are fixed through first screws, the side surface of the reflector seat is in contact with the convex rib on the reflector support, and the reflector seat is adjusted by taking the axis of the convex rib as a rotating shaft through different screwing amounts of the two first screws in the first threaded holes in the reflector seat, so that the reflector is adjusted, namely the incident angle between a laser beam and a reflector can be adjusted; the laser beam direction adjusting device does not need complex program control, is small in size, simple in structure and convenient to adjust, and is convenient to integrate into a small laser;
2. according to the laser beam direction adjusting device provided by the embodiment of the application, the diameter of the first through hole is larger than that of the first threaded hole, so that the reflector base has a certain adjusting gap in the length direction of the convex edge, and the reflector base moves along the length direction of the convex edge while being attached to the convex edge, so that the position of a laser beam incident to the reflecting surface of the reflector can be further adjusted;
3. the laser beam direction adjusting device provided by the embodiment of the application further comprises a reflector bottom plate, wherein a guide groove is formed in the reflector bottom plate, a guide edge is correspondingly arranged on the reflector support, and the guide edge moves relative to the guide groove, so that the reflector and the reflector seat can be driven to move, and the distance between the reflector and the laser beam can be further adjusted;
4. according to the laser beam direction adjusting device provided by the embodiment of the application, the reflector bottom plate is also provided with a second threaded hole, the reflector bracket is correspondingly provided with a second through hole, and the diameter of the second through hole is larger than that of the second threaded hole, so that the reflector seat has a certain adjusting allowance in the direction of the guide groove, and the distance from the reflector to a laser beam is adjusted;
5. according to the laser beam direction adjusting device provided by the embodiment of the application, the elastic supporting piece is arranged on the other side surface of the reflector base, so that the elastic supporting piece plays a role in buffering and supporting in the adjusting process of the reflector base by taking the axis of the convex edge as a rotating shaft, and the adjusting structure is more stable;
6. the laser beam direction adjusting device that this application embodiment provided, the speculum passes through the fixed plate to be installed in the mounting groove, makes the firm installation of speculum not take place to rock in the mounting groove like this, and then makes the adjustment structure more stable.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.

Claims (10)

1. A laser beam direction adjusting apparatus, comprising:
a mirror;
the reflector is arranged on one side surface of the reflector seat, and the other side surface of the reflector seat is provided with two first threaded holes;
the reflector bracket is provided with a first through hole corresponding to the first threaded hole, a convex edge is arranged on the side surface, close to the reflector base, of the reflector bracket and is perpendicular to a connecting line between the centers of circles of the two first through holes, the distance between the convex edge and the two first through holes is equal, and a first screw penetrates through the first through hole and is connected with the first threaded hole.
2. The laser beam direction adjusting apparatus according to claim 1, wherein a diameter of the first through hole is larger than a diameter of the first threaded hole.
3. The laser beam direction adjusting apparatus according to claim 1 or 2, further comprising a reflector base plate, wherein the reflector base plate is provided with a guide groove, the guide groove is parallel to the laser beam incident on the reflector, a guide rib is provided at a position of the bottom of the reflector holder corresponding to the guide groove, and the guide rib is located in the guide groove and can move relative to the guide groove.
4. The laser beam direction adjusting apparatus according to claim 3, wherein the reflector base plate is further provided with a second screw hole, the reflector holder is provided with a second through hole corresponding to the second screw hole, and a second screw passes through the second through hole and is connected to the second screw hole.
5. The laser beam steering apparatus of claim 4, wherein the second through hole diameter is larger than the second threaded hole diameter.
6. The laser beam direction adjusting apparatus according to claim 3, wherein the mirror holder comprises:
the first through hole and the convex edge are arranged on the vertical plate;
and the horizontal plate is fixed on the bottom surface of the vertical plate, and the guide edges are arranged at the bottom of the horizontal plate.
7. The laser beam direction adjusting apparatus according to claim 1, wherein an elastic support is provided between the rib and the first through hole at the other side of the mirror base.
8. The laser beam direction adjusting apparatus according to claim 7, wherein the other side surface of the mirror base is provided with a locking groove along a direction parallel to the axis of the rib, and the elastic support member is installed in the locking groove.
9. The laser beam direction adjustment apparatus of claim 8, wherein the resilient support is a rubber cushion.
10. The laser beam direction adjusting device according to claim 1, further comprising a fixing plate, wherein a third threaded hole is formed in the fixing plate, a mounting groove is formed in one side surface of the reflector base, the reflector is located in the mounting groove, the fixing plate is covered on the reflector, third through holes are formed in the other side surface of the reflector base and the reflector corresponding to the third threaded hole, and a third screw sequentially penetrates through the third through holes and is in threaded connection with the third threaded hole.
CN202110805971.3A 2021-07-16 2021-07-16 Laser beam direction adjusting device Active CN113245696B (en)

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